| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
|---|
| 06/03/1997 | US5634765 Substrate transport apparatus and substrate transport path adjustment method |
| 05/28/1997 | EP0776035A1 Substrate carrying device |
| 05/28/1997 | EP0776026A1 Semiconductor device manufacturing apparatus employing vacuum system |
| 05/27/1997 | US5632595 Glass plate conveying apparatus |
| 05/22/1997 | DE19614596C1 Compact disc transfer assembly |
| 05/15/1997 | WO1997017728A1 Transfer device, transfer method, processing device, and processing method |
| 05/14/1997 | EP0584076B1 Semiconductor wafer processing module |
| 05/14/1997 | CN2254073Y High-temp. material scale conveyer |
| 05/13/1997 | US5628605 Substrate transport apparatus and substrate transport path adjustment method |
| 05/07/1997 | EP0772229A2 Vertical wafer compact flip chip feeder |
| 05/06/1997 | US5626677 Atmospheric pressure CVD apparatus |
| 05/06/1997 | US5626456 Transfer device |
| 05/06/1997 | US5626207 Manual wafer lift |
| 05/02/1997 | EP0770756A1 Device for moving sheets of insulating glazings |
| 05/02/1997 | EP0769986A1 Conveyor cassette for wafers |
| 04/30/1997 | CN1148562A Integrated circuit conveying device |
| 04/28/1997 | CA2161599A1 Port system for sterile transfer |
| 04/17/1997 | DE19538157A1 Device for contact=free stacking of plate or panels |
| 04/15/1997 | US5620295 Transfer apparatus |
| 04/15/1997 | US5620293 Glass sheet handling apparatus |
| 04/09/1997 | CN1147153A Method and apparatus for fabricating self-assembling microstructures |
| 04/03/1997 | WO1997012396A1 Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
| 04/03/1997 | DE19606764C1 Substrate handling and transporting appts. |
| 04/03/1997 | CA2233612A1 Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
| 04/02/1997 | EP0766287A2 Indexing of a container compartment with the contained disk-like substrate |
| 04/01/1997 | US5615606 Spray cooking apparatus |
| 03/27/1997 | WO1997011015A1 Plant for processing containers, transport device and pallets for containers |
| 03/26/1997 | EP0764972A2 Apparatus for transferring semiconductor silicon wafers |
| 03/26/1997 | CN1145851A Method and composition for applying acidic interleaving material in aqueous media to glass sheets |
| 03/26/1997 | CN1145850A Buffered acid interleaving for glass sheets |
| 03/25/1997 | US5613821 Cluster tool batchloader of substrate carrier |
| 03/25/1997 | US5613435 Apparatus for palletizing tube sections of paper or the like |
| 03/18/1997 | US5612068 Apparatus for the transfer of substrates |
| 03/18/1997 | US5611865 Alignment of a shadow frame and large flat substrates on a heated support |
| 03/18/1997 | US5611858 Apparatus for transporting discoidal substrates in a vacuum coating apparatus |
| 03/18/1997 | US5611655 Vacuum process apparatus and vacuum processing method |
| 03/11/1997 | US5609924 High density, high molecular weight polyethylene |
| 03/11/1997 | US5609688 Apparatus for producing semiconductor device |
| 03/11/1997 | US5609459 For batch loading semiconductor wafers |
| 03/05/1997 | CN1144518A Car body surface treatment device |
| 03/05/1997 | CN1144188A Spreader set for disk coiled material surface treatment |
| 03/04/1997 | US5607753 Plurality of separated glass sheets |
| 03/04/1997 | US5607276 Batchloader for substrate carrier on load lock |
| 02/25/1997 | CA2105362C Lightweight vacuum shuttle |
| 02/25/1997 | CA2101165C Conveyor device |
| 02/19/1997 | CN1143190A Automatic handler for IC test system, test tray stopping machanism and test tray transfrring method for automatic handler of IC test system |
| 02/18/1997 | US5603777 Providing surface treatment for plurality of substrates arranged with optimal spacing in each processing cassette without being governed by storage spacing in transport cassette |
| 02/12/1997 | EP0757844A1 Semiconductor processing systems |
| 02/12/1997 | EP0757843A1 Semiconductor processing system with wafer container docking and loading station |
| 02/12/1997 | EP0757842A1 Semiconductor wafer processing system |
| 02/12/1997 | CN1142789A Method and material for protecting glass surfaces |
| 02/11/1997 | US5601686 Semiconductors |
| 02/11/1997 | US5601484 Device for transporting wafer magazines |
| 02/06/1997 | WO1997004479A1 Docking and environmental purging system for integrated circuit wafer transport assemblies |
| 02/04/1997 | US5599159 Pellet conveying device |
| 01/30/1997 | WO1997003005A1 Method and apparatus for vertical transfer of a semiconductor wafer cassette |
| 01/30/1997 | WO1997003004A1 Straight line wafer transfer system |
| 01/29/1997 | EP0756316A1 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 01/29/1997 | EP0756314A2 Semiconductor wafer loading and unloading apparatus, and semiconductor wafer transport containers for use therewith |
| 01/29/1997 | EP0562117B1 Vacuum suction pad and method of making said pad |
| 01/23/1997 | WO1997002199A1 Door drive mechanisms for substrate carrier and load lock |
| 01/23/1997 | WO1997002195A1 Load arm for load lock |
| 01/21/1997 | US5595412 Device for handling wafers |
| 01/14/1997 | US5592958 Apparatus for processing a circuit board substrate |
| 01/08/1997 | EP0735926A4 Method and material for protecting glass surfaces |
| 01/07/1997 | US5590996 Wafer transfer apparatus |
| 01/07/1997 | US5590994 Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method |
| 01/07/1997 | US5590672 Semiconductor cleaning apparatus and wafer cassette |
| 12/31/1996 | US5588789 Load arm for load lock |
| 12/27/1996 | WO1996042108A1 Substrate carrying device |
| 12/27/1996 | EP0750340A1 Nitrogen gas supply system |
| 12/27/1996 | EP0749921A1 Dolly for transporting, stacking, handling and depositing vertical elements and sheets |
| 12/27/1996 | EP0749916A2 Storage plant with guided storage units movable by means of a driving device |
| 12/27/1996 | EP0749914A1 Spacer for sheet-like products and method of making it |
| 12/27/1996 | EP0749395A1 Car body surface treatment device |
| 12/24/1996 | US5586585 Direct loadlock interface |
| 12/19/1996 | WO1996041372A1 Method and apparatus for fabricating self-assembling microstructures |
| 12/19/1996 | WO1996041371A1 Substrate transfer apparatus and heat treatment system using the same |
| 12/11/1996 | EP0747948A2 Method and apparatus for fabricating self-assembling microstructures |
| 12/10/1996 | US5582101 Method of palletizing tube packages utilizing a compression plate to compress the tube packages |
| 12/08/1996 | CA2177219A1 Method and apparatus for fabricating self-assembling microstructures |
| 12/05/1996 | WO1996038360A1 Glass panel conveyor |
| 12/04/1996 | CN1137329A Method for fabricating self-assembling microstructures |
| 11/27/1996 | EP0744764A2 Method and apparatus for manufacture of semiconductor devices |
| 11/26/1996 | US5578127 System for applying process liquid |
| 11/26/1996 | US5577879 Articulated arm transfer device |
| 11/26/1996 | CA2081562C Heated glass sheet topside support device |
| 11/19/1996 | US5575611 Wafer transfer apparatus |
| 11/19/1996 | US5575081 Device for transporting magazines for molding wafer-shaped objects |
| 11/07/1996 | WO1996035232A1 Method and device for treatment |
| 11/05/1996 | US5571331 Vacuum treatment apparatus |
| 11/05/1996 | US5571330 Load lock chamber for vertical type heat treatment apparatus |
| 11/05/1996 | US5570994 Wafer tray and ceramic blade for semiconductor processing apparatus |
| 10/29/1996 | US5568821 Semiconductor cleaning apparatus and wafer cassette |
| 10/24/1996 | DE19613616A1 Magazine transport apparatus for semiconductor testing equipment |
| 10/23/1996 | EP0738675A2 Storage device with mobile wagons having inclined frames |
| 10/21/1996 | CA2174597A1 Storage system for planar products |
| 10/16/1996 | EP0737968A1 Transport device |
| 10/15/1996 | US5564889 Semiconductor treatment system and method for exchanging and treating substrate |
| 10/09/1996 | EP0736468A1 Apparatus for conveying slab-like deformable articles, in particular tiles |