Patents
Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592)
03/2003
03/13/2003US20030047799 Wafer level interconnection
03/13/2003CA2454834A1 Electromechanical memory array using nanotube ribbons and method for making same
03/12/2003EP1290788A2 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
03/11/2003US6531668 High-speed MEMS switch with high-resonance-frequency beam
03/06/2003US20030042567 Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules
03/06/2003US20030042561 Micromechanical device and method of manufacture thereof
03/06/2003US20030042560 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode
03/06/2003US20030042117 High-speed mems switch with high-resonance-frequency beam
03/05/2003EP1288977A1 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode
03/05/2003EP1287589A1 A tunable impedance surface
03/05/2003EP1042774B1 Micro electro-mechanical systems relay
03/04/2003US6529093 Microelectromechanical (MEMS) switch using stepped actuation electrodes
02/2003
02/27/2003WO2003017722A2 Micro-electro mechanical system and method of making
02/26/2003EP1285491A2 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
02/25/2003US6525396 Integrated circuits; air gap thickness
02/20/2003WO2003015128A2 An electromechanical switch and method of fabrication
02/20/2003US20030034239 Micro-electro mechanical system
02/13/2003WO2003012811A1 Electro ceramic mems structure with oversized electrodes
02/13/2003US20030030998 Microelectromechanical component
02/13/2003US20030030505 Coplanar waveguide switch
02/13/2003US20030029705 Bistable actuation techniques, mechanisms, and applications
02/12/2003EP1283539A1 Static relay and communication device using static relay
02/12/2003EP1145418B1 Twin configuration for increased life time in touch mode electrostatic actuators
02/06/2003WO2001088837A9 Method and apparatus for pressure sensing
02/05/2003EP1163692B1 Microrelay working parallel to the substrate
01/2003
01/30/2003WO2002096166A9 Radio frequency microelectromechanical systems (mems) devices on low-temperature co-fired ceramic (ltcc) substrates
01/30/2003WO2002055431A3 Wafer level interconnection
01/30/2003US20030021966 Electromechanical memory array using nanotube ribbons and method for making same
01/30/2003US20030020585 Electro ceramic mems structure with oversized electrodes
01/30/2003US20030020173 Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
01/28/2003US6512432 Microswitch and method of fabricating a microswitch with a cantilevered arm
01/28/2003US6512300 Water level interconnection
01/28/2003US6511894 MEMS relay and method of fabricating the same
01/22/2003EP1277277A2 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
01/21/2003US6509816 Electro ceramic MEMS structure with oversized electrodes
01/21/2003US6509605 Flash memory cell having a flexible element
01/16/2003US20030011955 Inherently stable electrostatic actuator technique which allows for full gap deflection of the actuator
01/15/2003EP1276126A1 Microelectromechanical device
01/15/2003EP1275201A2 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
01/14/2003US6506989 Micro power switch
01/09/2003US20030006868 Microrelay
01/09/2003US20030006858 Microelectromechanical (mems) switch using stepped actuation electrodes
01/09/2003US20030006125 Micro electromechanical switches
01/08/2003EP1273071A1 An electronically tunable reflector
01/07/2003US6504447 Microelectromechanical RF and microwave frequency power limiter and electrostatic device protection
01/02/2003US20030001704 Micro machined RF switches and methods of operating the same
01/02/2003US20030001251 Wafer level interconnection
01/02/2003CA2389820A1 Microelectromechanical component
12/2002
12/31/2002US6501354 Microelectromechanical liquid metal current carrying system, apparatus and method
12/26/2002US20020195681 Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime
12/19/2002US20020191897 Micro electromechanical switches
12/19/2002US20020190835 Tunable inductor using microelectromechanical switches
12/19/2002US20020190267 Electrostatically actuated microswitch
12/18/2002CN1385357A Microelectric mechanical system with monoarmature
12/17/2002US6496351 MEMS device members having portions that contact a substrate and associated methods of operating
12/17/2002US6495905 Nanomechanical switches and circuits
12/17/2002US6495387 Electronic devices including micromechanical switches
12/12/2002WO2002099929A1 Apparatus and method for reconfiguring antenna elements
12/12/2002WO2002044033A3 Mems device with integral packaging
12/12/2002US20020186108 Micro electromechanical switches
12/10/2002US6492943 Phased-array antenna apparatus
12/05/2002WO2002096796A2 Membrane for micro-electro-mechanical switch, and methods of making and using it
12/05/2002US20020179421 Mechanically assisted restoring force support for micromachined membranes
12/03/2002US6489857 Multiposition micro electromechanical switch
11/2002
11/28/2002WO2002096166A1 Radio frequency microelectromechanical systems (mems) devices on low-temperature co-fired ceramic (ltcc) substrates
11/26/2002US6486425 Electrostatic microrelay
11/21/2002WO2002058089A9 Bistable actuation techniques, mechanisms, and applications
11/21/2002US20020171518 Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
11/21/2002US20020171517 Inductor-capacitor resonant rf switch
11/19/2002US6483480 Tunable impedance surface
11/19/2002US6483395 Micro-machine (MEMS) switch with electrical insulator
11/14/2002WO2002091556A1 Electrostatic actuator
11/14/2002US20020167380 Micro-electro mechanical system having single anchor
11/14/2002US20020166388 Method and apparatus for pressure sensing
11/13/2002EP1256970A1 Micro-electro mechanical system having single anchor
11/13/2002EP1082740B1 Micro-mechanical elements
11/07/2002WO2002089251A1 Method and apparatus for controlling an antenna array
11/07/2002US20020163408 Static relay and communication device using static relay
11/06/2002EP1255268A1 Microrelay circuit for off and on switching of alternating currents
11/06/2002EP1254474A1 Microelectromechanical micro-relay with liquid metal contacts
11/06/2002CN1378225A Static micro relay, radio device and measuring device and contact point switching method
11/06/2002CN1378224A Electronic parts
10/2002
10/31/2002US20020160583 MEMS relay and mehtod of fabricating the same
10/30/2002EP1252640A1 Microrelay
10/29/2002US6473361 Electromechanical memory cell
10/29/2002US6472962 Inductor-capacitor resonant RF switch
10/24/2002US20020153584 Nanomechanical switches and circuits
10/24/2002US20020153583 Nanomechanical switches and circuits
10/24/2002US20020153236 Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch
10/23/2002EP1251577A2 Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules
10/22/2002US6469677 Optical network for actuation of switches in a reconfigurable antenna
10/17/2002WO2002063657A9 Microelectronic mechanical system (mems) switch and method of fabrication
10/17/2002US20020151132 Micromachined electromechanical (MEM) random access memory array and method of making same
10/17/2002US20020149071 MEMS device having flexures with non-linear restoring force
10/15/2002US6466102 High isolation micro mechanical switch
10/15/2002US6465280 In-situ cap and method of fabricating same for an integrated circuit device
10/10/2002WO2002080207A1 Micro-machined radio frequency switches and method of operating the same
10/10/2002WO2002079079A1 Micro electromechanical switches
10/10/2002WO2002079078A1 Micro electromechanical switches
10/10/2002WO2002079077A1 Micro electromechanical switches
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