Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2012
08/09/2012DE112010002718T5 Verfahren zur reinigung eines siliciumwafers sowie verfahrenzur herstellung eines epitaktischen wafers unter verwendung des reinigungsverfahrens A method for cleaning a silicon wafer and verfahrenzur producing an epitaxial wafer by using the cleaning process
08/09/2012DE112010002634T5 Halbleitersubstrat-Wärmebehandlungsvorrichtung A semiconductor substrate heat treatment apparatus
08/09/2012DE112010002352T5 FinFET-Strukturen mit verspannungsinduzierenden Source/Drain-biIdenden Abstandshaltern und Verfahren zur Herstellung der FinFET-Strukturen FinFET structures with stress-inducing source / drain biIdenden spacers and method of manufacturing the FinFET structures
08/09/2012DE102012201779A1 Laserstrahlanwendungsmechanismus und Laserbearbeitungsvorrichtung Laser application mechanism and laser processing device
08/09/2012DE102012201719A1 Verfahren zur Herstellung einer elektrisch korrekten integrierten Schaltung A process for producing an electrically correct integrated circuit
08/09/2012DE102012201586A1 Integrierte Schaltungen mit platzsparenden Kondensatoren und Verfahren zu deren Herstellung Integrated circuits with space saving capacitors and methods for their preparation
08/09/2012DE102012201419A1 Laserbearbeitungsvorrichtung Laser processing apparatus
08/09/2012DE102012201025A1 Verfahren zur Herstellung von Halbleiterbauelementen mit lokalen Kontakten A process for producing semiconductor devices with local contacts
08/09/2012DE102012100869A1 Zusammendrückende polykristalline Siliziumschicht und Herstellungsverfahren dafür Compressing polycrystalline silicon layer and manufacturing method thereof
08/09/2012DE102012100767A1 Drain-erweiterte Feldeffekttransistoren und Verfahren zu deren Herstellung Drain-extended field effect transistors and methods for their preparation
08/09/2012DE102012002263A1 Dünnfilm-Solarzelle und Verfahren zum Herstellen derselben A thin film solar cell and method of manufacturing the same
08/09/2012DE102011078331A1 Method for producing ohmic contacts on silicon carbide substrate of semiconductor device of e.g. power electronics device, involves producing oxide layer on surface of substrate, and applying contact metallization layer on contact region
08/09/2012DE102011010751A1 Performing epitaxy process, comprises arranging substrate exhibiting semiconductor surfaces on carrier, heating semiconductor surfaces to temperature provided for epitaxy and epitaxially growing semiconductor material
08/09/2012DE102011010362A1 Semiconductor device has planar conductor that is formed on insulation layer in opposite side of substrate, where lateral edge of conductor is contacted and covered with metal film
08/09/2012DE102011000562A1 Method for producing solderable, electrical conductive structures on substrate surface at backside of laser-fired-contact cell, involves treating metal-containing composition in order to deposit metal as structure on substrate surface
08/09/2012DE102010000033B4 Verfahren zum Herstellen eines Halbleiterbauelements A method of manufacturing a semiconductor device
08/09/2012DE10137369B4 Halbleitersubstrat, Feldeffekt-Transistor, Verfahren zur Bildung einer SiGe-Schicht und Verfahren zur Bildung einer gespannten Si-Schicht unter Verwendung derselben, und Verfahren zur Herstellung eines Feldeffekt-Transistors Semiconductor substrate, the field effect transistor, method of forming a SiGe layer and method for forming a strained Si layer using the same, and method for producing a field effect transistor
08/08/2012EP2485282A1 Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device
08/08/2012EP2485252A1 A method of processing substrate holder material
08/08/2012EP2485251A2 Method of cutting semiconductor substrate
08/08/2012EP2485250A1 Semiconductor device, and process for production of semiconductor device
08/08/2012EP2485249A2 Semi-conductor structure with smooth surface and method for obtaining such a structure
08/08/2012EP2485248A1 Catalytic cvd device, film forming method and solar cell manufacturing method
08/08/2012EP2485247A2 Image processing-based lithography system and target object coating method
08/08/2012EP2485246A2 Method for manufacturing and reoxidising a TiN/Ta2O5/TiN capacitor
08/08/2012EP2485245A2 Method for manufacturing a TiN/Ta2O5/TiN capacitor
08/08/2012EP2485244A1 Pressure applying module, pressure applying apparatus, and substrate bonding apparatus
08/08/2012EP2485071A1 Inorganic optical filter, optical element, and light source
08/08/2012EP2484962A2 Led-based light bulb
08/08/2012EP2484818A1 Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device
08/08/2012EP2484817A1 Method for preserving a gallium nitride substrate, preserved gallium nitride substrate, semiconductor device, and manufacturing method therefor
08/08/2012EP2484816A1 Method for production of laminate
08/08/2012EP2484804A1 Catalytic cvd device, method for formation of film, process for production of solar cell, and substrate holder
08/08/2012EP2484803A1 Method of deposition of Al2O3/SiO2 stacks, from aluminium and silicon precursors
08/08/2012EP2484802A1 Method of deposition of Al2O3/SiO2 stacks from DMAI and silicon precursors
08/08/2012EP2484801A1 Method of deposition of Al2O3/SiO2 stacks, from TMA or TEA and silicon precursors
08/08/2012EP2484739A1 Conductive connection material, method for connection between terminals and method for manufacturing connecting terminal
08/08/2012EP2484732A1 Composite and method for the production thereof
08/08/2012EP2484190A1 Cold plate with pins
08/08/2012EP2483931A2 Solar cell module and method of manufacturing the same
08/08/2012EP2483929A2 Semiconductor device with oxygen-diffusion barrier layer and method for fabricating same
08/08/2012EP2483919A1 Nanoscale interconnects fabricated by electrical field directed assembly of nanoelements
08/08/2012EP2483918A1 Sample receiving device for sample materials in ultra-high vacuum chambers
08/08/2012EP2483917A1 Place station for a pick-and-place machine
08/08/2012EP2483916A1 Electronic devices and systems, and methods for making and using the same
08/08/2012EP2483915A1 Electronic devices and systems, and methods for making and using the same
08/08/2012EP2483914A1 Method for producing a light-emitting diode
08/08/2012EP2483456A2 Wafer pretreatment for copper electroplating
08/08/2012EP2483450A1 System for converting energy with an enhanced electric field
08/08/2012EP2340556B1 Production method and production device for strings
08/08/2012EP2313914B1 Method for electron beam induced etching
08/08/2012EP2257977B1 Method for manufacturing an integrated circuit having long and short channel metal gate devices
08/08/2012EP2165364B1 Vertical current controlled silicon on insulator (soi) device and method of forming same
08/08/2012EP2139553B1 Apparatus for setting the parameters of an alert window used for timing the delivery of etc signals to a heart under varying cardiac conditions
08/08/2012EP2073939B1 Wet processing apparatus using a fluid meniscus
08/08/2012EP1722409B1 Wire bonding method
08/08/2012EP1670040B1 Projection exposure apparatus, projection exposure method, and device manufacturing method
08/08/2012EP1639635B1 Methods for forming interconnect structures in integrated circuit devices
08/08/2012EP1610365B1 Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry
08/08/2012EP1497697B1 Photoresist compositions comprising acetals and ketals as solvents
08/08/2012EP1405349B1 Algan/gan hemts having a gate contact on a gan based cap segment and methods of fabricating the same
08/08/2012EP1222695B1 Integrated circuit with at least one capacitor and method for producing the same
08/08/2012CN202373621U Graphite boat for silicon wafer coating
08/08/2012CN202373619U Device for taking photovoltaic stacked silicon wafers at high speed
08/08/2012CN202373570U Quartz boat
08/08/2012CN202373569U Calibrating mold
08/08/2012CN202373568U Mounting tool for electrostatic adsorption disc
08/08/2012CN202373567U Track cushion block device for chip loading machine
08/08/2012CN202373566U Device for wet etching of semiconductor
08/08/2012CN202373565U Reaction cavity heating device
08/08/2012CN202373564U Mechanical operation platform with safety interlocking device for etching machine
08/08/2012CN202373563U Temperature-controllable avalanche photodiode assembly
08/08/2012CN202373562U Reaction device capable of preventing wafer over-reaction
08/08/2012CN202373561U Device for large-area roll-to-roll flexible substrate surface spraying and cracking selenium source
08/08/2012CN202372758U Baking device
08/08/2012CN202367587U Chemical and mechanical grinding device
08/08/2012CN202367583U Chemical-mechanical polishing device
08/08/2012CN202366896U Anti-pollution device
08/08/2012CN1998085B Methods of fabricating nitride-based transistors having regrown ohmic contact regions and nitride-based transistors having regrown ohmic contact regions
08/08/2012CN1870301B Gallium nitride semiconductor device
08/08/2012CN1790748B Semiconductor device and method for manufacturing the same
08/08/2012CN1627435B Gated diode memory cells and write method
08/08/2012CN102630350A Repair method and apparatus of light emitting diode using quantum dot coating
08/08/2012CN102630344A Semiconductor device and production method thereof
08/08/2012CN102630338A Air tension apparatus
08/08/2012CN102630337A Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate
08/08/2012CN102630336A Method of manufacturing crystalline semiconductor film
08/08/2012CN102630335A Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device
08/08/2012CN102630334A Pressure applying module, pressure applying apparatus, and substrate bonding apparatus
08/08/2012CN102630246A Antireflective coating composition and process thereof
08/08/2012CN102629664A Array substrate and manufacturing method thereof, and display apparatus
08/08/2012CN102629628A TFT array substrate and manufacturing method thereof and liquid crystal display
08/08/2012CN102629627A Heterogeneous gate tunneling transistor and forming method thereof
08/08/2012CN102629626A Semiconductor device
08/08/2012CN102629624A Metal-insulator-semiconductor (MIS) grid enhanced high electron mobility transistor (HEMT) device based on gallium nitride (GaN) and manufacture method of MIS grid enhanced HEMT device
08/08/2012CN102629621A Circuit, array substrate and manufacturing method thereof, and display
08/08/2012CN102629612A Pixel structure and manufacturing method
08/08/2012CN102629611A Display device, array substrate and manufacturing method thereof
08/08/2012CN102629610A Array substrate of X-ray detection device and manufacturing method thereof
08/08/2012CN102629609A Array substrate and manufacturing method thereof, liquid crystal panel, and display device
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