Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
12/2007
12/21/2007WO2007055876A3 Multi-mode sampling probes
12/20/2007US20070291279 Methods and apparatus for aligning an etalon with a photodiode array
12/20/2007US20070291278 Optical lens system and position measurement system using the same
12/20/2007US20070291277 Spectral domain optical coherence tomography system
12/20/2007US20070291275 Side-viewing optical acoustic sensors and their use in intravascular diagnostic probes
12/20/2007US20070291274 Interferometric Measuring System
12/20/2007US20070291272 Pointing device
12/20/2007DE102006028409A1 Scanning microscope e.g. confocal scanning microscope, for use in micro-system technology, has signal detector arranged in optical path such that radiation is formed on detector, where focusing device is connected with scanner control unit
12/20/2007DE102006024984A1 Detector device for e.g. qualitative or quantitative position measurement of inertia system in space travel area, has partial beams repeatedly guided by media before partial beams are merged in beam splitter
12/19/2007EP1866690A1 Apparatus and method for optically combining at least three light beams
12/19/2007EP1725832B1 Interferometric measuring arrangement
12/19/2007CN101091100A Miniature fourier transform spectrophotometer
12/18/2007US7310153 Using position-sensitive detectors for wavelength determination
12/18/2007US7310152 Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies
12/18/2007US7310151 Interferometric optical apparatus and method using wavefront division
12/18/2007US7310150 Apparatus and method for low coherence ranging
12/18/2007US7309863 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
12/18/2007CA2500045C Hydrophone mandrel for precise placement of gratings
12/13/2007WO2007071944A9 Apparatus for and a method of determining surface characteristics
12/13/2007WO2006088822A3 Laser radar system and system and method for providing chirped electromagnetic radiation
12/13/2007US20070288121 Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
12/13/2007US20070285671 Measurement method and apparatus, exposure apparatus, and device manufacturing method
12/13/2007US20070285670 Method and apparatus for detecting defect on a surface of a specimen
12/13/2007US20070285669 Polarization insensitive multiple probe
12/13/2007US20070285667 Holographic Sensor Having Heterogeneous Properties
12/13/2007US20070285643 Method For Manufacturing Reflective Optical Element, Reflective Optical Elements, Euv-Lithography Apparatus And Methods For Operating Optical Elements And Euv-Lithography Apparatus, Methods For Determining The Phase Shift, Methods For Determining The Layer Thickness, And Apparatuses For Carrying Out The Methods
12/13/2007DE10050802B4 Halterungsvorrichtung für einen beweglichen Spiegel für Photo-Interferometer Holding device for a movable mirror for photo interferometers
12/12/2007EP1864079A1 Method of manufacturing an optical element
12/12/2007EP1864078A2 Confocal fiber-optic laser device and method for intraocular lens power measurement
12/12/2007CN101087991A Three-dimensional shape measuring instrument
12/12/2007CN101087989A Embeddable polarimetric fiber optic sensor and method for monitoring of structures
12/12/2007CN100354599C Common-path frequency-scanning interferometer
12/11/2007US7308162 Intrinsic Fabry-Perot optical fiber sensors and their multiplexing
12/11/2007US7307734 Interferometric sensor for characterizing materials
12/11/2007US7307733 Optical image measuring apparatus and optical image measuring method
12/11/2007US7307732 Photonic crystal interferometer
12/11/2007US7307708 Eccentricity measuring method and eccentricity measuring apparatus
12/11/2007US7307707 Method and system for measuring the imaging quality of an optical imaging system
12/11/2007US7307706 Optical testing method and apparatus
12/11/2007US7307705 Method and apparatus for compact dispersive imaging spectrometer
12/11/2007US7306341 Multi-projector geometric calibration
12/06/2007WO2007140356A2 Polarization insensitive multiple probe
12/06/2007US20070279738 Single-Pole Optical Wavelength Selector
12/06/2007US20070279645 Method for measuring a thickness of a coating
12/06/2007US20070279642 System and method for printing interference patterns having a pitch in a lithography system
12/06/2007US20070279640 Improved Displacement Sensor
12/06/2007US20070279637 Apparatus for reducing wavefront errors in output beams of acousto-optic devices
12/06/2007US20070279636 All-fiber spectroscopic optical sensor
12/06/2007US20070279619 Device and method for testing lens modules
12/06/2007DE19738328B4 Interferometrische Vorrichtung zur Messung von Bewegungen eines Objektträgers relativ zu festen Reflektoren The interferometric device for measuring movements of a slide relative to fixed reflectors
12/06/2007DE102006031822B3 Optical interference pattern intensity distribution electronic scanning method, involves inferring incident beam running in direction of adjacent diffraction array by optical grid and another incident beam, which is not influenced by grid
12/05/2007EP1862759A1 Multiwavelength interference reflection microscopy
12/05/2007CN200986441Y Dual-grating displacement sensor
12/05/2007CN101083219A Confirming method for cricoid reinforcement formed on peripheral wafer and confirming device
12/04/2007US7305158 Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
12/04/2007US7305153 Multi wavelength sensor array
12/04/2007US7304815 Laser system
12/04/2007US7304798 Spectroscopic apparatus
12/04/2007US7304749 Point diffraction interferometer and exposure apparatus and method using the same
12/04/2007US7304748 Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
12/04/2007US7304747 Methods and systems for determining optical properties using low-coherence interference signals
12/04/2007US7304746 Common-path point-diffraction phase-shifting interferometer
12/04/2007US7304745 Phase measuring method and apparatus for multi-frequency interferometry
12/04/2007US7304744 Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light
11/2007
11/29/2007WO2007137261A2 Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool
11/29/2007WO2007136681A2 Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system
11/29/2007WO2007109394A3 Integrated multi-wavelength fabry-perot filter and method of fabrication
11/29/2007WO2006023489A3 Cyclic error compensation in interferometry systems
11/29/2007US20070273888 Variable spectroscopy device, spectroscopy apparatus, and endoscope system
11/29/2007US20070273887 Airway adaptor with optical pressure transducer and method of manufacturing a sensor component
11/29/2007US20070273870 Method and a device for measuring the power of an ophthalmic lens by combined feeling and contactless overall measurement
11/29/2007US20070273869 Sensor for Lithographic Apparatus and Method of Obtaining Measurements of Lithographic Apparatus
11/29/2007US20070273863 Ultra-linear signal processing for radar and laser radar
11/29/2007US20070272861 Interferometer
11/29/2007US20070272839 Backlight wedge with encapsulated light source
11/28/2007EP1860396A1 Homodyne laser interferometer probe and displacement measurement system using the same
11/28/2007EP1858403A1 Low coherence interferometry for detecting and characterizing plaques
11/28/2007CN200982854Y Digital electronic shearing speckle interferometer
11/28/2007CN200981254Y Laser lamp for water tank cutting machine
11/27/2007US7301646 Device and method for the determination of imaging errors and microlithography projection exposure system
11/27/2007US7301644 Enhanced optical coherence tomography for anatomical mapping
11/27/2007US7301643 Arrangement for building a miniaturized fourier transform interferometer for optical radiation according to the michelson principle or a principle derived therefrom
11/27/2007US7301615 Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method
11/27/2007US7301614 Lens-refracting characteristic measuring apparatus
11/27/2007US7301610 Gas velocity sensor
11/27/2007US7301604 Method to predict and identify defocus wafers
11/22/2007WO2007131662A1 Method and apparatus for locating a plug within the well
11/22/2007WO2007100935A3 Systems, arrangement and process for providing speckle reductions using a wave front modulation for optical coherence tomography
11/22/2007US20070268493 Optical apparatus for capturing spectral image
11/22/2007DE19719462B4 Verfahren und Vorrichtung zur Kontrastanhebung in der optischen Kohärenztomographie Method and apparatus for contrast enhancement in optical coherence tomography
11/22/2007CA2657629A1 Method and apparatus for locating a plug within the well
11/22/2007CA2651799A1 Systems, methods, and apparatuses of low-coherence enhanced backscattering spectroscopy
11/21/2007EP1857772A1 Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer
11/21/2007EP0943112B1 Spherical-aberration detection system and optical device using the same
11/21/2007CN200979404Y An interferometer
11/21/2007CN101076705A Methods and apparatus for wavefront manipulations and improved three-dimension measurements
11/21/2007CN101074866A Method for reinforcing measurement precision of substrate structure coordinate
11/20/2007US7298532 Single beam write and/or replay of spatial heterodyne holograms
11/20/2007US7298498 Optical property measuring apparatus and optical property measuring method, exposure apparatus and exposure method, and device manufacturing method
11/20/2007US7298497 Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
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