Patents
Patents for B24D 13 - Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor (4,710)
09/2002
09/12/2002US20020124958 Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
09/11/2002EP1238756A1 Chemical mechanical polishing with multiple polishing pads
09/05/2002DE10110739A1 Rotationswerkzeug für Oberflächenbearbeitung und Verfahren zu seiner Herstellung A rotary tool for surface machining, and process for its preparation
09/04/2002EP1236696A1 Method for producing frost glass product
09/04/2002EP1236541A2 Rotary tool for surface processing and method of manufacturing the same
09/03/2002US6443809 Polishing apparatus and method for forming an integrated circuit
08/2002
08/29/2002WO2002032254A3 Unitary brush having abrasive coated bristles and method of making the same
08/29/2002US20020119741 Abrasive pad and method of making same
08/29/2002US20020119286 Conductive polishing article for electrochemical mechanical polishing
08/28/2002EP1131187B1 Fan-like grinding wheel
08/27/2002US6439968 Polishing pad having a water-repellant film theron and a method of manufacture therefor
08/27/2002US6439965 Polishing pad and surface polishing method
08/22/2002WO2002064315A1 Polishing disk with end-point detection port
08/22/2002WO2000012264A9 Polishing pad having open area which varies with distance from initial pad surface
08/22/2002US20020115734 Method of altering and preserving the surface properties of a polishing pad and specific applications therefor
08/22/2002US20020115385 Composite polishing pads for chemical-mechanical polishing
08/22/2002US20020115379 Polishing disk with end-point detection port
08/22/2002DE10106631A1 Tragteller für Fächerschleifscheibe und Fächerschleifscheibe Support plate for flap disc and flap wheel
08/20/2002US6435953 Coin cleaning apparatus
08/20/2002US6435945 Chemical mechanical polishing with multiple polishing pads
08/15/2002WO2002062527A1 Abrasive article suitable for modifying a semiconductor wafer
08/15/2002US20020111124 Method and apparatus for uniformly planarizing a microelectronic substrate
08/15/2002US20020111123 Method and apparatus for uniformly planarizing a microelectronic substrate
08/15/2002US20020111120 Fixed abrasive article for use in modifying a semiconductor wafer
08/14/2002EP1231024A1 Carrier plate for flap grinding wheel and flap grinding wheel
08/14/2002CN1363447A Wing sand wheel
08/14/2002CN1089050C Polishing method, device and buff wheel therefor
08/13/2002US6431971 Abrasive brush
08/13/2002US6431960 Fixed abrasive polishing pad
08/08/2002US20020106980 Abrasive article suitable for modifying a semiconductor wafer
08/06/2002US6428406 Soft polishing disc with holes and method of manufacturing the same
08/06/2002US6428405 Abrasive pad and polishing method
08/06/2002US6428401 Quick-release lens clamp pad assembly for use in eyeglass lens processing
08/06/2002US6428388 Finishing element with finishing aids
08/01/2002US20020102924 Selective chemical-mechanical polishing properties of a cross-linked polymer and specific applications therefor
08/01/2002US20020102921 Fixed abrasive polishing pad
08/01/2002US20020102853 Articles for polishing semiconductor substrates
07/2002
07/30/2002US6425816 Polishing pads and methods relating thereto
07/30/2002US6425815 Fixed abrasive polishing pad
07/30/2002US6425809 Polishing apparatus
07/30/2002US6425803 Scored polishing pad and methods relating thereto
07/25/2002WO2002057071A2 Catalytic reactive pad for metal cmp
07/25/2002US20020098790 Open structure polishing pad and methods for limiting pore depth
07/25/2002US20020098782 Polishing pads and methods relating thereto
07/25/2002US20020098779 Method and apparatus for enhanced CMP using metals having reductive properties
07/25/2002US20020098778 Polishing pad, polishing apparatus and polishing method using the same
07/25/2002US20020098702 Apparatus and methods for chemical-mechanical polishing of semiconductor wafers
07/24/2002EP1224060A1 Polishing pad
07/23/2002US6422932 Integrally molded brush and method for making the same
07/23/2002US6422926 Foam buffing pad and method of manufacturing thereof
07/23/2002US6422921 Heat activated detachable polishing pad
07/18/2002WO2002055266A1 Wiping film
07/18/2002WO2002055265A1 Backup plate assembly for grinding system
07/18/2002WO2002055261A1 Polisher and polishing method
07/18/2002US20020094765 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates
07/18/2002US20020094437 Filamentary brush bristle material
07/18/2002US20020092111 Quick release buffing pad assembly
07/16/2002US6419572 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates
07/16/2002US6419568 Fixed abrasive polishing pad
07/11/2002WO2002038338A3 Composite abrasive particles and method of manufacture
07/11/2002US20020090901 Flexible abrasive product and method of making and using the same
07/11/2002US20020090900 Buckup plate assembly for grinding system
07/11/2002US20020090891 Composite abrasive particles and method of manufacture
07/10/2002CN1357434A Developing sealing surface polishing wheel and its making process
07/10/2002CN1357433A Development screen polishing wheel and its making process
07/09/2002US6416401 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives
07/09/2002US6416400 Apparatus for reducing the roughness and abrasive shedding of coating tapes
07/04/2002US20020086631 Flap wheel
07/04/2002US20020086630 Grinding wheel
07/04/2002US20020086619 Substrate polishing article
07/04/2002US20020086615 Multi characterized chemical mechanical polishing pad and method for fabricating the same
07/03/2002EP1218143A1 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives
07/02/2002US6413287 Reaction injection molded; polyurethane or polyurea binder; bristles with increased amount of particles; cleaning or polishing without damaging surface; brushes
07/02/2002CA2340850A1 Flap wheel
07/02/2002CA2238714C Improvements to sanding disks
06/2002
06/27/2002US20020081952 Method for attaching a fastener to a surface treating member, and such an article having a fastener
06/27/2002US20020081946 Base-pad for a polishing pad
06/26/2002EP1217105A1 Filamentary brush bristle material
06/25/2002US6409586 Fixed abrasive polishing pad
06/25/2002US6408480 Polishing disk
06/20/2002US20020077047 Barrel polishing apparatus
06/20/2002US20020077037 Fixed abrasive articles
06/20/2002US20020077036 Polishing pads and methods relating thereto
06/20/2002US20020077034 Substrate polishing article
06/19/2002EP1215010A2 Grinding apparatus
06/19/2002EP1011925B1 A method for manufacturing a sweeper or abrasive element and such element
06/19/2002CN2495412Y Improved abrasive wheel
06/13/2002WO2002046283A1 Thermoplastic polyurethane foam, process for production thereof and polishing pads made of the foam
06/13/2002US20020072311 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives
06/13/2002US20020072302 Method and apparatus for increasing chemical-mechanical-polishing selectivity
06/12/2002EP1212171A1 Self-leveling pads and methods relating thereto
06/12/2002EP1212170A1 Method and system for chemical mechanical polishing with a cylindrical polishing pad
06/11/2002US6402591 Planarization system for chemical-mechanical polishing
06/06/2002WO2002043940A1 A method of altering and preserving the surface properties of a polishing pad and specific applications therefor
06/06/2002WO2002043922A1 Crosslinked polyethylene polishing pad for chemical-mechnical polishing, polishing apparatus and polishing method
06/06/2002US20020068516 Apparatus and method for controlled delivery of slurry to a region of a polishing device
06/06/2002US20020068515 Method and apparatus for machining workpiece surfaces
06/06/2002US20020068456 Method and system to provide material removal and planarization employing a reactive pad
06/05/2002EP1211023A1 Polishing body, polisher, polishing method, and method for producing semiconductor device
06/05/2002EP1210209A1 Molded polishing pad having integral window
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