Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2010
06/17/2010US20100146866 Friction stir welding using a superabrasive tool
06/17/2010DE112006003027B4 Sputter-Target mit Vorrichtung zum Kühlen des Targets Sputtering target with a device for cooling the target
06/17/2010DE102008062332A1 Vorrichtung zur Oberflächenbehandlung und/oder -beschichtung von Substratkomponenten Device for the surface treatment and / or coating of substrate components
06/17/2010DE102008062220A1 Sliding layer useful in a sliding element for a tribological system, consists of amorphous carbon and chromium carbide, where particles of the amorphous carbon and chromium carbide are uniformly distributed
06/17/2010DE102008062062A1 Wear protective layer useful for sliding element, comprises a matrix containing chromium, aluminum, nitrogen, oxygen and/or carbon, where metallic silver is stored in the matrix in the form of a solid solution
06/17/2010DE102008062061A1 Wear protective layer useful for sliding element, comprises a matrix containing chromium, aluminum, nitrogen, oxygen and/or carbon, where metallic niobium is stored in the matrix in the form of a solid solution
06/17/2010DE102008062060A1 Wear-resistant layer useful in a sliding element such as a piston ring, comprises a matrix containing rhenium, chromium, aluminum and nitrogen, where the rhenium is present in the form of a solid solution
06/17/2010DE102004043384B4 Verfahren zur Herstellung eines beschichteten Hohlkörper-Substrates aus zumindest Polyethylenterephthalat A process for preparing a coated hollow body substrate of polyethylene terephthalate at least
06/16/2010EP2197044A1 Solar battery manufacturing method
06/16/2010EP2197043A1 Solar battery manufacturing method
06/16/2010EP2196556A1 Security element and method for production thereof
06/16/2010EP2194914A1 Optimum surface texture geometry
06/16/2010CN201508422U Film coating umbrella
06/16/2010CN201506832U Vacuum sputtering preevacuated vacuum treatment device made of flexible belt materials
06/16/2010CN201506831U Connecting mechanism
06/16/2010CN201506830U A planar magnetron sputtering target with a novel structure
06/16/2010CN201506829U Magnetron sputtering target
06/16/2010CN1950539B Method and device for the continuous coating of flat substrates with optically active layer systems
06/16/2010CN1938444B Ultra-hydrophilic and micro-organism resistant thin film coated metal product and method for manufacturing the same
06/16/2010CN1902335B Melting and vaporizing apparatus and method
06/16/2010CN1854794B Method for producing near field optical generator
06/16/2010CN1769513B Deposition method and apparatus
06/16/2010CN1754978B Methods and apparatus for reducing arcing during plasma processing
06/16/2010CN1721570B Method for aluminide coating a hollow article
06/16/2010CN1675059B Flexible electrically conductive film comprising a plurality of visible light transmissive layers
06/16/2010CN1656243B Autoionizing inductive coupling plasma used for sputtering and re-sputtering
06/16/2010CN1582070B Vapor deposition container and vapor deposition apparatus
06/16/2010CN101743610A Treatment system for flat substrates
06/16/2010CN101743339A Sputtering targets with adjusted proportion of pinholes and manufacturing method thereof
06/16/2010CN101743338A Vacuum treatment unit and vacuum treatment process
06/16/2010CN101743071A Plasma deposition apparatus
06/16/2010CN101742842A Shell and manufacture method thereof
06/16/2010CN101740690A Method for improving activation efficiency of magnesium in III-V family nitrides
06/16/2010CN101740547A Semiconductor device and method of manufacturing semiconductor device
06/16/2010CN101740448A Plasma processing equipment and substrate support plate thereof
06/16/2010CN101740358A Method for preparing P type poly-silicon thin film on glass substrate
06/16/2010CN101738652A Method for preparing ultrawide wave band high antireflection film combining three lights
06/16/2010CN101737983A Solar spectrum selective absorbing coating and preparation method thereof
06/16/2010CN101737982A Solar selectively absorbing coating and preparation method thereof
06/16/2010CN101737479A Wear-resistant gear with alloy steel on surface
06/16/2010CN101736348A Method for carrying out surface activation treatment on marine climate-resisting engineering parts
06/16/2010CN101736309A Horizontal revolution and rotation mechanism for vacuum coating
06/16/2010CN101736308A Film-coating workpiece carrying device and film-coating method
06/16/2010CN101736307A Plasma vapor deposition method
06/16/2010CN101736306A Method and device for producing plasma surface metallurgical metal wire
06/16/2010CN101736305A Method for growing ZnO films of piezoelectric thin film transducer by double-end co-sputtering
06/16/2010CN101736304A Vacuum aluminizing method of surface of neodymium-iron-boron permanent magnet
06/16/2010CN101736303A Preparation method of chromium-doped titanium nitride magnetic semiconductor polycrystal film
06/16/2010CN101736302A Preparation method of homogeneous multilayer nanometer metallic film material
06/16/2010CN101736301A Shielding device in vacuum magnetic control film coating chamber
06/16/2010CN101736300A Magnetic control sputtering target
06/16/2010CN101736299A Process for preparing high-purity titanium target material
06/16/2010CN101736298A Film coating device
06/16/2010CN101736297A Rotatable sputtering cathode device for film coating
06/16/2010CN101736296A Method for continuously preparing YBCO superconductive layer on metal baseband
06/16/2010CN101736295A Method for preparing titanium dioxide thin film
06/16/2010CN101736294A Evaporation boat clamping device
06/16/2010CN101736293A Metal filling method and system for evaporating electrode of organic electroluminescent diode
06/16/2010CN101736292A Composite magnetic control and ion beam sputtering and depositing system
06/16/2010CN101736291A Combined type film coating device and method
06/16/2010CN101736290A Method for improving die bonding in process of deposition of aluminum metallic film
06/16/2010CN101736289A Copper alloy target, manufacturing method thereof and film and solar cell manufactured by same
06/16/2010CN101736288A Surface chromium nitride film plating method
06/16/2010CN101736287A Method for fabricating smei-cylindrical groove by shadow evaporation and wet etching
06/16/2010CN101358331B Magnetron sputtering rose gold target material and preparation method thereof
06/16/2010CN101260515B Device and method for real time monitoring metal source beam flow change in active gas environment
06/16/2010CN101218360B High-purity hafnium, process for producing the same, target and thin film comprising the high-purity hafnium
06/16/2010CN101210311B System for preparing composite film
06/16/2010CN101208451B Sputtering target and thin film for optical information recording medium
06/16/2010CN101200795B Method for forming a SiN:H layer on a substrate
06/16/2010CN101144150B Two dimensional magnetron scanning for sputtering onto flat panels
06/16/2010CN101104920B Film-forming apparatus and film-forming method
06/15/2010US7738987 Device and method for controlling substrate processing apparatus
06/15/2010US7738983 Method of optimizing process recipe of substrate processing system
06/15/2010US7737702 Apparatus for wafer level arc detection at an electrostatic chuck electrode
06/15/2010US7736824 photomask blank comprising a multilayer film including at least four layers of different compositions, wherein the interface between the layers is moderately graded in composition; a phase shift mask blank comprising a phase shift film of at least two layers including a surface layer of a composition
06/15/2010US7736473 Magnetron having continuously variable radial position
06/15/2010US7736462 Installation for processing a substrate
06/15/2010US7736438 Method and apparatus for depositing a coating on a tape carrier
06/10/2010WO2010064879A2 Film deposition method for razor blade
06/10/2010WO2010064493A1 Plasma processing apparatus, apparatus for manufacturing magnetoresistive element, method for forming magnetic thin film and program for controlling film formation
06/10/2010WO2010063928A1 Method for treating a metal element with ion beam
06/10/2010WO2010063264A1 Method and device for reversing the feeding of sputter coating systems in clean rooms
06/10/2010WO2010019218A3 Electrical contacts for use with vacuum deposition sources
06/10/2010WO2009083193A3 Method and apparatus for surface treatment by combined particle irradiation
06/10/2010US20100145380 Thrombosis filter with cover layer
06/10/2010US20100143828 Method of mask forming and method of three-dimensional microfabrication
06/10/2010US20100143741 Method of coating a metallic article with a surface of tailored wettability
06/10/2010US20100143707 Surface-treated metal substrate and manufacturing method of the same
06/10/2010US20100143657 High-temperature-durable optical film structure and fabrication method thereof
06/10/2010US20100143611 Methods for making an asymmetric composite membrane
06/10/2010US20100143431 Bioactive, ruthenium-containing coating and device
06/10/2010US20100143232 Metal binary and ternary compounds produced by cathodic arc deposition
06/10/2010US20100143108 Device for the Protection of Components Having A Flammable Titanium Alloy From Titanium Fire, and Method for the Production Thereof
06/10/2010US20100142035 Front filter for display device and method of manufacturing the same
06/10/2010US20100141878 Method for producing color filter, color filter, liquid crystal display device and producing apparatus
06/10/2010US20100141097 Thin film piezoelectric actuators
06/10/2010US20100141085 Ionic polymer devices and methods of fabricating the same
06/10/2010US20100140727 Magnetic thin film and method of manufacturing the same, and various application devices using the same
06/10/2010US20100140588 Catalyst support substrate, method for growing carbon nanotubes using the same, and transistor using carbon nanotubes