Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1989
10/17/1989US4874497 Thin film forming apparatus
10/17/1989US4874494 Bias sputtering thin film
10/17/1989US4874484 Etching method for generating apertured openings or trenches in layers or substrates composed of n-doped silicon
10/17/1989US4874464 Process for epitaxial deposition of silicon
10/17/1989US4874463 Coating with etch resistant coating, etching, polishing
10/17/1989US4874462 Method of forming patterned film on substrate surface by using metal alkoxide sol
10/17/1989US4874459 In evacuated housing with temperature controlled tiltable support
10/17/1989US4874444 Die-bonding method and apparatus therefor
10/17/1989US4874438 Intermetallic compound semiconductor thin film and method of manufacturing same
10/17/1989US4874273 Apparatus for holding and/or conveying articles by fluid
10/17/1989US4874086 Film carrier and a method for manufacturing a semiconductor device utilizing the same
10/17/1989US4873942 Plasma enhanced chemical vapor deposition wafer holding fixture
10/17/1989US4873833 Apparatus comprising a high-vacuum chamber
10/12/1989DE3910185A1 Silicon wafer having excellent getter capability, and method for fabricating it
10/12/1989DE3811068A1 Method for one-sided processing of bodies of planar extent, in particular of semiconductor wafers, and device for carrying out the method
10/12/1989DE3811045A1 Process for preparing electroconductive sintered layers
10/12/1989DE3810594A1 Arrangement for the protection of integrated components against damage by uncontrolled electrostatic discharge in handling systems
10/12/1989DE3809693A1 Process for producing ceramic tape-casting compositions for thin-film circuits
10/11/1989EP0336869A2 A multilayered metallurgical structure for an electronic component
10/11/1989EP0336831A1 Process of manufacturing alternating layers of monocrystalline semiconductor material and layers of isolating material
10/11/1989EP0336830A1 Method for producing an alternance of monocrystalline semiconductor layers and insulating layers
10/11/1989EP0336741A2 Semiconductor integrated circuit with bipolar transistors and MOSFETs
10/11/1989EP0336679A2 BIC memory cell structure and a manufacturing method thereof
10/11/1989EP0336672A2 Epitaxial deposition of thin films
10/11/1989EP0336660A1 Semiconductor devices having multi-level metal interconnects
10/11/1989EP0336605A2 High sensitivity mid and deep UV resist
10/11/1989EP0336604A2 Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom
10/11/1989EP0336528A2 Automated discretionary bonding of multiple parallel elements
10/11/1989EP0336515A1 Method of manufacturing a semiconductor device having a silicon substrate with fully or partly sunken field oxide regions
10/11/1989EP0336514A1 Method of providing a semiconductor body on a support
10/11/1989EP0336500A1 Integrated circuit comprising a programmable cell
10/11/1989EP0336499A1 Method of manufacturing a semiconductor device having an SOI structure
10/11/1989EP0336498A1 Semiconductor memory device
10/11/1989EP0336461A1 Surface planarization process of semiconductor devices
10/11/1989EP0336372A2 Moistureproof coating
10/11/1989EP0336114A2 Apparatus for detecting the position of contacts of electric or electronic components
10/11/1989EP0336026A1 Fabrication of customized integrated circuits
10/11/1989EP0335965A1 Phantom esd protection circuit employing e-field crowding
10/11/1989EP0335919A1 System and method for securing integrated circuits from unauthorized copying
10/11/1989EP0221895B1 Container for corrosive liquids
10/11/1989EP0221156B1 Method of making a device comprising a patterned aluminum layer
10/11/1989CN1036297A Prodn. of mo-cu lead wire for diode
10/11/1989CN1036296A Method and apparatus for temp. treatment of semiconductor materials
10/11/1989CN1036295A Method for surface displaying ion implantation doped region
10/11/1989CN1036294A Application of galliumization in silicon mesa transister prodn.
10/11/1989CN1036264A A corrosion method for testing the stress-resistance of connecting legs of semiconductor devices
10/10/1989US4873670 Complementary semiconductor memory device with pull-up and pull down
10/10/1989US4873664 Self restoring ferroelectric memory
10/10/1989US4873565 Stud with corrosion resistant cladding extends through insulator
10/10/1989US4873563 Solid state monolithic switching device
10/10/1989US4873562 Charge-coupled device with lowering of transfer potential at output and fabrication method thereof
10/10/1989US4873561 High dynamic range charge-coupled device
10/10/1989US4873560 Dynamic random access memory having buried word lines
10/10/1989US4873559 Semiconductor memory device and a process for producing the same
10/10/1989US4873558 Multilayer; variations in doping concentration
10/10/1989US4873557 MIS FET and process of fabricating the same
10/10/1989US4873447 Wafer transport apparatus for ion implantation apparatus
10/10/1989US4873413 Method and apparatus for writing a line on a patterned substrate
10/10/1989US4873205 Method for providing silicide bridge contact between silicon regions separated by a thin dielectric
10/10/1989US4873204 Method for making silicide interconnection structures for integrated circuit devices
10/10/1989US4873203 Silicon nitride masking, oxidation of silicon substrate, burying polycrystalline silicon in trench
10/10/1989US4873201 Dividing into individual devices; forming penetrating terminals
10/10/1989US4873200 Oxidizing polycrystalline silicon substrate, doping, etching, overcoating with metal silicide
10/10/1989US4873199 Method of making bipolar integrated circuits
10/10/1989US4873176 Reticulation resistant photoresist coating
10/10/1989US4873169 Reacting naphthoquinone diazide sulfonic acid halide with mono- or polyvalent phenolic compound
10/10/1989US4873163 Photomask material
10/10/1989US4873125 Method for forming deposited film
10/10/1989US4872964 Planar magnetron sputtering apparatus and its magnetic source
10/10/1989US4872947 CVD of silicon oxide using TEOS decomposition and in-situ planarization process
10/10/1989US4872944 Process for the control in real time of the selectivity of the etching by analysis of the plasma gases in a process of reactive ionic etching and a reactor therefore
10/10/1989US4872943 Epitaxial growth from super-saturated solution of cadmium and mercury in tellurium; controlling temperature also controls concentration
10/10/1989US4872938 Processing apparatus
10/10/1989US4872835 Hot chuck assembly for integrated circuit wafers
10/10/1989US4872825 Method and apparatus for making encapsulated electronic circuit devices
10/10/1989US4872799 Boat transfer and queuing furnace elevator and method
10/10/1989US4872554 Reinforced carrier with embedded rigid insert
10/10/1989US4872358 Driving mechanism having a pressure member
10/10/1989US4872356 Resistivity probe fixture
10/10/1989US4872260 Method of making pre-formed lead-ins for an IC package
10/10/1989CA1262294A1 Method of manufacturing a semiconductor device by vapour phase deposition using multiple inlet flow control
10/10/1989CA1262293A1 Semiconductor super lattice device
10/10/1989CA1262291A1 Method and apparatus for measuring the ion implant dosage in a semiconductor crystal
10/05/1989WO1989009493A1 Burn-in pads for tab interconnect structures
10/05/1989WO1989009492A1 Gate array structure and process to allow optioning at second metal mask only
10/05/1989WO1989009491A1 Device mounting
10/05/1989WO1989009490A1 Tapered laser or waveguide optoelectronic structures and method
10/05/1989WO1989009489A2 Etching method
10/05/1989WO1989009294A1 Precursors for metal fluoride deposition and use thereof
10/05/1989WO1989007367A3 Analog-to-digital converter made with focused ion beam technology
10/05/1989DE3910033A1 Semiconductor memory and method for producing it
10/05/1989DE3909669A1 Vorrichtung zur bearbeitung von werkstuecken Apparatus for machining workpieces
10/05/1989DE3809722A1 Process for fabricating electrical contacts
10/04/1989EP0335752A2 System for manufacturing semiconductors under clean condition
10/04/1989EP0335744A1 Semiconducting device mounting
10/04/1989EP0335741A2 Dielectrically isolated semiconductor substrate
10/04/1989EP0335740A2 IC packing device with impedance adjusting insulative layer
10/04/1989EP0335720A2 Bipolar transistor device and method of manufacturing the same
10/04/1989EP0335697A2 Integrated circuit device comprising interconnection wiring
10/04/1989EP0335695A2 Integrated circuit device comprising interconnection wiring
1 ... 6324 6325 6326 6327 6328 6329 6330 6331 6332 6333 6334 6335 6336 6337 6338 6339 6340 6341 6342 6343 6344 ... 6590