Patents
Patents for B24D 13 - Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor (4,710)
06/2004
06/17/2004DE4229022B4 Innenwirkendes Schleifwerkzeug und Herstellungsverfahren Inner-action grinding tool and manufacturing processes
06/17/2004DE10255652A1 Grinding pad for wet-chemical grinding of a substrate surface comprises a polymer matrix consisting of polymers with repetition units and incorporating embedded abrasive particles
06/16/2004EP1071538B1 Method and apparatus for repairing optical discs
06/15/2004US6749714 Polishing body, polisher, polishing method, and method for producing semiconductor device
06/15/2004US6749485 Hydrolytically stable grooved polishing pads for chemical mechanical planarization
06/10/2004WO2004049417A1 Polishing pad and method for manufacturing semiconductor device
06/10/2004WO2004048473A1 Curable emulsions and abrasive articles therefrom
06/10/2004WO2004048033A1 Grinding method and grinding device
06/10/2004WO2003099496A3 Rotary foam sanding tool and method for manufacture
06/10/2004US20040110456 Nonwoven fabric for buffing applications
06/10/2004US20040108063 Method and polishing pad design enabling improved wafer removal from a polishing pad in a CMP process
06/09/2004EP1341643A4 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
06/09/2004DE10356669A1 Material-abrading lapping or machining tool especially for processing semiconductor wafers, has working surface divided into surface elements by mutually crossing grooves
06/08/2004US6746317 Methods and apparatuses for making and using planarizing pads for mechanical and chemical mechanical planarization of microelectronic substrates
06/08/2004US6746311 Polishing pad with release layer
06/08/2004US6745631 Using planar ultrasound sensor; forming relational image
06/03/2004WO2004046216A1 Method of fabricating polyurethane foam with micro pores and polishing pad tehrefrom
06/03/2004WO2004045805A1 Rotary abrasive material
06/03/2004US20040106367 Fixed abrasive polishing pad
06/03/2004US20040106357 Polishing pad for in-situ endpoint detection
05/2004
05/27/2004WO2004043648A1 Polishing apparatus
05/27/2004US20040102574 Stable for a long time, and that may be dried and cured to provide polyurethanes with good physical properties
05/27/2004US20040102141 Polishing pad with window for planarization
05/27/2004US20040102137 Polishing pad for planarization
05/27/2004US20040102049 Method and system to provide material removal and planarization employing a reactive pad
05/25/2004US6739962 Polishing pads and methods relating thereto
05/25/2004US6739947 In situ friction detector method and apparatus
05/20/2004US20040097175 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates
05/19/2004EP1419853A1 Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations
05/19/2004EP1326508B1 Unitary brush having abrasive coated bristles and method of making the same
05/19/2004DE19845166B4 Rotationswerkzeug in der Ausführungsform einer Ringscheibe zur Oberflächenbearbeitung Rotary tool in the embodiment of a washer for surface treatment
05/19/2004DE10110526B4 Vorrichtung zur Feinbearbeitung durch Schleifen, Läppen oder Polieren Apparatus for finishing by grinding, lapping and polishing
05/18/2004US6736709 Grooved polishing pads for chemical mechanical planarization
05/12/2004EP1417703A1 Chemical mechanical polishing pad having holes and/or grooves
05/12/2004CN1494987A Lapping pad containing embedded liquid trace component and its production method
05/12/2004CN1494984A Sander for polishing cloth and polishing cloth sanding method using said sander
05/12/2004CN1494983A Polishing mattress and multilayer polishing mattress
05/06/2004US20040087250 Method and apparatus for forming and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
05/06/2004EP1415764A2 Fastener for a surface treatment article and quick release system
05/05/2004CN1494734A Polishing element, CMP polishing device and production method for semiconductor device
05/04/2004US6730140 Injection molding
05/04/2004US6729950 Chemical mechanical polishing pad having wave shaped grooves
05/04/2004US6729838 Automated barrel panel transfer and processing system
04/2004
04/29/2004US20040082289 Conductive polishing article for electrochemical mechanical polishing
04/29/2004DE202004002905U1 Werkzeug zur Bearbeitung von Oberflächen, Kantenbereichen und Konturen Tool for machining surfaces, edge areas and contours
04/29/2004DE10296621T5 Polierkissen und System Polishing pad and system
04/28/2004EP1412131A1 Method for fabricating polishing pad using laser beam and mask
04/28/2004EP1412129A1 Method for fabricating chemical mechanical polishing pad using laser
04/28/2004CN2613343Y Disc for polishing
04/28/2004CN2613342Y Roller for removing metal burr
04/27/2004US6726555 Tool carrier
04/27/2004US6726528 Polishing pad with optical sensor
04/21/2004EP1409201A1 Fixed abrasive articles with wear indicators
04/21/2004EP0949986B1 Method for the production of optical quality surfaces on glass
04/20/2004US6722955 Buckup plate assembly for grinding system
04/20/2004US6722249 Method of fabricating a polishing pad having an optical window
04/15/2004US20040072516 Polishing pad having a grooved pattern for use in chemical mechanical polishing apparatus
04/15/2004US20040072507 Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particles
04/15/2004US20040072506 Fixed abrasive article for use in modifying a semiconductor wafer
04/15/2004US20040072502 Subpad support with a releasable subpad securing element and polishing apparatus including the subpad support
04/14/2004EP1408538A1 Polishing element, cmp polishing device and productions method for semiconductor device
04/14/2004CN1489508A FIxed abrasive article for use in modifying semiconductor wafer
04/08/2004WO2004028745A1 Polishing pad for planarization
04/08/2004WO2004028744A1 Polishing pad with window for planarization
04/08/2004WO2002064315A8 Polishing disk with end-point detection port
04/08/2004DE10338682A1 Surface treatment brush finishing tool has bristles of different length
04/07/2004CN1487965A Thermoplastic polyurethane foam, process for production thereof and polishing pads made of the foam
04/07/2004CN1487867A Catalytic reactive pad for metal CMP
04/07/2004CN1145201C Abrasive sheet
04/06/2004US6716092 Providing a polishing pad having a layer of adhesive that covers substantially an entire surface of the pad, and curing selected portions of the adhesive layer to reduce adhesive strength of the layer
04/01/2004US20040063387 Through-pad slurry delivery for chemical-mechanical polish
03/2004
03/31/2004CN1486234A 擦拭膜 Wipe the film
03/30/2004US6713413 Nonwoven buffing or polishing material having increased strength and dimensional stability
03/30/2004US6712681 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
03/25/2004WO2004024393A1 A polishing pad support that improves polishing performance and longevity
03/25/2004WO2004024392A1 Measuring the surface properties of polishing pads using ultrasonic reflectance
03/25/2004WO2004024391A1 Novel finishing pad design for multidirectional use
03/25/2004US20040058630 Chemical mechanical polishing pad having holes and or grooves
03/25/2004US20040058629 Apparatus for processing substantially planar workpieces
03/24/2004EP1400312A1 Sanding disc having pleated flaps with circumferential recesses
03/24/2004CN1484568A Polishing disk with end-point detection port
03/24/2004CN1484566A Crosslinked polyethylene polishing pad for chemical mechnical polishing polishing apparatus and polishing method
03/23/2004US6709317 Method and apparatus for uniformly planarizing a microelectronic substrate
03/18/2004WO2004022283A1 Optical disk polishing device
03/18/2004WO2003009965A3 Cutlery polishing apparatus
03/18/2004US20040054023 Having uniform foam structure; pads useful for polishing applications for semiconductor wafers and the like with high accuracy and high efficiency
03/18/2004US20040053570 Novel finishing pad design for multidirectional use
03/18/2004US20040053569 Buffing disc for cleaning hubs
03/18/2004US20040053562 Method for securing a polishing pad to a platen for use in chemical-mechanical polishing of wafers
03/18/2004US20040053042 Wiping film
03/18/2004US20040053007 Used for transporting square or rectangular substrates, such as a glass substrate for a display or the like; substrate is used for producing a display panel of, for example, a liquid crystal display device; nonwarping, dustless
03/17/2004EP1084009B1 Cmp pad conditioner arrangement and method therefor
03/16/2004US6706383 Polishing pad support that improves polishing performance and longevity
03/16/2004US6705934 Polishing pad
03/16/2004US6705928 Through-pad slurry delivery for chemical-mechanical polish
03/11/2004WO2004021426A1 Polishing pad, polishing plate hole cover, polishing apparatus, polishing method, and method for manufacturing semiconductor device
03/11/2004WO2003038862A3 Pads for cmp and polishing substrates
03/11/2004US20040048564 Polishing pads and methods relating thereto
03/11/2004US20040048562 Polishing pads and methods relating thereto
03/11/2004US20040048560 Polishing tool
1 ... 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 ... 48