Patents
Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773)
12/2012
12/13/2012US20120312984 Mass Spectrometry for Gas Analysis with a One-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer Both Offset from a Central Axis of the Deflector Lens
12/13/2012US20120312975 Electron beam exposure apparatus and electron beam exposure method
12/13/2012US20120312971 Electro-Optical Radiation Collector for Arc Flash Detection
12/11/2012US8330129 Uniformity of a scanned ion beam
12/06/2012WO2012139872A3 Electron source for generating an electron beam and x-ray source for generating x-ray radiation
12/06/2012US20120305798 Charged particle multi-beamlet apparatus
12/06/2012US20120305797 Method and particle beam device for focusing a particle beam
12/05/2012CN202585308U Atmospheric impact resistant electron source
12/04/2012US8324562 Fiber scanning system having a magnet attached to the fiber at a position before or after an electrical coil with improved tip positioning
11/2012
11/29/2012US20120298879 Apparatus and methods for forming an electrical conduction path through an insulating layer
11/27/2012US8319174 Scanned writing of an exposure pattern on a substrate having a spot size modulator and dual motor for moving the substrate table and a laser spot relative to each other
11/27/2012CA2689088C Mass spectrometry method and apparatus
11/22/2012US20120295203 Drawing apparatus and method of manufacturing article
11/22/2012US20120295202 Drawing apparatus and method of manufacturing article
11/22/2012US20120292524 Charged particle lithography system with aperture array cooling
11/22/2012US20120292431 Optical Window and Detection System Employing the Same
11/21/2012CN101952926B Pumped electron source, power supply method for pumped electron source and method for controlling an electron pumped source
11/20/2012US8314410 Combination laser and charged particle beam system
11/20/2012US8314409 Pattern modification schemes for improved FIB patterning
11/20/2012US8314403 Gas field ion source with coated tip
11/15/2012US20120288800 Electron beam drawing apparatus and method of manufacturing device
11/15/2012US20120286156 Selective ion mobility spectrometer
11/15/2012US20120286149 Method and apparatus for providing beams of nanodroplets for high sputtering rate of inert materials
11/14/2012EP2523207A2 Electron beam generator
11/13/2012US8310413 Electroluminescent display devices
11/13/2012US8309936 Ion deflector for two-dimensional control of ion beam cross sectional spread
11/13/2012US8309935 End terminations for electrodes used in ion implantation systems
11/13/2012CA2533191C Electron emission device
11/08/2012US20120280136 Plasma Source for Charged Particle Beam System
11/08/2012US20120280121 Device, system, and method for reflecting ions
11/01/2012US20120273692 Method and apparatus for processing a microsample
11/01/2012US20120273691 Charged particle system for processing a target surface
11/01/2012US20120273690 Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams
11/01/2012US20120273658 Modulation device and charged particle multi-beamlet lithography system using the same
10/2012
10/30/2012US8299418 Imaging device unit and photographing apparatus comprising a piezoelectric element mounted on a plate
10/30/2012US8298449 Dielectric composition with reduced resistance
10/25/2012US20120267544 Energy degrader and charged particle irradiation system including the same
10/25/2012US20120267543 Synchrotron and particle therapy system using the same
10/23/2012US8294116 Photocathode with nanomembrane
10/23/2012US8294115 Linear electron source, evaporator using linear electron source, and applications of electron sources
10/23/2012US8294083 Image display device and method with mirror drive sensitivity correction
10/23/2012US8294080 Viewing apparatus capable of moving a subject within the field of view of the center of the viewed image
10/18/2012WO2012139872A2 Electron source for generating an electron beam and x-ray source for genrating x-ray radiation
10/18/2012US20120262635 Elementary image acquisition or display device
10/18/2012US20120261586 Beam Blanker for Interrupting a Beam of Charged Particles
10/17/2012CN101952927B Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
10/16/2012US8289178 Electro/optical smoke analyzer
10/16/2012US8288704 Apparatus and method for capturing still images and video using coded lens imaging techniques
10/11/2012US20120257723 Electron beam generator and x-ray generator including the same
10/11/2012US20120256098 Ion Beam System and Method of Operating Ion Beam System
10/10/2012EP2509096A2 Electron beam generator and x-ray generator including the same
10/10/2012CN202487521U Fast pulse transmission device for electron gun
10/09/2012US8284483 Method and device for acquiring signals in laser scanning microscopy
10/09/2012US8283629 Aberration-corrected wien ExB mass filter with removal of neutrals from the Beam
10/09/2012US8283621 Optical apparatus, imaging apparatus, and manufacturing method for optical apparatus with holding member for maintaining positional relation between optical elements
10/04/2012WO2012135544A1 Method and apparatus for enhancing quantum efficiency (qe) of photocathode with surface acoustic waves (saw) and applying surface acoustic waves (saw) to electron photoinjector
10/04/2012US20120248328 Apparatus and method for multiple slot ion implantation
10/04/2012US20120248327 Method and Arrangement for the Adjustment of Characteristics of a Beam Bundle of High-Energy Radiation Emitted from a Plasma
10/04/2012US20120248326 Uniformity of a Scanned Ion Beam
10/04/2012US20120248324 Method and Apparatus for Improved Uniformity Control with Dynamic Beam Shaping
10/03/2012CN202473822U Electronic impulse quasilinear symmetrical pulse width compression device
10/03/2012CN102709132A Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same
10/02/2012US8278635 Global point spreading function in multi-beam patterning
10/02/2012US8278615 Imaging system having a variable optical transmission timing
09/2012
09/27/2012US20120241641 Drawing apparatus and method of manufacturing article
09/27/2012US20120241640 Ion sources, systems and methods
09/27/2012US20120241612 Electron Beam Biprism Device and Electron Beam Device
09/27/2012US20120241604 Vacuum measurement device with ion source mounted
09/26/2012EP2503587A2 Apparatus for generating a plurality of beamlets
09/20/2012US20120235055 Focused Ion Beam Device and Focused Ion Beam Processing Method
09/20/2012US20120235054 Electron beam irradiation apparatus and electron beam drawing apparatus
09/19/2012EP2500926A1 Electric field emission element
09/18/2012US8269188 Charged particle beam apparatus and sample processing method
09/13/2012WO2012122036A2 Electrostatic lenses and systems including the same
09/13/2012US20120228516 Charged particle beam drawing apparatus and article manufacturing method using same
09/13/2012US20120228515 Apparatus and method for maskless patterned implantion
09/13/2012US20120228482 Systems and methods for sensing light
09/12/2012CN102668009A Clean corona gas ionization for static charge neutralization
09/11/2012US8264174 Laser acceleration system for generating monoenergetic protons
09/11/2012US8263951 System and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith
09/06/2012US20120223247 Particle beam irradiation system
09/06/2012US20120223246 System and method for automated cyclotron procedures
09/06/2012US20120223244 Electrostatic lenses and systems including the same
09/06/2012DE102012002988A1 Ionenisolierung in überladenen HF-Ionenfallen Ion isolation in overloaded RF ion trap
09/05/2012EP2494573A1 Covering wide areas with ionized gas streams
09/04/2012US8258484 Beamlet blanker arrangement
08/2012
08/30/2012US20120219914 Drawing apparatus, drawing method and method of manufacturing article
08/30/2012US20120217388 Bladed Ion Slicer
08/30/2012US20120217387 Ion slicer with accelleration and decelleration optics
08/28/2012US8253092 Optical die with variable refractive index, corrective of negative distortion, and method of fabricating such a die
08/23/2012US20120211668 Beam Current Controller for Laser Ion Source
08/23/2012US20120211667 Particle beam therapy system
08/21/2012US8247786 Non-contact displacement detecting device using optical astigmatism
08/16/2012US20120206069 Particle accelerator having wide energy control range
08/16/2012US20120205551 Method and apparatus for intensity control of a charged particle beam extracted from a synchrotron
08/16/2012US20120205550 Objective lens
08/14/2012US8244135 System and method for increasing upstream optical coding gain in a gigabit passive optical network (GPON)
08/09/2012US20120200613 Fluorescent lamp and image display apparatus
08/09/2012US20120199758 Gas field ionization ion source and ion beam device
08/09/2012US20120199756 Method for Centering an Optical Element in a TEM Comprising a Contrast Enhancing Element
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