| Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592) |
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| 05/27/2004 | US20040099518 Integrated microsprings for speed switches |
| 05/26/2004 | CN1500063A Micro electromechanical switches |
| 05/26/2004 | CN1500062A Micro electromechanical switches |
| 05/25/2004 | US6741207 Multi-bit phase shifters using MEM RF switches |
| 05/25/2004 | US6740946 Micromechanical device and method of manufacture thereof |
| 05/20/2004 | US20040095210 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 05/20/2004 | US20040095205 RF MEMS switch matrix |
| 05/18/2004 | US6738600 Ceramic microelectromechanical structure |
| 05/12/2004 | CN1495916A Micro electromechanical system device |
| 05/11/2004 | US6734770 Microrelay |
| 05/11/2004 | US6734550 In-situ cap and method of fabricating same for an integrated circuit device |
| 05/11/2004 | US6734512 Electrostatic actuator |
| 05/06/2004 | WO2004038819A2 Piezoelectric switch for tunable electronic components |
| 05/06/2004 | WO2004038751A1 A micromachined relay with inorganic insulation |
| 05/04/2004 | US6731492 Overdrive structures for flexible electrostatic switch |
| 05/04/2004 | US6730978 Single crystal, dual wafer, tunneling sensor and a method of making same |
| 04/27/2004 | US6727778 Transmission line structures for use as phase shifters and switches |
| 04/22/2004 | US20040075514 Microswitch and method of manufacturing the same |
| 04/22/2004 | US20040075366 Piezoelectric switch for tunable electronic components |
| 04/21/2004 | EP1410429A2 Electromechanical memory array using nanotube ribbons and method for making same |
| 04/15/2004 | WO2003059805A3 Micro device |
| 04/15/2004 | US20040069608 Switch and method for manufacturing the same |
| 04/13/2004 | US6720851 Micro electromechanical switches |
| 04/13/2004 | US6720201 MEMS device and fabrication method thereof |
| 04/08/2004 | WO2004030005A1 Electrostatically actuated low response time power commutation micro-switches |
| 04/08/2004 | WO2004028953A2 Microelectromechanical device having an active opening switch |
| 04/08/2004 | WO2002073673A9 A micro-electro-mechanical switch and a method of using and making thereof |
| 04/08/2004 | US20040066258 MEMS device with integral packaging |
| 04/07/2004 | EP1406281A2 Capacitive micro-electro mechanical switch and method of manufacturing the same |
| 04/06/2004 | US6717496 Electromagnetic energy controlled low actuation voltage microelectromechanical switch |
| 04/01/2004 | WO2003079384A3 Double-electret mems actuator |
| 04/01/2004 | WO2002067293A9 Microelectromechanical systems (mems) device including an analog or a digital |
| 04/01/2004 | US20040061579 Microelectromechanical device having an active opening switch |
| 04/01/2004 | US20040061106 Micro electro mechanical system apparatus |
| 03/31/2004 | CN1485873A Electrostatic rf mems switches |
| 03/30/2004 | US6714105 Micro electro-mechanical system method |
| 03/30/2004 | US6713938 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
| 03/30/2004 | US6713695 RF microelectromechanical systems device |
| 03/25/2004 | WO2004025676A2 Mechanically bi-stable mems relay device |
| 03/25/2004 | US20040056740 Microelectromechanical (MEMS) switching apparatus |
| 03/25/2004 | US20040056320 Microrelays and microrelay fabrication and operating methods |
| 03/24/2004 | EP1254474B1 Microelectromechanical micro-relay with liquid metal contacts |
| 03/24/2004 | CN1484266A Switch and method for mfg of same |
| 03/18/2004 | US20040050675 High cycle cantilever MEMS devices |
| 03/18/2004 | US20040050674 Mechanically bi-stable mems relay device |
| 03/17/2004 | EP1398811A2 Switchable capacitor |
| 03/17/2004 | EP1398804A2 Variable capacitor and method for manufacturing same |
| 03/16/2004 | US6707355 Gradually-actuating micromechanical device |
| 03/16/2004 | US6706981 Techniques to fabricate a reliable opposing contact structure |
| 03/16/2004 | US6706402 Nanotube films and articles |
| 03/11/2004 | WO2004021383A2 Reliable opposing contact structure and techniques to fabricate the same |
| 03/11/2004 | WO2004021382A2 Micro-electromechanical switch performance enhancement |
| 03/11/2004 | WO2003043095A3 Anchors for micro-electro-mechanical systems (mems) devices |
| 03/11/2004 | US20040048403 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 03/10/2004 | EP1395516A2 Membrane for micro-electro-mechanical switch, and methods of making and using it |
| 03/10/2004 | CN1480972A Variable capacitor element and its mfg. method |
| 03/09/2004 | US6703916 Micro-device with thermal actuator |
| 03/09/2004 | US6701779 Perpendicular torsion micro-electromechanical switch |
| 03/04/2004 | WO2004019362A1 Diaphragm activated micro-electromechanical switch |
| 03/04/2004 | US20040040828 Micro-electromechanical switch performance enhancement |
| 03/04/2004 | US20040040825 Techniques to fabricate a reliable opposing contact structure |
| 03/03/2004 | EP1394826A2 Micro-relay and method for manufacturing the same |
| 03/03/2004 | EP1394825A1 Micromechanical contact arrangement and microrelay having the same |
| 03/02/2004 | US6700465 Micro-switching device actuated by low voltage |
| 03/02/2004 | US6700172 Method and apparatus for switching high frequency signals |
| 03/02/2004 | US6698082 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode |
| 02/26/2004 | WO2004017350A1 Electrode configuration in a mems switch |
| 02/25/2004 | EP1391906A2 Electrostatic RF mems switches |
| 02/19/2004 | WO2004015729A1 Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
| 02/19/2004 | WO2004015728A1 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism |
| 02/19/2004 | US20040032705 Electrode configuration in a MEMS switch |
| 02/19/2004 | US20040031912 Method of eliminating brownian noise in micromachined varactors |
| 02/19/2004 | US20040031670 Method of actuating a high power micromachined switch |
| 02/18/2004 | CN1476529A 传感器设备 Sensor devices |
| 02/18/2004 | CN1476033A 开关 Switch |
| 02/12/2004 | WO2004013898A2 Sealed integral mems switch |
| 02/12/2004 | WO2004013039A2 Low temperature plasma si or sige for mems applications |
| 02/11/2004 | EP1388875A2 Hermetically sealed electrostatic MEMS |
| 02/05/2004 | US20040023429 Low temperature plasma Si or SiGe for MEMS applications |
| 02/05/2004 | US20040022044 Used for connecting a first terminal with a second terminal electrically |
| 02/05/2004 | US20040021151 Microswitch with a micro-electromechanical system |
| 02/05/2004 | DE10152945B4 MEMS-Schalter und Verfahren zu seiner Herstellung MEMS switch and process for its preparation |
| 02/04/2004 | EP1387380A1 Switch and method for manufacturing the same |
| 02/04/2004 | EP1386347A2 Microelectromechanical system (mens) device |
| 02/03/2004 | US6687112 Control system for an electrostatically-driven microelectromechanical device |
| 02/03/2004 | US6686820 Microelectromechanical (MEMS) switching apparatus |
| 02/03/2004 | US6686810 Coplanar waveguide switch |
| 01/29/2004 | US20040017644 Overdrive structures for flexible electrostatic switch |
| 01/28/2004 | EP1385189A2 Switch |
| 01/22/2004 | WO2003095356A3 Micro electro-mechanical system apparatus and method |
| 01/22/2004 | WO2003092048A3 Micro electro-mechanical system method |
| 01/22/2004 | US20040012298 MEMS device having electrothermal actuation and release and method for fabricating |
| 01/22/2004 | US20040012060 Miniature electrostatic actuation device and installation comprising such devices |
| 01/21/2004 | EP1383236A1 Reconfigurable multibandfilter |
| 01/20/2004 | US6680660 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 01/20/2004 | US6678943 Method of manufacturing a microelectromechanical switch |
| 01/15/2004 | WO2004006295A2 Spring loaded bi-stable mems switch |
| 01/15/2004 | US20040008099 High cycle MEMS device |
| 01/15/2004 | US20040008097 Microelectromechanical (mems) switching apparatus |
| 01/13/2004 | US6677214 Semiconductor device and method of fabricating the same |