| Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592) |
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| 03/05/2015 | WO2015031473A1 Rf mems electrodes with limited grain growth |
| 03/05/2015 | WO2015030898A2 Micromechanical resonant switches and charge pumps |
| 03/03/2015 | US8971011 Semiconductor device |
| 02/24/2015 | US8963661 Four terminal nano-electromechanical switch with a single mechanical contact |
| 02/11/2015 | CN104347320A Mems开关设备和制造方法 Mems switching device and manufacturing method |
| 02/05/2015 | WO2015017743A1 Dvc utilizing mems resistive switches and mim capacitors |
| 02/05/2015 | US20150035387 Mems switch device and method of fabrication |
| 02/04/2015 | EP2833388A2 A MEMS Switch Device and Method of Fabrication |
| 02/04/2015 | CN101465243B 具有双致动器和共栅极的mems微型开关 Dual actuator and having a common gate of the micro-switch mems |
| 02/03/2015 | US8948706 Stiction reduction for MEMS devices |
| 01/28/2015 | CN204130459U 一种高度集成的电磁双稳态mems继电器 A highly integrated electromagnetic bistable relay mems |
| 01/22/2015 | WO2015009360A1 Non-symmetric arrays of mems digital variable capacitor with uniform operating characteristics |
| 01/06/2015 | US8928435 Electromechanical switch device and method of operating the same |
| 01/06/2015 | US8925183 Methods for fabricating an electromechanical switch |
| 12/24/2014 | CN104241035A 一种双段式静电驱动微机械开关 A two-stage electrostatic drive micro-mechanical switch |
| 12/24/2014 | CN104241034A 微机电系统(mems)结构及设计结构 Microelectromechanical systems (mems) structure and design of the structure |
| 12/23/2014 | US8916996 Electrical distribution system |
| 12/23/2014 | US8916995 Method and apparatus for switching electrical power |
| 12/11/2014 | US20140360851 Electrically Controllable Integrated Switch |
| 12/10/2014 | CN104201059A 基于静电斥力和引力混合驱动的射频mems开关 Based on electrostatic repulsion and gravitational hybrid drive RF mems switch |
| 12/02/2014 | US8902600 Electrically activatable integrated mechanical anti-rollback device with one or more positions |
| 11/04/2014 | US8878315 Horizontal coplanar switches and methods of manufacture |
| 10/30/2014 | US20140318937 Configurable multi-gate switch circuitry |
| 10/28/2014 | US8873218 Actuator |
| 10/28/2014 | US8869625 MEMS actuator/sensor |
| 10/21/2014 | US8866537 Input apparatus |
| 10/16/2014 | US20140305777 Integrated micro-electromechanical switches and a related method thereof |
| 10/14/2014 | US8859318 Method for integrating MEMS microswitches on GaN substrates comprising electronic power components |
| 10/09/2014 | WO2014165624A1 Mems digital variable capacitor design with high linearity |
| 10/07/2014 | US8853803 Micro-electromechanical system devices |
| 10/02/2014 | US20140291136 Mems device and manufacturing method thereof |
| 09/30/2014 | US8847087 MEMS switch and communication device using the same |
| 09/25/2014 | WO2014151624A1 Printed membrance switch activated with magnetic force and applications thereof |
| 09/25/2014 | US20140284188 Mems device and method of manufacturing the same |
| 09/18/2014 | US20140262707 Nanowire-based mechanical switching device |
| 09/09/2014 | US8826529 Method of forming a micro-electromechanical system device |
| 09/04/2014 | DE112012005009T5 Mikroelektromechanischer Schalter und zugehöriges Verfahren dafür The micro-electromechanical switches and associated method for |
| 08/28/2014 | US20140238828 Merged legs and semi-flexible anchoring for mems device |
| 08/13/2014 | CN103985608A 一种具有pn结的mems电容开关 Mems having a pn junction capacitance of the switch |
| 08/13/2014 | CN101779261B 用于配电的基于微机电系统的选择性协调的保护系统和方法 Selective coordination based on micro-electromechanical systems protection system and method for power distribution |
| 08/06/2014 | CN103972612A 一种并联接触式rf mems开关 Kind of Parallel contact rf mems switch |
| 07/31/2014 | US20140209442 Mems switches and fabrication methods |
| 07/30/2014 | CN103959418A 微机电开关及其相关方法 MEMS switches and related method |
| 07/30/2014 | CN103956300A 一种接触式rf开关 A contact switch rf |
| 07/30/2014 | CN103956299A 一种微机械rf开关 A micro mechanical switch rf |
| 07/24/2014 | WO2014110788A1 Contactor |
| 07/24/2014 | US20140202838 Electronic component |
| 07/24/2014 | US20140202837 Low-cost process-independent rf mems switch |
| 07/23/2014 | CN103943421A 一种驱动电极板、电容上极板分离式rf mems开关 A drive electrode plate, the capacitor plates separate rf mems switch |
| 07/23/2014 | CN103943420A Mems继电器、悬臂梁开关及其形成方法 Mems relays, switches and method of forming the cantilever |
| 07/23/2014 | CN103943419A 一种带有上悬梁的RFMEMs开关 A switch on the cantilever beam with RFMEMs |
| 07/23/2014 | CN103943418A 一种弹性微桥式rf mems开关 An elastic micro-bridge rf mems switch |
| 07/23/2014 | CN103943417A 一种电容式rf mems开关 Capacitive rf mems switch |
| 07/23/2014 | CN103943416A 一种双稳态静电型开关 A bistable switch electrostatic |
| 07/09/2014 | EP2751818A2 Rf mems isolation, series and shunt dvc, and small mems |
| 07/09/2014 | EP2751022A2 Mems device anchoring |
| 07/03/2014 | US20140184352 Electrostatic micro relay and manufacturing method for the same |
| 07/03/2014 | US20140183014 Electric equipment having movable portion, and its manufacture |
| 06/25/2014 | EP2747190A1 Capacitive MEMS component with buried transmission line |
| 06/25/2014 | EP2747102A1 Vertical electromechanical switch device and method for manufacturing the same. |
| 06/25/2014 | EP2745301A1 Routing of mems variable capacitors for rf applications |
| 06/25/2014 | CN103889887A Mems装置锚固 Mems device anchoring |
| 06/25/2014 | CN102034648B 开关装置 Switching device |
| 06/19/2014 | US20140167168 Ultrananocrystalline Diamond Films With Optimized Dielectric Properties For Advanced RF MEMS Capacitive Switches |
| 06/19/2014 | US20140166461 Three-dimensional inter-chip contact through vertical displacement mems |
| 06/18/2014 | EP2743955A1 Electronic component |
| 06/18/2014 | CN102054628B Mems switch |
| 06/12/2014 | WO2014088878A1 Stiction reduction for mems devices |
| 06/11/2014 | CN103858199A Electric equipment with moving part and manufacturing method thereof |
| 06/04/2014 | CN103843090A Rf mems isolation, series and shunt DVC, and small MEMS |
| 06/04/2014 | CN103843089A Electrical device having movable electrode |
| 06/04/2014 | CN101456530B Method and system for mems switches fabricated in an integrated circuit package |
| 05/28/2014 | EP2735009A1 Rf mems component comprising ferroelectric material |
| 05/13/2014 | CA2496860C Microelectromechanical devices |
| 05/07/2014 | CN103779142A 逻辑门 Logic gates |
| 05/06/2014 | CA2602187C Rf mems switch a flexible and free switch membrane |
| 04/30/2014 | CN103762123A Electrostatic driven bi-stable state RFMEMS switch |
| 04/24/2014 | US20140112067 Apparatus, Storage Device, Switch and Methods, Which Include Microstructures Extending from a Support |
| 04/23/2014 | CN103748646A Routing of MEMS variable capacitors for RF applications |
| 04/23/2014 | CN103745890A Impact-resisting silicon beam MEMS (micro-electromechanical system) composite switch |
| 04/22/2014 | US8704316 Etchant-free methods of producing a gap between two layers, and devices produced thereby |
| 04/16/2014 | EP2718225A2 Systems and methods for current density optimization in cmos-integrated mems capacitive devices |
| 04/16/2014 | CN103732526A Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devices |
| 04/16/2014 | CN101866781B Vertical integrated circuit switches and method of fabricating same |
| 04/15/2014 | US8699268 Field effect devices controlled via a nanotube switching element |
| 04/03/2014 | WO2014049464A1 Nanoelectromechanical switch with localized nanoscale conductive pathway |
| 04/02/2014 | EP2713379A1 A switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches |
| 03/27/2014 | WO2014047383A1 Mems switches and other miniaturized devices having encapsulating enclosures, and processes for fabricating same |
| 03/27/2014 | WO2014047380A1 Switches for use in microelectromechanical and other systems, and processes for making same |
| 03/20/2014 | US20140076699 Mems switches and other miniaturized devices having encapsulating enclosures, and processes for fabricating same |
| 03/20/2014 | US20140076698 Switches for use in microelectromechanical and other systems, and processes for making same |
| 03/19/2014 | EP2707770A1 Microelectromechanical system with a center of mass balanced by a mirror substrate |
| 03/19/2014 | EP2707769A2 Microelectromechanical system with balanced center of mass |
| 03/19/2014 | CN102543591B MEMS (micro-electro-mechanical systems) switch and manufacturing method thereof |
| 03/13/2014 | US20140070340 Normally closed microelectromechanical switches (mems), methods of manufacture and design structures |
| 03/12/2014 | EP2706547A1 Radio circuits and components thereof including temperature responsive liquid MEMS |
| 03/12/2014 | EP2706546A1 Liquid MEMS component and RF applications thereof |
| 03/12/2014 | EP2706545A2 Liquid MEMS capacitor |
| 03/12/2014 | CN102134051B 电子器件 Electronic devices |
| 03/06/2014 | US20140061013 Four terminal nano-electromechanical switch with a single mechanical contact |