Patents for B24B 57 - Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents (2,579) |
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03/19/2008 | CN101143275A Bubble damper of slurry supply apparatus |
03/13/2008 | US20080060525 Bubble damper of slurry supply apparatus |
03/12/2008 | CN100374245C Grinding liquid reusing device and system thereof |
03/06/2008 | US20080057831 Double face polishing apparatus |
03/05/2008 | EP1894675A1 Double face polishing apparatus |
03/05/2008 | EP1893385A1 Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components |
03/05/2008 | CN101134289A Apparatus of treating grinding water for processing periphery of eyeglass lens |
02/28/2008 | US20080047667 Substrate holding apparatus and substrate polishing apparatus |
02/21/2008 | WO2008020507A1 Method of recovering abrasive from abrasive slurry waste liquid and apparatus therefor |
02/19/2008 | US7331844 Polishing method |
02/14/2008 | US20080038998 Method for processing a substrate using multiple fluid distribtuions on a polishing surface |
02/13/2008 | CN201020653Y Internal wall surface polishing device for small diameter thin wall metal pipes |
02/13/2008 | CN101121243A Chemical and mechanical grinding method |
02/13/2008 | CN101121239A Chemical and mechanical grinding bench chemical liquid supplying device |
02/13/2008 | CN100368496C Polishing system and method of its use |
02/06/2008 | CN201015843Y Multiposition rotary pilot valve |
01/30/2008 | CN101112751A Chemical mechanical lapping system and chemical mechanical lapping method |
01/30/2008 | CN101112750A Collocation method of pipes for transferring the grinding fluid and the de-ionized water in the chemical and mechanical grinder |
01/30/2008 | CN100364721C 流体混合装置及切削装置 Fluid mixing device and cutting device |
01/24/2008 | US20080016783 Matrix Liquid for Producing a Chip Removal Suspension and Used as a Lubricating or Machining Liquid |
01/23/2008 | EP1881524A1 Polishing slurry and polishing method |
01/23/2008 | CN201009167Y Constant temperature conveyer of polishing solution |
01/23/2008 | CN201009164Y Liquid supplying mechanism of abrasive disk brush |
01/23/2008 | CN101108472A Slurry dispensing system and mehtod thereof |
01/23/2008 | CN101108470A LCD glass grinder |
01/02/2008 | CN100358697C Wire sawing apparatus |
12/20/2007 | DE19849025B4 Kurbelwellen-Schleifmaschine Crankshaft grinding machine |
12/19/2007 | CN200991855Y Device for automatically dripping grinding liquid for grinding-polishing machine |
12/18/2007 | US7309618 Method and apparatus for real time metal film thickness measurement |
12/11/2007 | US7307023 Polishing method of Cu film and method for manufacturing semiconductor device |
12/11/2007 | US7306508 Multi-wire saw |
12/06/2007 | US20070281592 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
12/05/2007 | CN200984707Y Improved blow head structure for chemical and mechanical grinder |
12/04/2007 | US7305275 Material supply system in semiconductor device manufacturing plant |
11/28/2007 | CN200981191Y Optical accessory fine-grinding polishing machine |
11/27/2007 | US7300877 Method of manufacturing a semiconductor device |
11/27/2007 | US7300521 Wall scrubber for blown insulation |
11/22/2007 | US20070270086 Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device |
11/21/2007 | EP1857225A1 Blasting device for premixed abrasive slurry |
11/21/2007 | EP1856586A2 An apparatus for dispensing precise volumes of fluid |
11/21/2007 | CN101073881A Automatic polishing-fluid dropper |
11/15/2007 | US20070264908 Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device |
10/24/2007 | EP1144155B1 Ultrasonic transducer slurry dispenser |
10/17/2007 | CN100343958C Polishing pad having slurry utilization enhancing grooves |
10/11/2007 | US20070238399 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
10/10/2007 | EP1584365B1 Transmitter for wireless control |
10/02/2007 | US7276446 Planarizing solutions, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
09/27/2007 | US20070221615 Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid |
09/26/2007 | CN100339183C Two-site polishing machine |
09/20/2007 | WO2007105714A1 Method of recovering rare earth element from composition containing rare earth fluoride |
09/19/2007 | CN101037585A Polishing fluid and polishing method |
09/19/2007 | CN100337791C Automatic fluid-supplying polishing machine |
09/13/2007 | US20070212988 Polishing apparatus |
09/12/2007 | EP1830985A2 Polishing apparatus and polishing method |
09/12/2007 | CN200945579Y Material dropping device of grinding buffing machine |
09/05/2007 | CN100336179C Polishing fluid and polishing method |
09/05/2007 | CN100335580C Polishing system with stopping compound and method of its use |
08/29/2007 | EP1826411A1 Rotary pump, hydrodynamic mixer with a rotary pump and use of the rotary pump to process fluids |
08/21/2007 | US7258600 Vacuum-assisted pad conditioning system |
08/21/2007 | US7258598 Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device |
08/14/2007 | US7255632 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
08/09/2007 | WO2007087831A1 'universal' barrier cmp slurry for use with low dielectric constant interlayer dielectrics |
08/09/2007 | WO2007087830A1 Initiating chemical mechanical polishing with slurries having small abrasive particles |
08/01/2007 | CN101010166A Method of polishing the inner peripheral end surfaces of substrates |
08/01/2007 | CN101007394A Controlling method for adjusting paper running of paper filter |
08/01/2007 | CN101007393A Reversible drive device with two single action cylinder implemented by closed abrasive |
07/31/2007 | US7249995 Apparatus and method for feeding slurry |
07/25/2007 | EP1811005A1 Polishing system and method of its use |
07/12/2007 | US20070161338 Wafer polishing apparatus and wafer polishing method |
07/05/2007 | US20070155294 Chemical mechanical polishing system |
07/03/2007 | US7238090 Polishing apparatus having a trough |
06/27/2007 | CN1986158A Separating collector and collecting method for waste chemico-mechanical polishing liquid |
06/21/2007 | US20070141845 Apparatus and method for supplying chemicals |
06/19/2007 | US7232363 Polishing solution retainer |
06/19/2007 | US7232360 Uninterrupted abrasive fluid supply |
06/14/2007 | US20070135022 Apparatus for reduction of defects in wet procssed layers |
06/13/2007 | CN2910478Y Automatic polishing cream applicator |
06/07/2007 | US20070128982 Bubble suppressing flow controller with ultrasonic flow meter |
06/06/2007 | EP1197293B1 Polishing device and method |
05/29/2007 | US7224064 Semiconductor device having conductive interconnections and porous and nonporous insulating portions |
05/29/2007 | US7223344 Method for treating an exhausted glycol-based slurry |
05/23/2007 | EP1347824B1 Process and apparatus for blending and distributing a slurry solution |
05/23/2007 | CN1966210A Polishing apparatus and method of polishing work |
05/18/2007 | WO2007054125A1 A system and method for removing particles from a polishing pad |
05/17/2007 | US20070111639 Slurry supply unit for CMP apparatus |
05/17/2007 | US20070108067 Polishing apparatus and method of polishing work |
05/16/2007 | EP1785228A1 Apparatus and method for polishing work using electrolytic reduced water |
05/09/2007 | EP1633527A4 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
05/08/2007 | US7214125 Method for controlling pH during planarization and cleaning of microelectronic substrates |
05/01/2007 | US7210989 Planarizing machines and methods for dispensing planarizing solutions in the processing of microelectronic workpieces |
04/26/2007 | US20070093064 Polishing method of Cu film and method for manufacturing semiconductor device |
04/26/2007 | US20070090040 Flow control device for drain lines of a septic system interrupts flow in the event the proximate water table rises to a level of over-saturation resulting in the effluent flow being directed to the remaining drain lines; each drain line is provided with control box having float controlled inlet valve |
04/24/2007 | US7208417 Apparatus and method for supplying chemicals |
04/18/2007 | EP1226220B1 Polishing system and method of its use |
04/18/2007 | CN1947945A Equipment for chemical-mechanical polishing, method for washing its polishing pad and flattening method |
04/17/2007 | US7204679 Flow control system |
04/03/2007 | US7198729 Slurry capable of reducing scratches on a region to be polished during Chemical Mechanical Polishing |
03/28/2007 | CN2882902Y Two-way driving gear realized by two acting cylinders through closed abrasive materials |
03/27/2007 | US7195546 Polishing apparatus and method of polishing work piece |
03/22/2007 | US20070066200 Perforation and grooving for polishing articles |