Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2010
11/30/2010USRE41975 Interconnector line of thin film, sputter target for forming the wiring film and electronic component using the same
11/30/2010USRE41963 Semiconductor memory device
11/30/2010US7844941 Charged particle beam exposure method and charged particle beam exposure device
11/30/2010US7844934 Method for designing a semiconductor integrated circuit layout capable of reducing the processing time for optical proximity effect correction
11/30/2010US7844559 Method and system for predicting process performance using material processing tool and sensor data
11/30/2010US7844359 Coating and developing apparatus, operating method for same, and storage medium for the method
11/30/2010US7844357 Controlling device for substrate processing apparatus and method therefor
11/30/2010US7844142 Communication methods, methods of forming an interconnect, signal interconnects, integrated circuit structures, circuits, and data apparatuses
11/30/2010US7843751 Semiconductor memory device comprising sense amplifier having P-type sense amplifier and N-type sense amplifiers with different threshold voltages
11/30/2010US7843700 Semiconductor device
11/30/2010US7843669 Magnetoresistance effect element, magnetic head, magnetic reproducing apparatus, and magnetic memory
11/30/2010US7843643 Laminated micromirror package
11/30/2010US7843559 System for detection of wafer defects
11/30/2010US7843552 Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
11/30/2010US7843532 Liquid crystal display panel with color filters and method of fabricating the same
11/30/2010US7843523 Thin film transistor, integrated circuit, liquid crystal display, method of producing thin film transistor, and method of exposure using attenuated type mask
11/30/2010US7843408 Device substrate, light emitting device and driving method of light emitting device
11/30/2010US7843407 Electronic device and electronic apparatus
11/30/2010US7843205 Process monitor for monitoring an integrated circuit chip
11/30/2010US7843203 Support member assembly having reinforcement member for conductive contact members
11/30/2010US7843075 Apparatus and methods of forming an interconnect between a workpiece and substrate
11/30/2010US7843073 Semiconductor device and method for fabricating the same
11/30/2010US7843071 Semiconductor device including wiring and manufacturing method thereof
11/30/2010US7843062 Thermally programmable anti-reverse engineering interconnects wherein interconnects only conduct when heated above room temperature
11/30/2010US7843049 Semiconductor device and manufacturing method thereof
11/30/2010US7843045 capable of bonding a semiconductor chip to a lead frame tightly at an adhesion temperature lower than that of the adhesion film of a traditional polyimide resin without generation of voids; reaction of 1,3-bis(3-aminophenoxy)benzene, for example, and an acid component
11/30/2010US7843039 Stress-modified device structures, methods of fabricating such stress-modified device structures, and design structures for an integrated circuit
11/30/2010US7843036 Enhanced on-chip decoupling capacitors and method of making same
11/30/2010US7843035 MIM capacitors with catalytic activation layer
11/30/2010US7843034 Capacitor having upper electrode not formed over device isolation region
11/30/2010US7843032 Radio frequency identification device electrostatic discharge management
11/30/2010US7843025 Micromechanical semiconductor sensor
11/30/2010US7843024 Method and structure for improving device performance variation in dual stress liner technology
11/30/2010US7843021 Double-side mountable MEMS package
11/30/2010US7843020 High withstand voltage transistor and manufacturing method thereof, and semiconductor device adopting high withstand voltage transistor
11/30/2010US7843015 Multi-silicide system in integrated circuit technology
11/30/2010US7843010 Crystalline semiconductor film and method for manufacturing the same
11/30/2010US7843009 Electrostatic discharge protection device for an integrated circuit
11/30/2010US7843007 Metal high-k transistor having silicon sidewall for reduced parasitic capacitance
11/30/2010US7843002 Fully isolated high-voltage MOS device
11/30/2010US7843001 Insulated gate type semiconductor device and method for fabricating the same
11/30/2010US7842999 Semiconductor memory device and method of manufacturing the same
11/30/2010US7842997 Nonvolatile memory device having cell and peripheral regions and method of making the same
11/30/2010US7842989 Semiconductor memory cell and semiconductor memory array using the same
11/30/2010US7842988 Manufacturing method of photoelectric conversion device
11/30/2010US7842973 Semiconductor device and manufacturing method of the same
11/30/2010US7842960 Light emitting packages and methods of making same
11/30/2010US7842915 Microelectronic imagers with integrated optical devices and methods for manufacturing such microelectronic imagers
11/30/2010US7842909 CMOS imaging device comprising a microlens array exhibiting a high filling rate
11/30/2010US7842902 Laser processing method and laser beam processing machine
11/30/2010US7842887 Multilayer printed circuit board
11/30/2010US7842649 Quality control method for making a biochip displaying an encoded bead array
11/30/2010US7842623 for removing an insulation material comprising silicon carbonitride (SiCN) from a substrate; the composition comprising a peroxy acid compound oxidizing agent, a fluorine-containing compound, and water
11/30/2010US7842622 Method of forming highly conformal amorphous carbon layer
11/30/2010US7842621 Method of measuring nitrogen concentration, method of forming silicon oxynitride film, and method of manufacturing semiconductor device.
11/30/2010US7842620 Method for manufacturing semiconductor device using quadruple-layer laminate
11/30/2010US7842619 Plasma processing method
11/30/2010US7842618 System and method for improving mesa width in a semiconductor device
11/30/2010US7842617 Etching method and etching apparatus
11/30/2010US7842616 Methods for fabricating semiconductor structures
11/30/2010US7842615 Semiconductor device having a copper metal line and method of forming the same
11/30/2010US7842614 depositing an interconnect material including Cu or Cu alloy over an insulating film, and polishing the interconnect material by CMP with a polishing liquid, wherein the oxidation-reduction potential of the polishing liquid is controlled so as to be in the range of 400 mV to 700 mV
11/30/2010US7842613 Methods of forming microelectronic packaging substrates having through-substrate vias therein
11/30/2010US7842612 Selective formation of a compound comprising a semi-conducting material and a metallic material in a substrate through a germanium oxide layer
11/30/2010US7842611 Substrate and manufacturing method of the same
11/30/2010US7842610 Semiconductor device
11/30/2010US7842609 Method for manufacturing semiconductor device
11/30/2010US7842608 Method for manufacturing semiconductor device having via plug
11/30/2010US7842607 Semiconductor device and method of providing a thermal dissipation path through RDL and conductive via
11/30/2010US7842606 Method of depositing thin film and method of manufacturing semiconductor using the same
11/30/2010US7842605 Atomic layer profiling of diffusion barrier and metal seed layers
11/30/2010US7842604 Low-k b-doped SiC copper diffusion barrier films
11/30/2010US7842603 Method for fabricating semiconductor memory device
11/30/2010US7842602 Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
11/30/2010US7842601 Method of forming small pitch pattern using double spacers
11/30/2010US7842600 Methods of forming interlayer dielectrics having air gaps
11/30/2010US7842599 Bumping electronic components using transfer substrates
11/30/2010US7842598 Electronic component and semiconductor device, method of making the same and method of mounting the same, circuit board, and electronic instrument
11/30/2010US7842597 Chip package, chip packaging, chip carrier and process thereof
11/30/2010US7842596 Method for formation of high quality back contact with screen-printed local back surface field
11/30/2010US7842595 Fabricating electronic-photonic devices having an active layer with spherical quantum dots
11/30/2010US7842594 Semiconductor device and method for fabricating the same
11/30/2010US7842593 Semiconductor device and method for fabricating the same
11/30/2010US7842592 Channel strain engineering in field-effect-transistor
11/30/2010US7842591 Method of fabricating short-gate-length electrodes for integrated III-V compound semiconductor devices
11/30/2010US7842590 Method for manufacturing a semiconductor substrate including laser annealing
11/30/2010US7842589 Laser irradiation apparatus with means for applying magnetic field
11/30/2010US7842588 Group-III metal nitride and preparation thereof
11/30/2010US7842587 III-V MOSFET fabrication and device
11/30/2010US7842586 Plasma CVD apparatus, method for manufacturing microcrystalline semiconductor layer, and method for manufacturing thin film transistor
11/30/2010US7842585 Method to form a photovoltaic cell comprising a thin lamina
11/30/2010US7842584 Method for manufacturing semiconductor device
11/30/2010US7842583 Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
11/30/2010US7842582 Method of forming semiconductor devices
11/30/2010US7842581 Methods of forming metal layers using oxygen gas as a reaction source and methods of fabricating capacitors using such metal layers
11/30/2010US7842580 Structure and method for buried inductors for ultra-high resistivity wafers for SOI/RF SiGe applications
11/30/2010US7842579 Method for manufacturing a semiconductor device having doped and undoped polysilicon layers
11/30/2010US7842578 Method for fabricating MOS devices with a salicided gate and source/drain combined with a non-silicide source drain regions
11/30/2010US7842577 Two-step STI formation process
11/30/2010US7842576 Semiconductor device including first and second sidewalls and method of manufacturing semiconductor device
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