Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592) |
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03/13/2003 | US20030047799 Wafer level interconnection |
03/13/2003 | CA2454834A1 Electromechanical memory array using nanotube ribbons and method for making same |
03/12/2003 | EP1290788A2 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
03/11/2003 | US6531668 High-speed MEMS switch with high-resonance-frequency beam |
03/06/2003 | US20030042567 Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules |
03/06/2003 | US20030042561 Micromechanical device and method of manufacture thereof |
03/06/2003 | US20030042560 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode |
03/06/2003 | US20030042117 High-speed mems switch with high-resonance-frequency beam |
03/05/2003 | EP1288977A1 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode |
03/05/2003 | EP1287589A1 A tunable impedance surface |
03/05/2003 | EP1042774B1 Micro electro-mechanical systems relay |
03/04/2003 | US6529093 Microelectromechanical (MEMS) switch using stepped actuation electrodes |
02/27/2003 | WO2003017722A2 Micro-electro mechanical system and method of making |
02/26/2003 | EP1285491A2 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
02/25/2003 | US6525396 Integrated circuits; air gap thickness |
02/20/2003 | WO2003015128A2 An electromechanical switch and method of fabrication |
02/20/2003 | US20030034239 Micro-electro mechanical system |
02/13/2003 | WO2003012811A1 Electro ceramic mems structure with oversized electrodes |
02/13/2003 | US20030030998 Microelectromechanical component |
02/13/2003 | US20030030505 Coplanar waveguide switch |
02/13/2003 | US20030029705 Bistable actuation techniques, mechanisms, and applications |
02/12/2003 | EP1283539A1 Static relay and communication device using static relay |
02/12/2003 | EP1145418B1 Twin configuration for increased life time in touch mode electrostatic actuators |
02/06/2003 | WO2001088837A9 Method and apparatus for pressure sensing |
02/05/2003 | EP1163692B1 Microrelay working parallel to the substrate |
01/30/2003 | WO2002096166A9 Radio frequency microelectromechanical systems (mems) devices on low-temperature co-fired ceramic (ltcc) substrates |
01/30/2003 | WO2002055431A3 Wafer level interconnection |
01/30/2003 | US20030021966 Electromechanical memory array using nanotube ribbons and method for making same |
01/30/2003 | US20030020585 Electro ceramic mems structure with oversized electrodes |
01/30/2003 | US20030020173 Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates |
01/28/2003 | US6512432 Microswitch and method of fabricating a microswitch with a cantilevered arm |
01/28/2003 | US6512300 Water level interconnection |
01/28/2003 | US6511894 MEMS relay and method of fabricating the same |
01/22/2003 | EP1277277A2 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
01/21/2003 | US6509816 Electro ceramic MEMS structure with oversized electrodes |
01/21/2003 | US6509605 Flash memory cell having a flexible element |
01/16/2003 | US20030011955 Inherently stable electrostatic actuator technique which allows for full gap deflection of the actuator |
01/15/2003 | EP1276126A1 Microelectromechanical device |
01/15/2003 | EP1275201A2 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
01/14/2003 | US6506989 Micro power switch |
01/09/2003 | US20030006868 Microrelay |
01/09/2003 | US20030006858 Microelectromechanical (mems) switch using stepped actuation electrodes |
01/09/2003 | US20030006125 Micro electromechanical switches |
01/08/2003 | EP1273071A1 An electronically tunable reflector |
01/07/2003 | US6504447 Microelectromechanical RF and microwave frequency power limiter and electrostatic device protection |
01/02/2003 | US20030001704 Micro machined RF switches and methods of operating the same |
01/02/2003 | US20030001251 Wafer level interconnection |
01/02/2003 | CA2389820A1 Microelectromechanical component |
12/31/2002 | US6501354 Microelectromechanical liquid metal current carrying system, apparatus and method |
12/26/2002 | US20020195681 Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime |
12/19/2002 | US20020191897 Micro electromechanical switches |
12/19/2002 | US20020190835 Tunable inductor using microelectromechanical switches |
12/19/2002 | US20020190267 Electrostatically actuated microswitch |
12/18/2002 | CN1385357A Microelectric mechanical system with monoarmature |
12/17/2002 | US6496351 MEMS device members having portions that contact a substrate and associated methods of operating |
12/17/2002 | US6495905 Nanomechanical switches and circuits |
12/17/2002 | US6495387 Electronic devices including micromechanical switches |
12/12/2002 | WO2002099929A1 Apparatus and method for reconfiguring antenna elements |
12/12/2002 | WO2002044033A3 Mems device with integral packaging |
12/12/2002 | US20020186108 Micro electromechanical switches |
12/10/2002 | US6492943 Phased-array antenna apparatus |
12/05/2002 | WO2002096796A2 Membrane for micro-electro-mechanical switch, and methods of making and using it |
12/05/2002 | US20020179421 Mechanically assisted restoring force support for micromachined membranes |
12/03/2002 | US6489857 Multiposition micro electromechanical switch |
11/28/2002 | WO2002096166A1 Radio frequency microelectromechanical systems (mems) devices on low-temperature co-fired ceramic (ltcc) substrates |
11/26/2002 | US6486425 Electrostatic microrelay |
11/21/2002 | WO2002058089A9 Bistable actuation techniques, mechanisms, and applications |
11/21/2002 | US20020171518 Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring |
11/21/2002 | US20020171517 Inductor-capacitor resonant rf switch |
11/19/2002 | US6483480 Tunable impedance surface |
11/19/2002 | US6483395 Micro-machine (MEMS) switch with electrical insulator |
11/14/2002 | WO2002091556A1 Electrostatic actuator |
11/14/2002 | US20020167380 Micro-electro mechanical system having single anchor |
11/14/2002 | US20020166388 Method and apparatus for pressure sensing |
11/13/2002 | EP1256970A1 Micro-electro mechanical system having single anchor |
11/13/2002 | EP1082740B1 Micro-mechanical elements |
11/07/2002 | WO2002089251A1 Method and apparatus for controlling an antenna array |
11/07/2002 | US20020163408 Static relay and communication device using static relay |
11/06/2002 | EP1255268A1 Microrelay circuit for off and on switching of alternating currents |
11/06/2002 | EP1254474A1 Microelectromechanical micro-relay with liquid metal contacts |
11/06/2002 | CN1378225A Static micro relay, radio device and measuring device and contact point switching method |
11/06/2002 | CN1378224A Electronic parts |
10/31/2002 | US20020160583 MEMS relay and mehtod of fabricating the same |
10/30/2002 | EP1252640A1 Microrelay |
10/29/2002 | US6473361 Electromechanical memory cell |
10/29/2002 | US6472962 Inductor-capacitor resonant RF switch |
10/24/2002 | US20020153584 Nanomechanical switches and circuits |
10/24/2002 | US20020153583 Nanomechanical switches and circuits |
10/24/2002 | US20020153236 Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch |
10/23/2002 | EP1251577A2 Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules |
10/22/2002 | US6469677 Optical network for actuation of switches in a reconfigurable antenna |
10/17/2002 | WO2002063657A9 Microelectronic mechanical system (mems) switch and method of fabrication |
10/17/2002 | US20020151132 Micromachined electromechanical (MEM) random access memory array and method of making same |
10/17/2002 | US20020149071 MEMS device having flexures with non-linear restoring force |
10/15/2002 | US6466102 High isolation micro mechanical switch |
10/15/2002 | US6465280 In-situ cap and method of fabricating same for an integrated circuit device |
10/10/2002 | WO2002080207A1 Micro-machined radio frequency switches and method of operating the same |
10/10/2002 | WO2002079079A1 Micro electromechanical switches |
10/10/2002 | WO2002079078A1 Micro electromechanical switches |
10/10/2002 | WO2002079077A1 Micro electromechanical switches |