Patents
Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773)
08/2012
08/09/2012US20120199736 Micro-reflectron for time-of-flight mass spectrometer
08/07/2012US8237103 Mechanical galvanometer tilt correction control
08/02/2012US20120193551 Apparatus systems and methods of sensing chemical bio-chemical and radiological agents using electrophoretic displays
08/02/2012US20120193550 Charged particle radiation device
08/01/2012CN102623128A Superconducting hybrid magnet device for generating minimum B magnetic field
07/2012
07/26/2012US20120187307 Charged particle beam writing apparatus and charged particle beam writing method
07/26/2012US20120187306 Systems and Methods for Control of Multiple Charged Particle Beams
07/25/2012CN101438368B Techniques for preventing parasitic beamlets from affecting ion implantation
07/24/2012US8227743 Apparatus for selecting light of a single wavelength
07/19/2012US20120183905 Charged-particle beam drawing apparatus and article manufacturing method
07/17/2012US8222613 Scanning irradiation device of charged particle beam
07/12/2012US20120178025 Charged particle beam drawing apparatus and article manufacturing method
07/12/2012US20120175535 Optical backplane having at least one optical relay element for relaying light from an input facet of the backplane to an output facet of the backplane
07/11/2012CN102097265B Device for enhancing uniformity of electron beam current
07/10/2012US8217596 Method of controlling coherent synchroton radiation-driven degradation of beam quality during bunch length compression
07/10/2012US8217332 Optical engine having a beam splitting element comprising a first dichroic unit and an optical path turning unit disposed in transmission paths of a visible beam and an invisible beam
07/10/2012US8215011 Method of manufacturing a printed circuit board
07/05/2012US20120168638 Charged Particle Source with Multiple Selectable Particle Emitters
07/05/2012US20120168637 Method and apparatus for controlling an electrostatic lens about a central ray trajectory of an ion beam
07/04/2012CN102074431B Electron gun control circuit for electronic linear accelerator
06/2012
06/28/2012US20120161029 Efficient Atmospheric Pressure Interface for Mass Spectrometers and Method
06/27/2012EP1602121B1 Apparatus for generating a plurality of beamlets
06/21/2012US20120155509 Electrode member, electron energy analyzer, photoelectron energy analyzer, and temperature measuring apparatus
06/21/2012US20120153147 Corrector
06/19/2012US8203113 Illumination apparatus and projection display apparatus
06/14/2012US20120145931 Lithography system, modulation device and method of manufacturing a fiber fixation substrate
06/14/2012US20120145917 Apparatus of plural charged particle beams with multi-axis magnetic lens
06/14/2012US20120145916 Projection lens arrangement
06/14/2012US20120145915 Lithography system and method of refracting
06/14/2012US20120145898 Particle detection system
06/13/2012CN102496539A Electronic pulse quasi-linear symmetric type pulse width compression device and method thereof
06/13/2012CN101849275B Plasma electron flood for ion beam implanter
06/13/2012CN101506927B Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter
06/12/2012US8201268 Integrated high index contrast sub-wavelength optical transforming tip (HICSWOTT) for near-field scanning optical microscope
06/12/2012US8198602 Electrostatic lens structure
06/07/2012US20120143051 Multi-field charged particle cancer therapy method and apparatus coordinated with patient respiration
06/07/2012US20120138814 Particle beam device with deflection system
06/06/2012EP1771871B1 High resolution cathode structure
06/05/2012US8194279 Image data combining apparatus and method
06/05/2012US8193520 Particle beam therapy system
05/2012
05/31/2012US20120132826 Particle beam irradiation apparatus and particle beam therapy system
05/29/2012US8188451 Electron generation and delivery system for contamination sensitive emitters
05/29/2012US8188450 Multiple beam charged particle optical system
05/29/2012US8188443 Focusing method of charged particle beam and astigmatism adjusting method of charged particle
05/29/2012US8186839 Optical module for observing event or object
05/24/2012US20120126459 Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus
05/24/2012US20120126138 Charged particle beam drawing apparatus and article manufacturing method using same
05/24/2012US20120126137 Ion implantation method and ion implanter
05/24/2012US20120126136 Charged-particle beam exposure apparatus and method of manufacturing article
05/23/2012EP1735810B1 A large-area shower electron beam irradiator with field emitters as an electron source
05/23/2012EP1221035B1 System and method for tomographic imaging of dynamic properties of a scattering medium
05/23/2012EP1221033B1 Method and system for enhanced imaging of a scattering medium
05/23/2012CN102473575A 可调整的进气口叶片式等离子体电子潮外壳 Adjustable inlet vane plasma electron shell tide
05/23/2012CN101874281B Cathode assembly containing an ultraviolet light-blocking dielectric layer
05/22/2012US8183545 Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing
05/22/2012US8183539 High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter
05/17/2012US20120119106 Charged particle beam irradiation apparatus, charged particle beam irradiating method, and method of attaching and detaching transport line
05/17/2012US20120119105 Bolus, bolus manufacturing method, particle beam therapy system, and treatment planning apparatus
05/16/2012EP2452355A1 Methods and systems for providing a substantially quadrupole field with a higher order component
05/15/2012US8178856 Charged particle beam writing apparatus and method thereof
05/15/2012US8178850 Chromatic aberration corrector for charged-particle beam system and correction method therefor
05/15/2012US8178849 Objective lens
05/15/2012CA2689094C Mass spectrometry method and apparatus
05/15/2012CA2689091C Mass spectrometry method and apparatus
05/15/2012CA2689084C Mass spectrometry method and apparatus
05/10/2012US20120115306 Deflector array, charged particle beam drawing apparatus, device manufacturing method, and deflector array manufacturing method
05/10/2012US20120112091 Method for adjusting status of particle beams for patterning a substrate and system using the same
05/10/2012US20120112090 Charged Particle Source with Integrated Electrostatic Energy Filter
05/10/2012US20120112089 Aperture unit for a particle beam device
05/10/2012US20120112042 Molded image sensor package and method
05/09/2012CN102449721A Device for generating plasma and for directing an flow of electrons towards a target
05/03/2012WO2012056322A1 Fast-switching dual-polarity ion mobility spectrometry
05/03/2012WO2012055458A1 Device for producing an electron beam
05/03/2012US20120104272 Charged particle gun and charged particle beam device
05/03/2012US20120104252 Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements
05/03/2012CA2816116A1 Fast-switching dual-polarity ion mobility spectrometry
05/02/2012EP2446456A1 Magnetically insulated cold-cathode electron gun
05/02/2012CN101263574B Non-heavy metal optical bandpass filter in electro-optical readers
05/01/2012US8168946 Charged particle separation apparatus and charged particle bombardment apparatus
05/01/2012US8168941 Ion beam angle calibration and emittance measurement system for ribbon beams
05/01/2012US8168938 Method of manufacturing an optical member having stacked high and low refractive index layers
05/01/2012US8168937 Optical head for reading an image of an object
04/2012
04/26/2012US20120097861 Deceleration apparatus for ribbon and spot beams
04/26/2012US20120097849 Ion beam stabilization
04/25/2012DE202012003487U1 Vorrichtung und System zum Reflektieren von Ionen An apparatus and system for reflecting ions
04/25/2012CN101438367B 用于发电系统预测控制的装置和方法 Apparatus and method for generating predictive control
04/24/2012US8164075 Treatment apparatuses and methods using proton
04/24/2012US8164070 Collimator magnet for ion implantation system
04/24/2012US8164068 Mask health monitor using a faraday probe
04/24/2012US8164042 Color filter arrays and image sensors using the same
04/19/2012US20120091360 Charged particle beam system having multiple user-selectable operating modes
04/19/2012US20120091359 Simplified particle emitter and method of operating thereof
04/19/2012US20120091318 Beamlet blanker arrangement
04/17/2012US8158940 Magnetic domain imaging system
04/12/2012US20120085920 Particle beam injector system and method
04/12/2012US20120085919 Apparatus and methods for pattern generation
04/12/2012US20120085918 Ion beam irradiation device and method for suppressing ion beam divergence
04/12/2012US20120085917 Inductively coupled plasma flood gun using an immersed low inductance fr coil and multicusp magnetic arrangement
04/11/2012EP1472703B1 Beam delivery system
04/10/2012US8153991 Direct write lithography system
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