Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
05/2011
05/05/2011WO2010119792A9 Substrate, substrate provided with thin film, semiconductor device, and method for manufacturing semiconductor device
05/05/2011US20110104906 Method of growing oxide thin films
05/05/2011US20110100291 Plant and method for large-scale ammonothermal manufacturing of gallium nitride boules
05/04/2011EP2316989A2 Non-polar (Al, B, In, Ga) quantum well and heterostructure materials and devices
05/04/2011CN1649181B Self-supported nitride semiconductor substrate and its production method, and light-emitting nitride semiconductor device using it
05/04/2011CN102046856A Methods and apparatus for deposition reactors
05/04/2011CN102041554A Method for producing N-doped SiC nanowires with field emission properties
05/04/2011CN102041552A Method for preparing polysilicon membrane
05/04/2011CN102041551A Base material for growing single crystal diamond and method for producing single crystal diamond substrate
05/04/2011CN102041476A Method for preparing cobalt titanate film by dual-target magnetron sputtering method
05/04/2011CN101387008B Carbon nanotube growing apparatus
05/04/2011CN101094732B Deposition of silicon-containing films from hexachlorodisilane
05/03/2011US7935617 Method to stabilize carbon in Si1-x-yGexCy layers
05/03/2011US7935615 III-V nitride semiconductor substrate and its production method
04/2011
04/28/2011US20110097876 Chemical vapor deposition reactor having multiple inlets
04/28/2011US20110095291 Lateral Growth Semiconductor Method and Devices
04/28/2011US20110094668 Substrate with determinate thermal expansion coefficient
04/28/2011US20110094438 Laminated body and the method for production thereof
04/27/2011EP2313543A2 Growth of planar non-polar {1-1 0 0} m-plane and semi-polar {1 1-2 2} gallium nitride with hydride vapor phase epitaxy (hvpe)
04/27/2011CN102037165A Method for producing nanostructures on metal oxide substrate, and thin film device
04/27/2011CN102031561A Base material for growing single crystal diamond and method for producing single crystal diamond substrate
04/27/2011CN102031560A Method for preparing large-size GaN self-support substrate
04/27/2011CN102031498A Substrate support seat for III-V group thin film growth reaction chamber, reaction chamber thereof and process treatment method
04/27/2011CN101445960B Method for preparing adulteration monocrystalline zinc oxide nanometer brush by vapour deposition and device thereof
04/27/2011CN101063233B Equipment for growth of horizontal chromium doped semi-insulation gallium arsenide
04/26/2011US7932107 Method for growing nitride semiconductor
04/26/2011US7931748 Systems and methods for the production of highly tetrahedral amorphous carbon coatings
04/21/2011WO2011047182A1 High growth rate deposition for group iii/v materials
04/21/2011WO2010101715A9 Gas injectors for cvd systems with the same
04/21/2011US20110089433 Method for manufacturing nitrogen compound semiconductor substrate and nitrogen compound semiconductor substrate, and method for manufacturing single crystal sic substrate and single crystal sic substrate
04/21/2011US20110089431 Compound single crystal and method for producing the same
04/21/2011CA2777544A1 High growth rate deposition for group iii/v materials
04/20/2011EP2312616A1 Film deposition method
04/20/2011EP2312023A2 Compound single crystal and method for producing the same
04/20/2011EP2311076A2 Rapid thermal processing chamber with shower head
04/20/2011EP2310553A1 Atomic layer deposition apparatus and loading methods
04/20/2011EP1957689B1 High crystalline quality synthetic diamond
04/20/2011CN201801636U Novel silicon chip production extension equipment and system comprising same
04/20/2011CN1777696B Methods and apparatus for atomic layer deposition
04/20/2011CN102021649A Chemical vapor deposition method for preparing diamond single crystal by adding N2O gas
04/19/2011US7927571 Method and device for producing high purity polycrystalline silicon with a reduced dopant content
04/14/2011WO2011044412A1 Multi-rotation epitaxial growth apparatus and reactors incorporating same
04/14/2011US20110083602 Multi-Rotation Epitaxial Growth Apparatus and Reactors Incorporating Same
04/14/2011US20110083601 High growth rate deposition for group iii/v materials
04/13/2011CN102016118A Apparatus and methods for deposition reactors
04/13/2011CN102011182A Method for manufacturing lattice graded buffer layer
04/13/2011CN102011103A Chemisorption method for preparing carbon nitride film
04/12/2011US7922821 Source, an arrangement for installing a source, and a method for installing and removing a source
04/07/2011WO2011041765A1 High temperature superconducting materials and methods for modifying and creating same
04/07/2011US20110079793 Semiconductor substrate and its manufacturing method
04/06/2011EP2305859A1 III-V Nitride substrate boule and method of making and using the same
04/05/2011US7919831 Nitride semiconductor device having oxygen-doped N-type gallium nitride freestanding single crystal substrate
04/05/2011US7918937 Method of producing silicon carbide epitaxial layer
03/2011
03/31/2011WO2011016828A3 Large area deposition of graphene hetero-epitaxial growth, and products including the same
03/31/2011US20110073874 Method of reducing memory effects in semiconductor epitaxy
03/31/2011US20110073184 Method for manufacturing monocrystalline thin film and monocrystalline thin film device manufactured thereby
03/31/2011DE102009055667A1 Method for the production of a disc comprising gallium nitride, comprises providing a substrate from monocrystalline silicon with a superficial layer of monocrystalline 3C-silicon carbide
03/31/2011DE102009042349A1 Semipolare wurtzitische Gruppe-III-Nitrid basierte Halbleiterschichten und darauf basierende Halbleiterbauelemente Semi-polar wurtzite-type group III nitride based semiconductor layers that form the basis semiconductor devices
03/30/2011EP2302110A1 Method of manufacturing a si(1-v-w-x)cwalxnv substrate, method of manufacturing an epitaxial wafer, si(1-v-w-x)cwalxnv substrate, and epitaxial wafer
03/30/2011EP2302108A1 Nanostructures and methods for manufacturing the same
03/30/2011EP2300643A1 Diamond material
03/30/2011EP1784529B1 Manufacture of cadmium mercury telluride on patterned silicon
03/30/2011EP1745165B1 Method for producing virtual ge substrates for iii/v-integration on si(001)
03/30/2011CN101509145B Method for growing nonpolar a face GaN film on lithium aluminate substrate
03/29/2011US7915698 Nitride semiconductor substrate having a base substrate with parallel trenches
03/29/2011US7915152 III-V nitride substrate boule and method of making and using the same
03/29/2011US7915151 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices
03/24/2011US20110067625 Crystal growth method and apparatus
03/23/2011EP2298968A2 Method for growing nanowires
03/23/2011EP2297383A1 Microwave-assisted synthesis of carbon and carbon-metal composites from lignin, tannin and asphalt derivatives
03/23/2011EP2021532B1 Source container of a vpe reactor
03/23/2011EP1533402B1 Epitaxial wafer and its manufacturing method
03/23/2011CN201770800U Bearing platform for production of epitaxial wafers
03/23/2011CN101368289B Deposition boiler tube
03/23/2011CN101290877B Preparing method of polycrystalline silicon thin film
03/23/2011CN101192520B Semiconductor device and manufacture method thereof
03/23/2011CN101008080B Film-forming device
03/22/2011US7911035 Directionally controlled growth of nanowhiskers
03/22/2011US7911009 Nanosensors
03/22/2011US7910765 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride
03/22/2011US7910462 Growing [110] silicon on [001] oriented substrate with rare-earth oxide buffer film
03/22/2011US7910083 Coloured diamond
03/22/2011CA2469789C Coloured diamond
03/17/2011US20110064103 Semipolar nitride-based devices on partially or fully relaxed alloys with misfit dislocations at the heterointerface
03/16/2011EP2296169A1 Method for manufacturing nitrogen compound semiconductor substrate, nitrogen compound semiconductor substrate, method for manufacturing single crystal sic substrate, and single crystal sic substrate
03/16/2011EP2294608A2 Modular and readily configurable reactor enclosures and associated function modules
03/16/2011EP2294245A1 Arrangement in connection with ald reactor
03/16/2011EP2294005A2 Skull reactor
03/16/2011CN101985774A Method for synthesizing single crystal nano wire array
03/16/2011CN101985744A Method for preparing monocrystalline cubic carbon nitride thin film
03/16/2011CN101498036B Controllable pressure pen ejecting apparatus possessing automatic alarming function for epitaxial production
03/15/2011US7906411 Deposition technique for producing high quality compound semiconductor materials
03/10/2011WO2011027580A1 Group-iii nitride crystal substrate, group-iii nitride crystal substrate with epitaxial layer, semiconductor device, and method for manufacturing same
03/10/2011US20110057197 GaN SINGLE CRYSTAL SUBSTRATE AND METHOD OF MANUFACTURING THEREOF AND GaN-BASED SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF
03/10/2011US20110056429 Rapid Growth Method and Structures for Gallium and Nitrogen Containing Ultra-Thin Epitaxial Structures for Devices
03/09/2011EP2291552A2 Direct silicon or reactive metal casting
03/09/2011EP1651802B1 Support system for treatment apparatuses
03/08/2011US7902546 Rare earth-oxides, rare earth -nitrides, rare earth -phosphides and ternary alloys with silicon
03/03/2011WO2011025715A1 Doped transparent conductive oxide
03/03/2011WO2011024854A1 Silicon carbide epitaxial wafer and manufacturing method therefor
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