Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1989
10/04/1989EP0335679A2 Bonded ceramic-metal composite substrate, circuit board constructed therewith and methods for production thereof
10/04/1989EP0335603A2 A fabrication method and structure for field isolation in field effect transistors on integrated circuit chips
10/04/1989EP0335557A2 High-speed dielectrically isolated devices utilizing buried silicide regions and fabrication thereof
10/04/1989EP0335498A2 Field-effect transistor having a lateral surface superlattice, and method of making the same
10/04/1989EP0335491A2 Monolithic integration of optoelectronic and electronic devices
10/04/1989EP0335459A2 Electrical connections for electronic devices
10/04/1989EP0335453A1 Process for obtaining a single crystal heteroepitaxial ternary layer on a binary layer and crucible therefor
10/04/1989EP0335445A1 Method of manufacturing a conductivity modulation MOS semiconductor power device (Himos)
10/04/1989EP0335421A2 Semiconductor manufacturing apparatus
10/04/1989EP0335395A2 Non-volatile semiconductor memory device and method for manufacture thereof
10/04/1989EP0335383A2 Semiconductor device having a metallization film layer
10/04/1989EP0335313A2 Method of manufacturing semiconductor device and apparatus for use in practicing the method
10/04/1989EP0335291A2 Method and device of plating pin grid arrays
10/04/1989EP0335288A2 A method to evaluate the homogenization of the properties across the silicon surface region of an oxidized silicon wafer
10/04/1989EP0335267A2 Molecular beam epitaxy apparatus
10/04/1989EP0335220A2 Positive-working light-sensitive mixture and recording material of high thermal stability prepared therefrom
10/04/1989EP0335217A2 Integrated Schottky diode and transistor
10/04/1989EP0335163A2 Apparatus for detecting foreign matter on the surface of a substrate
10/04/1989EP0335148A2 Method for programming MOS and CMOS rom memories
10/04/1989EP0335074A2 Alignment mark system
10/04/1989EP0335019A1 Semiconductor chip bonded to a substrate
10/04/1989EP0334983A1 Integrated CMOS/NMOS circuit
10/04/1989EP0334933A1 Folded container for packaging electronic devices
10/04/1989EP0334927A1 Integrated circuit trench cell
10/04/1989EP0334906A1 Silicon-containing negative resist material, and process for its use in patterning substrates.
10/04/1989EP0315678A4 High volume crystal plating apparatus and method.
10/04/1989EP0191439B1 Linearly structured multiple aperture and beam blanking electrodes for the production of a multiplicity of individually blankable corpuscular beam probes in a lithography apparatus
10/04/1989CN2045497U Tester with upper probe and lower probe
10/04/1989CN1036049A Annealing process of vertically pulled silicon doped by neutron transmutation
10/03/1989US4872168 Integrated circuit with memory self-test
10/03/1989US4872140 Laser programmable memory array
10/03/1989US4872047 Semiconductor die attach system
10/03/1989US4872046 Heterojunction semiconductor device with <001> tilt
10/03/1989US4872045 Input protection device for C-MOS device
10/03/1989US4872043 Forming transfer electrons; hydrogen bonding
10/03/1989US4872041 Semiconductor device equipped with a field effect transistor having a floating gate
10/03/1989US4872040 Self-aligned heterojunction transistor
10/03/1989US4872039 Buried lateral diode and method for making same
10/03/1989US4872038 Lateral surface superlattice having negative differential conductivity novel process for producing same
10/03/1989US4872010 Analog-to-digital converter made with focused ion beam technology
10/03/1989US4871963 Method and apparatus for testing EPROM type semiconductor devices during burn-in
10/03/1989US4871930 Programmable logic device with array blocks connected via programmable interconnect
10/03/1989US4871919 Electron beam lithography alignment using electric field changes to achieve registration
10/03/1989US4871692 Using compound of phosphorous with sulfur, selenium, tellurium or polonium
10/03/1989US4871691 Vapor phase reaction of silane and metal haoogenide; heat treatment
10/03/1989US4871690 Epitaxial depositing semiconductor layers; annealing
10/03/1989US4871689 Filling with oxynitride dielectric
10/03/1989US4871688 Sequence of etching polysilicon in semiconductor memory devices
10/03/1989US4871687 Method of fabricating a MESFET transistor with gate spaced above source electrode by layer of air or the like
10/03/1989US4871686 Integrated Schottky diode and transistor
10/03/1989US4871685 Method of manufacturing bipolar transistor with self-aligned external base and emitter regions
10/03/1989US4871684 Emitter, contact formed beneath protective coating
10/03/1989US4871651 Cryogenic process for metal lift-off
10/03/1989US4871646 Polysilane compound and photosensitive composition
10/03/1989US4871630 Mask using lithographic image size reduction
10/03/1989US4871619 Electronic components comprising polymide dielectric layers
10/03/1989US4871617 Ohmic contacts and interconnects to silicon and method of making same
10/03/1989US4871517 Apparatus for parting wafer-shaped silicon bodies, useful for solar cells, from a silicon tape manufactured in a horizontal tape-drawing method
10/03/1989US4871422 Etching solutions containing ammonium fluoride and anionic sulfate esters of alkylphenol polyglycidol ethers and method of etching
10/03/1989US4871421 Split-phase driver for plasma etch system
10/03/1989US4871420 Selective etching process
10/03/1989US4871419 Method of forming pattern of a two-layer metal film
10/03/1989US4871418 Etching of polyoxymethylene glycol substrate which has patterned photoresist coating
10/03/1989US4871417 Method and apparatus for surface treating of substrates
10/03/1989US4871416 Method and device for cleaning substrates
10/03/1989US4871405 Method of bonding a semiconductor to a package with a low and high viscosity bonding agent
10/03/1989US4871290 Automatic handling apparatus for plate-shaped objects
10/03/1989US4871244 Movable member mounting
10/03/1989US4871110 Method and apparatus for aligning solder balls
10/03/1989CA1262200A1 Photoinitiator systems for free radical polymerizable compositions
10/03/1989CA1262187A1 Charge-coupled device
10/03/1989CA1262110A1 Method of making edge-aligned implants and electrodes therefor
10/03/1989CA1262086A1 Method of manufacturing semiconductor devices, in which material is deposited from a reaction gas, and apparatus for carrying out such a method
09/1989
09/27/1989EP0334791A1 Process for the preparation of silicon nitride
09/27/1989EP0334784A2 Analog macro embedded in a digital gate array
09/27/1989EP0334761A1 Method for forming a self-aligned source/drain contact for a MOS transistor
09/27/1989EP0334747A1 Device for interconnecting and protecting a bare chip of a high frequency component
09/27/1989EP0334709A1 Apparatus for selective tin-plating of the conductors of a high density integrated support and a tin-plating process utilizing such an apparatus
09/27/1989EP0334684A1 A method for heat-treating gallium arsenide monocrystals
09/27/1989EP0334682A2 Heterostructure transistor having a germanium layer on gallium arsenide and a method for manufacturing the same using molecular beam expitaxial growth
09/27/1989EP0334664A2 Recovery of lower-boiling silanes in A CVD process
09/27/1989EP0334659A2 Conductivity modulated field effect transistor device
09/27/1989EP0334525A1 Method of etching a layer including polysilicon
09/27/1989EP0334453A2 A process for preparing non-porous, selective membrane layers
09/27/1989EP0334433A1 Planetary reactor for epitaxy
09/27/1989EP0334432A1 Epitaxy reactor with wall protected against deposits
09/27/1989EP0334330A2 Opto-electric transducing element and method for producing the same
09/27/1989EP0334269A2 Benzocyclobutene-based organosilane adhesion aids
09/27/1989EP0334268A2 Means of forming planar isolation
09/27/1989EP0334233A2 Photosensitive resin composition and pattern formation using the same
09/27/1989EP0334110A2 Process for producing polycristalline layers with large crystals for thin film semiconductor devices, like solar cells
09/27/1989EP0334109A1 Process and apparatus for the production of semiconducting layers made of silicium-germanium alloys by flow discharge technics and particularly of solar cells
09/27/1989EP0334058A2 Charge injection device with low noise readout
09/27/1989EP0334052A2 Thin film transistor
09/27/1989EP0334006A1 Stacked channel heterojunction fet
09/27/1989EP0333997A2 Bipolar transistor
09/27/1989EP0333842A1 Carrier for flat panel displays
09/27/1989EP0333838A1 GaAs ELECTRICAL CIRCUIT DEVICES WITH LANGMUIR-BLODGETT INSULATOR LAYER
09/27/1989EP0333803A1 Oxide removal from metallic contact bumps formed on semiconductor devices to improve hybridization cold-welds
09/27/1989EP0333734A1 Attachment of semiconductor die to lead frame by means of an adhesive resin
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