Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2012
05/10/2012WO2012061559A1 Method of making a finger sensor package and associated devices
05/10/2012WO2012061436A2 Dry etching method of surface texture formation on silicon wafer
05/10/2012WO2012061381A2 Crack arrest vias for ic devices
05/10/2012WO2012061363A1 Coating of glass wafers for semiconductor fabrication, processes and methods of making same
05/10/2012WO2012061362A2 Electrode securing platens and electrode polishing assemblies incorporating the same
05/10/2012WO2012061277A2 Rapid and uniform gas switching for a plasma etch process
05/10/2012WO2012061266A2 Method of forming an array of nanostructures
05/10/2012WO2012061232A2 Method of depositing dielectric films using microwave plasma
05/10/2012WO2012061205A1 Electromechanical systems apparatuses and methods for providing rough surfaces
05/10/2012WO2012061199A2 No flow underfill
05/10/2012WO2012061167A1 Asymmetric hetero-structure fet and method of manufacture
05/10/2012WO2012061130A2 Low temperature implant to improve bjt current gain
05/10/2012WO2012061091A2 Encapsulated die, microelectronic package containing same, and method of manufacturing said microelectronic package
05/10/2012WO2012061023A1 A non-vacuum method for fabrication of a photovoltaic absorber layer
05/10/2012WO2012060993A2 Methods of forming electrical components and memory cells
05/10/2012WO2012060983A2 Ternary metal alloys with tunable stoichiometries
05/10/2012WO2012060940A1 Ion-induced atomic layer deposition of tantalum
05/10/2012WO2012060927A1 Semiconductor capacitor
05/10/2012WO2012060839A1 Advanced transistors with structured low dopant channels
05/10/2012WO2012060819A1 Semiconductor structure with insulated through silicon via
05/10/2012WO2012060703A1 Carrier for separated electronic components and method for visual inspection of separated electronic components
05/10/2012WO2012060600A2 Substrate and separator, grown thin film and method of growth, separation, and heating, epitaxial wafer, and light emitting diode
05/10/2012WO2012060576A2 Method for processing a nano fine electrode within a biochemical analysis chip
05/10/2012WO2012060505A1 Multiple quantum dot device and a production method for the device
05/10/2012WO2012060441A1 Exposure device
05/10/2012WO2012060430A1 Semiconductor substrate, method for manufacturing semiconductor substrate, thin-film transistor, semiconductor circuit, liquid crystal display device, electroluminescent device, wireless communication device, and light-emitting device
05/10/2012WO2012060423A1 Radical cleaning device and method
05/10/2012WO2012060410A1 Liquid supply device, liquid supply method, management device, management method, exposure equipment, exposure method, system for producing devices, method for producing devices, program, and recording medium
05/10/2012WO2012060399A1 Method for forming isolation structure
05/10/2012WO2012060391A1 Defect testing method and device for defect testing
05/10/2012WO2012060379A1 Method for manufacturing semiconductor device, method for processing substrate and apparatus for processing substrate
05/10/2012WO2012060375A1 Imprint mold for manufacturing bit-patterned media, and method for manufacturing same
05/10/2012WO2012060325A1 Plasma annealing method and device for same
05/10/2012WO2012060299A1 Group iii nitride semiconductor device, method of manufacturing group iii nitride semiconductor devices, and epitaxial substrate
05/10/2012WO2012060274A1 Quantum dot structure, method for forming quantum dot structure, wavelength conversion element, light-light conversion device, and photoelectric conversion device
05/10/2012WO2012060262A1 Sinter bonding agent, method for producing same, and bonding method using same
05/10/2012WO2012060253A1 Semiconductor device
05/10/2012WO2012060248A1 Semiconductor device and manufacturing method therefor
05/10/2012WO2012060226A1 Apparatus for swinging substrate in longitudinal-direction, substrate stage apparatus, and ion implantation apparatus
05/10/2012WO2012060223A1 Semiconductor device and manufacturing method therefor
05/10/2012WO2012060222A1 Semiconductor device and manufacturing method therefor
05/10/2012WO2012060217A1 Method for modifying surface of substrate, computer storage medium, and device for modifying surface of substrate
05/10/2012WO2012060206A1 Semiconductor device and manufacturing method therefor
05/10/2012WO2012060205A1 Template processing method, computer storage medium, and template processing device
05/10/2012WO2012060202A1 Semiconductor device
05/10/2012WO2012060104A1 Method for manufacturing transistor, transistor, and display device
05/10/2012WO2012060099A1 Light source adjustment method, exposure method, device manufacturing method, illumination optical system, and exposure device
05/10/2012WO2012060091A1 Method for forming wiring on surface of three-dimensional structure, intermediate structure for obtaining three-dimensional structure provided with wiring on surface thereof, and three-dimensional structure provided with wiring on surface thereof
05/10/2012WO2012060083A1 Illumination device, exposure device, program, and illumination method
05/10/2012WO2012060079A1 Oxidation/annealing treatment apparatus and process for production of thin film transistor employing oxidation/annealing treatment
05/10/2012WO2012060071A1 Semiconductor chip
05/10/2012WO2012060057A1 Defect inspection method, low light detecting method, and low light detector
05/10/2012WO2012060054A1 Circuit device and method for manufacturing same
05/10/2012WO2012060053A1 Adhesive for optical semiconductor devices, adhesive sheet for optical semiconductor devices, method for producing adhesive sheet for optical semiconductor devices, and method for producing optical semiconductor devices
05/10/2012WO2012060032A1 Semiconductor integrated circuit
05/10/2012WO2012060027A1 Method for driving nonvolatile logic circuit
05/10/2012WO2012060024A1 Illumination shape optimization method, mask shape optimization method, and pattern formation method
05/10/2012WO2012060022A1 Method for forming tin or solder coat film and device therefor
05/10/2012WO2012060014A1 Semiconductor device and method for manufacturing semiconductor device
05/10/2012WO2012059986A1 Delay measurement circuit and delay measurement method
05/10/2012WO2012059967A1 Sheet-like structure and process for production thereof
05/10/2012WO2012059848A2 Iii-nitride light emitting device
05/10/2012WO2012059843A1 Iii-nitride layer grown on a substrate
05/10/2012WO2012059837A1 Solid state light emitting devices based on crystallographically relaxed structures
05/10/2012WO2012059659A1 Connecting elements for producing hybrid electronic circuits
05/10/2012WO2012059479A1 Device-specific markings
05/10/2012WO2012059426A1 Method for manufacturing solar cells attenuating the lid phenomena
05/10/2012WO2012059386A1 Polyimides as dielectric
05/10/2012WO2012059365A1 Apparatus and method for holding and making contact with wafers
05/10/2012WO2012059350A2 A method of treating a multilayer structure
05/10/2012WO2012059004A1 Method for chip package
05/10/2012WO2012059003A1 Method for chip packaging
05/10/2012WO2012058947A1 EPITAXIAL GROWTH METHOD FOR NiSiGe USING INSERTED Al LAYER
05/10/2012WO2012058831A1 Mechanical arm and conveying device with mechanical arm
05/10/2012WO2012039833A3 Low temperature silicon carbide deposition process
05/10/2012WO2012035416A3 Apparatus for generating patterns on workpieces
05/10/2012WO2012027667A3 Method for preventing the collapse of high aspect ratio structures during drying
05/10/2012WO2012021776A3 Method of forming monolithic cmos-mems hybrid integrated, packaged structures
05/10/2012WO2012021464A3 Transparent reflector plate for rapid thermal processing chamber
05/10/2012WO2012021349A3 Wire loops, methods of forming wire loops, and related process
05/10/2012WO2012019040A3 Spectrographic monitoring using index tracking after detection of layer clearing
05/10/2012WO2012018685A3 Article and method for bonding substrates with large topographies
05/10/2012WO2012015993A3 Magnet for physical vapor deposition processes to produce thin films having low resistivity and non-uniformity
05/10/2012WO2012015931A3 Apparatus for controlling the flow of a gas in a process chamber
05/10/2012WO2012009313A3 3 transistor (n/p/n) non-volatile memory cell without program disturb
05/10/2012WO2012009076A3 Memory arrays having substantially vertical, adjacent semiconductor structures and their formation
05/10/2012WO2012006261A3 Power semiconductor devices, structures, and related methods
05/10/2012WO2012003335A3 Deposition apparatus and methods to reduce deposition asymmetry
05/10/2012WO2011152959A3 Methods of forming patterns on substrates
05/10/2012WO2011149686A3 Ultrasonic acoustic emissions to detect substrate fracture
05/10/2012WO2011143062A3 Confined process volume pecvd chamber
05/10/2012WO2011104461A3 Method of eliminating fragments of material present on the surface of a multilayer structure
05/10/2012WO2005015609A3 Sixsnyge1-x-y and related alloy heterostructures based on si, ge and sn
05/10/2012US20120116209 High magnetic field compatible interventional needle and integrated needle tracking system
05/10/2012US20120115334 Method of depositing dielectric films using microwave plasma
05/10/2012US20120115333 Polybenzoxazole precursor, photosensitive resin composition using the same, and manufacturing method of semiconductor device
05/10/2012US20120115332 Method of Post Etch Polymer Residue Removal
05/10/2012US20120115331 Methods of forming fine patterns and methods of fabricating semiconductor devices
05/10/2012US20120115330 Metal-insulator-semiconductor tunneling contacts
05/10/2012US20120115329 Depositing tungsten into high aspect ratio features
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