Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2012
05/09/2012CN102446738A Plasma etching device
05/09/2012CN102446737A Substrate processing method and substrate processing apparatus
05/09/2012CN102446736A Method for removing oxidation film on edge of wafer by using corrosive liquid prepared by hydrogen fluoride (HF) and glacial acetic acid
05/09/2012CN102446735A Sapphire wafer dividing method
05/09/2012CN102446734A Grid electrode structure and method
05/09/2012CN102446733A Power device with high-voltage radio-frequency lateral diffusion structure and production method of power device
05/09/2012CN102446732A Grid reworking process capable of improving stability of multi-time exposure
05/09/2012CN102446731A Method for reducing oxide gate loss by changing removing order of polysilicon gate hard film
05/09/2012CN102446730A Method for forming nickel silicide with microwave annealing
05/09/2012CN102446729A High-k gate stack with superior integrity and controlled undercut, formed through wet chemistry
05/09/2012CN102446728A Method of modifying insulating film
05/09/2012CN102446727A Etching method of etching hard mask layer containing silicon nitride
05/09/2012CN102446726A Method for forming metal gate
05/09/2012CN102446725A Cascaded grid production method
05/09/2012CN102446724A Method for manufacturing gate electrode
05/09/2012CN102446723A Method for reducing line width of silicon gate by utilizing ultraviolet rays to irradiate photoresist
05/09/2012CN102446722A Method for preventing failure of photoresist in dual stress silicon nitride process
05/09/2012CN102446721A Method for realizing stepped doping concentration distribution by multi-energy ion implantation
05/09/2012CN102446720A Method for preparing storage unit
05/09/2012CN102446719A Method for increasing writing speed of floating body dynamic random access memory
05/09/2012CN102446718A Method for reducing hot carrier implantation damage of semiconductor device
05/09/2012CN102446717A Method for reducing damage of semiconductor device caused during hot carrier injection
05/09/2012CN102446716A Method for reducing damage of semiconductor device caused during hot carrier injection
05/09/2012CN102446715A Systems and methods for forming semiconductor materials by atomic layer deposition
05/09/2012CN102446714A Method for improving multi-exposure stability of aluminum metal layer
05/09/2012CN102446713A Method for repeatedly photoetching copper interconnected groove structure for multiple times
05/09/2012CN102446712A Method for increasing double patterning process windows
05/09/2012CN102446711A Method for manufacturing insulating layer in MIM (metal-insulator-metal) capacitor
05/09/2012CN102446710A Method for manufacturing multilayer metal-silicon nitride-metal capacitor
05/09/2012CN102446709A Production method of metal-silicon nitride-metal capacitor
05/09/2012CN102446708A Semiconductor multi-project or multi-product wafer process
05/09/2012CN102446707A Method and apparatus for treating silicon substrate
05/09/2012CN102446706A Composite wafer having graphite core and method for manufacturing same
05/09/2012CN102446705A Method for forming semiconductor device
05/09/2012CN102446704A Dual patterning method
05/09/2012CN102446703A Dual patterning method
05/09/2012CN102446702A Wet processing method and pull back method
05/09/2012CN102446701A Method for improving defect of silicon spikes of edge of silicon wafer with etched deep groove
05/09/2012CN102446700A Method for improving silicon substrate and obtained silicon substrate
05/09/2012CN102446688A Two-dimensional scanning method for controlling uniform implantation of ions
05/09/2012CN102446687A Two-dimensional scanning device for controlling uniform ion implantation
05/09/2012CN102446684A Structure of parallel beam limiting diaphragm based on ion implantation
05/09/2012CN102446488A 半导体器件 Semiconductor devices
05/09/2012CN102445862A Improved wafer developing method
05/09/2012CN102445838A Method for reforming photo-resist pattern
05/09/2012CN102445835A Optical proximity correction modeling method of SRAM source and drain dimension
05/09/2012CN102445834A Optical modeling proximity correction method of SRAM (Static Random Access Memory) grid dimension
05/09/2012CN102445802A Array substrate used for liquid crystal display device and method for fabricating same
05/09/2012CN102445801A Liquid crystal display panel and manufacturing method thereof
05/09/2012CN102445711A THz-wave detector
05/09/2012CN102445144A Calibrating method and device for online membrane thickness measuring system
05/09/2012CN102445076A Heat teratment apparatus
05/09/2012CN102443395A Compound for wet etching silicon dioxide
05/09/2012CN102442550A Transfer device, processing system, control method of transfer device
05/09/2012CN102442492A Cassette for Loading Substrate
05/09/2012CN102441843A Internal cleaning structure for CMP (Chemical Mechanical Polishing) machine station and method thereof
05/09/2012CN102441840A System and method for wafer back-grinding control
05/09/2012CN102441838A Processing apparatus
05/09/2012CN102441826A Device for the double-sided processing of flat workpieces and method for the simultaneous double-sided material removal processing of a plurality of semiconductor wafers
05/09/2012CN102441741A Use of aliphatic hydrocarbons and paraffins as solvent in silver sintering pastes
05/09/2012CN102157351B Chip pickup and placement control method
05/09/2012CN102110593B Method for improving stability of polysilicon thin-film resistor
05/09/2012CN102061438B Method for treating metal surface by using heated carbon monoxide
05/09/2012CN102019582B Polishing process of 8-inch polished wafers doped with silicon lightly
05/09/2012CN102005480B High-voltage low-on-resistance LDMOS device and manufacturing method thereof
05/09/2012CN101964343B Semiconductor device
05/09/2012CN101941673B Micro electro mechanical system wafer-level vacuum packaging method
05/09/2012CN101930948B Method for producing nitride read-only memory
05/09/2012CN101930936B Method of manufacturing semiconductor package and method of manufacturing substrate for the semiconductor package
05/09/2012CN101916727B Preparation method of SOI (Silicon on Insulator) high-voltage power device
05/09/2012CN101908510B Semiconductor device with heat-radiating and packaging structure and manufacturing method thereof
05/09/2012CN101894844B Ferroelectric dynamic random memory based on metal oxide vapor phase deposition and preparation method thereof
05/09/2012CN101887845B Method for preparing nanometer super capacitor
05/09/2012CN101882668B Display device
05/09/2012CN101866876B Process for manufacturing contact hole
05/09/2012CN101859723B Method for exchanging substrates and substrate processing device
05/09/2012CN101849277B Quantum well intermixing
05/09/2012CN101847588B Semiconductor process
05/09/2012CN101846889B Exposure apparatus
05/09/2012CN101840920B Semiconductor structure and forming method thereof
05/09/2012CN101840882B Shallow slot isolation method
05/09/2012CN101823989B Polymer for resist, resist composition, pattern forming method and material compound for resist polymer
05/09/2012CN101819947B Method of forming integrated circuit structure
05/09/2012CN101807532B Ultra-thin chip inversely packaging method and packaged body
05/09/2012CN101789491B Phase-change memory cell structure, preparation method thereof and preparation method of phase-change memory arrays
05/09/2012CN101771014B Wafer-level package structure and package method thereof
05/09/2012CN101752227B Manufacturing method of shallow groove isolation structure for MOS capacitance
05/09/2012CN101750277B Solder collecting device for reliability testing of semiconductor element and method thereof
05/09/2012CN101730374B Plasma system
05/09/2012CN101728295B Gas filling bearing piece, gas filling bearing piece set and gas filling equipment
05/09/2012CN101711354B Method for detecting surface defects on a substrate and device using said method
05/09/2012CN101685788B Front open type wafer box with latch and airtight structure
05/09/2012CN101681843B Method of manufacturing semiconductor device
05/09/2012CN101677067B Copper core layer multilayer packaging substrate manufacturing method
05/09/2012CN101663354B Resin composition and molded article obtained from the composition
05/09/2012CN101656203B Method and system for manufacturing multi-gate transistor
05/09/2012CN101650532B Liquid processing apparatus, liquid processing method
05/09/2012CN101650530B Coating and developing device and method
05/09/2012CN101641219B Method to form a pattern of functional material on a substrate using a mask material
05/09/2012CN101640169B Preparation method of nano patterned substrate used for nitride epitaxial growth
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