| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/19/2011 | US7981699 Method for tunably repairing low-k dielectric damage |
| 07/19/2011 | US7981698 Removal of integrated circuits from packages |
| 07/19/2011 | US7981697 Current-confined effect of magnetic nano-current-channel (NCC) for magnetic random access memory (MRAM) |
| 07/19/2011 | US7981574 Reticle, and method of laying out wirings and vias |
| 07/19/2011 | US7981573 Photoresists; extreme ultraviolet region and absorber layer for exposure light; semiconductors |
| 07/19/2011 | US7981483 Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices |
| 07/19/2011 | US7981316 Selective barrier metal polishing method |
| 07/19/2011 | US7981308 Method of etching a device using a hard mask and etch stop layer |
| 07/19/2011 | US7981307 Method and apparatus for shaping gas profile near bevel edge |
| 07/19/2011 | US7981306 Supplying RF power to a plasma process |
| 07/19/2011 | US7981305 High-density field emission elements and a method for forming said emission elements |
| 07/19/2011 | US7981303 Method of manufacturing monocrystalline silicon micromirrors |
| 07/19/2011 | US7981286 Substrate processing apparatus and method of removing particles |
| 07/19/2011 | US7981269 Method of electrochemical fabrication |
| 07/19/2011 | US7981246 Method and device for detaching a component which is attached to a flexible film |
| 07/19/2011 | US7981245 Forming plated through hole; surface roughness facilitates deposition of conductive metal; shrinkage inhibition |
| 07/19/2011 | US7981219 System for plasma treating a plastic component |
| 07/19/2011 | US7981218 Substrate supporting mechanism and substrate processing apparatus |
| 07/19/2011 | US7981217 Vertical heat treatment apparatus and method of transferring substrates to be processed |
| 07/19/2011 | US7981216 Vacuum processing apparatus |
| 07/19/2011 | US7980666 Method of forming thermal bend actuator with connector posts connected to drive circuitry |
| 07/19/2011 | US7980255 Single wafer dryer and drying methods |
| 07/19/2011 | US7980198 Doping apparatus, doping method, and method for fabricating thin film transistor |
| 07/19/2011 | US7980195 Transistor production using semiconductor printing fluid |
| 07/19/2011 | CA2525978C Process for increasing ionic charge in mass spectrometry |
| 07/19/2011 | CA2489718C Silicon production reactor |
| 07/14/2011 | WO2011085255A2 Inspection guided overlay metrology |
| 07/14/2011 | WO2011085064A2 N-channel flow ratio controller calibration |
| 07/14/2011 | WO2011085054A2 In-situ passivation methods to improve performance of polysilicon diode |
| 07/14/2011 | WO2011084975A2 A body-tied asymmetric n-type field effect transistor |
| 07/14/2011 | WO2011084972A2 Dual tray carrier unit |
| 07/14/2011 | WO2011084971A1 A body-tied asymmetric p-type field effect transistor |
| 07/14/2011 | WO2011084915A2 Method of making a semiconductor structure useful in making a split gate non-volatile memory cell |
| 07/14/2011 | WO2011084896A2 Method and apparatus for processing substrate edges |
| 07/14/2011 | WO2011084887A1 Chemical compositions for wet chemical modification of sapphire surfaces |
| 07/14/2011 | WO2011084812A2 Flowable dielectric using oxide liner |
| 07/14/2011 | WO2011084752A2 In-situ ozone cure for radical-component cvd |
| 07/14/2011 | WO2011084667A2 Interconnect structure with a mushroom-shaped oxide capping layer and method for fabricating same |
| 07/14/2011 | WO2011084666A2 Superfilled metal contact vias for semiconductor devices |
| 07/14/2011 | WO2011084575A2 Methods for forming nmos epi layers |
| 07/14/2011 | WO2011084532A2 Dielectric film formation using inert gas excitation |
| 07/14/2011 | WO2011084531A2 Mobile vacuum carriers for thin wafer processing |
| 07/14/2011 | WO2011084501A1 Systems and methods employing a physically asymmetric semiconductor device having symmetrical electrical behavior |
| 07/14/2011 | WO2011084489A1 In vacuum optical wafer heater for cryogenic processing |
| 07/14/2011 | WO2011084450A1 Electrophysiology in-vivo using conformal electronics |
| 07/14/2011 | WO2011084415A2 Electroless nickel and gold plating in semiconductor device |
| 07/14/2011 | WO2011084397A2 Body contacted transistor with reduced parasitic capacitance |
| 07/14/2011 | WO2011084381A2 Cleaning optimization of pecvd solar films |
| 07/14/2011 | WO2011084339A2 Nickel-silicide formation with differential pt composition |
| 07/14/2011 | WO2011084337A2 Method and apparatus for processing bevel edge |
| 07/14/2011 | WO2011084270A2 Low ohmic contacts containing germanium for gallium nitride or other nitride-based power devices |
| 07/14/2011 | WO2011084269A2 Stress compensation for large area gallium nitride or other nitride-based structures on semiconductor substrates |
| 07/14/2011 | WO2011084262A2 Semiconductor device having doped epitaxial region and its methods of fabrication |
| 07/14/2011 | WO2011084235A2 Glass core substrate for integrated circuit devices and methods of making the same |
| 07/14/2011 | WO2011084229A2 Embedded mems sensors and related methods |
| 07/14/2011 | WO2011084223A2 Wet oxidation process performed on a dielectric material formed from a flowable cvd process |
| 07/14/2011 | WO2011084127A2 Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber |
| 07/14/2011 | WO2011084126A2 Uv lamp assembly of degas chamber having rotary shutters |
| 07/14/2011 | WO2011084058A1 System and method for picking and placement of chip dies |
| 07/14/2011 | WO2011083953A2 Wafer polishing apparatus |
| 07/14/2011 | WO2011083919A2 Block and standard cell packing method for automated design area optimization |
| 07/14/2011 | WO2011083898A1 Insulation device of single crystal growth device and single crystal growth device including the same |
| 07/14/2011 | WO2011083872A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film |
| 07/14/2011 | WO2011083824A1 Circuit connecting adhesion film and circuit connecting structure |
| 07/14/2011 | WO2011083820A1 Metal alkoxide compound and process for production of metal-containing thih film using the compound |
| 07/14/2011 | WO2011083751A1 Hybrid electrostatic chuck |
| 07/14/2011 | WO2011083724A1 Liquid-immersion member, exposing device, exposing method, and device manufacturing method |
| 07/14/2011 | WO2011083719A1 Method and apparatus for etching of surface layer part of silicon wafer, and method for analysis of metal contamination in silicon wafer |
| 07/14/2011 | WO2011083667A1 Method and apparatus for processing compound semiconductor wafer |
| 07/14/2011 | WO2011083598A1 Semiconductor device, active matrix substrate, and display device |
| 07/14/2011 | WO2011083552A1 Epitaxial wafer and semiconductor element |
| 07/14/2011 | WO2011083540A1 Method and device for testing defect using sem |
| 07/14/2011 | WO2011083532A1 Inspecting apparatus and inspecting method |
| 07/14/2011 | WO2011083525A1 Transfer vehicle system |
| 07/14/2011 | WO2011083524A1 Semiconductor device, and method for producing same |
| 07/14/2011 | WO2011083523A1 Semiconductor device, and method for producing same |
| 07/14/2011 | WO2011083502A1 Antenna and wireless device |
| 07/14/2011 | WO2011083475A1 Sorbate-containing compositions for use in copper chemical mechanical planarization |
| 07/14/2011 | WO2011083162A2 Micro-electromechanical semiconductor component |
| 07/14/2011 | WO2011083159A2 Semiconductor component |
| 07/14/2011 | WO2011083041A1 Read transistor for single poly non-volatile memory using body contacted soi device |
| 07/14/2011 | WO2011082874A1 Tunnel junction via |
| 07/14/2011 | WO2011082857A2 Production of a component |
| 07/14/2011 | WO2011082782A1 Method for generating conductive or semi-conductive metal oxide layers on substrates and substrates produced in said manner |
| 07/14/2011 | WO2011082778A2 Method for producing an electronic unit and electronic unit |
| 07/14/2011 | WO2011082677A1 Method and structure for determinig crystal orientation on wafers accurately |
| 07/14/2011 | WO2011082633A1 Semiconductor device with p-n junction |
| 07/14/2011 | WO2011062357A3 Shower head assembly and thin film deposition apparatus comprising same |
| 07/14/2011 | WO2011061695A3 Apparatus and method for processing a substrate |
| 07/14/2011 | WO2011056318A3 Apparatus and method for measuring position and/or motion using surface micro-structure |
| 07/14/2011 | WO2011052895A3 Roll imprinting apparatus |
| 07/14/2011 | WO2011049811A3 Point-of-use silylamine generation |
| 07/14/2011 | WO2011049800A3 Stress management for tensile films |
| 07/14/2011 | WO2011043961A3 Epitaxial chamber with cross flow |
| 07/14/2011 | WO2011043613A3 Method for manufacturing an mim capacitor having a nanostructure |
| 07/14/2011 | WO2011041332A3 Off-center ground return for rf-powered showerhead |
| 07/14/2011 | WO2011034897A3 Scratch-resistant coatings for protecting front-side circuitry during backside processing |
| 07/14/2011 | WO2011033758A3 Substrate structure including functional region and method for transferring functional region |
| 07/14/2011 | WO2011031056A3 Sputtering system comprising a substrate-vibrating apparatus, and method for controlling same |
| 07/14/2011 | WO2011028080A3 Printing apparatus using thermal roll imprinting and a patterned plate, and film-laminating apparatus for microfluidics and sensor and printing method using same |