Patents
Patents for B24D 13 - Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor (4,710)
01/2005
01/11/2005US6840842 Burnishing pad, burnishing machine equipped with burnishing pad and burnishing method
01/06/2005WO2005000527A2 Multi-layer polishing pad material for cmp
01/06/2005WO2005000526A1 Polishing pad with oriented pore structure
01/06/2005WO2005000525A1 Polishing pad for electrochemical-mechanical polishing
01/06/2005US20050003749 Polishing pad
01/06/2005US20050003742 Polishing method and polishing device
01/06/2005US20050003738 Edge-sealed pad for CMP process
01/06/2005US20050000801 Method and apparatus for electrochemical mechanical processing
01/06/2005US20050000166 Grinding wheel, intermediate product and method for producing a grnding wheel of this type
01/04/2005US6838382 Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates
01/04/2005US6838169 Comprising a thermoplastic backing film and a pressure sensitive adhesive of silicone and acrylic polymer to couple the backing of a chemical mechanical polishing pad to a platen support; antipeeling agents; durability; semiconductor wafers
01/04/2005US6837781 Dissolving an inert gas in a polyurethane with raw materials; reaction injection molding yields foam with small and uniform cells; semiconductor wafers
01/04/2005US6837780 Lapping and polishing device
12/2004
12/30/2004US20040266327 Conductive polishing article for electrochemical mechanical polishing
12/30/2004US20040266326 Method of machining semiconductor wafer-use polishing pad and semiconductor wafer-use polishing pad
12/30/2004DE20122200U1 Workpiece surface machining process involves machining surfaces with one tool unit containing machining roll and one tool unit containing plate-type tools
12/30/2004DE10322496A1 Device for automatic cleaning and conditioning of polishing cloths comprises a body with bristle tufts and means for attaching it to a polishing machine
12/29/2004EP1490198A2 Fiber flocked dental polishing tips
12/29/2004CN1559082A Chemical mechanical polishing pad with micro-holes
12/28/2004US6835118 Rigid plate assembly with polishing pad and method of using
12/23/2004US20040259484 Multi-layer polishing pad material for CMP
12/23/2004US20040259482 Chemical mechanical polishing apparatus and method of chemical mechanical polishing
12/23/2004US20040259480 [polishing pad and process of chemical mechanical use thereof]
12/23/2004US20040259479 Polishing pad for electrochemical-mechanical polishing
12/23/2004US20040258882 Polishing pad with oriented pore structure
12/23/2004US20040255521 Polishing pad of CMP equipment for polishing a semiconductor wafer
12/23/2004US20040255420 Pad driver
12/23/2004DE202004016635U1 Polishing sponge for a polishing machine comprises a frontal polishing surface provided with a circular groove (4) adjacent to its boundary
12/22/2004EP1488888A1 Grinding disc for portable power grinder
12/22/2004EP1487610A1 Automated processing unit for a working station
12/22/2004EP1294532B1 Burr removal apparatus
12/21/2004CA2128564C Cylinder cleaning device
12/16/2004DE202004015195U1 Ultrasonic polishing tool for fine finishing has a bundle of zinc coated brass wires mounted on an ultrasonic transducer inside a hand held support
12/16/2004DE202004013279U1 Device for de-burring and surface-treating machined work surfaces has two opposite brushing tools and drive mechanism to rotate tool sockets and treat both sides of workpiece
12/16/2004DE102004002382B3 Rotating tool for a hand-operated tool drive device comprises working contact elements rotatably mounted in holding elements about an axis of rotation having a direction with a component perpendicular to the axis of rotation of a base body
12/15/2004CN1179825C Abrasive pad for chemical mechanical polishing
12/09/2004WO2004107428A1 Production method for semiconductor wafer
12/09/2004US20040248508 Controlled penetration subpad
12/09/2004US20040248501 Polishing pad for chemical mechanical polishing apparatus
12/02/2004WO2004105113A1 Polishing body for cmp polishing, cmp polishing apparatus, cmp polishing method, and method for manufacturing semiconductor device
12/02/2004WO2004103643A1 A brush module for a grinding brush
12/02/2004WO2004103642A1 Grinding element for mouting in a groove
12/02/2004US20040242132 Polishing element, cmp polishing device and productionj method for semiconductor device
12/02/2004US20040242121 Substrate polishing apparatus
12/02/2004US20040237414 Manufacture of lapping board
12/02/2004CA2526492A1 A brush module for a grinding brush
12/01/2004CN1551303A Polishing disk, polishing machine and method for manufacturing semiconductor
11/2004
11/30/2004US6824455 Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus
11/30/2004US6824452 Polishing pad and process of chemical mechanical use thereof
11/30/2004US6824447 Transparent window is formed on a part of the polishing pad so as to let a laser beam or visible light pass therethrough to detect the end point of polishing rate
11/25/2004WO2004101223A1 Substrate polishing apparatus
11/25/2004US20040235398 Chemical mechanical planarization method and apparatus for improved process uniformity, reduced topography and reduced defects
11/25/2004US20040232121 Method for fabricating polishing pad using laser beam and mask
11/25/2004US20040231245 Composite material and processing method using the material
11/25/2004DE3920971B4 Drehbares Schleifwerkzeug Rotatable grinding tool
11/24/2004EP1479479A1 Polishing pad
11/24/2004CN1549756A Method for fabricating polishing pad using laser beam and mask
11/23/2004US6821570 Method for preparing a polymer for chemical mechanical polishing
11/18/2004WO2004098831A1 Abrading machine with abrading discs, which are moved in a reciprocatory movement transverse to the item
11/18/2004US20040229545 Endpoint detection system for wafer polishing
11/18/2004DE102004014254A1 Polierscheibe Buff
11/17/2004EP1477275A1 Abrading machine with abrading discs, which are moved in a reciprocatory movement transverse to the item
11/17/2004EP1299210A4 Polishing pad grooving method and apparatus
11/16/2004US6818301 Thermoconductive polymer of a substrate and filler particle of a group ii salt and within; planarizing a surface on a semiconductor wafer
11/16/2004US6817935 Method of making a surface treating article and such a surface treating article
11/16/2004US6817932 Portable surface treatment device
11/11/2004WO2004096495A1 Grinding wheel with sand paper items
11/11/2004US20040224623 Polishing pad for cmp, method for polishing substrate using it and method for producing polishing pad for cmp
11/11/2004US20040224622 Polishing pad and production method thereof
11/11/2004US20040224616 Polishing pad and chemical mechanical polishing method
11/11/2004US20040224611 Polishing pad and method of polishing a semiconductor wafer
11/11/2004DE202004014427U1 Polierwerkzeug Polishing tool
11/10/2004EP1475827A1 Polishing pad, polishing plate hole cover, polishing apparatus, polishing method, and method for manufacturing semiconductor device
11/10/2004CN1545441A Method for fabricating chemical mechanical polishing pad using laser
11/10/2004CN1174837C Cleaning tool, method for making same
11/09/2004US6814656 Surface treatment disks for rotary tools
11/04/2004WO2004094108A1 Polishing pad with a window
11/04/2004DE10317199A1 Serging method for thermally cut sections of workpiece, by striking impact bodies in the direction of the section to be serged with high delivery force and speed to destroy and remove the oxide layer
11/03/2004EP1473115A1 Polishing method and polishing device
11/03/2004EP1068048B1 Plated grinding tool
11/03/2004CN1543670A Chemical mechanical polishing pad having wave shaped grooves
11/03/2004CN1543669A Chemical mechanical polishing pad having holes and or grooves
11/03/2004CN1541807A Polishing pad with optimized grooves and method of using same
11/02/2004US6811475 Surface finishing pad
11/02/2004US6811469 Grinding wheel for polishing and polishing method employing it
10/2004
10/27/2004EP1470893A1 Polishing pad and chemical mechanical polishing method
10/27/2004EP1470892A1 Polishing pad and method of polishing a semiconductor wafer
10/27/2004CN1539598A Polishing pad and its prodn. method
10/26/2004US6808446 Abrasive flap disc
10/26/2004US6807705 Polishing pad and system
10/21/2004US20040209551 Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool
10/21/2004US20040209066 Polishing pad with window for planarization
10/20/2004EP1468785A2 Polishing pad and production method thereof
10/20/2004EP1338385A4 Polishing tool and a composition for producing said tool
10/20/2004EP1294968A4 Method of making nonwoven fabric for buffing applications
10/20/2004EP1011919B1 Method of manufacturing a polishing pad
10/19/2004US6805051 Lithographic printing plate support and method of manufacturing the same
10/14/2004WO2003038882A8 Method and pad for polishing wafer
10/13/2004EP1467403A1 Polishing pad, process for producing the same, and method of polishing
10/13/2004EP1465753A2 Pads for cmp and polishing substrates
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