Patents
Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773)
05/2011
05/17/2011US7943896 Mechanical galvanometer tilt correction control
05/17/2011US7943894 Optical element for free-space propagation between an optical waveguide and another optical waveguide, component, or device
05/17/2011US7943889 Apparatus for improving detection efficiency of multiphoton microscopy systems by focus compensation, pupil image division, and parallel pupil rearrangement
05/12/2011US20110108736 SACP Method and Particle Optical System for Performing the Method
05/11/2011EP2320446A1 Electron emitter and field emission device provided with electron emitter
05/05/2011WO2011053556A1 Covering wide areas with ionized gas streams
05/05/2011US20110101235 Particle beam irradiation apparatus and particle beam therapy system
05/05/2011US20110100428 Photoelectric conversion unit
05/03/2011US7935920 Illumination optical system including luminous flux conversion system
04/2011
04/28/2011US20110095198 System and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith
04/27/2011EP1751783B1 Charged particle gun
04/27/2011CN201813579U Electronic gun for electron beam melting furnace
04/27/2011CN102037536A Method and apparatus for single-axis cross-sectional scanning of parts
04/21/2011US20110089334 Ion implanter with variable aperture and ion implant method thereof
04/21/2011US20110089333 Assemblies for ion and electron sources and methods of use
04/20/2011EP1831760B1 Optoelectronic position determination system
04/19/2011US7928357 High speed scanning platform for microarray scanner
04/14/2011US20110084216 Method for treating non-planar structures using gas cluster ion beam processing
04/14/2011US20110084215 Method and system for tilting a substrate during gas cluster ion beam processing
04/14/2011US20110084214 Gas cluster ion beam processing method for preparing an isolation layer in non-planar gate structures
04/13/2011EP2308273A1 Neutral particle generator
04/12/2011US7923699 Tracking control method and electron beam writing system
04/12/2011US7923677 Coded aperture imager comprising a coded diffractive mask
04/12/2011US7923676 Optical unit, solid-state image sensing device with position adjusting section and electronic apparatus comprising same
04/07/2011US20110079731 Multipole lens for electron column
04/07/2011US20110079730 Imaging system
03/2011
03/31/2011US20110073759 Electromagentic field application system
03/30/2011CN101625946B Electronic emission device
03/29/2011US7915597 Extraction electrode system for high current ion implanter
03/29/2011US7915572 Imaging optical system and endoscope provided with imaging optical system
03/23/2011EP2297763A2 Charged particle detection system and method
03/22/2011US7911120 Source for providing an electron beam of settable power
03/17/2011US20110062335 Detecting electromagnetic radiation
03/10/2011US20110057566 Pulsed electron source, power supply method for pulsed electron source and method for controlling a pulsed electron source
03/10/2011US20110057565 Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
03/10/2011US20110057114 Electron beam lithography apparatus and electron beam lithography method
03/08/2011US7902504 Charged particle beam reflector device and electron microscope
03/08/2011US7902492 Measuring unit for air flow
03/03/2011US20110049382 Pattern modification schemes for improved fib patterning
03/03/2011US20110049337 Photodetection device and photodetection method, and microscope and endoscope
03/02/2011EP2289087A1 Method and apparatus for single-axis cross-sectional scanning of parts
03/01/2011US7897903 Image detection system of optical channels arranged next to one another
03/01/2011US7895885 Method and system for nanoknife and MEMS platform
02/2011
02/24/2011US20110042578 Ion beam monitoring arrangement
02/24/2011DE102009028182B3 High frequency-photoelectron source has semiconducting cavity resonator system that has cathode, choke cell and gun cell
02/22/2011US7893605 Back-gated field emission electron source
02/15/2011US7888653 Techniques for independently controlling deflection, deceleration and focus of an ion beam
02/15/2011US7888628 Optical zoom system for a light scanning microscope
02/10/2011US20110031408 Mask health monitor using a faraday probe
02/10/2011US20110031384 Speckle reduction method and apparatus
02/10/2011US20110031380 Optical pointing device
02/10/2011DE102008057342B4 Gasentladungskammer mit Glühkathode und Polschuhlinse Gas discharge chamber with hot cathode and Polschuhlinse
02/08/2011USRE42111 Multideflector
02/08/2011US7884372 Diamond UV-Ray sensor
02/08/2011US7884334 Charged particle beam imaging method and system thereof
02/08/2011US7884333 Particle beam and crabbing and deflecting structure
02/03/2011US20110025811 Light scanning unit and electrophotographic image forming apparatus using the same
02/03/2011US20110025184 Illuminating device
02/01/2011US7880375 Triode cathode apparatus and method of making a triode cathode apparatus
02/01/2011US7880147 Components for reducing background noise in a mass spectrometer
02/01/2011US7880146 Tune-stabilized, non-scaling, fixed-field, alternating gradient accelerator
02/01/2011US7880130 Optical device and mobile apparatus
01/2011
01/27/2011US20110017920 Method and system for electron beam applications
01/20/2011WO2011008288A1 Adjustable louvered plasma electron flood enclosure
01/20/2011US20110013167 Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
01/19/2011EP2276056A2 Ion trap
01/19/2011EP1194944B1 Electron beam accelerator
01/19/2011CN101952927A Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
01/19/2011CN101952926A Pumped electron source, power supply method for pumped electron source and method for controlling an electron pumped source
01/18/2011USRE42033 Single step multi-section exposure scanning method
01/18/2011US7872798 Microscopic apparatus and observing method
01/18/2011US7872241 Method and apparatus for production and maintenance of electron beam space-charge neutralization
01/18/2011US7872240 Corrector for charged-particle beam aberration and charged-particle beam apparatus
01/13/2011WO2011003186A1 Methods and systems for providing a substantially quadrupole field with a higher order component
01/13/2011US20110006271 Dielectric composition with reduced resistance
01/13/2011CA2767444A1 Methods and systems for providing a substantially quadrupole field with a higher order component
01/12/2011CN1652283B Field emitting electronic source device and its preparing process
01/11/2011US7868301 Deflecting a beam of electrically charged particles onto a curved particle path
01/11/2011US7868300 Lithography system, sensor and measuring method
01/11/2011US7868284 Optical semiconductor package having an optical module with a progressively varying refractive index
01/06/2011WO2009085081A3 Method and apparatus for reducing space charge in an ion trap
01/06/2011US20110001058 Gas field ion source with coated tip
01/06/2011US20110001057 Component for manipulating a stream of charged particles
01/06/2011US20110001056 Component for manipulating a stream of charged particles
01/05/2011EP2270832A1 Spin polarized electron source
01/04/2011US7863587 Symmetrical shaper for an ion beam deposition and etching apparatus
01/04/2011US7863580 Electron beam apparatus and an aberration correction optical apparatus
01/04/2011US7863555 Illumination apparatus and projection display apparatus
01/04/2011US7863552 Digital images and related methodologies
12/2010
12/30/2010US20100327180 Beam quality in fib systems
12/30/2010US20100327179 Charged particle beam column and method of operating same
12/30/2010US20100327160 Method for examining a sample by using a charged particle beam
12/28/2010US7860352 Light-collecting apparatus and contact-type solid-state imaging apparatus using the same
12/28/2010US7858951 Skew chicane based betatron eigenmode exchange module
12/28/2010US7858923 Light beam scanning apparatus and image forming apparatus provided with the same
12/23/2010US20100320393 Off-axis ion milling device for manufacture of magnetic recording media and method for using the same
12/23/2010US20100320366 Beam power with beam redirection
12/22/2010CN101019201B Charged particle gun
12/21/2010US7855373 Charged particle gun
12/14/2010US7851756 Charged particle beam irradiation system
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