| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/14/2012 | CN101545091B Film plating fixture |
| 03/14/2012 | CN101503795B Twin-type coating device with improved separating plate |
| 03/13/2012 | US8133595 Multilayer alloy coating film, heat-resistant metal member having the same, and method for producing multilayer alloy coating film |
| 03/13/2012 | US8133553 Process for forming a ceramic layer |
| 03/13/2012 | US8133429 Methods for manufacturing a phase-change memory device |
| 03/13/2012 | US8133368 Encapsulated sputtering target |
| 03/13/2012 | US8133367 Sputtering system and method using a loose granular sputtering target |
| 03/13/2012 | US8133365 Method of arc ion plating and target for use therein |
| 03/13/2012 | US8133364 Formation of photoconductive and photovoltaic films |
| 03/13/2012 | US8133363 Comprises antiferromagnetic layer sandwiched between ferromagnetic layers; formed by sputter deposition and annealing |
| 03/13/2012 | US8133362 Physical vapor deposition with multi-point clamp |
| 03/13/2012 | US8133361 Thin film coating system and method |
| 03/13/2012 | US8133360 Prediction and compensation of erosion in a magnetron sputtering target |
| 03/13/2012 | US8133359 Methods and apparatus for sputtering deposition using direct current |
| 03/13/2012 | US8133358 Method and apparatus for producing a metal wire coated with a layer of metal alloy |
| 03/13/2012 | CA2585612C Scratch resistant coated glass article including carbide layer(s) resistant to fluoride-based etchant(s) |
| 03/08/2012 | WO2012030792A1 Vapor deposition system |
| 03/08/2012 | WO2012030500A1 System, method and apparatus for controlling ion energy distribution |
| 03/08/2012 | WO2012029797A1 Multilayer transparent electroconductive film and method for manufacturing same, as well as thin-film solar cell and method for manufacturing same |
| 03/08/2012 | WO2012029638A1 Semiconductor device |
| 03/08/2012 | WO2012029612A1 Sputtering target and method for manufacturing semiconductor device |
| 03/08/2012 | WO2012029545A1 Vapor deposition method, vapor deposition device, and organic el display device |
| 03/08/2012 | WO2012029498A1 Fe-pt-type ferromagnetic material sputtering target |
| 03/08/2012 | WO2012029408A1 Oxide sintered body and oxide semiconductor thin film |
| 03/08/2012 | WO2012029407A1 Sintered oxide and oxide semiconductor thin film |
| 03/08/2012 | WO2012029364A1 Indium target and production method for same |
| 03/08/2012 | WO2012029363A1 Indium target and method for manufacturing same |
| 03/08/2012 | WO2012029356A1 Laminated structure and method for producing same |
| 03/08/2012 | WO2012029355A1 Indium target and method for producing same |
| 03/08/2012 | WO2012029331A1 Ferromagnetic material sputtering target |
| 03/08/2012 | WO2012029260A1 Deposition cell and vacuum deposition device provided with same |
| 03/08/2012 | WO2012007469A3 Process for coating a substrate by means of an arc |
| 03/08/2012 | WO2011123688A3 Target utilization improvement for rotatable magnetrons |
| 03/08/2012 | US20120058366 Film-formed article and method of producing the same |
| 03/08/2012 | US20120058361 Device housing and method for making the same |
| 03/08/2012 | US20120058283 Method for preparing a thin film of thiospinels |
| 03/08/2012 | US20120055788 Target for sputtering |
| 03/08/2012 | US20120055787 Sputtering Target and Method of Processing a Sputtering Target |
| 03/08/2012 | US20120055786 Holding unit, assembly system, sputtering unit, and processing method and processing unit |
| 03/08/2012 | US20120055784 Preparation method of palladium alloy composite membrane for hydrogen separation |
| 03/08/2012 | US20120055783 Process for producing a target by thermal spraying |
| 03/08/2012 | US20120055691 Housing and method for manufacturing housing |
| 03/08/2012 | DE102010040267A1 Sputtereinrichtung mit rohrförmigem Target Sputtering with a tubular target |
| 03/07/2012 | EP2426702A1 Method of deposition of chemical compound semiconductor and device |
| 03/07/2012 | EP2426693A2 Ion source |
| 03/07/2012 | EP2426232A2 Sputtering apparatus |
| 03/07/2012 | EP2426231A1 Arc evaporation source and method for manufacturing film using same |
| 03/07/2012 | EP2425036A1 Reactive sputtering with multiple sputter sources |
| 03/07/2012 | EP2425035A1 Method and device for high-rate coating by means of high-pressure evaporation |
| 03/07/2012 | EP2425034A1 An arrangement for holding a substrate in a material deposition apparatus |
| 03/07/2012 | EP2425033A2 Lift-off deposition system featuring a density optimized hula substrate holder in a conical dep0sition chamber |
| 03/07/2012 | EP1641955B1 Biological laser printing via indirect photon-biomaterial interactions |
| 03/07/2012 | EP1641571B1 Biological laser printing for tissue microdissection via indirect photon-biomaterial interactions |
| 03/07/2012 | CN202157118U 连续性镀膜生产线活动挡板装置 Continuous coating line flapper device |
| 03/07/2012 | CN202157117U 真空镀膜机支架 Vacuum coating machine bracket |
| 03/07/2012 | CN202157116U 镀膜伞 Coating umbrella |
| 03/07/2012 | CN202157115U 一种夹爪镀膜夹具 One kind of jaw plated fixtures |
| 03/07/2012 | CN202157114U 一种聚焦反射镜的镀膜夹具 A focusing mirror of the coating jig |
| 03/07/2012 | CN202157113U 一种磁控溅射镀膜装置 One kind of magnetron sputtering device |
| 03/07/2012 | CN202157112U 一种阴极电弧的磁场调节装置 A cathode arc magnetic field adjustment device |
| 03/07/2012 | CN202157111U 靶材 Target |
| 03/07/2012 | CN1924079B Linear type deposition source |
| 03/07/2012 | CN102369787A Film forming device, film forming method, and organic EL element |
| 03/07/2012 | CN102369306A Apparatus for depositing film and method for depositing film and system for depositing film |
| 03/07/2012 | CN102368508A Sodium tantalate film ultraviolet light detector and preparation method thereof |
| 03/07/2012 | CN102368097A Dim light and laser transmission and medium-infrared reflection film and prism, preparation method of prism |
| 03/07/2012 | CN102367569A Vacuum magnetic controlled sputtering film plating apparatus with low roller sputtering pollution |
| 03/07/2012 | CN102367568A Preparation method of high-purity tantalum target material |
| 03/07/2012 | CN102367567A TARGET FORMED OF SINTERING-RESISTANT MATERIAL PROCESS FOR PRODUCING same, and target-backing plate assembly and process for manufacturing same |
| 03/07/2012 | CN102367566A Cast iron vacuum chromium plating method |
| 03/07/2012 | CN102366742A Coating method for non-continuous high-metal-texture film layer |
| 03/07/2012 | CN101937864B Filling method of contact hole |
| 03/07/2012 | CN101911266B Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium |
| 03/07/2012 | CN101807521B Method for preparing of compound trapping layer in floating gate type nonvolatile storage |
| 03/07/2012 | CN101501239B Takeup type vacuum filming apparatus |
| 03/07/2012 | CN101451233B Motion control device of rectangle sample magnetron sputtering instrument and control method thereof |
| 03/07/2012 | CN101393979B Silicon cathode, lithium ion secondary battery comprising the same and manufacturing method therefor |
| 03/06/2012 | US8128793 Vertical substrate transfer apparatus and film-forming apparatus |
| 03/06/2012 | US8128753 Method and apparatus for depositing LED organic film |
| 03/06/2012 | US8128750 Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components |
| 03/01/2012 | WO2012027442A1 Rare earth silicate environmental barrier coatings |
| 03/01/2012 | WO2012026599A1 Method for producing zno film, method for producing transparent conductive film, zno film, and transparent conductive film |
| 03/01/2012 | WO2012026519A1 Electrically conductive transparent base, touch panel, resistive touch panel, and capacitive touch panel |
| 03/01/2012 | WO2012026483A1 Vapor deposition processing device and vapor deposition processing method |
| 03/01/2012 | WO2012026467A1 Production method of transparent conductive film and production method of thin-film solar cell |
| 03/01/2012 | WO2012026405A1 Soft magnetic alloy for magnetic recording medium, sputtering target material, and magnetic recording medium |
| 03/01/2012 | WO2012026349A1 Water-reactive al composite material, water-reactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber |
| 03/01/2012 | WO2012026113A1 Radical source and molecular beam epitaxy apparatus |
| 03/01/2012 | WO2012025819A1 Continuous furnace |
| 03/01/2012 | WO2012025484A1 Carrier for a substrate and a method for assembling the same |
| 03/01/2012 | WO2011143527A3 Process kit shield for improved particle reduction |
| 03/01/2012 | WO2011140060A3 Thermal evaporation sources with separate crucible for holding the evaporant material |
| 03/01/2012 | WO2011131172A3 Apparatus and method for coating substrates using the eb/pvd process |
| 03/01/2012 | US20120052323 Process for surface treating aluminum or aluminum alloy and article made with same |
| 03/01/2012 | US20120052320 Low Emissivity and EMI Shielding Window Films |
| 03/01/2012 | US20120052291 Article and method for manufacturing same |
| 03/01/2012 | US20120052290 Article and method for manufacturing same |
| 03/01/2012 | US20120052288 Film structure and method for manufacturing the same |
| 03/01/2012 | US20120052280 Coating, article coated with coating, and method for manufacturing article |
| 03/01/2012 | US20120052276 Coating, article coated with coating, and method for manufacturing article |