Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2012
05/03/2012WO2012055198A1 Semiconductor structure and manufacturing method thereof
05/03/2012WO2012055197A1 Method for manufacturing contact electrode, and semiconductor device
05/03/2012WO2012055196A1 Graphene device and manufacturing method thereof
05/03/2012WO2012055186A1 Light emitting diode and forming method thereof
05/03/2012WO2012055182A1 Semiconductor device with stress isolation trenches and method for forming the same
05/03/2012WO2012055181A1 Method for forming stress isolation trench semiconductor device
05/03/2012WO2012055144A1 Transistor and manufacturing method thereof
05/03/2012WO2012055143A1 Transistor and manufacturing method thereof
05/03/2012WO2012055142A1 Transistor and manufacturing method thereof
05/03/2012WO2012055119A1 Groove type mosfet spacer structure and fabricating method thereof
05/03/2012WO2012055085A1 Method for bonding wire between chips or between chip and metal frame
05/03/2012WO2012033574A3 Methods to adjust threshold voltage in semiconductor devices
05/03/2012WO2012033326A3 Dense rare earth metal oxide coating film for sealing porous ceramic surface, and preparation method thereof
05/03/2012WO2012033287A3 Cmp pad conditioner and method for manufacturing the same
05/03/2012WO2012033284A3 Chamber system adapted for a successive process
05/03/2012WO2012030099A3 Apparatus using an induction coil for treating toxic waste gas
05/03/2012WO2012021026A3 Texture-etchant composition for crystalline silicon wafer and method for texture-etching (1)
05/03/2012WO2012021025A3 Texture-etchant composition for crystalline silicon wafer and method for texture-etching (2)
05/03/2012WO2012019078A3 Photovoltaic module cleaner
05/03/2012WO2012018975A3 Mos transistors including sion gate dielectric with enhanced nitrogen concentration at its sidewalls
05/03/2012WO2012018783A3 System and method for fabricating thin-film photovoltaic devices
05/03/2012WO2012018211A3 Method for depositing cyclic thin film
05/03/2012WO2012018210A3 Method for depositing cyclic thin film
05/03/2012WO2012016422A8 Heat retention barrel and vertical heat treatment apparatus provided with heat retention barrel
05/03/2012WO2012015694A3 Detection of layer clearing using spectral monitoring
05/03/2012WO2012015259A3 Susceptor and deposition apparatus including the same
05/03/2012WO2012008783A3 Air knife chamber having shield member
05/03/2012WO2012008729A3 Pulsed laser deposition apparatus and deposition method using same
05/03/2012WO2012005453A3 Method for vision inspecting semiconductor packages
05/03/2012WO2011118006A9 Transfer apparatus and method, and computer program
05/03/2012WO2011113414A4 Method for sintering a semiconductor device using a low-temperature joining technique
05/03/2012WO2011071069A9 Method for cleaning film forming apparatus, film forming method, and film forming apparatus
05/03/2012WO2011032120A3 Underfill for high density interconnect flip chips
05/03/2012US20120108081 Apparatus having improved substrate temperature uniformity using direct heating methods
05/03/2012US20120108080 Substrate processing apparatus and method of manufacturing a semiconductor device
05/03/2012US20120108079 Atomic Layer Deposition Film With Tunable Refractive Index And Absorption Coefficient And Methods Of Making
05/03/2012US20120108078 Semiconductor device and method for manufacturing the same
05/03/2012US20120108077 Substrate processing apparatus and semiconductor device manufacturing method
05/03/2012US20120108076 Showerhead for cvd depositions
05/03/2012US20120108075 Gas-Phase Functionalization of Surfaces of Microelectronic Structures
05/03/2012US20120108074 Method for treating a semiconductor wafer
05/03/2012US20120108073 Method for fabricating semiconductor device
05/03/2012US20120108072 Showerhead configurations for plasma reactors
05/03/2012US20120108071 Resist underlayer film composition and patterning process using the same
05/03/2012US20120108070 Method for forming semiconductor device
05/03/2012US20120108069 Methods of forming an integrated circuit with self-aligned trench formation
05/03/2012US20120108068 Method for Patterning Sublithographic Features
05/03/2012US20120108067 Edge Bead Remover For Coatings
05/03/2012US20120108066 Pecvd showerhead configuration for cmp uniformity and improved stress
05/03/2012US20120108065 Method for manufacturing polishing pad
05/03/2012US20120108064 Polishing composition for silicon wafers
05/03/2012US20120108063 Beam dose computing method and writing method and record carrier body and writing apparatus
05/03/2012US20120108062 Nitrogen-Containing Ligands And Their Use In Atomic Layer Deposition Methods
05/03/2012US20120108061 Substrate processing apparatus and method of manufacturing a semiconductor device
05/03/2012US20120108060 Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
05/03/2012US20120108059 Method of manufacturing semiconductor device
05/03/2012US20120108058 Methods of forming layers on substrates
05/03/2012US20120108057 Method for fabricating semiconductor device with buried gates
05/03/2012US20120108056 Method for fabricating semiconductor device
05/03/2012US20120108055 Manufacturing process of semiconductor device and semiconductor device
05/03/2012US20120108054 Dual Damascene Copper Process Using a Selected Mask
05/03/2012US20120108053 Apparatus, system, and method for wireless connection in integrated circuit packages
05/03/2012US20120108052 Electronic apparatus containing lanthanide yttrium aluminum oxide
05/03/2012US20120108051 Different gate oxides thicknesses for different transistors in an integrated circuit
05/03/2012US20120108050 Work function engineering for edram mosfets
05/03/2012US20120108049 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
05/03/2012US20120108048 Three-dimensional semiconductor devices and methods of fabricating the same
05/03/2012US20120108047 Methods Of Forming Conductive Contacts In The Fabrication Of Integrated Circuitry
05/03/2012US20120108046 Patterning Methodology for Uniformity Control
05/03/2012US20120108045 Method for radiation hardening a semiconductor device
05/03/2012US20120108044 Isotopically-enriched boron-containing compounds, and methods of making and using same
05/03/2012US20120108043 Pattern forming process
05/03/2012US20120108042 Methods Of Forming Doped Regions In Semiconductor Substrates
05/03/2012US20120108041 Patterning of Nanostructures
05/03/2012US20120108040 Vaporizing polymer spray deposition system
05/03/2012US20120108039 Etchant treatment processes for substrate surfaces and chamber surfaces
05/03/2012US20120108038 Amorphous ge/te deposition process
05/03/2012US20120108037 Methods of forming a phase change material
05/03/2012US20120108036 Active Region Patterning in Double Patterning Processes
05/03/2012US20120108035 Method of Fabricating Semiconductor Device
05/03/2012US20120108034 Substrate Structure Having Buried Wiring And Method For Manufacturing The Same, And Semiconductor Device And Method For Manufacturing The Same Using The Substrate Structure
05/03/2012US20120108033 Method of manufacturing devices having vertical junction edge
05/03/2012US20120108032 Method for forming a semiconductor device with stressed trench isolation
05/03/2012US20120108031 Resistive random access memory and method for manufacturing the same
05/03/2012US20120108030 Method for obtaining smooth, continuous silver film
05/03/2012US20120108029 Semiconductor device and method for manufacturing the same
05/03/2012US20120108028 Methods of Forming Electrical Components and Memory Cells
05/03/2012US20120108027 Improved silicide method
05/03/2012US20120108026 Method of manufacturing strained source/drain structures
05/03/2012US20120108025 Method of manufacturing a semiconductor device
05/03/2012US20120108024 Field effect transistor having nanostructure channel
05/03/2012US20120108023 Method for manufacturing semiconductor device
05/03/2012US20120108022 Semiconductor device including a p-channel type mos transmitter
05/03/2012US20120108021 PMOS SiGe-LAST INTEGRATION PROCESS
05/03/2012US20120108020 Low temperature coefficient resistor in cmos flow
05/03/2012US20120108019 Method for fabricating a substrate provided with two active areas with different semiconductor materials
05/03/2012US20120108018 Method for manufacturing thin film transistor substrate
05/03/2012US20120108017 Threshold voltage adjustment through gate dielectric stack modification
05/03/2012US20120108016 Semiconductor device and manufacturing methods with using non-planar type of transistors
05/03/2012US20120108015 Underfill flow guide structures and method of using same
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