Patents
Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592)
05/2001
05/15/2001US6232919 Phased-array antenna apparatus
05/15/2001US6232847 Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
05/15/2001US6232841 Integrated tunable high efficiency power amplifier
05/08/2001US6229684 Variable capacitor and associated fabrication method
05/08/2001US6229683 High voltage micromachined electrostatic switch
05/03/2001WO2001031664A1 Optically controlled mem switches
05/01/2001US6225668 Semiconductor device having a single crystal gate electrode and insulation
04/2001
04/18/2001EP1093143A1 Flip-chip bonded micro-relay on integrated circuit chip
04/18/2001EP1093142A2 Dual motion electrostatic actuator design for mems micro-relay
04/17/2001US6218911 Planar airbridge RF terminal MEMS switch
04/15/2001CA2323189A1 Dual motion electrostatic actuator design for mems micro-relay
04/05/2001WO2001024307A1 Small-sized phase shifter and method of manufacture thereof
04/05/2001CA2322126A1 High isolation micro electromechanical rf switch
04/03/2001US6211580 Twin configuration for increased life time in touch mode electrostatic actuators
03/2001
03/22/2001DE19937811A1 Microrelay for electric circuit, has planar contact elements which contact when diaphragms are deflected thermally and electrostatically
03/20/2001US6204737 Piezoelectric resonator structures with a bending element performing a voltage controlled switching function
03/14/2001EP1082740A1 Micro-mechanical elements
03/08/2001DE19935819A1 Relais und Verfahren zu dessen Herstellung Relay and process for its preparation
03/01/2001WO2001015184A1 Microelectromechanical device having single crystalline components and metallic components and associated fabrication methods
03/01/2001CA2345810A1 Microelectromechanical device having single crystalline components and metallic components and associated fabrication methods
02/2001
02/27/2001US6195047 Integrated microelectromechanical phase shifting reflect array antenna
02/22/2001WO2001013457A1 Electrical switches
02/22/2001CA2381966A1 Electrical switches
02/20/2001US6191754 Antenna system using time delays with mercury wetted switches
02/20/2001US6191671 Apparatus and method for a micromechanical electrostatic relay
02/14/2001EP1075703A1 Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
02/08/2001WO2001009911A1 Microelectromechanic relay and method for the production thereof
02/08/2001CA2387251A1 Microelectromechanic relay and method for the production thereof
02/01/2001DE19935678A1 Relay has contacts, spring element, actuating element formed by mechanical microstructures electrically connected to upper side of bearer substrate and in plane parallel to substrate upper side
02/01/2001DE10031569A1 Highly miniaturized relay in integrated circuit form, providing reliable operation and high isolation at high frequencies, includes see-saw mounted plate alternately closing contacts on substrate when rocked
01/2001
01/23/2001US6177706 Field-effect thin-film transistor device
01/11/2001WO2001003288A1 Integrated tunable high efficiency power amplifier
01/11/2001WO2001003208A1 Nanoscopic wire-based devices, arrays, and methods of their manufacture
01/11/2001WO2001003152A1 Arc resistant high voltage micromachined electrostatic switch
01/11/2001CA2372707A1 Nanoscopic wire-based devices, arrays, and method of their manufacture
01/04/2001WO2001001434A1 High voltage micromachined electrostatic switch
01/02/2001US6168395 Bistable microactuator with coupled membranes
12/2000
12/19/2000US6162657 Method for manufacturing a micromechanical relay
12/12/2000US6160230 Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
12/07/2000WO2000073839A1 Micromachined electrostatic actuator with air gap
12/06/2000EP1057196A1 Micro-mechanical electrostatic relay
11/2000
11/28/2000US6153839 Micromechanical switching devices
11/07/2000US6143997 Low actuation voltage microelectromechanical device and method of manufacture
11/02/2000WO2000065626A1 Micromachine switch and method of manufacture thereof
10/2000
10/24/2000US6137120 Semiconductor device and method of fabricating the same
10/17/2000US6133807 High-frequency switch and integrated high-frequency switch array
10/17/2000CA2155121C Micromachined relay and method of forming the relay
10/12/2000WO2000060627A1 Micromachine switch
10/11/2000EP1042774A1 Micro electro-mechanical systems relay
10/03/2000US6127908 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
10/03/2000US6127744 Method and apparatus for an improved micro-electrical mechanical switch
09/2000
09/28/2000WO2000057445A1 Microrelay working parallel to the substrate
09/21/2000WO2000055918A1 Flash memory cell having a flexible element
09/21/2000DE19912669A1 Substratparallel arbeitendes Mikrorelais Substrate parallel working Microrelay
09/12/2000US6118192 Applications of micro-electro-mechanical wobble motors as radio frequency transceiver components
09/08/2000WO2000052722A1 Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
09/05/2000US6115231 Electrostatic relay
08/2000
08/31/2000WO2000024021A9 Micromechanical switching devices
08/22/2000US6106734 Micromachine manufacture using gas beam crystallization
08/10/2000WO2000046852A1 Micro-relay
08/10/2000CA2361756A1 Micro-relay
08/09/2000EP1026718A2 Electrostatically controlled micro-relay device
08/08/2000US6100477 Recessed etch RF micro-electro-mechanical switch
08/02/2000EP1024512A1 Electrostatic micro-relay
07/2000
07/27/2000WO2000044012A1 Microswitching contact
07/26/2000EP1021815A1 Micromechanical electrostatic relay and method for the production thereof
07/25/2000US6094116 Micro-electromechanical relays
07/20/2000WO2000042705A1 Device including a micromechanical resonator having an operating frequency and method of extending same
07/20/2000CA2360405A1 Device including a micromechanical resonator having an operating frequency and method of extending same
07/18/2000US6091125 Micromechanical electronic device
07/13/2000WO2000041200A1 Micromachine switch
07/06/2000WO2000039915A1 Twin configuration for increased life time in touch mode electrostatic actuators
06/2000
06/29/2000WO2000038209A1 Micromachine switch and its production method
06/29/2000WO2000038208A1 Micromachine switch and its production method
06/28/2000EP1014468A2 Flexible microwave switch matrix
06/21/2000CA2292850A1 Flexible microwave switch matrix
06/15/2000DE19854450A1 Mikromechanisches elektrostatisches Relais The micromechanical electrostatic relay
06/14/2000EP0938738B1 Method for manufacturing a micromechanical relay
06/13/2000US6074890 Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices
06/06/2000US6072686 Micromachined rotating integrated switch
06/02/2000WO2000031819A1 Method and apparatus for switching high frequency signals
06/02/2000WO2000031767A1 Micromechanical electrostatic relay
06/02/2000WO2000030543A1 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
05/2000
05/30/2000US6069540 Micro-electro system (MEMS) switch
05/18/2000DE19950964A1 Micromechanical relay; has bottom electrode on substrate and two spaced contact faces formed by flexible, reversibly deformable material regions
05/16/2000US6064126 Switches and switching systems
05/11/2000WO2000026933A1 Micro machine switch
05/04/2000WO2000025337A1 Micromechanical relay with a resilient contact and method for producing the same
05/02/2000US6058027 Micromachined circuit elements driven by micromachined DC-to-DC converter on a common substrate
05/02/2000US6057520 Arc resistant high voltage micromachined electrostatic switch
04/2000
04/27/2000WO2000024021A1 Micromechanical switching devices
04/27/2000DE19950373A1 Micromechanical relay for high frequency signal switching, has electrode control lines containing resistors of kilo-ohmic range
04/25/2000US6054745 Nonvolatile memory cell using microelectromechanical device
04/25/2000US6054659 Integrated electrostatically-actuated micromachined all-metal micro-relays
04/11/2000US6049702 Integrated passive transceiver section
04/04/2000US6046659 Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications
03/2000
03/21/2000US6040611 Microelectromechanical device
03/15/2000EP0986082A2 Microelectromechanical device
03/14/2000US6037719 Matrix-addressed display having micromachined electromechanical switches
03/07/2000US6034339 Electrostatically controlled microswitch
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