Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2006
06/29/2006DE102005054431A1 Verfahren zum Herstellen eines Flaschengrabens und eines Flaschengrabenkondensators A method of manufacturing a bottle and a bottle trench capacitor grave
06/29/2006DE102005045967A1 New top anti-reflective coating polymer compounds useful to fabricate a semiconductor device
06/29/2006DE102004063959A1 Verfahren zur Herstellung einer vergrabenen metallischen Schicht in einem Halbleiterkörper und Halbleiterbauelement mit einer vergrabenen metallischen Schicht A process for producing a buried metallic layer in a semiconductor body and the semiconductor component with a buried metallic layer
06/29/2006DE102004063578B4 Verfahren zur Ausbildung von Dual Gate Elektroden bei Anwendung des Damaszener Gate Prozesses Method for forming dual gate electrodes by applying the Damascus Gate process
06/29/2006DE102004061604A1 Semiconductor-solar cell producing method, involves directly contacting films having openings with solar cell areas, applying voltage between cell surface and one film, locally removing cell material in openings after limiting gas discharge
06/29/2006DE102004061518A1 Fin field effect transistor manufacturing method, involves producing auxiliary layer, where auxiliary layer covers part of electrically conductive layer and does not cover part of conductive layer that is arranged over top surface
06/29/2006DE102004061099A1 Power semiconductor module for use as contact for sensors comprises of substrate arranged with base plate and frame housing enclosing substrate, whereby second section of auxiliary connections are connected with high impedance connection
06/29/2006DE102004061056A1 Micromechanical functional component manufacturing method for e.g. micro pump, involves connecting substrates by local application of thermal energy in intermediate layer formed from glass frit, where application is carried out by laser
06/29/2006DE102004060821A1 Verfahren zur Herstellung von Deep-Trench-Strukturen A process for the production of deep trench structures
06/29/2006DE102004060625A1 Beschichtete Halbleiterscheibe und Verfahren und Vorrichtung zur Herstellung der Halbleiterscheibe Coated wafer and method and apparatus for producing the semiconductor wafer
06/29/2006DE102004060624A1 Halbleiterscheibe mit epitaktisch abgeschiedener Schicht und Verfahren zur Herstellung der Halbleiterscheibe Semiconductor wafer having epitaxially deposited layer and method for manufacturing the semiconductor wafer
06/29/2006DE102004060569A1 Method for the production of double capacitor involves internal capacitor and external capacitor in single trench such that inner and outer capacitors are formed between their electrode contact and earth electrode
06/29/2006DE102004060369A1 Semiconductor circuit manufacturing wafer, has connection contacts provided in test structure-area and forming two rows, which run in longitudinal direction and are displaced against each other transverse to longitudinal direction
06/29/2006DE102004060365A1 Bauelement mit Halbleiterübergang und Verfahren zur Herstellung Component with a semiconductor junction and methods for preparing
06/29/2006DE102004060364A1 Halbleitersubstrat mit Mehrschichtaufbau und Verfahren zur Herstellung Semiconductor substrate having a multilayer structure and methods for preparing
06/29/2006DE102004060210A1 Separation diffusion zone producing method for double-sided blocking power semiconductor component, involves producing trench that extends from side of semiconductor body up to maximum depth of body, and placing doping material into body
06/29/2006DE102004060188A1 Process hot chamber comprises a number of rod lamps and a number of spot lamps for heating an object arranged in the chamber
06/29/2006DE102004059884A1 Microchip, e.g. heterojunction bipolar transistor, flip-chip mounting method, involves coating surfaces of microchips, with gold-tin-solder, where chips are soldered by heating of arrangement along with substrate
06/29/2006DE102004041889B4 Halbleitervorrichtung mit gestapelten Halbleiterbauelementen und Verfahren zu deren Herstellung A semiconductor device with stacked semiconductor devices and processes for their preparation
06/29/2006DE102004041417B4 Electrical arrangement for microelectronics has component insulated from substrate by dielectric layer on conductive substrate
06/29/2006DE10194628B4 Gassammler für einen Epitaxiereaktor Gas collector for an epitaxial reactor
06/29/2006DE10144955B4 Vorrichtung zum Beschicken von Mikrosystemen Device for feeding of microsystems
06/29/2006DE10134484B4 Verfahren zur Verhinderung eines Biegens von Halbleiterschichten und anhand des Verfahrens hergestellte Halbleitervorrichtung A method for preventing bending of the semiconductor layer and produced by the method semiconductor device
06/29/2006DE10131491B4 Verfahren zum Herstellen einer Halbleiterspeichereinrichtung A method of manufacturing a semiconductor memory device
06/29/2006DE10131490B4 Verfahren zum Herstellen einer Halbleiterspeichereinrichtung A method of manufacturing a semiconductor memory device
06/29/2006DE10115492B4 Verfahren zur Aufbereitung einer Reaktionskammer Process for the preparation of a reaction chamber
06/29/2006DE10008814B4 Separating bottom for use in braking and/or clamping device, has flexible supporting elements projected from outer surface, where supporting elements with center line of base body enclose angle of preset values
06/29/2006DE10006257B4 Dünnfilmtransistoren mit organisch-anorganischen Hybridmaterialien als halbleitende Kanäle Thin film transistors with organic-inorganic hybrid materials as semiconducting channels
06/29/2006CA2587774A1 Component for detecting especially infrared electromagnetic radiation
06/29/2006CA2562148A1 Systems and methods for nanowire growth and manufacturing
06/28/2006EP1675446A1 Multi-layer ceramic substrate, method for manufacturng the same and electronic device using the same
06/28/2006EP1675181A1 Methode of making a non-volatile MOS semiconductor memory device
06/28/2006EP1675180A1 Methode of making a non-volatile MOS semiconductor memory device
06/28/2006EP1675176A1 Method for measuring the bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate
06/28/2006EP1675169A1 Semiconductor substrate, semiconductor device and process for producing semiconductor substrate
06/28/2006EP1675168A2 Process and device for the positioning of connection balls for integrated circuits
06/28/2006EP1675167A1 Hot-melt underfill composition and method of application
06/28/2006EP1675166A2 Internally gettered heteroepitaxial semiconductor wafers and methods of manufacturing such wafers
06/28/2006EP1675165A2 Method and system for 3D alignment in wafer scale integration
06/28/2006EP1675164A1 Multilayer film reflection mirror, production method for multilayer film reflection mirror, and exposure system
06/28/2006EP1675163A2 Ferroelectric film and method of manufacturing the same
06/28/2006EP1675162A2 Ferroelectric film, method of manufacturing ferroelectric film, ferroelectric capacitor, and ferroelectric memory
06/28/2006EP1675161A1 Ferroelectric material, manufacturing method and ferroelectric memory
06/28/2006EP1675160A1 Electrostatic chuck with built-in heater
06/28/2006EP1674890A2 Multilayer material and method of preparing same
06/28/2006EP1674873A2 Sensor
06/28/2006EP1673815A1 Group-iii nitride semiconductor device
06/28/2006EP1673813A2 Fully depleted silicon-on-insulator cmos logic
06/28/2006EP1673810A2 Field effect transistor, particularly vertical field effect transistor, memory cell, and production method
06/28/2006EP1673806A2 Amorphous carbon layer to improve photoresist adhesion
06/28/2006EP1673805A1 An etch back process using nitrous oxide
06/28/2006EP1673804A1 Wafer etching techniques
06/28/2006EP1673803A1 Mems based contact conductivity electrostatic chuck
06/28/2006EP1673802A1 REMOVAL OF POST ETCH RESIDUES AND COPPER CONTAMINATION FROM LOW-K DIELECTRICS USING SUPERCRITICAL CO sb 2 /sb WITH DIKETONE ADDITIVES
06/28/2006EP1673801A2 Developer-soluble materials and methods of using the same in via-first dual damascene applications
06/28/2006EP1673800A2 Production method and device for improving the bonding between plastic and metal
06/28/2006EP1673799A2 Short-channel transistors
06/28/2006EP1673782A2 Mram array with segmented word and bit lines
06/28/2006EP1673781A1 Memory cell array with staggered local inter-connect structure
06/28/2006EP1673671A2 Power system inhibit method and device and structure therefor
06/28/2006EP1673611A2 Operator independent programmable sample preparation and analysis system
06/28/2006EP1673416A2 Slurry for chemical mechanical polishing of metals comprising periodic acid
06/28/2006EP1673201A1 Polishing apparatus
06/28/2006EP1495161A4 Electropolishing and electroplating methods
06/28/2006EP1414545B1 Apparatus for and method of trapping products in exhaust gas
06/28/2006EP1412182A4 Laser spectral engineering for lithographic process
06/28/2006EP1386376A4 Laser spectral engineering for lithographic process
06/28/2006EP1345665B1 Apparatus and method for extracting biomass
06/28/2006EP1301829A4 Radiation sensitive compositions containing image quality and profile enhancement additives
06/28/2006EP1192410A4 Helium-neon laser light source generating two harmonically related, single-frequency wavelengths for use in displacement and dispersion measuring interferometry
06/28/2006EP1159756B1 Compounds for the treatment of cancer
06/28/2006EP1102970B1 A sensor for measuring a substrate temperature
06/28/2006EP0991960B1 Optical system with anti-reflection coating
06/28/2006EP0889515B1 Method and apparatus for conveying thin sheet-like substrate
06/28/2006CN2791884Y Single transistor plane random access stroage
06/28/2006CN2791881Y Chip package structure
06/28/2006CN2791880Y Chip loading chamber
06/28/2006CN2791879Y Package biscuit detecting machine
06/28/2006CN2791878Y Surface figuring machine for high power semiconductor element
06/28/2006CN1795563A Method for annealing silicon thin films and polycrystalline silicon thin films prepared therefrom
06/28/2006CN1795562A Body-tied soi transistor and method for fabrication thereof
06/28/2006CN1795553A Method of manufacturing a substrate, having a porous dielectric layer and air gaps, and a substrate
06/28/2006CN1795552A Method for manufacturing a multi-level interconnect structure
06/28/2006CN1795551A Electrostatic chuck including a heater mechanism
06/28/2006CN1795550A Method of using pre-applied underfill encapsulant
06/28/2006CN1795549A 高阻抗射频功率塑料封装 High impedance RF power plastic packages
06/28/2006CN1795548A Gate electrode for mos transistors
06/28/2006CN1795547A P-channel power mis field effect transistor and switching circuit
06/28/2006CN1795546A Method of forming fluorinated carbon film
06/28/2006CN1795545A Production method for semiconductor wafer
06/28/2006CN1795544A Method of processing silicon wafer
06/28/2006CN1795543A Abrasive and method of polishing
06/28/2006CN1795542A Method for producing single crystal ingot from which semiconductor wafer is sliced
06/28/2006CN1795541A Electron beam microprocessing method
06/28/2006CN1795540A Transistor with independant gate structures
06/28/2006CN1795539A Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
06/28/2006CN1795538A Substrate for stressed systems and method for growing crystal on the substrate
06/28/2006CN1795537A Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire
06/28/2006CN1795536A Position information measuring method and device, and exposure method and system
06/28/2006CN1795535A Exposure method, exposure apparatus, and method for producing device