Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1991
09/05/1991WO1991013470A1 Process for assembling micro-mechanical components by means of a thick-film technique
09/05/1991WO1991013463A1 Process for producing an insulated monocrystalline silicon island
09/05/1991WO1991013462A2 Methods of forming electronic packages
09/05/1991WO1991013461A1 Method of treating semiconductor substrate surface and device therefor
09/05/1991WO1991013460A1 Diffuser features for spin-coated films
09/05/1991WO1991013459A1 Optically compensated bipolar transistor
09/05/1991WO1991013458A1 Charge neutralization apparatus for ion implantation system
09/05/1991WO1991013457A1 Apparatus for ion implantation
09/05/1991DE4102573A1 Verfahren zur herstellung einer quantenwannenstruktur A process for producing a quantum-well structure
09/05/1991DE4042334A1 Mfg. insulated monocrystalline silicon island - implanting oxygen into highly doped monocrystalline region for forming insulated buried silicon di:oxide layer
09/05/1991DE4006789A1 Optical scanning system for raster measurement graduations - has light sensor as doped regions in semiconducting substrate with grids applied during mfr.
09/05/1991CA2076637A1 Methods of forming electronic packages
09/04/1991EP0445059A2 Method for performing a complementary bipolar transistor structure including a self-aligned vertical PNP transistor
09/04/1991EP0445058A1 Speed enhancers for acid sensitized resists
09/04/1991EP0445040A1 Electrical HF circuit comprising a polymer layer
09/04/1991EP0445008A1 Process for making high-density electronic devices
09/04/1991EP0444957A1 Semiconductor device having a reduced junction leakage
09/04/1991EP0444943A1 A method of manufacturing a bonded wafer
09/04/1991EP0444942A1 A bonded wafer and a method of manufacturing it
09/04/1991EP0444936A2 Exposure apparatus
09/04/1991EP0444935A2 Ion beam control system
09/04/1991EP0444893A2 Method of making ohmic contacts between semiconductors and oxide superconductors
09/04/1991EP0444836A2 Process for forming semiconductor device isolation regions
09/04/1991EP0444756A1 Method of removing in a centrifuge a liquid from a surface of a substrate
09/04/1991EP0444714A1 Holder device for processing disc-like articles
09/04/1991EP0444695A2 Semiconductor device having multilayered wiring structure and method of manufacturing the same
09/04/1991EP0444687A2 Semiconductor memory circuit device having gate array memory cells
09/04/1991EP0444665A2 A laser scanning apparatus
09/04/1991EP0444615A1 Dynamic random access memory having bit lines buried in semiconductor substrate
09/04/1991EP0444598A1 Azeotropic solvent composition
09/04/1991EP0444580A2 Liquid crystal device and display apparatus
09/04/1991EP0444574A1 Organic-inorganic composites and method of making them
09/04/1991EP0444539A1 Exciting coil set, method of fabricating the same and micromotor equipped therewith
09/04/1991EP0444538A2 Device and procedure for vacuum evaporation of a material and utilisation of the procedure
09/04/1991EP0444531A2 Process for multi-layer photoresist etching with minimal feature undercut and unchanging photoresist load during etch
09/04/1991EP0444524A1 Semiconductor integrated circuit
09/04/1991EP0444493A2 Negative working radiation sensitive composition and radiation sensitive recording material produced therefrom
09/04/1991EP0444469A2 High density internconnect
09/04/1991EP0444465A2 Controlled silicon doping of III-V compounds by thermal oxidation of silicon capping layer
09/04/1991EP0444450A1 Latent-image control of lithography tools
09/04/1991EP0444408A2 Emitter coupled logic circuit
09/04/1991EP0444370A1 Semiconductor device with a thinned active region and process therefor
09/04/1991EP0444356A2 Diffusion apparatus for semiconductors
09/04/1991EP0444350A2 Method for fabricating selfstabilized semiconductor gratings
09/04/1991EP0444258A2 Process for determining the relation between the substrate damage and the parameters of a dry-etching process
09/04/1991EP0444216A1 Via-forming ceramics composition
09/04/1991EP0444205A1 Substrate support device for cvd apparatus
09/04/1991EP0422129A4 Enclosed buried channel transistor
09/04/1991CN1054334A Semiconductor device comprising support and method of manufacturing such semiconductor device
09/03/1991US5046161 Flip chip type semiconductor device
09/03/1991US5046160 Masterslice integrated circuit device having an improved wiring structure
09/03/1991US5046148 Ion implantation apparatus
09/03/1991US5046113 Method of and apparatus for detecting pattern defects by means of a plurality of inspecting units each operating in accordance with a respective inspecting principle
09/03/1991US5045975 Three dimensionally interconnected module assembly
09/03/1991US5045970 Joined substrates having planar electrical interconnection of hybrid circuits
09/03/1991US5045966 Method for forming capacitor using FET process and structure formed by same
09/03/1991US5045919 Plastic packaged semiconductor device having bonding wires which are prevented from coming into contact with each other in plastic sealing step
09/03/1991US5045917 Multi-level semiconductor structure and process of fabricating thereof
09/03/1991US5045916 Bipolar transistor on substrate
09/03/1991US5045915 Low impedance wiring
09/03/1991US5045912 Bi-CMOS integrated circuit device having a high speed lateral bipolar transistor
09/03/1991US5045911 Lateral PNP transistor and method for forming same
09/03/1991US5045910 Integrated power transistor comprising means for reducing thermal stresses
09/03/1991US5045909 Power switching semiconductor device
09/03/1991US5045907 Graphotaxially formed photosensitive detector array
09/03/1991US5045905 Amorphous silicon thin film transistor
09/03/1991US5045904 Semiconductor device including an improved trench arrangement
09/03/1991US5045903 Topographic pattern delineated power MOSFET with profile tailored recessed source
09/03/1991US5045902 VDMOS/logic integrated circuit comprising a vertical depleted MOS transistor and a zener diode and a method of making same
09/03/1991US5045901 Double diffusion metal-oxide-semiconductor device having shallow source and drain diffused regions
09/03/1991US5045900 Semiconductor device having a vertical power MOSFET fabricated in an isolated form on a semiconductor substrate
09/03/1991US5045899 Dynamic random access memory having stacked capacitor structure
09/03/1991US5045898 CMOS integrated circuit having improved isolation
09/03/1991US5045753 Matrix display apparatus with repair wires
09/03/1991US5045725 Integrated standard cell including clock lines
09/03/1991US5045716 Integrated circuit in complementary circuit technology comprising a substrate bias voltage generator
09/03/1991US5045514 Sol-gel method for making composite mullite/cordierite ceramics
09/03/1991US5045505 Method of processing substrate for a beveled semiconductor device
09/03/1991US5045504 Multilayer; tetraethioxy, then polysiloxane
09/03/1991US5045503 Microwave monolithic integrated circuit with heat radiating electrode
09/03/1991US5045502 Annealing
09/03/1991US5045501 Method of forming an integrated circuit structure with multiple common planes
09/03/1991US5045499 Method of manufacturing a distributed brass reflector type semiconductor laser
09/03/1991US5045497 Method of making a schottky electrode
09/03/1991US5045496 Semi-insulating cobalt doped indium phosphide grown by MOCVD
09/03/1991US5045495 Doping, heating, oxidation
09/03/1991US5045494 Method for manufacturing a DRAM using selective epitaxial growth on a contact
09/03/1991US5045493 Vertical bipolar transistor
09/03/1991US5045492 Using silicon nitride mask
09/03/1991US5045491 Method of making a nonvolatile memory array having cells with separate program and erase regions
09/03/1991US5045489 Floating gate perpendicular to diffusion segments; control gate between two diffusion segments
09/03/1991US5045487 Process for producing a thin film field-effect transistor
09/03/1991US5045486 Transistor fabrication method
09/03/1991US5045485 Method for producing amorphous silicon thin film transistor array substrate
09/03/1991US5045484 Fabrication method of a BIMOS semiconductor device
09/03/1991US5045483 Self-aligned silicided base bipolar transistor and resistor and method of fabrication
09/03/1991US5045437 Method for producing a structured ceramic film or a ceramic member constructed of such films by sintering and useful as ultrasound transducers
09/03/1991US5045419 Pattern exposure/transfer method and pattern exposure/transfer mask apparatus
09/03/1991US5045417 Mask for manufacturing semiconductor device and method of manufacture thereof
09/03/1991US5045409 Process for making thin film solar cell