| Patents for G03B 27 - Photographic printing apparatus (25,157) |
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| 03/29/2011 | US7916269 Lithographic apparatus and contamination removal or prevention method |
| 03/29/2011 | US7916268 Substrate carrying device, substrate carrying method, and exposure device |
| 03/29/2011 | US7916267 Lithographic apparatus, and motor cooling device |
| 03/24/2011 | WO2011034756A1 Limiting plate shifting within a plate pallet |
| 03/24/2011 | US20110069298 Support or table for lithographic apparatus, method of manufacturing such support or table and lithographic apparatus comprising such support or table |
| 03/24/2011 | US20110069297 Lithographic apparatus, coverplate and device manufacturing method |
| 03/24/2011 | US20110069296 Microlithographic exposure method as well as a projection exposure system for carrying out the method |
| 03/24/2011 | US20110069295 Optical system for microlithography |
| 03/24/2011 | US20110069294 Apparatus and method for exposing edge of substrate |
| 03/24/2011 | US20110069293 Actuator, positioning system and lithographic apparatus |
| 03/24/2011 | US20110069292 Metrology Method and Apparatus, Lithographic Apparatus, and Device Manufacturing Method |
| 03/24/2011 | US20110069291 Physical sensor for autofocus system |
| 03/24/2011 | US20110069290 Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
| 03/24/2011 | US20110069289 Lithographic apparatus, coverplate and device manufacturing method |
| 03/24/2011 | US20110069287 Device for producing a high-resolution reflection hologram |
| 03/22/2011 | US7911588 Exposure apparatus and original |
| 03/22/2011 | US7911586 Lithographic apparatus and device manufacturing method |
| 03/22/2011 | US7911585 Measurement apparatus, exposure apparatus, and device manufacturing method |
| 03/22/2011 | US7911584 Illumination system for microlithography |
| 03/22/2011 | US7911583 Exposure apparatus, exposure method, and method for producing device |
| 03/22/2011 | US7911582 Exposure apparatus and device manufacturing method |
| 03/17/2011 | US20110065052 Resist coating and developing apparatus and method |
| 03/17/2011 | US20110063727 Method and system with indicating marks for projection film |
| 03/17/2011 | US20110063601 Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame |
| 03/17/2011 | US20110063600 Film holder |
| 03/17/2011 | US20110063599 Film holder |
| 03/17/2011 | US20110063598 Illumination optics for euv microlithography and related system and apparatus |
| 03/17/2011 | US20110063597 Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method |
| 03/17/2011 | US20110063596 Projection objective and projection exposure apparatus with negative back focus of the entry pupil |
| 03/17/2011 | US20110063595 Optical aperture device |
| 03/17/2011 | US20110063594 Light source device and image forming apparatus |
| 03/17/2011 | US20110063593 Management apparatus, exposure method, and method of manufacturing device |
| 03/17/2011 | US20110063592 Fluorescent film, method of forming fluorescent film, multilayer dielectric film, optical element, optical system, imaging unit, optical property measuring apparatus, method of measuring optical property, exposure apparatus, exposure method, and method of manufacturing device |
| 03/17/2011 | US20110063591 Scanning exposure device and image-forming apparatus |
| 03/17/2011 | US20110063590 Optical element module |
| 03/17/2011 | US20110063589 Exposure apparatus and method for manufacturing device |
| 03/17/2011 | US20110063588 Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus |
| 03/16/2011 | EP2296041A2 Lithographic systems and methods with extended depth of focus |
| 03/16/2011 | CN1823301B An integrated, in-line bumping and exposure system |
| 03/16/2011 | CN101464619B Digital stereo puzzle projection imaging lighting equipment and its operation method |
| 03/16/2011 | CN101408717B Method and apparatus for implementing automatic top and bottom plate on exposure roller |
| 03/15/2011 | US7907256 Stage apparatus, exposure apparatus, and method for manufacturing device |
| 03/15/2011 | US7907255 Lithographic apparatus and device manufacturing method |
| 03/15/2011 | US7907254 Exposure apparatus, exposure method, and method for producing device |
| 03/15/2011 | US7907253 Exposure apparatus, exposure method, and method for producing device |
| 03/15/2011 | US7907251 Exposure apparatus and device manufacturing method |
| 03/15/2011 | US7907250 Immersion lithography method |
| 03/15/2011 | US7905668 Coating/developing apparatus and method |
| 03/10/2011 | US20110058151 Exposure apparatus and device manufacturing method |
| 03/10/2011 | US20110058150 Molecular transfer lithography apparatus and method for transferring patterned materials to a substrate |
| 03/10/2011 | US20110058149 Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
| 03/10/2011 | US20110058148 Lithographic apparatus and device manufacturing method |
| 03/10/2011 | US20110058147 Cleaning module and euv lithography device with cleaning module |
| 03/09/2011 | CN201757828U Air cavity separating structure of drum used for CTP |
| 03/08/2011 | US7903234 Lithographic apparatus, device manufacturing method and computer program product |
| 03/08/2011 | US7903233 Offset partial ring seal in immersion lithographic system |
| 03/08/2011 | US7903232 Lithographic apparatus and device manufacturing method |
| 03/08/2011 | US7901854 Wafer edge exposure unit |
| 03/03/2011 | WO2011026005A2 Projection and display system |
| 03/03/2011 | US20110053092 Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method |
| 03/03/2011 | US20110053062 Exposure method, exposure apparatus, and device manufacturing method |
| 03/03/2011 | US20110053061 Exposure apparatus, exposure method, and device manufacturing method |
| 03/03/2011 | US20110053060 Exposure device, exposure method, and method for manufacturing semiconductor device |
| 03/03/2011 | US20110051116 Substrate Matrix To Decouple Tool And Process Effects |
| 03/03/2011 | US20110051115 Substrate Holding Apparatus, Mask Alignment Method, and Vacuum Processing Apparatus |
| 03/03/2011 | US20110051114 Optimized polarization illumination |
| 03/03/2011 | US20110051113 Lithography system and optical module thereof |
| 03/03/2011 | US20110051112 Exposure apparatus, exposure method, and method for producing device |
| 03/03/2011 | US20110051111 Position detection apparatus, exposure apparatus, and device fabrication method |
| 03/03/2011 | US20110051110 Lens comprising a plurality of optical element disposed in a housing |
| 03/03/2011 | US20110051109 Measurement apparatus, exposure apparatus, and device manufacturing method |
| 03/03/2011 | US20110051108 Exposure method, exposure apparatus, and device manufacturing method |
| 03/03/2011 | US20110051107 Lithographic apparatus and device manufacturing method |
| 03/03/2011 | US20110051106 Exposure apparatus and device manufacturing method |
| 03/03/2011 | US20110051105 Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
| 03/03/2011 | US20110051104 Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
| 03/02/2011 | CN101539718B Color image printer and gradation correcting method therefor |
| 03/01/2011 | US7899264 Method of determining a measure of edge strength and focus |
| 03/01/2011 | US7898646 Using an interferometer as a high speed variable attenuator |
| 03/01/2011 | US7898645 Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method |
| 03/01/2011 | US7898644 Lithographic apparatus and device manufacturing method |
| 03/01/2011 | US7898643 Immersion photolithography system and method using inverted wafer-projection optics interface |
| 03/01/2011 | US7898642 Lithographic apparatus and device manufacturing method |
| 03/01/2011 | US7897942 Dynamic tracking of wafer motion and distortion during lithography |
| 03/01/2011 | US7897941 Lithographic apparatus, device manufacturing method, and use of a radiation collector |
| 03/01/2011 | US7896562 Developing method, developing apparatus and storage medium |
| 02/24/2011 | US20110045613 Method of manufacturing semiconductor device and exposure device |
| 02/24/2011 | US20110045409 Method and system for manufacturing a surface using character projection lithography with variable magnification |
| 02/24/2011 | US20110044425 Spectral purity filters for use in a lithographic apparatus |
| 02/24/2011 | US20110043911 Method of producing a patterned birefringent product |
| 02/24/2011 | US20110043784 Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method |
| 02/24/2011 | US20110043783 Illumination optical system, exposure method and designing method |
| 02/24/2011 | US20110043782 Spectral purity filters for use in a lithographic apparatus |
| 02/24/2011 | US20110043781 Projection optical device and exposure apparatus |
| 02/24/2011 | US20110043780 Lithographic apparatus and device manufacturing method |
| 02/24/2011 | US20110043778 Lithographic Apparatus and Device Manufacturing Method Utilizing Data Filtering |
| 02/24/2011 | US20110043777 Target material, a source, an euv lithographic apparatus and a device manufacturing method using the same |
| 02/24/2011 | US20110043776 Exposure control apparatus, manufacturing method of semiconductor device, and exposure apparatus |
| 02/24/2011 | US20110043775 Lithographic apparatus, distortion determining method, and patterning device |
| 02/24/2011 | US20110043774 Cleaning module, euv lithography device and method for the cleaning thereof |