| Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773) |
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| 02/18/2010 | US20100038555 Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner |
| 02/18/2010 | US20100038554 Compensation of dose inhomogeneity and image distortion |
| 02/18/2010 | US20100038538 Objective lens |
| 02/17/2010 | CN100590767C Corona discharge electrode and method of operating the same |
| 02/16/2010 | US7663094 Probe for data storage apparatus |
| 02/11/2010 | US20100032580 Compact Accelerator For Medical Therapy |
| 02/11/2010 | US20100032562 Slit Disk for Modified Faraday Cup Diagnostic for Determing Power Density of Electron and Ion Beams |
| 02/09/2010 | US7659509 System for scanning probe microscope input device |
| 02/09/2010 | US7659501 Image-sensing module of image capture apparatus and manufacturing method thereof |
| 02/04/2010 | WO2010012021A1 Neutral particle generator |
| 02/04/2010 | US20100025578 Dual Beam System |
| 02/04/2010 | CA2732372A1 Neutral particle generator |
| 02/02/2010 | US7655923 Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system |
| 01/28/2010 | US20100019167 Fan beam modulator for ion beams providing continuous intensity modulation |
| 01/28/2010 | US20100019166 Method for Controlling Electron Beam in Multi-Microcolumn and Multi-Microcolumn Using The Same |
| 01/28/2010 | US20100018839 Baggage deposit system |
| 01/27/2010 | CN100585780C Electron emission device and electron emission display using the same |
| 01/21/2010 | US20100015537 Beam dose computing method and writing method and record carrier body and writing apparatus |
| 01/21/2010 | US20100012825 Confocal imaging methods and apparatus |
| 01/14/2010 | US20100006770 Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system |
| 01/14/2010 | US20100006747 Optical head that can be easily assembled |
| 01/12/2010 | US7646149 Electronic switching device |
| 01/07/2010 | US20100001204 Open-ended electromagnetic corrector assembly and method for deflecting, focusing, and controlling the uniformity of a traveling ion beam |
| 01/07/2010 | US20100001203 Method of acquiring offset deflection amount for shaped beam and lithography apparatus |
| 01/07/2010 | US20100001202 Spherical aberration correction decelerating lens, spherical aberration correction lens system, electron spectrometer, and photoelectron microscope |
| 01/07/2010 | US20100001174 Semiconductor device, its manufacturing method and optical pickup module |
| 01/06/2010 | EP2141725A1 Surface emission type electron source and drawing device |
| 01/06/2010 | EP1386324B1 Actuating and sensing device for scanning probe microscopes |
| 12/31/2009 | US20090325452 Cathode substrate having cathode electrode layer, insulator layer, and gate electrode layer formed thereon |
| 12/31/2009 | US20090321655 Ion Transfer Tube with Spatially Alternating DC Fields |
| 12/29/2009 | US7638784 Radiation protection system |
| 12/29/2009 | US7638782 Semiconductor device manufacturing method and ion implanter used therein |
| 12/24/2009 | US20090314950 Lithography apparatus and focusing method for charged particle beam |
| 12/24/2009 | US20090314949 Laser-driven deflection arrangements and methods involving charged particle beams |
| 12/23/2009 | CN100573777C Field emission electronic source and its manufacturing method |
| 12/22/2009 | US7635850 Ion implanter |
| 12/17/2009 | US20090310738 Imaging apparatus and imaging method |
| 12/17/2009 | US20090309040 Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system |
| 12/17/2009 | US20090309039 Application specific implant system and method for use in solar cell fabrications |
| 12/17/2009 | US20090309038 Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system |
| 12/17/2009 | US20090309022 Apparatus for inspecting a substrate, a method of inspecting a substrate, a scanning electron microscope, and a method of producing an image using a scanning electron microscope |
| 12/17/2009 | US20090309018 Multi-source plasma focused ion beam system |
| 12/17/2009 | US20090309014 Method and apparatus to sharply focus aerosol particles at high flow rate and over a wide range of sizes |
| 12/17/2009 | US20090309010 Image sensor with decreased optical interference between adjacent pixels |
| 12/15/2009 | US7633053 Microscope, particularly a laser scanning microscope with adaptive optical arrangement |
| 12/10/2009 | US20090302233 Charged particle beam apparatus |
| 12/10/2009 | US20090302217 Hybrid Phase Plate |
| 12/09/2009 | CN101599401A Method for inhibiting oscillation of binode magnetic injection gun region of gyrotron amplifier |
| 12/09/2009 | CN100568645C Ionizer and discharge electrode assembly to be assembled therein |
| 12/08/2009 | US7629736 Method and device for preventing junction leakage in field emission devices |
| 12/03/2009 | WO2009144727A2 Charged particle detection system and method |
| 12/03/2009 | US20090294687 Three modes particle detector |
| 12/03/2009 | US20090294638 Nanomechanical Oscillator |
| 12/02/2009 | EP2126953A1 High frequency, cold cathode, triode-type, field-emitter vacuum tube and process for manufacturing the same |
| 12/02/2009 | CN100565774C Electronic optical focusing, deflexion and signals collection method for the turning gear immerged object lens |
| 12/02/2009 | CN100565751C Medium layer, method for forming negative holes structure, and electron emission device |
| 12/01/2009 | US7626166 Electron microscope |
| 12/01/2009 | US7626157 Image sensor including microlens having sizes differing according to deposition of color filter array |
| 11/26/2009 | WO2009143005A1 Method and apparatus for single-axis cross-sectional scanning of parts |
| 11/26/2009 | US20090289196 Deflection Signal Compensation for Charged Particle Beam |
| 11/26/2009 | US20090289195 Charged Particle Source with Integrated Energy Filter |
| 11/26/2009 | US20090289194 Particle beam therapy system |
| 11/26/2009 | US20090289193 Ion implanting apparatus and ion beam deflection angle correcting method |
| 11/26/2009 | US20090289192 Scanning aperture ion beam modulator |
| 11/26/2009 | US20090289191 Ultra high precision measurement tool with control loop |
| 11/26/2009 | CA2725058A1 Method and apparatus for single-axis cross-sectional scanning of parts |
| 11/24/2009 | US7622705 Dielectric microcavity fluorosensors excited with a broadband light source |
| 11/19/2009 | US20090283665 Image sensor with an aligned optical assembly |
| 11/18/2009 | CN100561634C Ion gun |
| 11/17/2009 | US7619235 Optical sampling arrangements |
| 11/17/2009 | US7619203 High throughput multi beam detection system and method |
| 11/11/2009 | CN100559170C Tomography imaging apparatus |
| 11/10/2009 | US7615739 Spin microscope based on optically detected magnetic resonance |
| 11/10/2009 | US7615738 Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
| 11/05/2009 | US20090273789 Interferometer |
| 11/05/2009 | US20090272911 Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifier |
| 11/05/2009 | US20090272891 Mass Spectrometer |
| 11/03/2009 | US7612346 Non-axisymmetric charged-particle beam system |
| 11/03/2009 | US7612330 Optical scanning probe, optical scanning probe device and method for controlling the optical scanning probe |
| 11/03/2009 | US7612329 Apparatus and method for free space optical communications beam steering without gimbals |
| 11/03/2009 | US7612323 Optical element for condensing incident light |
| 11/03/2009 | US7612318 Complementary metal oxide semiconductor image sensor having cross talk prevention and method for fabricating the same |
| 11/03/2009 | US7612317 Beam steering for optical target identification and tracking without gimbals or scanning mirrors |
| 10/29/2009 | US20090266997 Ion source with adjustable aperture |
| 10/29/2009 | US20090266984 Plasma Ion Source Mass Spectrometer |
| 10/28/2009 | CN101568985A Method and apparatus for communicating radiation pressure provided by a light wave |
| 10/28/2009 | CN100555551C Beam uniformity and angular distribution measurement system |
| 10/28/2009 | CN100555532C Electron emission device |
| 10/27/2009 | US7608845 Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
| 10/22/2009 | US20090261267 Projection lens arrangement |
| 10/22/2009 | US20090261251 Inspection apparatus and inspection method |
| 10/20/2009 | US7605377 On-chip reflectron and ion optics |
| 10/20/2009 | US7604922 Reciprocating device; mercury lamps |
| 10/15/2009 | US20090256082 Ion implanting apparatus |
| 10/15/2009 | US20090256081 Focused ion beam apparatus |
| 10/14/2009 | EP2109132A2 Electron beam apparatus and image display apparatus using the same |
| 10/14/2009 | CN100550430C Semiconductor device and method of manufacturing such a device |
| 10/13/2009 | US7601949 Optical scanner device |
| 10/13/2009 | US7601944 High throughput multi beam detection system and method |
| 10/13/2009 | US7601938 Imaging system, methodology, and applications employing reciprocal space optical design |