Patents
Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773)
10/2009
10/08/2009US20090252023 Integrated optical system and method of manufacturing the same and information recording and/or reproducing apparatus using the integrated optical system
10/06/2009US7598499 Charged-particle exposure apparatus
10/06/2009US7598498 Electric field lens and ion implanter having the same
10/06/2009US7598495 Methods and systems for trapping ion beam particles and focusing an ion beam
10/06/2009US7598483 Optical element and optical measurement device using the optical element
10/01/2009US20090244654 Image reading device and image forming device
10/01/2009US20090242792 Electron microscopy
10/01/2009US20090242789 Charged particle beam irradiating apparatus
10/01/2009US20090242788 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium
10/01/2009US20090242787 Charged-particle beam writing method and charged-particle beam writing apparatus
10/01/2009US20090242786 Aberration corrector for transmission electron microscope
10/01/2009US20090242761 Method and apparatus for charged particle beam inspection
10/01/2009US20090242757 Charged particle beam apparatus and method adjusting axis of aperture
09/2009
09/30/2009EP2104944A1 Cathode structure for a flat screen with refocusing grid
09/29/2009US7595488 Method and apparatus for specifying working position on a sample and method of working the sample
09/29/2009US7595481 Scanning optical system measuring device and scanning optical system measuring method
09/29/2009US7595477 Anti- reflective device having an anti-reflection surface formed of silicon spikes with nano-tips
09/24/2009US20090237376 Optical Position Sensing System and Optical Position Sensor Assembly with Convex Imaging Window
09/24/2009US20090236522 Optical zoom system for a light scanning electron microscope
09/24/2009US20090236495 Autofocus for high power laser diode based annealing system
09/22/2009US7592604 Charged particle beam apparatus
09/22/2009US7592582 Confocal scanner having beam spread angle adjustment device
09/17/2009WO2009112668A1 Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
09/17/2009US20090230317 Aberration correction apparatus that corrects spherical aberration of charged particle apparatus
09/17/2009US20090230316 Method of Suppressing Beam Position Drift, Method of Suppressing Beam Dimension Drift, and Charged-Particle Beam Lithography System
09/10/2009US20090224170 Scanning electron microscope
09/10/2009US20090224169 Scanning Transmission Electron Microscope and Method of Aberration Correction Therefor
09/10/2009US20090224137 Light barrier
09/09/2009EP2099058A2 Ion trap
09/08/2009US7586086 Scanning imaging device for image-substraction confocal microscopy
09/08/2009US7586085 Photo-detection device and method
09/08/2009US7586082 Optical element for a document illuminator
09/03/2009WO2009106759A1 Pumped electron source, power supply method for pumped electron source and method for controlling an electron pumped source
09/03/2009US20090218508 Cold cathode field emission electron gun and its application to electron beam instruments
09/03/2009US20090218507 Charged particle beam device
09/03/2009US20090218506 Electron beam apparatus
08/2009
08/27/2009US20090216450 Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus
08/27/2009US20090213094 Optical Position Sensing System and Optical Position Sensor Assembly
08/27/2009US20090212231 Heavy ion radiation therapy system with stair-step modulation
08/27/2009US20090212230 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium
08/27/2009US20090212229 Projection lens arrangement
08/27/2009US20090212228 Charged particle beam apparatus including aberration corrector
08/27/2009US20090212214 Sample inspection apparatus
08/27/2009US20090212203 System for Determining An Operational State of a MEMS Based Display
08/20/2009WO2009100753A1 Low-voltage field emission scanning electron microscope
08/20/2009US20090206280 Charged-beam exposure apparatus having an improved alignment precision and exposure method
08/20/2009US20090206271 Focussing mask
08/20/2009US20090206238 Optical substrate for reduced background fluorescence
08/19/2009EP1735806A4 Ion source with controlled superposition of electrostatic and gas flow fields
08/19/2009CN101512763A Apparatus for obtaining radiant energy
08/18/2009US7576315 Scanning type image display apparatus having a synchronization control circuit and a light transmitting area on the last surface of a scanning optical system
08/18/2009US7576311 Optical detector having a sensing element, a lens and a frustum coupled to the lens
08/18/2009US7576310 Imaging optical system and endoscope provided with imaging optical system
08/13/2009US20090200497 Beam current calibration system
08/13/2009US20090200484 Dual mode gas field ion source
08/13/2009US20090200483 Inner Gantry
08/13/2009US20090200482 Method for Focusing Electron Beam in Electron Column
08/12/2009EP1077463B1 Electron beam emitting device and image forming device
08/12/2009CN101506927A Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter
08/11/2009US7573045 Plasmon wave propagation devices and methods
08/11/2009US7573031 Methods for SEM inspection of fluid containing samples
08/11/2009US7573022 Method for fabricating vertically-offset interdigitated comb actuator device
08/06/2009US20090194711 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium
08/06/2009US20090194692 Charged particle radiation apparatus
08/05/2009CN100524581C Field emission device
08/04/2009US7569833 Apparatus for generating a plurality of beamlets
08/04/2009US7569805 Apparatus and method for calibrating a reflecting mirror
07/2009
07/30/2009US20090189094 Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate
07/29/2009EP2082411A2 X-ray tube with ion deflecting and collecting device made from a getter material
07/29/2009CN100521061C Field emitting display with carbon nano tube emitting polar and its making method
07/28/2009US7567027 Negative hole structure having a protruded portion and electron emission device including the same
07/28/2009US7566882 Reflection lithography using rotating platter
07/28/2009US7566864 Apparatus and methods for an area scanner having an adjustable mirror and a scan mirror with scan operable to 360 degrees
07/23/2009US20090184256 Charged particle beam apparatus
07/23/2009US20090184255 Inspection method and inspection system using charged particle beam
07/23/2009US20090184243 Charged particle beam apparatus
07/21/2009US7564042 Ion beam apparatus having plasma sheath controller
07/16/2009US20090180192 Method and Apparatus for Imaging
07/15/2009EP2079092A1 Device and method for supplying power to an electron source and electron source with secondary emission under ion bombardment
07/14/2009US7560715 System for the delivery of proton therapy
07/09/2009WO2009085081A2 Method and apparatus for reducing space charge in an ion trap
07/09/2009US20090173888 Gas field ion source, charged particle microscope, and apparatus
07/09/2009US20090173887 Charged particle beam trajectory corrector and charged particle beam apparatus
07/09/2009US20090173875 Image pickup unit and endoscope using the same
07/09/2009CA2710991A1 Method and apparatus for reducing space charge in an ion trap
07/08/2009EP2077574A1 Method of controlling electron beam focusing of pierce type electron gun and control device therefor
07/08/2009EP1550144A4 System for and method of gas cluster ion beam processing
07/07/2009US7558161 Integrated optical system and method of manufacturing the same and information recording and/or reproducing apparatus using the integrated optical system
07/07/2009US7557337 Micro-lens configuration for small lens focusing in digital imaging devices
07/02/2009WO2009080411A1 Linear electron source, evaporator using linear electron source, and applications of electron sources
07/02/2009US20090166553 Electron beam drawing method
07/02/2009US20090166552 E-Beam Exposure Apparatus
07/01/2009EP1805779A4 Remapping methods to reduce distortions in images
06/2009
06/30/2009US7554095 Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
06/30/2009US7554083 Integration of electromagnetic detector on integrated chip
06/25/2009US20090159811 Linear electron source, evaporator using linear electron source, and applications of electron sources
06/25/2009DE102007058339A1 Herstellungsverfahren für einen Aluminat-UV-Leuchtstoff Manufacturing method for a UV-aluminate phosphor
06/24/2009EP2073243A1 Linear electron source, evaporator using linear electron source, and applications of electron sources
06/23/2009US7550713 System for determining an operational state of a MEMS based laser scanner
06/23/2009US7550712 Optical scanning system with reduced spherical aberration and image forming apparatus using the same
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