Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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06/23/1982 | EP0054189A1 Improved photochemical vapor deposition method |
06/22/1982 | US4336304 Chemical vapor deposition of sialon |
06/22/1982 | US4336280 Method for continuous production of niobium-germanium layers on a substrate |
06/15/1982 | US4335160 Chemical process |
06/15/1982 | CA1125896A1 Amorphous semiconductors equivalent to crystalline semiconductors |
06/15/1982 | CA1125700A1 Vacuum deposition method |
06/09/1982 | EP0053150A1 Method for manufacturing a thin layer with orientated structure, device for implementing such method and products obtained thereby |
06/08/1982 | US4333989 Sapphire single crystal substrate consisting essentially of Ga2 O.sub.3 |
06/08/1982 | CA1125028A1 Method of obtaining polycrystalline silicon and workpiece useful therein |
06/02/1982 | EP0052979A1 Improvements in the manufacture of group IIIB-VB compounds |
06/01/1982 | US4332751 Vapor deposition on a substrate, coating with a polymeric resin and thermally shrinking the resin |
05/25/1982 | US4331737 Oxynitride film and its manufacturing method |
05/25/1982 | US4331698 Method for making a very pure silicon |
05/25/1982 | US4331462 Optical fiber fabrication by a plasma generator |
05/19/1982 | EP0051677A1 Process and apparatus for chemical vapor deposition of films on silicon wafers |
05/19/1982 | EP0051628A1 High pressure plasma deposition of silicon |
05/18/1982 | US4330570 Selective photoinduced condensation technique for producing semiconducting compounds |
05/18/1982 | US4330182 Method of forming semiconducting materials and barriers |
05/12/1982 | EP0051449A1 Method of manufacturing amorphous silicon films |
05/11/1982 | US4329418 Organometallic semiconductor devices |
05/11/1982 | US4329379 Vapor deposition, floating |
05/11/1982 | US4328646 Method for preparing an abrasive coating |
05/05/1982 | EP0050815A1 Apparatus for emptying a fluidised-bed oven for coating cores of combustible or breeder material |
05/04/1982 | US4328261 Metallizing semiconductor devices |
05/04/1982 | US4328258 Method of forming semiconducting materials and barriers |
04/29/1982 | WO1982001441A1 Thin silicon film and process for preparing same |
04/20/1982 | US4325987 Process for the production of an electrically conducting article |
04/14/1982 | EP0049380A1 Apparatus for a plasma-enhanced chemical deposition |
04/13/1982 | US4324854 Deposition of metal films and clusters by reactions of compounds with low energy electrons on surfaces |
04/13/1982 | CA1121666A1 Tin oxide coatings |
04/07/1982 | EP0049032A1 Coating insulating materials by glow discharge |
04/07/1982 | EP0048742A1 Vapor delivery control system and method |
03/31/1982 | EP0048542A2 Coating infra red transparent semiconductor material |
03/30/1982 | US4322149 Electric driving device of a camera |
03/30/1982 | CA1120887A1 Method for producing uniform parallel alignment in liquid crystal cells |
03/23/1982 | US4321073 Method and apparatus for forming metal coating on glass fiber |
03/23/1982 | US4320716 Ultra-high frequency device for depositing thin films on solids |
03/17/1982 | EP0047688A1 Method for the opalisation of lamps in a gaseous way |
03/10/1982 | EP0047112A2 Method of forming phosphosilicate glass films |
03/09/1982 | US4318767 Apparatus for the treatment of semiconductor wafers by plasma reaction |
03/02/1982 | US4317844 Semiconductor device having a body of amorphous silicon and method of making the same |
02/23/1982 | US4316430 Vapor phase deposition apparatus |
02/17/1982 | EP0046059A2 Method of plasma enhanced chemical vapour deposition of films |
02/16/1982 | US4315968 Silicon coated silicon carbide filaments and method |
02/09/1982 | US4314837 Oxidation |
02/09/1982 | US4314525 Fluidized bed silicon deposition from silane |
02/03/1982 | EP0045291A1 Method of making a coated cemented carbide body and body produced in such a manner |
02/02/1982 | US4313783 Computer controlled system for processing semiconductor wafers |
01/27/1982 | EP0044526A1 Process for making a glass coating on the internal surface of a hollow object |
01/26/1982 | US4312924 Super hard highly pure silicon nitrides |
01/26/1982 | US4312923 Super hard-highly pure silicon nitrides, and a process and apparatus for producing the same |
01/26/1982 | US4312921 Hexagonal crystal structure, high density, high strength |
01/26/1982 | US4312294 Apparatus for thermal treatment of semiconductors |
01/19/1982 | US4311545 Method for the deposition of pure semiconductor material |
01/13/1982 | EP0043789A2 Method for the chemical-discharge treatment of sensitive workpieces by means of a glow discharge |
01/12/1982 | US4310567 High speed stream of gas containing an organometallic compound, a metal halide and a reactive gas |
01/12/1982 | US4310474 Method and apparatus for generating a vapor stream |
01/12/1982 | US4309961 Apparatus for thermal treatment of semiconductors |
01/05/1982 | US4309240 Process for chemical vapor deposition of films on silicon wafers |
12/30/1981 | EP0042773A1 Method of manufacturing a silicon-containing layer and its application to photoelectric conversion devices |
12/24/1981 | WO1981003669A1 Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby |
12/16/1981 | EP0041773A1 Solar cell production |
12/09/1981 | EP0041259A1 Fluidised furnace and process for emptying it |
12/08/1981 | CA1113686A1 Method of manufacturing silicium for photovoltaic conversion |
12/02/1981 | EP0040939A1 Manufacture of cadmium mercury telluride |
11/26/1981 | WO1981003348A1 Process and apparatus for chemical vapor deposition of films on silicon wafers |
11/25/1981 | EP0040540A2 Chemical vapor delivery system and method for controlling the flow of vapor in a chemical vapor delivery system |
11/12/1981 | WO1981003133A1 High pressure plasma deposition of silicon |
11/11/1981 | EP0039417A1 Process for producing silicon |
11/04/1981 | EP0038982A2 Optical fiber fabrication |
11/03/1981 | US4297971 Apparatus for vaporizing solid coating reactants |
10/27/1981 | US4297150 Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity |
10/20/1981 | US4295870 Interior of glass tubes by vapor deposition |
10/15/1981 | WO1981002848A1 Vapor delivery control system and method |
10/13/1981 | US4294871 Vapor deposition |
10/13/1981 | US4294868 Process for continuously depositing a layer of a solid material on the surface of a substrate heated to a high temperature |
10/13/1981 | US4294193 Apparatus for vapor coating a moving glass substrate |
10/06/1981 | US4293755 Method of cooling induction-heated vapor deposition apparatus and cooling apparatus therefor |
10/06/1981 | US4293594 Method for forming conductive, transparent coating on a substrate |
10/06/1981 | US4293326 Glass coating |
09/30/1981 | EP0036780A2 Method of producing photoelectric transducers |
09/30/1981 | EP0036721A1 Fluidising fine powder |
09/29/1981 | US4292374 Sapphire single crystal substrate for semiconductor devices |
09/29/1981 | US4292373 Layer having a more homogeneous crystal structure with that of dielectric; stress releiving |
09/29/1981 | US4292343 Method of manufacturing semiconductor bodies composed of amorphous silicon |
09/29/1981 | US4292342 Using the interior walls of a heated structure as substrate |
09/29/1981 | US4292341 Measurement of the intensity of the ultraviolet radiation illuminating the gaseous reactants; accuracy |
09/29/1981 | US4292153 Method for processing substrate materials by means of plasma treatment |
09/29/1981 | US4292063 Manufacture of an optical fiber preform with micro-wave plasma activated deposition in a tube |
09/23/1981 | EP0036191A1 Plasma coating the insides of tubular glass blanks |
09/23/1981 | EP0036061A1 Process and tubular reactor for vapour-phase deposition and for plasma etching |
09/22/1981 | US4290385 Vertical type vapor-phase growth apparatus |
09/15/1981 | US4289801 From ammonia and silicon halide in methane |
09/15/1981 | US4289797 First forming porous film of silicon hydride before oxidation or nitriding to form silicon oxide or silicon nitride |
09/15/1981 | US4289598 For conditioning multilayer printed circuits |
09/15/1981 | US4289539 Heat and chemical resistance, coating of silicon for diffusion of phosphorus |
09/09/1981 | EP0035146A2 Semiconductor photoelectric device |
09/08/1981 | US4287851 Mounting and excitation system for reaction in the plasma state |
09/03/1981 | WO1981002419A1 Methods of controlling the index profile of optical fiber preforms |
09/02/1981 | EP0034706A2 Process and apparatus for ion etching or for plasma C.V.D. |