Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2010
07/01/2010US20100167543 Method for manufacturing semiconductor device
07/01/2010US20100167540 Film Forming Method, Plasma Film Forming Apparatus and Storage Medium
07/01/2010US20100167460 Zinc oxide film forming method and apparatus
07/01/2010US20100167037 Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
07/01/2010US20100167000 Sputtering Target, Thin Film for Optical Information Recording Medium and Process for Producing the Same
07/01/2010US20100166983 Omni-directional reflector and light emitting diode adopting the same
07/01/2010US20100166956 Vapor deposition apparatus
07/01/2010US20100166945 Methods of calculating thicknesses of layers and methods of forming layers using the same
07/01/2010US20100165440 Electrochromic Device And Method For Making Electrochromic Device
07/01/2010US20100165276 Antireflective articles and methods of making the same
07/01/2010US20100163422 Assisted deposition, narrow trench damascene process for manufacturing a write pole of a magnetic write head
07/01/2010US20100163406 Substrate support in a reactive sputter chamber
07/01/2010US20100163405 Method and device for producing three-dimensional objects
07/01/2010US20100163404 Shadow Masks for Patterned Deposition on Substrates
07/01/2010US20100163102 Solar cell and the method of manufacturing thereof
07/01/2010DE102009043300A1 Transportvorrichtung für eine Vakuumprozessanlage und Vakuumprozessanlage Transport device for a vacuum processing system and vacuum processing system
07/01/2010DE102007048758B4 Transporteinrichtung für langgestreckte Substrate, Be- und Entladeeinrichtung und Verfahren zum Be- und Entladen der Transporteinrichtung Transport means for elongated substrates, loading and unloading device and method for loading and unloading of the transport device
07/01/2010DE102006012747B4 Kalotte mit einer Mehrzahl an Vorrichtungen zum Halten sowie zum Drehen und/oder Wenden eines Gegenstands bei dessen Beschichtung in einer Vakuumbeschichtungsanlage sowie Verfahren zum Halten sowie zum Drehen und/oder Wenden von Gegenständen bei deren Beschichtung in einer Vakuumbeschichtungsanlage Dome with a plurality of devices for holding, as well as for rotating and / or turning of an object during its coating in a vacuum coating system and method for holding and for rotating and / or turning of items from their coating in a vacuum coating system
07/01/2010DE102004060670B4 Verfahren und Anordnung zur Herstellung hochtemperaturbeständiger Kratzschutzschichten mit geringer Oberflächenrauigkeit Method and apparatus for producing high-temperature resistant scratch protection layers with low surface roughness
06/2010
06/30/2010EP2202804A2 Method of fabricating a CIGSS solar cell
06/30/2010EP2202330A1 Ornament parts
06/30/2010EP2202059A1 Method for lamination of decorative metal film on resin base material, and resin base material having decorative metal film thereon
06/30/2010EP2201154A1 Method of producing a layer by arc-evaporation from ceramic cathodes
06/30/2010EP2201152A1 Coated cutting insert for machining of titanium based alloys
06/30/2010EP2201148A2 Application of hipims to through silicon via metallization in three-dimensional wafer packaging
06/30/2010EP1483782B1 Production method of sic monitor wafer
06/30/2010CN201517130U Source electrode used for double-cathode luminance discharging leaked metal
06/30/2010CN201517129U Multifunctional ion beam composition processing system
06/30/2010CN101765678A Thin film coating of blades
06/30/2010CN101765677A Film deposition method and device by sputtering
06/30/2010CN101765676A Multipurpose carrier of vacuum vapor deposition material and method thereof
06/30/2010CN101765344A Display screen casing, preparation method thereof and electronic product including same
06/30/2010CN101764084A Method for preparing copper barrier layer-seed crystal layer film
06/30/2010CN101764065A Preparing method of p-type stannous oxide ditch film transistors
06/30/2010CN101764042A Air sucking device and semiconductor processing device
06/30/2010CN101760740A Preparation method combing physical vapor deposition (PVD) with electrodeposition
06/30/2010CN101760723A Guide flow type thermal evaporation depositing device
06/30/2010CN101760722A Method for preventing small magnet from generating bulge in vapor phase deposition process of thin film
06/30/2010CN101760721A Method for plating chromium on surface of plastic material
06/30/2010CN101760720A Shielding device with vacuum cavity body
06/30/2010CN101760647A Method of manufacturing high purity hafnium
06/30/2010CN101758234A Target pressing hydraulic machine
06/30/2010CN101757926A Magnetic-particle photocatalyst with core-shell structure, preparation and application thereof
06/30/2010CN101295560B Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band
06/30/2010CN101139702B Method for preparing silicon-based octahedrite phase TiO2 film by pulsed laser deposition
06/30/2010CN101139701B Method for preparing silicon-based rutile phase TiO2 film by pulsed laser deposition
06/29/2010US7745014 non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area; by cathodic deposition; better gas sorbing; microelectromechanical device
06/29/2010US7744967 laser beam and flux of metallic powder, whereof the nature is the same as that of the metallic piece, is applied to piece to produce layer of metal, monocrystalline or directionally solidified, from the piece, wherein laser beam and flux of powder are applied coaxially on piece; gas turbine motor blades
06/29/2010US7744957 Method and apparatus for depositing material
06/29/2010US7744949 upward emission type EL element can be fabricated without exposing the element to the outside air, so a highly reliable device is obtained; OLEDs; no viewing-angle-related problem unlike liquid crystal display devices; using a CCD (charge coupled device) in a film forming chamber to form pixel electrode
06/29/2010US7744798 Method of forming film on molded body, method of producing molded body with film formed thereon, mold for producing molded body with film formed thereon
06/29/2010US7744735 Ionized PVD with sequential deposition and etching
06/29/2010US7744731 Sputtering apparatus of forming thin film
06/29/2010US7744730 for depositing on multiple wafers and/or display panels in vacuum chamber; robotics
06/29/2010US7743728 Cluster tool architecture for processing a substrate
06/24/2010WO2010071572A1 A method of making a coated cutting tool and a coated cutting tool
06/24/2010WO2010071101A1 System for processing of substrate, method of processing of substrate, and storage medium that stores program
06/24/2010WO2010071068A1 Fuel cell separator material, fuel cell separator using same, fuel cell stack, and method for producing fuel cell separator material
06/24/2010WO2010071048A1 Method for recovering metal from target and target manufacturing method
06/24/2010WO2010070944A1 Indium oxide sintered compact and sputtering target
06/24/2010WO2010070845A1 Sputtering device and sputtering method
06/24/2010WO2010070832A1 Sintered complex oxide and sputtering target comprising same
06/24/2010WO2010070240A1 Method for lowering the pressure in a charge-discharge lock and associated equipment
06/24/2010WO2010070067A1 Industrial vapour generator for depositing an alloy coating on a metal strip
06/24/2010WO2010069888A1 Sheet for packaging food
06/24/2010WO2010069289A1 Apparatus for treating and/or coating the surface of a substrate component
06/24/2010WO2010044545A3 Integrated roll-to-roll sputter chamber
06/24/2010WO2009095705A3 Coated articles
06/24/2010WO2009059165A3 Endoprosthesis coating
06/24/2010US20100159286 Perpendicular magnetic recording medium
06/24/2010US20100159285 Hybrid grain boundary additives in granular media
06/24/2010US20100159270 Durable thermal barrier coating compositions, coated articles, and coating methods
06/24/2010US20100159262 Durable thermal barrier coating compositions, coated articles, and coating methods
06/24/2010US20100159179 Polymer compositions and articles having improved reheat characteristics
06/24/2010US20100159153 Electrostatic chuck shielding mechanism
06/24/2010US20100159151 Methods for making environmental barrier coatings and ceramic components having cmas mitigation capability
06/24/2010US20100159150 Methods for making environmental barrier coatings and ceramic components having cmas mitigation capability
06/24/2010US20100159124 Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
06/24/2010US20100159120 Plasma ion process uniformity monitor
06/24/2010US20100157287 Vacuum coating plotting method, special device and product
06/24/2010US20100155860 Two step method to create a gate electrode using a physical vapor deposited layer and a chemical vapor deposited layer
06/24/2010US20100155717 Noncrystalline oxide semiconductor thin film, process for producing the noncrystalline oxide semiconductor thin film, process for producing thin-film transistor, field-effect-transistor, light emitting device, display device, and sputtering target
06/24/2010US20100155365 Stamper manufacturing method
06/24/2010US20100155238 Rf sputtering arrangement
06/24/2010US20100155237 Sputtering target and method for producing sintered oxide
06/24/2010US20100155232 Method for manufacturing a magnetic write head having a write pole trailing edge taper
06/24/2010US20100155231 Method and Apparatus for Manufacturing Magnetoresistive Devices
06/24/2010US20100155230 Method of Fabricating Bubble-Type Micro-Pump
06/24/2010US20100155229 Sputtering apparatus and film deposition method
06/24/2010US20100155228 Sputtering apparatus and method of manufacturing electronic device
06/24/2010US20100155227 Sputtering apparatus and film forming method
06/24/2010US20100155226 Rotatable magnetron sputtering with axially movable target electrode tube
06/24/2010US20100155225 Method of forming thin film and apparatus for forming thin film
06/24/2010US20100155224 Multi-Component Deposition
06/24/2010US20100155223 Electromagnet array in a sputter reactor
06/24/2010US20100154878 Electrode Structure and Fabrication of the Dye-Sensitized Solar Cell
06/24/2010US20100154710 In-vacuum deposition of organic materials
06/24/2010DE112008001939T5 Oxidfilm, Oxidfilm-beschichtetes Material und Verfahren zum Bilden eines Oxidfilms Oxide film, oxide film-coated material and methods of forming an oxide film
06/24/2010DE102009054677A1 Linearablagerungsquelle Linear deposition source
06/24/2010CA2748893A1 Device for surface treatment and/or coating of substrate components