| Patents for B24D 13 - Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor (4,710) |
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| 08/06/2003 | EP1296800A4 Polishing pad with built-in optical sensor |
| 08/05/2003 | US6602123 Finishing pad design for multidirectional use |
| 07/31/2003 | US20030143930 Apparatus and method for front side chemical mechanical planarization (cmp) of semiconductor workpieces |
| 07/31/2003 | US20030143925 Polishing pad window for a chemical-mechanical polishing tool |
| 07/31/2003 | US20030143911 Cleaning tool, method for making same |
| 07/29/2003 | US6599765 Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection |
| 07/24/2003 | WO2003059573A1 Polishing method and polishing device |
| 07/24/2003 | US20030139125 Surface finishing pad |
| 07/24/2003 | US20030136508 Multilayer; polyethylene backings; heating, pressing |
| 07/23/2003 | EP1329287A1 Grinding of clothing |
| 07/23/2003 | EP1329286A1 Grinding of clothing |
| 07/22/2003 | US6596388 Method of introducing organic and inorganic grafted compounds throughout a thermoplastic polishing pad using a supercritical fluid and applications therefor |
| 07/22/2003 | US6595845 Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones |
| 07/22/2003 | US6595844 Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones |
| 07/22/2003 | US6595843 Buffing tools and methods of making |
| 07/22/2003 | US6595842 Abrasive pad and method of making same |
| 07/22/2003 | US6595839 Surface treatment tool |
| 07/22/2003 | US6595833 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives |
| 07/17/2003 | WO2003058698A1 Polishing pad, process for producing the same, and method of polishing |
| 07/17/2003 | US20030134584 Tool carrier |
| 07/17/2003 | US20030132207 Method for fabricating chemical mechanical polshing pad using laser |
| 07/16/2003 | EP1326728A1 Device and method for machining a workpiece |
| 07/16/2003 | EP1326508A2 Unitary brush having abrasive coated bristles and method of making the same |
| 07/15/2003 | US6592443 Method and apparatus for forming and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates |
| 07/15/2003 | US6592442 Aluminum hub with outwardly opening peripheral slots |
| 07/15/2003 | US6592438 CMP platen with patterned surface |
| 07/10/2003 | DE20305995U1 Polishing wheel with upper side and underside, middle polishing area enclosed by edge part, round holes arranged in ring |
| 07/09/2003 | EP1326267A1 Abrasive cloth, polishing device and method for manufacturing semiconductor device |
| 07/09/2003 | EP1240075B1 Method for protecting underwater surfaces against pollution due to fouling, and brush and coating agent used therewith |
| 07/08/2003 | US6589106 Polyvinyl chloride, adhesive, flocked fibers |
| 07/08/2003 | US6589101 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives |
| 07/03/2003 | WO2003054097A1 Polishing pad |
| 07/03/2003 | US20030124958 Burnishing pad, burnishing machine equipped with burnishing pad and burnishing method |
| 07/03/2003 | US20030121213 Lapping medium and method of generating the same |
| 06/26/2003 | US20030119437 Sanding wallboard; abrasive disk on foam substrate |
| 06/26/2003 | US20030119432 Abrasive belt material for grinding/polishing/cutting tools |
| 06/26/2003 | US20030119425 Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool |
| 06/25/2003 | EP1320443A1 Polishing pad having an advantageous micro-texture |
| 06/24/2003 | US6582289 Flap disc |
| 06/24/2003 | US6582283 Polishing pads for chemical mechanical planarization |
| 06/24/2003 | US6582282 Chemical mechanical polishing with multiple polishing pads |
| 06/19/2003 | US20030114096 Surface treating member having a fastener |
| 06/19/2003 | US20030114088 Fixed abrasive polishing pad |
| 06/19/2003 | US20030114084 Method and apparatus for polishing substrates |
| 06/19/2003 | US20030114079 Rigid plate assembly with polishing pad and method of using |
| 06/19/2003 | US20030110609 Subpad support with a releasable subpad securing element and polishing apparatus including the subpad support |
| 06/18/2003 | EP1318891A1 Polishing pad comprising particulate polymer and crosslinked polymer binder |
| 06/17/2003 | US6579604 Method of altering and preserving the surface properties of a polishing pad and specific applications therefor |
| 06/17/2003 | US6579159 Chemical planar head dampening system |
| 06/12/2003 | US20030109209 Polishing pad |
| 06/12/2003 | US20030109197 Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
| 06/12/2003 | US20030109196 Endpoint detection system for wafer polishing |
| 06/10/2003 | US6575825 CMP polishing pad |
| 06/10/2003 | US6575823 Polishing pad and method for in situ delivery of chemical mechanical polishing slurry modifiers and applications thereof |
| 06/10/2003 | US6575094 A support of a PS plate which has excellent ability to withstand repeated printing, and in which defects in appearance, such as dirtying and the like, do not occur. Also provided are a method of manufacturing the lithographic |
| 06/05/2003 | WO2003045631A1 Polishing pad comprising particles with a solid core and polymeric shell |
| 06/05/2003 | WO2002100593A3 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same |
| 06/05/2003 | US20030104768 Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates |
| 06/05/2003 | DE20304860U1 Machine driven grinding tool comprising plate, grinding cloth and support segments, has grinding cloth segments specially oriented on top of plate segments |
| 06/04/2003 | EP1316991A1 Method of polishing semiconductor wafer |
| 06/03/2003 | US6572439 Customized polishing pad for selective process performance during chemical mechanical polishing |
| 05/29/2003 | US20030100250 Pads for CMP and polishing substrates |
| 05/29/2003 | US20030100244 Polishing pad comprising particles with a solid core and polymeric shell |
| 05/28/2003 | EP1313594A1 Polishing tool |
| 05/28/2003 | EP1024924A4 Apparatus and method for cleaning and finishing |
| 05/27/2003 | US6568998 Using planarizing medium having relatively hard polishing pad and planarizing liquid including colloidal particles formed from silicon dioxide, manganese oxide, and cerium oxide |
| 05/22/2003 | US20030096559 Methods and apparatuses for analyzing and controlling performance parameters in mechanical and chemical-mechanical planarization of microelectronic substrates |
| 05/15/2003 | WO2003039812A1 Method of fabricating a polishing pad having an optical window |
| 05/15/2003 | US20030092371 Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus |
| 05/15/2003 | US20030092370 Sanding strip |
| 05/15/2003 | US20030092368 Surface treatment tool |
| 05/14/2003 | EP1309424A2 Abrasive pad for cmp |
| 05/13/2003 | US6561886 Device for retaining abrasive pad on lap in eyeglass lens making apparatus |
| 05/13/2003 | US6561873 Method and apparatus for enhanced CMP using metals having reductive properties |
| 05/08/2003 | WO2003038882A1 Method and pad for polishing wafer |
| 05/08/2003 | WO2003038862A2 Pads for cmp and polishing substrates |
| 05/08/2003 | WO2003037565A2 Polishing pads and manufacturing methods |
| 05/08/2003 | US20030087593 Device for processing flat workpieces |
| 05/08/2003 | US20030084774 Method of fabricating a polishing pad having an optical window |
| 05/07/2003 | EP1308243A1 Polishing method |
| 05/07/2003 | EP1308241A1 Brushing apparatus with reciprocating roll |
| 05/06/2003 | US6558236 Method and apparatus for chemical mechanical polishing |
| 05/06/2003 | US6557608 Method for attaching web based polishing materials together on a polishing tool |
| 05/02/2003 | EP1306162A1 Polishing sheet and method of manufacturing the sheet |
| 05/02/2003 | EP1305139A2 Fluid dispensing fixed abrasive polishing pad |
| 05/01/2003 | WO2002100598A3 Grinding wheel, intermediate product and method for producing a grinding wheel of this type |
| 05/01/2003 | US20030083003 Polishing pads and manufacturing methods |
| 04/24/2003 | US20030077436 Method of altering and preserving the surface properties of a polishing pad and specific applications therefor |
| 04/23/2003 | EP1303381A2 Grooved polishing pads and methods of use |
| 04/23/2003 | EP1177071B1 Grinding disc with backup pad |
| 04/23/2003 | CN1413158A Method for protecting underwater surfaces against pollution due to fouling, and brush and coating agent used terewith |
| 04/17/2003 | WO2003032379A1 Polishing pad for cmp, method for polishing substrate using it and method for producing polishing pad for cmp |
| 04/16/2003 | EP1301312A1 Cleaning tool, method for making same |
| 04/16/2003 | EP0912294B1 Nonwoven abrasive articles |
| 04/15/2003 | US6547655 Flame-resistant buffing wheel and method |
| 04/15/2003 | US6547652 Linear CMP tool design using in-situ slurry distribution and concurrent pad conditioning |
| 04/15/2003 | US6547644 Metathesis ring-opening polymerization; polishing glass sheet |
| 04/15/2003 | US6547643 Surface polishing applicator system and method |
| 04/10/2003 | WO2003028519A1 Method for sanitation of covered floors, floor maintenance agents and associated cleaning pads |
| 04/09/2003 | EP1299210A1 Polishing pad grooving method and apparatus |