| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/19/2011 | US7981802 Method for manufacturing shallow trench isolation layer of semiconductor device |
| 07/19/2011 | US7981801 Chemical mechanical polishing (CMP) method for gate last process |
| 07/19/2011 | US7981800 Shallow trench isolation structures and methods for forming the same |
| 07/19/2011 | US7981799 Room temperature-operating single-electron device and the fabrication method thereof |
| 07/19/2011 | US7981798 Method of manufacturing substrate |
| 07/19/2011 | US7981797 Phase-change random access memory device and method of manufacturing the same |
| 07/19/2011 | US7981796 Methods for forming packaged products |
| 07/19/2011 | US7981795 Semiconductor device manufacturing method |
| 07/19/2011 | US7981794 Film forming method and substrate processing apparatus |
| 07/19/2011 | US7981793 Method of forming a metal directly on a conductive barrier layer by electrochemical deposition using an oxygen-depleted ambient |
| 07/19/2011 | US7981792 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument |
| 07/19/2011 | US7981791 Thin films |
| 07/19/2011 | US7981790 Semiconductor device and method of fabricating the same |
| 07/19/2011 | US7981789 Feature patterning methods and structures thereof |
| 07/19/2011 | US7981788 Semiconductor device and a manufacturing method of the same |
| 07/19/2011 | US7981787 Semiconductor device manufacturing method |
| 07/19/2011 | US7981786 Method of fabricating non-volatile memory device having charge trapping layer |
| 07/19/2011 | US7981785 Method for manufacturing semiconductor device and plasma oxidation method |
| 07/19/2011 | US7981784 Methods of manufacturing a semiconductor device |
| 07/19/2011 | US7981783 Semiconductor device and method for fabricating the same |
| 07/19/2011 | US7981782 Method of fabricating a semiconductor device including ion implantation at a tilt angle in exposed regions |
| 07/19/2011 | US7981781 Metal line of semiconductor device having a diffusion barrier and method for forming the same |
| 07/19/2011 | US7981780 Method and apparatus for processing semiconductor wafer after impurity implantation |
| 07/19/2011 | US7981779 Method for making junction and processed material formed using the same |
| 07/19/2011 | US7981778 Directional solid phase crystallization of thin amorphous silicon for solar cell applications |
| 07/19/2011 | US7981777 Methods of depositing stable and hermetic ashable hardmask films |
| 07/19/2011 | US7981776 Method for depositing silicon |
| 07/19/2011 | US7981775 Nitride semiconductor light-emitting device having high light efficiency and method of manfacturing the same |
| 07/19/2011 | US7981774 Assembly of quasicrystalline photonic heterostructures |
| 07/19/2011 | US7981773 Switchable memory diode—a new memory device |
| 07/19/2011 | US7981772 Methods of fabricating nanostructures |
| 07/19/2011 | US7981771 Structures and methods to enhance Cu interconnect electromigration (EM) performance |
| 07/19/2011 | US7981770 Wafer machining method for preparing a wafer for dicing |
| 07/19/2011 | US7981769 Solid-state imaging device and method for manufacturing the same |
| 07/19/2011 | US7981768 Method for transferring an epitaxial layer |
| 07/19/2011 | US7981766 Manufacturing method and manufacturing apparatus of semiconductor |
| 07/19/2011 | US7981765 Substrate bonding with bonding material having rare earth metal |
| 07/19/2011 | US7981764 Method for fabricating semiconductor device with vertical gate |
| 07/19/2011 | US7981763 Atomic layer removal for high aspect ratio gapfill |
| 07/19/2011 | US7981762 Method of forming pre-metal dielectric layer of semiconductor device |
| 07/19/2011 | US7981761 Method of manufacturing semiconductor device having MIM capacitor |
| 07/19/2011 | US7981760 Method for manufacturing nonvolatile storage element and method for manufacturing nonvolatile storage device |
| 07/19/2011 | US7981759 Local oxidation of silicon planarization for polysilicon layers under thin film structures |
| 07/19/2011 | US7981758 Systems and methods to laminate passives onto substrate |
| 07/19/2011 | US7981757 Semiconductor component and method of manufacture |
| 07/19/2011 | US7981756 Common plate capacitor array connections, and processes of making same |
| 07/19/2011 | US7981755 Self aligned ring electrodes |
| 07/19/2011 | US7981754 Manufacturing method of bonded SOI substrate and manufacturing method of semiconductor device |
| 07/19/2011 | US7981753 Method and device for electrostatic discharge protection |
| 07/19/2011 | US7981752 Method of forming junction of semiconductor device |
| 07/19/2011 | US7981751 Structure and method for fabricating self-aligned metal contacts |
| 07/19/2011 | US7981750 Methods of fabrication of channel-stressed semiconductor devices |
| 07/19/2011 | US7981749 MOS structures that exhibit lower contact resistance and methods for fabricating the same |
| 07/19/2011 | US7981748 Method for fabricating a vertical field effect transistor array comprising a plurality of semiconductor pillars |
| 07/19/2011 | US7981747 Semiconductor device and a method of manufacturing the same |
| 07/19/2011 | US7981746 Semiconductor device and method for manufacturing thereof |
| 07/19/2011 | US7981745 Sacrificial nitride and gate replacement |
| 07/19/2011 | US7981744 Field-effect transistor, semiconductor device, a method for manufacturing them, and a method of semiconductor crystal growth |
| 07/19/2011 | US7981743 Method of fabricating a memory cell |
| 07/19/2011 | US7981742 Semiconductor device, data element thereof and method of fabricating the same |
| 07/19/2011 | US7981741 High-capacitance density thin film dielectrics having columnar grains formed on base-metal foils |
| 07/19/2011 | US7981740 Enhanced cap layer integrity in a high-K metal gate stack by using a hard mask for offset spacer patterning |
| 07/19/2011 | US7981739 Method of fabricating a lateral double-diffused MOSFET (LDMOS) transistor and a conventional CMOS transistor |
| 07/19/2011 | US7981738 Semiconductor memory device and a method of manufacturing the same |
| 07/19/2011 | US7981737 Thin film transistor array panel and method for manufacturing the same |
| 07/19/2011 | US7981736 Systems and devices including multi-gate transistors and methods of using, making, and operating the same |
| 07/19/2011 | US7981735 Method of manufacturing a Schottky barrier tunnel transistor |
| 07/19/2011 | US7981734 Manufacturing method of thin film transistor including low resistance conductive thin films |
| 07/19/2011 | US7981733 Laser irradiation method, laser irradiation apparatus, and semiconductor device |
| 07/19/2011 | US7981732 Programming of laser fuse |
| 07/19/2011 | US7981731 Method of forming a high impedance antifuse |
| 07/19/2011 | US7981729 Fabrication method of multi-chip stack structure |
| 07/19/2011 | US7981728 Coreless substrate |
| 07/19/2011 | US7981727 Electronic device wafer level scale packages and fabrication methods thereof |
| 07/19/2011 | US7981726 Copper plating connection for multi-die stack in substrate package |
| 07/19/2011 | US7981725 Fabricating process of a chip package structure |
| 07/19/2011 | US7981724 Manufacturing method for semiconductor device embedded substrate |
| 07/19/2011 | US7981723 Capped wafer method and apparatus |
| 07/19/2011 | US7981722 Semiconductor device and fabrication method thereof |
| 07/19/2011 | US7981721 Diamond transistor and method of manufacture thereof |
| 07/19/2011 | US7981720 Method of making thin film transistor with zinc oxide based semiconductor layer and zinc oxide based insulation layer |
| 07/19/2011 | US7981718 Method of manufacturing solid-state image pickup element, and solid-state image pickup element |
| 07/19/2011 | US7981717 Image sensor and method of manufacturing the same |
| 07/19/2011 | US7981716 Chip module having a protection device |
| 07/19/2011 | US7981715 MEMS/NEMS structure comprising a partially monocrystalline anchor and method for manufacturing same |
| 07/19/2011 | US7981714 Nitride based semiconductor device using nanorods and process for preparing the same |
| 07/19/2011 | US7981713 Group III-V nitride-based semiconductor substrate, group III-V nitride-based device and method of fabricating the same |
| 07/19/2011 | US7981712 Method for producing an optoelectronic semiconductor chip, and optoelectronic semiconductor chip |
| 07/19/2011 | US7981711 Manufacture method of a multilayer structure having non-polar a-plane {11-20} III-nitride layer |
| 07/19/2011 | US7981710 Light emitting device and manufacturing method |
| 07/19/2011 | US7981709 Semiconductor device and method for fabricating the same |
| 07/19/2011 | US7981708 Method of fabricating pixel structure and method of fabricating organic light emitting device |
| 07/19/2011 | US7981707 Method for enhancing optical characteristics of multilayer optoelectronic components |
| 07/19/2011 | US7981706 Photoresist composition and method of manufacturing a display substrate using the same |
| 07/19/2011 | US7981705 Method of manufacturing a vertical type light-emitting diode |
| 07/19/2011 | US7981704 Method for manufacturing semiconductor optical device |
| 07/19/2011 | US7981703 Electronic assemblies without solder and methods for their manufacture |
| 07/19/2011 | US7981702 Integrated circuit package in package system |
| 07/19/2011 | US7981701 Semiconductor thin film manufacturing method |
| 07/19/2011 | US7981700 Semiconductor oxidation apparatus and method of producing semiconductor element |