| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 05/14/2009 | US20090122941 Device for Producing an Atmospheric Pressure Plasma |
| 05/14/2009 | US20090121638 Cold air atmospheric pressure micro plasma jet application nethod and device |
| 05/14/2009 | US20090121637 Plasma Generator |
| 05/14/2009 | US20090120580 Disturbance-Free, Recipe-Controlled Plasma Processing System And Method |
| 05/14/2009 | CA2741135A1 Hydroxyl radical producing plasma sterilisation apparatus |
| 05/14/2009 | CA2741133A1 Microwave plasma sterilisation system and applicators therefor |
| 05/13/2009 | CN201238415Y Plasma excitation component and plasma processing apparatus including the same |
| 05/13/2009 | CN101431854A Plasma processing apparatus |
| 05/13/2009 | CN101431009A Shower plate and substrate processing apparatus |
| 05/13/2009 | CN101431003A Exhaustion ring and plasma processing device |
| 05/13/2009 | CN100487871C Etching method |
| 05/12/2009 | US7532451 Electrostatic fluid acclerator for and a method of controlling fluid flow |
| 05/12/2009 | US7532322 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 05/12/2009 | US7530359 Plasma treatment system and cleaning method of the same |
| 05/12/2009 | CA2488137C Plasma processing apparatus for powder and plasma processing method for powder |
| 05/12/2009 | CA2350977C A device with a plasma torch |
| 05/07/2009 | WO2009058044A1 Plasmochemical reactor for generating a plasma discharge in gases |
| 05/07/2009 | WO2009057838A1 Apparatus for surface-treating wafer using high-frequency inductively-coupled plasma |
| 05/07/2009 | WO2009057556A1 Plasma generating body and plasma generating apparatus |
| 05/07/2009 | WO2009057555A1 Plasma generating body, plasma generating apparatus, ozone generating apparatus, and exhaust gas treatment apparatus |
| 05/07/2009 | US20090117288 Vacuum plasma generator |
| 05/07/2009 | US20090116166 Apparatus and method for generating atmospheric-pressure plasma |
| 05/06/2009 | EP2054895A2 Hydrogen-lithium fusion device, method and applications |
| 05/06/2009 | EP1305453B1 Ring-shaped high-density plasma source and method |
| 05/06/2009 | CN201234398Y Uninterrupted AC plasma arc electricity supply apparatus |
| 05/06/2009 | CN101427353A Silicon etching method |
| 05/06/2009 | CN101426588A Method for forming a tribologically enhanced surface using laser treating |
| 05/06/2009 | CN101426329A Current collecting device and radio frequency transmission system |
| 05/06/2009 | CN101426328A Current sampling device and radio frequency transmission system |
| 05/06/2009 | CN101426327A Plasma jet device |
| 05/06/2009 | CN101423928A Plasma processing apparatus and controlling method for plasma processing apparatus |
| 05/05/2009 | US7528395 Radiation source, lithographic apparatus and device manufacturing method |
| 05/05/2009 | US7527016 Plasma processing apparatus |
| 04/30/2009 | WO2009055234A1 Offset liner for chamber evacuation |
| 04/30/2009 | WO2009054671A2 Capacitively coupled plasma reactor |
| 04/30/2009 | WO2009053984A1 Aerodynamic performance enhancements using discharge plasma actuators |
| 04/30/2009 | WO2009053614A2 Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma |
| 04/30/2009 | WO2007016218A3 Integrated electroless deposition system |
| 04/30/2009 | WO2006135375A3 Catalytically grown nano-bent nanostructure and method for making the same |
| 04/30/2009 | WO2006002315A3 Electron beam enhanced nitriding system (ebens) |
| 04/30/2009 | US20090110847 Apparatus and Method for Producing Light-Emitting Elements With Organic Compounds |
| 04/30/2009 | US20090110846 Filling completely each of cavities in first nozzle plate with filler, such that upper surface of nozzle plate and upper surface of filler together define contiguous planar surface, and depositing second material onto planar surface to form second nozzle plate having planar exterior surface |
| 04/30/2009 | US20090109141 In-Liquid Plasma Electrode, In-Liquid Plasma Generating Apparatus and In-Liquid Plasma Generating Method |
| 04/30/2009 | US20090108759 High effficiency and high bandwidth plasma generator system for flow control and noise reduction |
| 04/30/2009 | DE10335523B4 Vorrichtung zur Plasmaerregung mit Mikrowellen Apparatus for plasma excitation with microwaves |
| 04/30/2009 | DE102007051444A1 Strip-shaped substrate etching method, involves producing magnetic field in such manner that electrical flux lines run in closed area perpendicular to operating direction in plasma area close to edge in substrate area |
| 04/30/2009 | CA2706589A1 Device and method for simulation of magnetohydrodynamics |
| 04/30/2009 | CA2700575A1 Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma |
| 04/29/2009 | EP2051741A2 Method and device for air disinfection and sterilization |
| 04/29/2009 | EP1232517A4 Plasma focus light source with improved pulse power system |
| 04/29/2009 | EP1208583B1 Plasma reactor for treating substrates having large surfaces |
| 04/29/2009 | CN201230400Y Atmosphere pressure microwave plasma producing device |
| 04/29/2009 | CN101422088A Methods and arrangement for the reduction of byproduct deposition in a plasma processing system |
| 04/29/2009 | CN101420816A Capacitively coupled plasma reactor |
| 04/29/2009 | CN101420815A Amplitude discriminating sensor, radio frequency transmission system and method for load resistance amplitude discrimination |
| 04/29/2009 | CN101419907A High temperature cathode for plasma etching |
| 04/29/2009 | CN100484361C Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure |
| 04/29/2009 | CN100484360C Method for making infused composite material |
| 04/29/2009 | CN100483620C Plasma processing device |
| 04/29/2009 | CN100482817C Gas-tight electrode for carbothermic reduction furnace |
| 04/28/2009 | US7524533 Diffusion barrier layers and processes for depositing metal films thereupon by CVD or ALD processes |
| 04/28/2009 | US7524397 Lower electrode design for higher uniformity |
| 04/23/2009 | WO2009050240A1 Transient plasma ball generation system at long distance |
| 04/23/2009 | WO2009018951A3 Plasma treatment during printing |
| 04/23/2009 | WO2006130739A3 Graphitized carbon coatings for composite electrodes |
| 04/23/2009 | US20090105980 Plasma processing apparatus and method for detecting status of said apparatus |
| 04/23/2009 | US20090102385 Capacitively coupled plasma reactor |
| 04/23/2009 | DE112005000735B4 Siliciumelektrodenplatte für ein Plasmaätzen mit überlegener Haltbarkeit Silicon electrode plate for plasma etching with superior durability |
| 04/23/2009 | DE102007051295A1 Anordnung zur Erzeugung von EUV-Strahlung Arrangement for the generation of EUV radiation |
| 04/23/2009 | DE102006052061B4 Verfahren zur Ansteuerung von zumindest zwei HF-Leistungsgeneratoren Method for driving at least two RF power generators |
| 04/22/2009 | EP1994807B1 Apparatus for producing a plasma jet |
| 04/22/2009 | CN101415293A Plasma head structure and plasma discharge apparatus with the structure |
| 04/22/2009 | CN101415292A Honeycomb medium countercheck discharging low-temperature plasma generator |
| 04/22/2009 | CN101414537A Tunable multi-zone gas injection system |
| 04/22/2009 | CN100482031C Barrier glow discharging plasma generator and generation with atmosphere medium |
| 04/22/2009 | CN100481342C System and method for processing wafer using single frequency RF power in plasma processing chamber |
| 04/22/2009 | CN100481308C Apparatus and method for use of optical system with a plasma processing system |
| 04/22/2009 | CN100481307C Method and apparatus for the compensation of edge ring wear in a plasma processing chamber |
| 04/21/2009 | US7520956 On-wafer monitoring system |
| 04/21/2009 | US7520246 Power supply antenna and power supply method |
| 04/21/2009 | US7520244 Plasma treatment apparatus |
| 04/21/2009 | CA2401251C High frequency matching network |
| 04/16/2009 | WO2009048697A1 Apparatus and method for measuring vapor flux density |
| 04/16/2009 | WO2009048294A2 Magnetized inductively coupled plasma processing apparatus and generating method |
| 04/16/2009 | WO2009048232A1 Microplasma current switch |
| 04/16/2009 | WO2009047442A1 Device for very high frequency plasma assisted cvd under atmospheric pressure, and applications thereof |
| 04/16/2009 | WO2009047441A1 Microwave plasma generating devices and plasma torches |
| 04/16/2009 | WO2009047284A1 Device for injecting a liquid load to be mixed/converted inside a plasma needle or a gaseous flow |
| 04/16/2009 | WO2009046473A1 Method for operating a plasma burner and plasma burner |
| 04/16/2009 | WO2009046472A1 Method for operating a plasma burner and plasma burner |
| 04/16/2009 | WO2008140501A3 Ring plasma jet method and apparatus for making an optical fiber preform |
| 04/16/2009 | WO2008112034A3 5 ns or less neutron and gamma pulse generator |
| 04/16/2009 | WO2007038192A3 Plasma boriding method |
| 04/16/2009 | WO2007038050A3 Treatment processes for a batch ald reactor |
| 04/16/2009 | WO2007035241A3 Methods for synthesis of high quality carbon single-walled nanotubes |
| 04/16/2009 | WO2007001253A3 Method for reducing violence of accidental explosions in solid fuel rocket motors and other energetic devices |
| 04/16/2009 | WO2006022905A3 Discharge-enhanced atmospheric pressure chemical vapor deposition |
| 04/16/2009 | US20090098311 Method for forming thin film |
| 04/16/2009 | US20090095424 Showerhead electrode assemblies and plasma processing chambers incorporating the same |
| 04/16/2009 | US20090095217 Plasma treatment system and cleaning method of the same |