Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1991
08/07/1991EP0439751A2 Superconductor gate field effect transistor
08/07/1991EP0439750A2 Semiconductor superconductor integrated circuit technology
08/07/1991EP0439727A2 Process to make grooves in silicon substrates for high density integrated circuits
08/07/1991EP0439644A1 Light-emitting semiconductor device substrate and method of manufacturing the same
08/07/1991EP0439634A1 Method of manufacturing a semiconductor device including a trench capacitor
08/07/1991EP0439619A1 Contact member relative to electrically charged material
08/07/1991EP0305411B1 Molecular beam etching system and method
08/07/1991CA2035857A1 Leadframe
08/06/1991USH948 Forming diffusion barrier at interface
08/06/1991US5038380 Method for recognizing position of component and apparatus therefor
08/06/1991US5038322 Method of and device for sub-micron processing a surface
08/06/1991US5038321 Eraseable electro-optic storage disk, method of and apparatus for recording and reading data therefor
08/06/1991US5038200 Resin insulated type semiconductor device
08/06/1991US5038198 Modular semiconductor power device
08/06/1991US5038196 Bonding chip to frame using rubber
08/06/1991US5038195 protective nickel alloy coating to copper leads
08/06/1991US5038194 Semiconductor device
08/06/1991US5038193 Semiconductor integrated circuit device
08/06/1991US5038192 Gate array cell having FETs of different and optimized sizes
08/06/1991US5038191 Semiconductor memory device
08/06/1991US5038188 Insulated-gate type transistor and semiconductor integrated circuit using such transistor
08/06/1991US5038185 Structurally consistent surface skimming hetero-transverse junction lasers and lateral heterojunction bipolar transistors
08/06/1991US5038184 Thin film varactors
08/06/1991US5038183 Diode used in reference potential generating circuit for dram
08/06/1991US5038068 Thin film pattern and method of forming the same
08/06/1991US5038048 Defect detection system and method for pattern to be inspected utilizing multiple-focus image signals
08/06/1991US5038019 For semiconductor
08/06/1991US5038013 Plasma processing apparatus including an electromagnet with a bird cage core
08/06/1991US5037876 Matrix of heat resistant polymer intercalated with diamond or amorphous, hydrogenated carbon solid filler; thermoconductiv-ity, oxygen etchability
08/06/1991US5037782 Method of making a semiconductor device including via holes
08/06/1991US5037781 Multi-layered field oxide structure
08/06/1991US5037780 Pressing against transparent substrate using first and second pressure tools
08/06/1991US5037779 Method of encapsulating a sensor device using capillary action and the device so encapsulated
08/06/1991US5037778 Gold, silicon cladding
08/06/1991US5037777 Method for forming a multi-layer semiconductor device using selective planarization
08/06/1991US5037776 Multilayer; one step
08/06/1991US5037775 Reacting vapor phase reducible compound with reducing agent
08/06/1991US5037774 Interface buffer layer of silicon; prevention stacking faults
08/06/1991US5037773 Stacked capacitor doping technique making use of rugged polysilicon
08/06/1991US5037772 Method for forming a polysilicon to polysilicon capacitor
08/06/1991US5037770 Process for the production of a field effect transistor using a lanthanum arsenide contact layer
08/06/1991US5037768 Multilayer; nitride and two polycrystalline layers
08/06/1991US5037767 Method of manufacturing a semiconductor device by ion implantation through an ion-sensitive resist
08/06/1991US5037766 Method of fabricating a thin film polysilicon thin film transistor or resistor
08/06/1991US5037721 Positive radiation-sensitive mixture containing monomeric acid-cleavable compound and radiation-sensitive recording material produced therefrom
08/06/1991US5037720 Hydroxylated aromatic polyamide polymer containing bound naphthoquinone diazide photosensitizer, method of making and use
08/06/1991US5037709 Light emitting diodes; brightness
08/06/1991US5037676 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
08/06/1991US5037674 Method of chemically vapor depositing a thin film of GaAs
08/06/1991US5037622 Improved crucible and capillary die unit
08/06/1991US5037514 Introducing a silicon halide and oxygen into a chamber to form a silicon oxide layer containing halogen which neutralizes alkali ions
08/06/1991US5037506 Method of stripping layers of organic materials
08/06/1991US5037505 Depositing a layer of resin, masking, ethcing, depositing a layer of silica, masking and etching
08/06/1991US5037502 Process for producing a single-crystal substrate of silicon carbide
08/06/1991US5037262 Holding device for a disk and application therefor
08/06/1991US5037023 Method and apparatus for wire bonding
08/06/1991US5036794 CVD apparatus
08/06/1991US5036646 Method of packaging an integrated circuit in an inert gas
08/06/1991US5036624 Notch grinder
08/06/1991US5036584 Method of manufacture of copper cored enclosures for hybrid circuits
08/06/1991CA2034602A1 Novolak resins of lowered hydroxyl content and high contrast high thermal stability positive photoresists prepared therefrom
08/03/1991CA2035406A1 Radiation-sensitive mixture, radiation-sensitive recording material produced therewith and process for producing relief copies
08/01/1991DE4102731A1 Directly writing multibeam lithography system - has substrate markers with radiation energy source, generating first number of radiation beams
08/01/1991DE4039104A1 Semiconductor device prodn. by etching deep groove around device - except under lead to minimise leakage current
08/01/1991DE4002397A1 Positive photosensitive mixt. contg. hydroxy-aralkyl acrylate polymer - and sensitiser, useful in printing plate mfr. and as photoresist
07/1991
07/31/1991EP0439371A2 Photoresist containing aliphatic di- and tri-esters of aliphatic and aromatic di- and tri-acids and alcohols
07/31/1991EP0439361A2 Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
07/31/1991EP0439360A2 Rotating sputtering apparatus for selected erosion
07/31/1991EP0439322A2 Device and method for measuring the gap between two opposed objects
07/31/1991EP0439310A2 Semiconductor device for preventing malfunction caused by a noise
07/31/1991EP0439301A1 Semiconductor integrated-circuit device
07/31/1991EP0439289A2 Pattern-forming method and radiation resist for use when working this pattern-forming method
07/31/1991EP0439258A2 Actinic radiation-reactive pressure-sensitive adhesive composition
07/31/1991EP0439230A2 Active bypass for inhibiting high-frequency supply voltage variations in integrated circuits
07/31/1991EP0439227A1 Semiconductor device comprising a support, method of manufacturing it, and method of manufacturing the support
07/31/1991EP0439220A2 Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type
07/31/1991EP0439195A2 Method for fabricating a semiconductor device including a semi-insulating semiconductor layer
07/31/1991EP0439188A2 Semiconductor integrated circuit
07/31/1991EP0439173A2 Process of fabricating field effect transistor with LDD structure
07/31/1991EP0439164A2 Field-effect transistor having a vertical structure and method of manufacturing the same
07/31/1991EP0439163A2 Semiconductor device having a high-frequency bipolar transistor
07/31/1991EP0439141A2 Memory circuit with improved power interconnections
07/31/1991EP0439137A2 Substrate for packaging a semiconductor device, packaging structure and method
07/31/1991EP0439136A2 Method for electrically connecting and packaging a semiconductor device
07/31/1991EP0439134A2 Substrate for packaging a semiconductor device, packaging structure and method
07/31/1991EP0439128A2 Housing for semiconductor device and method of manufacturing
07/31/1991EP0439114A1 Compound semiconductor device having gate electrode self-aligned to source and drain electrodes and method of manufacturing the same
07/31/1991EP0439101A2 Dry etching method
07/31/1991EP0439084A2 Assembling system of semiconductor chip
07/31/1991EP0439064A1 Method of epitaxially growing compound crystal and doping method therein
07/31/1991EP0439052A1 Exposure system
07/31/1991EP0439003A1 Crimp-type semiconductor device having non-alloy structure
07/31/1991EP0439000A1 Electrostatic clamp and method
07/31/1991EP0438959A2 Semiconductor device structure employing a multi-level epitaxial structure and a method of manufacturing same
07/31/1991EP0438957A2 Dry interface thermal chuck system for semiconductor wafer testing
07/31/1991EP0438882A2 Enhanced fluorescence polymers and interconnect structures using them
07/31/1991EP0438742A1 Method of fabricating a semiconductor device of thin package type
07/31/1991EP0438727A2 Process and solution for liquid phase treatment of semiconductor surfaces
07/31/1991EP0438705A2 Integrated circuit driver inhibit control method for test
07/31/1991EP0438700A1 Turn-off MOS-controlled power semiconductor device and method of making the same
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