Patents
Sitemap › H01 - Basic electric elements › H01H - Electric switches; Relays; Selectors; Emergency protective devices › H01H 59 - Electrostatic relays; Electro-adhesion relays
Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592)
01/2004
01/06/2004US6674141 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same
01/02/2004EP1374267A1 Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring
01/02/2004EP1373128A1 Micro electromechanical switches
01/02/2004EP1373127A1 Micro electromechanical switches
01/02/2004EP1373126A1 Micro electromechanical switches
01/01/2004US20040000696 Stiff cantilever beam coupling to flexible structure; high frequency
12/2003
12/24/2003WO2003107372A1 Micro-electromechanical switch having a deformable elastomeric conductive element
12/23/2003US6667873 Adaptive manifold
12/23/2003US6667245 CMOS-compatible MEM switches and method of making
12/18/2003WO2003105175A1 Switch
12/18/2003WO2003105174A1 Electronic device and method of matching the impedance thereof
12/18/2003WO2003061107A3 Dielectric actuator including conductive gap
12/18/2003CA2465815A1 Switch
12/11/2003WO2003102989A1 Microelectromechanical rf switch
12/11/2003US20030227361 Microelectromechanical rf switch
12/10/2003CN1130790C Resonator structures
12/04/2003WO2003017722A3 Micro-electro mechanical system and method of making
12/04/2003US20030224267 Micro-electro-mechanical device and method of making
12/04/2003US20030223176 Variable capacitance element
12/04/2003US20030223174 Spring loaded bi-stable MEMS switch
12/04/2003US20030222728 Microelectromechanical RF and microwave frequency power regulator
12/04/2003US20030222321 Transmits an electric signal using mechanical contact between conductors is provided. The microelectromechanical device has a conductive oxide layer on at least one of contacting surfaces of the conductors.
12/03/2003EP1367615A1 Micro-electro-mechanical device and method of making
12/03/2003EP1366518A1 In-situ cap and method of fabricating same for an integrated circuit device
12/02/2003US6657832 Mechanically assisted restoring force support for micromachined membranes
12/02/2003US6657525 Microelectromechanical RF switch
12/02/2003US6657324 Micromachine switch and method of manufacture thereof
11/2003
11/27/2003WO2002067293A3 Microelectromechanical systems (mems) device including an analog or a digital
11/26/2003EP1365271A1 Electrostatic microactuator device and installation with such devices
11/20/2003WO2003096368A1 Micro-electro-mechanical switch, and methods of making and using it.
11/20/2003WO2003095356A2 Micro electro-mechanical system apparatus and method
11/20/2003US20030214373 Micro-electro-mechanical RF switch
11/18/2003US6649852 Micro-electro mechanical system
11/13/2003WO2003042721A3 Trilayered beam mems device and related methods
11/13/2003US20030210124 Micro electromechanical switch having self-aligned spacers
11/13/2003US20030210116 Micro electro-mechanical system with one or more moving parts method and apparatus
11/13/2003US20030210115 Bistable microelectromechanical system based structures, systems and methods
11/11/2003US6646525 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
11/11/2003US6646215 Device adapted to pull a cantilever away from a contact structure
11/11/2003US6645145 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
11/06/2003WO2003092048A2 Micro electro-mechanical system method
11/06/2003WO2003091486A1 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
11/06/2003US20030207487 Single crystal, dual wafer, tunneling sensor and a method of making same
11/06/2003CA2483009A1 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
11/05/2003CN1127168C Resonator structures
11/04/2003US6642593 Microelectromechanical switch
10/2003
10/30/2003US20030201852 Micro electro-mechanical system method
10/29/2003EP1357571A1 Microelectromechanical system and its method of manufacture
10/28/2003US6639494 Microelectromechanical RF switch
10/28/2003US6639493 Micro machined RF switches and methods of operating the same
10/28/2003US6639488 MEMS RF switch with low actuation voltage
10/28/2003US6639325 Microelectromechanic relay and method for the production thereof
10/28/2003US6639205 Optically controlled MEM switches
10/23/2003US20030198812 Nanotube films and articles
10/21/2003US6635506 Method of fabricating micro-electromechanical switches on CMOS compatible substrates
10/16/2003WO2003034457A3 High cycle mems device
10/16/2003US20030193012 Optically controlled MEM switches
10/15/2003EP1352414A2 A tunneling sensor or switch and a method of making same
10/15/2003CN1448333A 静电激励器 Static actuator
10/14/2003US6633079 Wafer level interconnection
10/09/2003WO2003083886A1 Switch device
10/09/2003US20030189807 Control system for an electrostatically-driven microelectromechanical device
10/09/2003US20030188958 Micro-electro mechanical system
10/08/2003EP1350281A1 Device comprising a capacitor having a varying capacitance, especially a high- frequency microswitch
10/07/2003US6630367 Single crystal dual wafer, tunneling sensor and a method of making same
10/02/2003WO2003040338A3 Micro-scale interconnect device with internal heat spreader and method for fabricating same
10/02/2003US20030184419 Integrated microsprings for high speed switches
10/02/2003US20030184413 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
10/02/2003US20030183887 MEMS device and fabrication method thereof
09/2003
09/30/2003US6628183 Micro-electro mechanical system having single anchor
09/30/2003US6628039 Microelectromechanical device having single crystalline components and metallic components
09/25/2003WO2003079384A2 Double-electret mems actuator
09/25/2003WO2003078305A1 Nanotube relay device
09/25/2003WO2003078299A1 Process for manufacturing mems
09/25/2003WO2003015128A3 An electromechanical switch and method of fabrication
09/25/2003US20030178635 Perpendicular torsion micro-electromechanical switch
09/23/2003US6625047 Micromechanical memory element
09/23/2003US6625004 Electrostatic actuators with intrinsic stress gradient
09/23/2003US6624367 Controllers comprising receivers on glass or semiconductor substrates, having electrode layouts used as wavelength phase shifters or filters for high-frequency circuits
09/17/2003EP1344746A2 MEMS device and fabrication method thereof
09/16/2003US6621392 Micro electromechanical switch having self-aligned spacers
09/16/2003US6621390 Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch
09/16/2003US6621387 Micro-electro-mechanical systems switch
09/16/2003US6621135 Microrelays and microrelay fabrication and operating methods
09/16/2003US6621022 Reliable opposing contact structure
09/12/2003WO2003041133A3 Electrothermal self-latching mems switch and method
09/11/2003US20030169167 Sensor device
09/11/2003US20030169146 RF microelectromechanical systems device
09/11/2003US20030169136 Microswitch
09/10/2003EP1343190A2 Variable capacitance element
09/10/2003EP1343189A2 RF microelectromechanical device
09/02/2003US6613993 Microrelay working parallel to the substrate
08/2003
08/28/2003WO2003021613A3 Electromechanical memory array using nanotube ribbons and method for making same
08/26/2003US6611033 Micromachined electromechanical (MEM) random access memory array and method of making same
08/21/2003WO2003069646A1 Microswitch with a micro-electromechanical system
08/21/2003WO2003069645A1 Method for the production of a microswitch-type micro component
08/21/2003US20030155995 Micro relay of which movable contact remains separated from ground contact in non-operating state
08/21/2003US20030155221 Electrostatic actuator
08/19/2003US6608268 Proximity micro-electro-mechanical system
08/19/2003US6607934 Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components
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