Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2012
05/08/2012US8171964 Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
05/08/2012US8171956 Liquid supply method and apparatus
05/08/2012US8171880 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
05/08/2012US8171879 Maintenance system, substrate processing apparatus, remote operation unit and communication method
05/08/2012US8171877 Backside mounted electrode carriers and assemblies incorporating the same
05/07/2012WO2012088796A1 Manufacturing method for semiconductor device
05/07/2012WO2012088779A1 Metal oxide semiconductor (mos) transistor and manufacturing method thereof
05/07/2012DE202012101462U1 Kapselung einer Weißlichtleuchtdiode mit Lichtmischungswirkung Encapsulation of a white light LED with light mixing effect
05/04/2012DE202012003926U1 Anordnung zum technologisch optimierten Ausführen von Lötverbindungen Arrangement for technologically optimized execution of solder joints
05/03/2012WO2012058678A2 Substrate shipper
05/03/2012WO2012058676A2 Substrate shipper
05/03/2012WO2012058656A2 Stress regulated semiconductor and associated methods
05/03/2012WO2012058618A1 Methods for enhancing p-type doping in iii-v semiconductor films
05/03/2012WO2012058514A2 Extended drain mos transistor
05/03/2012WO2012058377A2 Methods for etching oxide layers using process gas pulsing
05/03/2012WO2012058307A2 Laterally diffused mos transistor with reduced gate charge
05/03/2012WO2012058281A2 Hybrid active-field gap extended drain mos transistor
05/03/2012WO2012058262A2 Vicinal semipolar iii-nitride substrates to compensate tilt of relaxed hetero-epitaxial layers
05/03/2012WO2012058184A2 Plasma processing apparatus with reduced effects of process chamber asymmetry
05/03/2012WO2012058011A2 Interconnect structure with enhanced reliability
05/03/2012WO2012058005A2 Apparatus having improved substrate temperature uniformity using direct heating methods
05/03/2012WO2012057987A2 Deposition ring and electrostatic chuck for physical vapor deposition chamber
05/03/2012WO2012057967A2 Methods and apparatus for controlling photoresist line width roughness
05/03/2012WO2012057963A2 High purity aluminum coating hard anodization
05/03/2012WO2012057893A2 Multiple bonding layers for thin-wafer handling
05/03/2012WO2012057889A1 Atomic layer deposition film with tunable refractive index and absorption coefficient and methods of making
05/03/2012WO2012057886A1 Flow meter with improved thermal stability and methods of use
05/03/2012WO2012057884A1 Nitrogen-containing ligands and their use in atomic layer deposition methods
05/03/2012WO2012057883A1 Bisamineazaallylic ligands and their use in atomic layer deposition methods
05/03/2012WO2012057859A1 Laser assisted direct bonding
05/03/2012WO2012057823A2 Methods for scribing of semiconductor devices with improved sidewall passivation
05/03/2012WO2012057772A1 Memristive devices and memristors with ribbon-like junctions and methods for fabricating the same
05/03/2012WO2012057608A1 A method for producing metal-oxide-semiconductor (mos) capacitor
05/03/2012WO2012057499A2 Resistive memory having rectifying characteristics or an ohmic contact layer
05/03/2012WO2012057388A1 Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the same
05/03/2012WO2012057372A1 Preparation method of radiation curing ink-jet ink composition for electrical or electronic materials capable of using three-dimensional ink-jet printing system
05/03/2012WO2012057296A1 Storage device
05/03/2012WO2012057230A1 Defect inspection method and device therefor
05/03/2012WO2012057215A1 Cordierite ceramic, and member for semiconductor manufacture devices which comprises same
05/03/2012WO2012057200A1 Process for manufacture of through-type wiring substrate, and through-type wiring substrate
05/03/2012WO2012057198A1 Image processing apparatus and computer program
05/03/2012WO2012057196A1 Organic thin film transistor with excellent charge injection properties
05/03/2012WO2012057195A1 Organic thin film transistor having a laminate structure source and drain electrode
05/03/2012WO2012057194A1 Method of manufacturing organic thin film transistor, and organic thin film transistor manufactured by said method
05/03/2012WO2012057166A1 Electron lens and the electron beam device
05/03/2012WO2012057132A1 Process for producing silicon substrate
05/03/2012WO2012057128A1 Film forming device and film forming method employing same
05/03/2012WO2012057127A1 Method for manufacturing dielectric device
05/03/2012WO2012057108A1 SPUTTERING DEVICE AND METHOD FOR FORMING In METAL OXIDE FILM
05/03/2012WO2012057077A1 Semiconductor device, back contact solar cell with wiring board, solar cell module, and method for manufacturing semiconductor device
05/03/2012WO2012057020A1 Thin film transistor and method for manufacturing same
05/03/2012WO2012057009A1 Mounting device and mounting method
05/03/2012WO2012056995A1 Circuit module, circuit board, circuit device and method for manufacturing circuit module
05/03/2012WO2012056985A1 Substrate transfer device and substrate processing system provided with same
05/03/2012WO2012056984A1 Substrate transfer device and substrate processing system provided with same
05/03/2012WO2012056969A1 Laminated body and method for separating laminated body
05/03/2012WO2012056933A1 Oxide semiconductor device and method for manufacturing same
05/03/2012WO2012056928A1 Method for manufacturing optical element
05/03/2012WO2012056918A1 Electrostatic chuck
05/03/2012WO2012056917A1 Heating device
05/03/2012WO2012056916A1 Heating device
05/03/2012WO2012056915A1 Electrostatic chuck
05/03/2012WO2012056914A1 Heating device
05/03/2012WO2012056911A1 Method and apparatus for washing mold for imprinting applications, and process for producing mold for imprinting applications
05/03/2012WO2012056893A1 Workpiece supplying device and workpiece processing device
05/03/2012WO2012056876A1 Ceramic material, member for semiconductor manufacturing apparatus, sputtering target member and method for producing ceramic material
05/03/2012WO2012056875A1 Ceramic material, laminate, member for semiconductor manufacturing apparatus, and sputtering target member
05/03/2012WO2012056867A1 Stacked body and method for detaching stacked body
05/03/2012WO2012056817A1 Scanning exposure apparatus using microlens array
05/03/2012WO2012056803A1 Stacked body and method for detaching stacked body
05/03/2012WO2012056770A1 Semiconductor device and method for manufacturing same
05/03/2012WO2012056705A1 Semiconductor element and manufacturing method therefor
05/03/2012WO2012056704A1 Semiconductor element and semiconductor device
05/03/2012WO2012056663A1 Circuit board, method for manufacturing same and display device
05/03/2012WO2012056661A1 Electronic components assembly
05/03/2012WO2012056658A1 Perovskite-type oxide film and ferroelectric film using same, ferroelectric element, and process for producing perovskite-type oxide film
05/03/2012WO2012056648A1 Semiconductor substrate, method of manufacturing semiconductor substrate, and vertical-cavity surface-emitting laser
05/03/2012WO2012056639A1 Pattern determination device and computer program
05/03/2012WO2012056638A1 Pattern measuring method, pattern measuring apparatus, and program using same
05/03/2012WO2012056615A1 Semiconductor device
05/03/2012WO2012056607A1 Capacitance array body and signal processing device comprising same
05/03/2012WO2012056605A1 Led package production system and resin coating method in led package production system
05/03/2012WO2012056604A1 Resin coating device and resin coating method
05/03/2012WO2012056602A1 Semiconductor device
05/03/2012WO2012056601A1 Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device
05/03/2012WO2012056574A1 Semiconductor circuit switching device and switching method
05/03/2012WO2012056536A1 Semiconductor device and method for manufacturing semiconductor device
05/03/2012WO2012056513A1 Polishing pad and method for producing same
05/03/2012WO2012056512A1 Polishing pad and method for producing same
05/03/2012WO2012056511A1 Adhesive film and wafer-processing tape
05/03/2012WO2012056341A2 Closed chamber for wafer wet processing
05/03/2012WO2012056097A1 Circuit board support for laser cutting
05/03/2012WO2012055777A1 Method of manufacturing a sic bipolar junction transistor and sic bipolar junction transistor thereof
05/03/2012WO2012055726A1 Process for producing interconnect or redirect lines for at least one integrated-circuit component
05/03/2012WO2012055725A1 System for laser direct writing of mesa structures having negatively sloped sidewalls
05/03/2012WO2012055693A1 Method for the electrochemical hydrogen passivation of semiconductor layers
05/03/2012WO2012055288A1 Self-aligned metal silicide groove-type semiconductor device and manufacturing method thereof
05/03/2012WO2012055252A1 Method for fabricating vertical led structures
05/03/2012WO2012055201A1 Semiconductor structure and method for forming the same
05/03/2012WO2012055199A1 Semiconductor structure and manufacturing method thereof
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