Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
05/2008
05/15/2008US20080111980 Exposure apparatus equipped with interferometer and exposure apparatus using the same
05/14/2008EP1920227A1 Device and method for the interferometric measurement of phase masks
05/14/2008CN101178464A Microlens optical fibre Fabry-perot interferometer
05/13/2008US7372579 Apparatus and method for monitoring trench profiles and for spectrometrologic analysis
05/13/2008US7372577 Monolithic, spatially-separated, common path interferometer
05/13/2008US7372576 System and method for generating beams of light using an anisotropic acousto-optic modulator
05/13/2008US7372575 Optical tomographic apparatus
05/13/2008US7372573 Multigas monitoring and detection system
05/13/2008CA2414257C Multichannel interferometer with phase generated carrier demodulation and quadrature error correction
05/08/2008WO2008054346A2 Improved spectral metrology for high repetition rate gas discharge laser
05/08/2008WO2008052311A1 Optical imaging apparatus with spectral detector
05/08/2008WO2008035389A3 Phase-sensitive low-coherence interferometry apparatus
05/08/2008US20080106745 Method and apparatus for high frequency optical sensor interrogation
05/08/2008DE19723448B4 Verfahren und Vorrichtung zur Kompensation des Datenalters in einem Interferometer Method and apparatus for compensating data age in an interferometer of the
05/07/2008EP1918756A1 Operation microscope with OCT system and operation microscope illumination module with OCT system
05/07/2008EP1918755A1 Ophthalmic operation microscope with OCT system
05/07/2008EP1918754A1 Operation microscope with OCT system
05/07/2008EP1918753A1 Operation microscope with OCT system
05/07/2008EP1918673A1 Method and equipment for measuring displacement, stage equipment and probe microscope
05/07/2008EP1704386A4 Method and system for optically tracking a target using an interferometric technique
05/06/2008US7369255 Apparatus and method for capacitive measurement of materials
05/06/2008US7369253 Systems and methods for measuring sample surface flatness of continuously moving samples
05/06/2008US7369252 Process control monitors for interferometric modulators
05/06/2008US7369251 Full-field optical measurements of surface properties of panels, substrates and wafers
05/06/2008US7369250 System and method to inspect components having non-parallel surfaces
05/06/2008US7369249 Apparatus for measuring differential mode delay of multimode optical fiber
05/06/2008US7369248 Device for measuring an optical path length difference
05/02/2008WO2008051587A2 Low coherence interferometry utilizing phase
05/02/2008WO2008051237A1 Compensation of effects of atmospheric perturbations in optical metrology
05/02/2008WO2007149925A3 Fiber optic sensor usable over wide range of gage lengths
05/01/2008US20080100849 Optical encoder with diffractive encoder member
05/01/2008US20080100848 Optical tomograph
05/01/2008US20080100847 Heterodyne Photonic Dispersion and Loss Analyzer
05/01/2008US20080100846 Systems and methods for all-optical signal regeneration based on free space optics
05/01/2008US20080100837 Apparatus and method for ranging and noise reduction of low coherence interferometry lci and optical coherence tomography oct signals by parallel detection of spectral bands
05/01/2008US20080100827 Full-band optical spectrum analyzer and method
05/01/2008US20080099677 Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same
04/2008
04/29/2008US7365861 Method and apparatus for determining telecentricity and microlithography projection exposure apparatus
04/29/2008US7365858 Systems and methods for phase measurements
04/29/2008US7365856 Method of motion correction in optical coherence tomography imaging
04/29/2008US7365855 Optical sensing devices with SPR sensors based on differential phase interrogation and measuring method using the same
04/29/2008US7364296 Method and apparatus for improving both lateral and axial resolution in ophthalmoscopy
04/29/2008CA2297368C In vitro evaluation of animal or human lens characteristics
04/24/2008WO2008048402A2 Apparatus for caries detection
04/24/2008US20080097709 Apparatus and method for rangings and noise reduction of low coherence interferometry lci and optical coherence tomography oct signals by parallel detection of spectral bands
04/24/2008US20080094637 Apparatus and method for ranging and noise reduction of low coherence interferometry lci and optical coherence tomography oct signals by parallel detection of spectral bands
04/24/2008US20080094635 Interrogation Of A Sensor
04/24/2008US20080094634 Phase Determination System and Method
04/24/2008US20080094633 Enhanced Detection of Acousto-Photonic Emissions in Optically Turbid Media Using a Photo-Refractive Crystal-Based Detection System
04/24/2008US20080094630 Apparatus and methods for detecting overlay errors using scatterometry
04/24/2008US20080094594 Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
04/23/2008EP1914530A1 Exposure apparatus mounted with measuring apparatus
04/23/2008EP1913364A2 Optical coherence imaging systems having a reduced effective linewidth and methods of using the same
04/23/2008EP1913332A2 Apparatus, methods and storage medium for performing polarization-based quadrature demodulation in optical coherence tomography
04/23/2008EP1913331A1 Tomographic imaging by an interferometric immersion microscope
04/23/2008CN201050979Y Novel omnipotent tool display
04/23/2008CN201050978Y Precise distribution device for surface shape of white light interferometry sample
04/23/2008CN101166947A Laser radar system and system and method for providing chirped electromagnetic radiation
04/23/2008CN101166946A Michelson interferometer based delay line interferometers
04/23/2008CN101165454A Interferometer angle sensitivity correction method
04/22/2008US7362449 Digital holographic microscope for 3D imaging and process using it
04/22/2008US7362445 Active control and detection of two nearly orthogonal polarizations in a fiber for heterodyne interferometry
04/22/2008US7362444 Interferometers for optical coherence domain reflectometry
04/22/2008US7362424 Compositions and methods for drop boundary detection and radiation beam alignment
04/17/2008WO2008045851A1 Forward-looking, optical coherence tomography endoscope
04/17/2008WO2008044539A1 Optical interference image diagnosing apparatus, and its processing method
04/17/2008US20080088956 Alignment system and method
04/17/2008US20080088849 Interferometry for determining characteristics of an object surface, with spatially coherent illumination
04/17/2008DE102006048317A1 Optical fiber sensor for optical measuring device i.e. interferometric measuring device, has optical fiber modularly provided with mechanically stabilizing coating in area of fiber end piece and/or in area of mechanical receiver
04/17/2008DE102006048316A1 Optical fiber probe for interferometric measuring instrument, has reflection zone arranged in fiber for partial reflection of light rays guided in fiber, where reflection zone is arranged in fiber end piece
04/17/2008DE10019059B4 Verfahren und Vorrichtung zur Messung von Profilabweichungen Method and apparatus for the measurement of profile deviations
04/16/2008EP1910678A2 Reciprocating pump with electronically monitored air valve having battery and solenoid electronic monitoring
04/16/2008CN201047756Y Image measuring apparatus
04/16/2008CN201047753Y Automatic mapping system based on optical continuous focal-length changeable microscope digital image-forming
04/15/2008US7359067 Optical displacement sensor comprising a wavelength-tunable optical source
04/15/2008US7359066 Electro-optical measurement of hysteresis in interferometric modulators
04/15/2008US7359064 Quantum positioning systems and methods
04/15/2008US7359063 Heterodyne array detector
04/15/2008US7359062 High speed spectral domain functional optical coherence tomography and optical doppler tomography for in vivo blood flow dynamics and tissue structure
04/15/2008US7359061 Method and apparatus for providing polarization insensitive signal processing for interferometric sensors
04/15/2008US7359060 Multi-mode sampling probes
04/15/2008US7359058 Miniature fourier transform spectrophotometer
04/15/2008US7359057 Method and apparatus for measuring small shifts in optical wavelengths
04/15/2008US7358516 System and method for determining a position or/and orientation of two objects relative to each other as well as beam guiding arrangement, interferometer arrangement and device for changing an optical path length for use in such a system and method
04/10/2008WO2008042908A2 Systems and methods for comparative interferogram spectrometry
04/10/2008WO2007140356A3 Polarization insensitive multiple probe
04/10/2008US20080084567 System for Scatterometric Measurements and Applications
04/10/2008US20080084565 Interferometer-based real time early fouling detection system and method
04/10/2008US20080084564 Systems and methods for comparative interferogram spectrometry
04/10/2008DE102005047162B4 Interferometersysteme zur Messung von Verlagerungen und diese Systeme benutzende Belichtungssysteme Interferometer for measuring displacements and these systems-use imaging systems
04/09/2008EP1909119A1 Reflective member, optical member, interferometer system, stage device, exposure device, and device manufacturing method
04/09/2008EP1907806A2 Reciprocating pump with electronically monitored air valve and piston
04/09/2008EP1907788A2 Methods and systems for ultra-precise measurement and control of object motion in six degrees of freedom by projection and measurement of interference fringes
04/09/2008EP1907036A2 Focused droplet nebulizer for evaporative light scattering detector
04/09/2008EP1695027A4 System and method for optical navigation using a projected fringe technique
04/08/2008US7355723 Apparatus comprising a high-signal-to-noise displacement sensor and method therefore
04/08/2008US7355721 Optical coherence tomography imaging
04/08/2008US7355719 Interferometer for measuring perpendicular translations
04/08/2008US7355718 Pressure sensor having two materials with different coefficients of thermal expansion configured to reduce temperature dependence
04/08/2008US7355716 Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
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