Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2010
11/30/2010US7842575 Vertical MOS transistor device with asymmetrical source and drain and its manufacturing method
11/30/2010US7842574 Method of manufacturing a semiconductor power device
11/30/2010US7842573 Virtual ground memory array and method therefor
11/30/2010US7842572 Methods of manufacturing semiconductor devices with local recess channel transistors
11/30/2010US7842571 Method for forming semiconductor device
11/30/2010US7842570 Semiconductor memory devices and methods of manufacturing the same
11/30/2010US7842569 Flash memory device and method of fabricating the same
11/30/2010US7842568 Lateral power semiconductor device for high frequency power conversion system, has isolation layer formed over substrate for reducing minority carrier storage in substrate
11/30/2010US7842567 Dual work function CMOS devices utilizing carbide based electrodes
11/30/2010US7842566 FinFET and method of manufacturing the same
11/30/2010US7842565 Beam homogenizer and laser irradiation apparatus
11/30/2010US7842564 Semiconductor memory device manufacturing method and semiconductor memory device
11/30/2010US7842563 Thin film transistor, method of fabricating the same, and flat panel display using thin film transistor
11/30/2010US7842562 Strained-channel fin field effect transistor (FET) with a uniform channel thickness and separate gates
11/30/2010US7842561 Semiconductor integrated circuit, semiconductor device, and manufacturing method of the semiconductor integrated circuit
11/30/2010US7842559 Method of fabricating multi-gate semiconductor devices with improved carrier mobility
11/30/2010US7842558 Masking process for simultaneously patterning separate regions
11/30/2010US7842557 Nonvolatile storage device and method of manufacturing the same, and storage device and method of manufacturing the same
11/30/2010US7842556 Method for low-temperature sealing of a cavity under vacuum or under controlled atmosphere
11/30/2010US7842555 Integrated transistor module and method of fabricating same
11/30/2010US7842554 VLSI hot-spot minimization using nanotubes
11/30/2010US7842553 Cooling micro-channels
11/30/2010US7842552 Semiconductor chip packages having reduced stress
11/30/2010US7842551 Adhesive composition, adhesive sheet and production process for semiconductor device
11/30/2010US7842550 Method of fabricating quad flat non-leaded package
11/30/2010US7842549 Methods of fabricating silicon carbide devices incorporating multiple floating guard ring edge terminations
11/30/2010US7842548 Fixture for P-through silicon via assembly
11/30/2010US7842547 Laser lift-off of sapphire from a nitride flip-chip
11/30/2010US7842546 Integrated circuit module and method of packaging same
11/30/2010US7842545 Semiconductor package having insulated metal substrate and method of fabricating the same
11/30/2010US7842544 Integrated circuit micro-module
11/30/2010US7842543 Wafer level chip scale package and method of laser marking the same
11/30/2010US7842542 Embedded semiconductor die package and method of making the same using metal frame carrier
11/30/2010US7842541 Ultra thin package and fabrication method
11/30/2010US7842540 Room temperature metal direct bonding
11/30/2010US7842539 Zinc oxide semiconductor and method of manufacturing the same
11/30/2010US7842536 Vacuum jacket for phase change memory element
11/30/2010US7842534 Method for forming a compound semi-conductor thin-film
11/30/2010US7842533 Electromagnetic radiation sensor and method of manufacture
11/30/2010US7842532 Nitride semiconductor device and method for manufacturing the same
11/30/2010US7842530 Method of manufacturing vertical cavity surface emitting laser and method of manufacturing laser array, vertical cavity surface emitting laser and laser array, and image forming apparatus with laser array
11/30/2010US7842529 Method of manufacturing nitride semiconductor light emitting element including forming scribe lines sandwiching and removing high density dislocation sections
11/30/2010US7842528 Method for manufacturing an LCD device employing a reduced number of photomasks
11/30/2010US7842527 Metalorganic chemical vapor deposition (MOCVD) growth of high performance non-polar III-nitride optical devices
11/30/2010US7842526 Light emitting device and method of producing same
11/30/2010US7842525 Method and apparatus for personalization of semiconductor
11/30/2010US7842523 Buried conductor for imagers
11/30/2010US7842522 Well formation
11/30/2010US7842521 Edge exclusion zone patterning for solar cells and the like
11/30/2010US7842520 Method for manufacturing semiconductor device, semiconductor inspection device, and program including color imaging of metal silicide and calculations thereof
11/30/2010US7842519 In-line lithography and etch system
11/30/2010US7842518 Method for fabricating semiconductor device
11/30/2010US7842451 Method of forming pattern
11/30/2010US7842436 for semiconductor integrated circuits; improved contrast; forming a small pattern under the same exposure conditions without depending on the shape and the density of the pattern
11/30/2010US7842385 Coated nano particle and electronic device using the same
11/30/2010US7842356 Substrate processing methods
11/30/2010US7842350 Method and apparatus for coating a photosensitive material
11/30/2010US7842219 Mold for forming a molding member and method of fabricating a molding member using the same
11/30/2010US7842205 Manufacturing method by treating substrate introduced into treatment apparatus from transfer container
11/30/2010US7842191 chemical mechanical polishing (CMP) copper films via slurry of polyvinylpyrrolidone, oxidizing agent, protective film-forming agent containing complexing agent (containing quinaldinic acid, quinolinic acid, and alkylbenzene sulfonate) for forming water-insoluble complex, and colloidal sol
11/30/2010US7842179 electrochemical cell used for Electrochemical Capacitance Voltage profiling; semiconductors
11/30/2010US7842169 Method and apparatus for local polishing control
11/30/2010US7842160 Semiconductor producing device and semiconductor device producing method
11/30/2010US7842159 Inductively coupled plasma processing apparatus for very large area using dual frequency
11/30/2010US7842158 Multiple zone carrier head with flexible membrane
11/30/2010US7842134 Diamond based substrate for electronic devices
11/30/2010US7841926 Substrate polishing metrology using interference signals
11/30/2010US7841925 Polishing article with integrated window stripe
11/30/2010US7841863 Spring interconnect structures
11/30/2010US7841820 Universal modular wafer transport system
11/30/2010US7841781 Methods and apparatuses for providing a hermetic sealing system for an optical transceiver module
11/30/2010US7841582 Variable seal pressure slit valve doors for semiconductor manufacturing equipment
11/30/2010US7841085 Method for manufacturing liquid jet head
11/30/2010CA2549625C Flow nozzle assembly
11/25/2010WO2010135702A2 Low temperature gst process
11/25/2010WO2010135572A2 Method and apparatus for providing through silicon via (tsv) redundancy
11/25/2010WO2010135453A2 Quantum efficiency measurement system and methods of use
11/25/2010WO2010135309A1 Methods and apparatus for aligning a set of patterns on a silicon substrate
11/25/2010WO2010135250A2 Methods for determining the quantity of precursor in an ampoule
11/25/2010WO2010135220A2 Systems and methods for optimizing looping parameters and looping trajectories in the formation of wire loops
11/25/2010WO2010135205A2 Integrated systems for interfacing with substrate container storage systems
11/25/2010WO2010135202A2 Substrate container storage system
11/25/2010WO2010135182A1 A method for forming a robust top-down silicon nanowire structure using a conformal nitride and such structure
11/25/2010WO2010135168A2 Method for providing electrical connections to spaced conductive lines
11/25/2010WO2010135120A2 Selective self-aligned double patterning of regions in an integrated circuit device
11/25/2010WO2010134779A2 Half tone mask having multi half permeation part and manufacturing method of the same
11/25/2010WO2010134774A2 Half tone mask and manufacturing method of the same
11/25/2010WO2010134691A2 Method for manufacturing polycrystalline silicon thin film
11/25/2010WO2010134644A1 Movable body apparatus, exposure apparatus and method, and device manufacturing method
11/25/2010WO2010134640A1 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
11/25/2010WO2010134639A1 Method for formation of resist pattern, and developing solution
11/25/2010WO2010134571A1 Semiconductor device, method for manufacturing same, and display device
11/25/2010WO2010134492A1 Cassette
11/25/2010WO2010134491A1 Cassette
11/25/2010WO2010134487A1 Wavefront measuring method and device, and exposure method and device
11/25/2010WO2010134477A1 Radiation-sensitive resin composition and compound
11/25/2010WO2010134471A1 Vapor phase growth apparatus
11/25/2010WO2010134468A1 Semiconductor switch device and method for manufacturing semiconductor switch device
11/25/2010WO2010134467A1 Method for manufacturing solar cell
11/25/2010WO2010134449A1 Method for producing tio2-sio2 glass body, method for heat-treating tio2-sio2 glass body, tio2-sio2 glass body, and optical base for euvl
1 ... 1591 1592 1593 1594 1595 1596 1597 1598 1599 1600 1601 1602 1603 1604 1605 1606 1607 1608 1609 1610 1611 ... 6590