Patents
Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773)
05/2013
05/22/2013CN103119684A Filter for removing macro-particles from a plasma beam
05/21/2013US8445872 System and method for layer-wise proton beam current variation
05/21/2013US8444271 System and method for reducing visible speckle in a projection visual display system
05/15/2013CN103107054A 场发射装置 The field emission device
05/14/2013US8440987 System and method for automated cyclotron procedures
05/09/2013US20130112891 Charged particle optical system and scribing apparatus
05/09/2013US20130112890 Charged particle energy filter
05/09/2013US20130112889 Wien filter
05/09/2013US20130112873 Aberration Correction Device and Charged Particle Beam Device Employing Same
05/09/2013US20130112858 Polarization diversity detector
05/02/2013US20130105704 White beam slit
05/02/2013US20130105703 Particle beam therapy system and adjustment method for particle beam therapy system
05/02/2013US20130105702 Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system
05/02/2013US20130105671 Faceted retro-mirror for line-of-sight jitter sensing
05/01/2013EP2587514A1 Nanostructure-based electron beam writer
04/2013
04/25/2013US20130099131 Method and apparatus for improved uniformity control with dynamic beam shaping
04/24/2013CN103069533A Control grid design for an electron beam generating device
04/24/2013CN102254762B 场发射装置 The field emission device
04/23/2013US8427006 Device for disconnecting at least one appliance from the electrical mains, which provides at least one override operating mode, a configurable device, system and configuration method
04/18/2013US20130092826 Pattern Modification Schemes for Improved FIB Patterning
04/16/2013US8421039 Method and apparatus for improved uniformity control with dynamic beam shaping
04/16/2013US8421031 Particle beam therapy system
04/16/2013US8421027 Charged particle analyser and method using electrostatic filter grids to filter charged particles
04/11/2013US20130087717 Electrostatic lens
04/11/2013US20130087716 Charged particle source
04/04/2013WO2013046107A1 Image gating using an array of reflective elements
03/2013
03/28/2013WO2013004566A3 An electron beam device, a getter sheet and a method of manufacturing an electron beam device provided with said getter sheet
03/28/2013US20130078577 Charged particle beam drawing apparatus, drawing data generation method, drawing data generation program storage medium, and article manufacturing method
03/28/2013US20130075624 Beam Monitoring Device, Method, And System
03/28/2013US20130075623 Multi-ion beam implantation apparatus and method
03/28/2013US20130075622 Particle beam irradiation apparatus and particle beam therapy system
03/27/2013EP2573793A1 Electron microscope
03/26/2013US8405045 Particle beam device with deflection system
03/26/2013US8405043 Charged particle extraction device and method of design there for
03/26/2013US8405026 Charged particle beam apparatus
03/21/2013US20130071791 Charged particle beam irradiation apparatus, charged particle beam drawing apparatus, and method of manufacturing article
03/21/2013US20130068962 Drawing apparatus, and article manufacturing method
03/19/2013US8399852 Systems and methods for control of multiple charged particle beams
03/19/2013US8399851 Systems and methods for scanning a beam of charged particles
03/19/2013US8399834 Isotope ion microscope methods and systems
03/19/2013US8399830 Means and method for field asymmetric ion mobility spectrometry combined with mass spectrometry
03/14/2013US20130062520 Distortion Free Stigmation of a TEM
03/13/2013CN102969211A Power generation circuit and power generation plant with same
03/06/2013EP2565902A2 Electron beam exposure system
03/05/2013US8389957 System and method for metered dosage illumination in a bioanalysis or other system
03/05/2013US8389953 Focused ion beam apparatus
03/05/2013US8389952 Particle beam irradiation apparatus and particle beam therapy system
03/05/2013US8389924 Detector and optical system
02/2013
02/28/2013US20130052590 Drawing apparatus and method of manufacturing article
02/26/2013US8385618 Determination and monitoring of laser energy
02/26/2013US8384051 Charged particle beam drawing apparatus and article manufacturing method using same
02/26/2013US8384009 Optical member with high refractive index layers, solid-state imaging device having an optical member with high refractive index layers, and manufacturing method thereof
02/20/2013EP2559123A2 Module assembly for the application-specific construction of power factor correction systems, filter systems, and absorption circuit systems
02/19/2013US8378313 Uniformity of a scanned ion beam
02/14/2013US20130037725 Grid providing beamlet steering
02/12/2013US8373137 High resolution energy-selecting electron beam apparatus
02/12/2013US8373136 Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator
02/07/2013US20130032731 Production of mev micro beams of protons for medical applications
02/07/2013US20130032729 Charged Particle Detection System and Multi-Beamlet Inspection System
02/07/2013US20130032716 Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
02/07/2013US20130032701 Inputting module and submount thereof and manufacturing method of the submount
02/05/2013US8368016 Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
02/05/2013US8368012 Guiding charged droplets and ions in an electrospray ion source
02/05/2013US8368006 Driving a laser scanning section using a basic period of a pulse signal based on a period of a resonance frequency and accumulated period errors to produce a correction period quantity
01/2013
01/31/2013US20130026386 Electrolytic plating method and electrostatic deflecting device
01/31/2013US20130026385 Shielding member having a charge control electrode, and a charged particle beam apparatus
01/31/2013US20130026362 System and method for fast discharging of an inspected object
01/31/2013US20130026356 System and Method for Ion Implantation with Improved Productivity and Uniformity
01/29/2013US8362443 Objective lens
01/24/2013US20130022363 Photosensor and image forming device incorporating the same
01/24/2013US20130020495 Compact High Precision Adjustable Beam Defining Aperture
01/15/2013US8354652 Ion source including separate support systems for accelerator grids
01/15/2013CA2783356A1 Stabilized electron multiplier anode
01/15/2013CA2782258A1 Multipole assembly having a main mass filter and an auxiliary mass filter
01/10/2013WO2013004566A2 An electron beam device, a getter sheet and a method of manufacturing an electron beam device provided with said getter sheet
01/10/2013WO2013004565A1 An electron beam device and a method of manufacturing said electron beam device
01/10/2013US20130009070 Electrostatic lens for charged particle radiation
01/08/2013US8350209 Production of self-organized pin-type nanostructures, and the rather extensive applications thereof
01/08/2013CA2460757C Conductive tube for use as a reflectron lens
01/03/2013US20130001432 Compact gantry for particle therapy
01/01/2013US8345658 Mobile communication terminal with GPS function, positioning system, operation control method, and program
01/01/2013US8344310 Optical member with high and low refractive index layers
12/2012
12/26/2012CN202633200U Cathode control bipolar electron gun for standing wave accelerating tube
12/26/2012CN202632926U Superconducting mixed magnet device for generating minimum magnetic field B
12/25/2012US8339260 Securing a hazardous area in the regin surrounding the automatic loading of reels on a reel changer
12/25/2012US8339071 Particle accelerator having wide energy control range
12/20/2012US20120319002 Ion generating apparatus
12/20/2012US20120319001 Charged particle beam lens
12/20/2012US20120318978 Monochromator for Charged Particle Beam Apparatus
12/20/2012DE102011104858A1 Verfahren zur Erzeugung von hochenergetischen Elektronenstrahlen ultrakurzer Pulslänge, Breite, Divergenz und Emittanz in einem hybriden Laser-Plasma-Beschleuniger A method for generating high-energy electron beams of ultra-short pulse length, width, divergence and emittance in a hybrid laser-plasma accelerator
12/19/2012CN1725416B Field emission display device and preparation method thereof
12/18/2012US8334523 Moving core beam energy absorber and converter
12/18/2012US8334517 Apparatus for adjusting ion beam by bended bar magnets
12/18/2012US8334500 System for reducing defocusing of an object image due to temperature changes
12/18/2012US8334499 Optical angle of arrival measurement system and method
12/13/2012WO2012170169A2 Mass spectrometry for a gas analysis with a two-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
12/13/2012WO2012170168A2 Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
12/13/2012US20120316378 Beam irradiation apparatus and beam irradiation control method
12/13/2012US20120313004 Mass Spectrometry for a Gas Analysis with a Two-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer both Offset from a Central Axis of the Deflector Lens
12/13/2012US20120313003 Gantry for Medical Particle Therapy Facility
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