| Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592) |
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| 03/07/2002 | US20020027487 Microswitch and method of fabricating the microswitch |
| 03/07/2002 | US20020027064 Capacitive microelectromechanical switches |
| 03/06/2002 | EP1183566A1 Micromachined electrostatic actuator with air gap |
| 02/28/2002 | WO2002017342A1 Microswitch |
| 02/28/2002 | US20020025595 MEMS variable capacitor with stabilized electrostatic drive and method therefor |
| 02/28/2002 | US20020023999 Optically controlled MEM switches |
| 02/27/2002 | CN1338116A Micro-relay |
| 02/26/2002 | US6351201 Microelectromechanical switch with braking algorithm |
| 02/21/2002 | WO2001082475A3 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
| 02/21/2002 | US20020021054 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
| 02/14/2002 | WO2002012114A2 Ceramic microelectromechanical structure |
| 02/14/2002 | WO2001056920A3 Micro-electromechanical system device |
| 02/14/2002 | WO2001003208A9 Nanoscopic wire-based devices, arrays, and methods of their manufacture |
| 02/14/2002 | US20020018334 MEMS device members having portions that contact a substrate and associated methods of operating |
| 02/14/2002 | DE10037385A1 Vorrichtung mit einem Kondensator A device with a capacitor |
| 02/14/2002 | DE10004393C1 Mikrorelais Microrelay |
| 02/07/2002 | WO2002011232A1 Coplanar waveguide switch |
| 02/07/2002 | WO2002011189A2 A tunneling sensor or switch and a method of making same |
| 02/07/2002 | WO2002011188A2 A mem sensor and a method of making same |
| 02/07/2002 | WO2002010684A2 Three-axes sensor and a method of making same |
| 02/07/2002 | WO2002010063A2 A tunneling sensor or switch and a method of making same |
| 01/31/2002 | WO2002009224A1 Multi-bit phase shifters using mem rf switches |
| 01/31/2002 | US20020011759 Electrostatic actuator for microelectromechanical systems and methods of fabrication |
| 01/30/2002 | EP1176620A1 Micromachine switch and method of manufacture thereof |
| 01/24/2002 | US20020008444 Micro-relay and method for manufacturing the same |
| 01/23/2002 | EP1021815B1 Micromechanical electrostatic relay and method for the production thereof |
| 01/17/2002 | US20020005341 Radio device and measuring device utilizing electrostatic microrelay and electrostatic microrelay |
| 01/09/2002 | EP1170768A1 Micromachine switch |
| 01/03/2002 | WO2002001584A1 Capacitive microelectromechanical switches |
| 01/03/2002 | US20020000364 Push-pull type micromachined microwave switch |
| 01/02/2002 | EP1168399A1 Micromachine switch |
| 01/02/2002 | EP1166352A1 Micro-relay |
| 12/27/2001 | WO2001035433A3 Cmos-compatible mem switches and method of making |
| 12/19/2001 | EP1163692A1 Microrelay working parallel to the substrate |
| 12/18/2001 | US6331257 Fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications |
| 12/18/2001 | CA2241375C Phased-array antenna apparatus |
| 12/06/2001 | US20010048353 Microelectromechanical micro-relay with liquid metal contacts |
| 12/06/2001 | US20010048141 Microelectromechanical switch |
| 12/05/2001 | EP1159758A1 Flash memory cell having a flexible element |
| 11/28/2001 | EP1157396A1 Variable capacitor and associated fabrication method |
| 11/22/2001 | WO2001088837A1 Method and apparatus for pressure sensing |
| 11/21/2001 | EP1156504A2 Micromechanical relay with improved switching behaviour |
| 11/14/2001 | EP1153405A1 Electronic devices including micromechanical switches |
| 11/08/2001 | US20010038254 Microelectromechanical device having single crystalline components and metallic components |
| 11/07/2001 | EP1151446A1 Microswitching contact |
| 11/07/2001 | CN1321323A Microelectromechanical device having single crystalline components and metallic components and associated fabrication methods |
| 11/01/2001 | WO2001082479A2 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 11/01/2001 | WO2001082478A2 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 11/01/2001 | WO2001082477A2 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
| 11/01/2001 | WO2001082476A2 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 11/01/2001 | WO2001082475A2 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
| 11/01/2001 | WO2001082467A2 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 11/01/2001 | WO2001082323A1 Static relay and communication device using static relay |
| 11/01/2001 | CA2406543A1 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 11/01/2001 | CA2406518A1 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 11/01/2001 | CA2406223A1 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 11/01/2001 | CA2406176A1 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 10/31/2001 | EP1150318A1 Micromachine switch and its production method |
| 10/30/2001 | US6310339 Optically controlled MEM switches |
| 10/25/2001 | WO2001080266A1 Method and arrangement for controlling micromechanical element |
| 10/25/2001 | WO2001080258A2 A micro relay |
| 10/25/2001 | US20010033121 Method and apparatus for upconvering and filtering an information signal utilizing a vibrating micromechanical device |
| 10/25/2001 | US20010033119 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 10/25/2001 | DE10018340A1 Microelectromechanical switching arrangement in line structure, employs alternating series-parallel arrangement of switches |
| 10/25/2001 | CA2406186A1 Method and arrangement for controlling micromechanical element |
| 10/23/2001 | US6307452 Folded spring based micro electromechanical (MEM) RF switch |
| 10/23/2001 | US6307169 Micro-electromechanical switch |
| 10/18/2001 | US20010031025 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 10/18/2001 | US20010030489 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 10/17/2001 | EP1146533A1 Micromachine switch and its production method |
| 10/17/2001 | EP1146532A2 Method and arrangement for controlling micromechanical element |
| 10/17/2001 | EP1145418A1 Twin configuration for increased life time in touch mode electrostatic actuators |
| 10/16/2001 | US6303885 Bi-stable micro switch |
| 10/10/2001 | EP1142110A1 Device including a micromechanical resonator having an operating frequency and method of extending same |
| 10/04/2001 | WO2001073893A1 A tunable impedance surface |
| 10/04/2001 | WO2001073891A1 An electronically tunable reflector |
| 09/25/2001 | US6294847 Bistable micro-electromechanical switch |
| 09/20/2001 | US20010022541 Micro-machine switch |
| 09/18/2001 | US6291922 Microelectromechanical device having single crystalline components and metallic components |
| 09/13/2001 | WO2001067476A1 Electrostatic discharge protection for electrostatically actuated microrelays |
| 08/30/2001 | WO2001063634A2 Microswitch and process for its production |
| 08/30/2001 | DE10108663A1 Microswitch used in electronic devices comprises flat substrate, spring having a fixed and a free section, and a device for pressing the spring onto the substrate |
| 08/29/2001 | CN1310854A Micromechanical electrostatic relay and method for the production thereof |
| 08/22/2001 | CN1308849A Corner irrigation system |
| 08/09/2001 | WO2001057902A2 Electrostatic actuator for microelectromechanical systems and methods of fabrication |
| 08/09/2001 | WO2001057901A1 Microrelay |
| 08/09/2001 | WO2001057900A1 Microelectromechanical micro-relay with liquid metal contacts |
| 08/09/2001 | WO2001056920A2 Micro-electromechanical system device |
| 08/08/2001 | EP1121694A1 Microelectromechanical device having single crystalline components and metallic components and associated fabrication methods |
| 06/21/2001 | WO2001045127A1 Electrostatically controlled variable capacitor |
| 06/21/2001 | WO2001045120A2 Variable capacitor and associated fabrication method |
| 06/21/2001 | US20010004548 Electronic devices including micromechanical switches |
| 06/21/2001 | CA2361511A1 Variable capacitor and associated fabrication method |
| 06/19/2001 | US6249073 Device including a micromechanical resonator having an operating frequency and method of extending same |
| 06/14/2001 | WO2001043153A1 Electronic devices including micromechanical switches |
| 06/05/2001 | US6242843 Resonator structures |
| 05/31/2001 | DE19929595C1 Switching relay e.g. silicon microrelay, has drive element used for deformation of spring blade fixed at either end to bring attached movable contact into contact with stationary contact |
| 05/25/2001 | WO2001037303A1 Micro machine switch |
| 05/22/2001 | US6236491 Micromachined electrostatic actuator with air gap |
| 05/17/2001 | WO2001035433A2 Cmos-compatible mem switches and method of making |