| Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592) |
|---|
| 10/10/2002 | WO2002079076A1 Mems device members having portions that contact a substrate and associated mehtods of operating |
| 10/10/2002 | US20020145493 Micro power switch |
| 10/03/2002 | US20020141130 Adaptive manifold |
| 10/03/2002 | US20020140533 Method of producing an integrated type microswitch |
| 10/02/2002 | EP1246216A2 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method |
| 10/02/2002 | EP1246215A1 Microrelay with new construction |
| 09/26/2002 | US20020136485 Apparatus and method for micro-electromechanical systems two-dimensional large movement electrostatic comb drive |
| 09/24/2002 | US6456420 Microelectromechanical elevating structures |
| 09/19/2002 | WO2002073691A1 In-situ cap and method of fabricating same for an integrated circuit device |
| 09/19/2002 | WO2002073673A1 A micro-electro-mechanical switch and a method of using and making thereof |
| 09/19/2002 | WO2002073645A1 Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring |
| 09/19/2002 | US20020131228 Micro-electro-mechanical switch and a method of using and making thereof |
| 09/19/2002 | US20020130353 Nanoscopic wire-based devices, arrays, and methods of their manufacture |
| 09/17/2002 | US6452124 Capacitive microelectromechanical switches |
| 09/12/2002 | WO2002063657A8 Microelectronic mechanical system (mems) switch and method of fabrication |
| 09/12/2002 | US20020124385 Micro-electro-mechanical high frequency switch and method for manufacturing the same |
| 09/05/2002 | US20020121145 Fingerprint sensors using membrane switch arrays |
| 08/29/2002 | WO2002067293A2 Microelectromechanical systems (mems) device including an analog or a digital |
| 08/29/2002 | US20020117937 Micro-relay and method for manufacturing the same |
| 08/28/2002 | EP1235244A1 Micro machine switch |
| 08/28/2002 | CN1366694A Static relay and communication device using static relay |
| 08/27/2002 | US6441449 MEMS variable capacitor with stabilized electrostatic drive and method therefor |
| 08/27/2002 | US6441405 Micro-mechanical elements |
| 08/27/2002 | US6440767 Monolithic single pole double throw RF MEMS switch |
| 08/21/2002 | CN1365504A Microelectromechanical relay and method for production thereof |
| 08/15/2002 | WO2002063657A2 Microelectronic mechanical system (mems) switch and method of fabrication |
| 08/15/2002 | WO2001082476A3 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 08/14/2002 | EP1230660A2 Cmos-compatible mem switches and method of making |
| 08/13/2002 | US6433657 Micromachine MEMS switch |
| 08/08/2002 | WO2002061781A1 Switch and integrated circuit device |
| 08/08/2002 | US20020105396 Microelectromechanical micro-relay with liquid metal contacts |
| 08/01/2002 | WO2002059977A2 Monolithic switch |
| 08/01/2002 | US20020101300 Transmission line structures for use as phase shifters and switches |
| 07/31/2002 | EP1227534A1 Small-sized phase shifter and method of manufacture thereof |
| 07/31/2002 | EP1226595A1 Optically controlled mem switches |
| 07/30/2002 | US6426687 RF MEMS switch |
| 07/25/2002 | WO2002058089A1 Bistable actuation techniques, mechanisms, and applications |
| 07/25/2002 | US20020098613 Monolithic single pole double throw rf mems switch |
| 07/25/2002 | US20020098611 Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components |
| 07/25/2002 | US20020097136 Micromechanical memory element |
| 07/25/2002 | US20020097133 Micro-device with thermal actuator |
| 07/25/2002 | US20020096421 MEMS device with integral packaging |
| 07/23/2002 | US6424074 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
| 07/18/2002 | WO2002055431A2 Wafer level interconnection |
| 07/11/2002 | WO2002054528A1 Device comprising a capacitor having a varying capacitance, especially a high- frequency microswitch |
| 07/11/2002 | DE10100296A1 Vorrichtung mit einem Kondensator mit veränderbarer Kapazität, insbesondere Hochfrequenz-Mikroschalter A device with a capacitor with variable capacity, especially high-frequency micro-switch |
| 07/09/2002 | US6417807 Optically controlled RF MEMS switch array for reconfigurable broadband reflective antennas |
| 07/03/2002 | EP1220256A1 Micro device with thermal actuator |
| 07/03/2002 | CN1356706A Multi-position power switch for microcomputer |
| 06/27/2002 | DE10061205A1 Micromechanical microwave switch has coefficients of thermal expansion of membrane, beams and substrate and lengths of membrane and beams matched to compensate thermal effects |
| 06/26/2002 | EP1216492A1 Multi-bit phase shifters using mem rf switches |
| 06/20/2002 | US20020075094 Microelectronic mechanical systems (MEMS) switch and method of fabrication |
| 06/18/2002 | US6407482 Micro-relay and method for manufacturing the same |
| 06/06/2002 | WO2002044033A2 Mems device with integral packaging |
| 06/06/2002 | US20020066659 Method and arrangement for controlling micromechanical element |
| 06/05/2002 | EP1211707A2 Multiposition micro electromechanical switch |
| 05/30/2002 | US20020063610 Multiposition micro electromechanical switch |
| 05/28/2002 | US6396372 Electrostatic micro relay |
| 05/28/2002 | US6396371 Microelectromechanical micro-relay with liquid metal contacts |
| 05/28/2002 | US6396368 CMOS-compatible MEM switches and method of making |
| 05/23/2002 | DE10040867A1 Microswitch has contact bearer deformable parallel to substrate with shape of symmetrical oscillation trough in stable off position, shape of asymmetrical trough in stable on position |
| 05/22/2002 | EP1206833A1 Integrated tunable high efficiency power amplifier |
| 05/21/2002 | US6391675 Method and apparatus for switching high frequency signals |
| 05/16/2002 | WO2002039472A1 Micro-relay contact structure for rf applications |
| 05/16/2002 | DE10143363A1 Mikroschalter zur Verwendung in einer Bohrung Micro-switch for use in a bore |
| 05/14/2002 | US6388359 Method of actuating MEMS switches |
| 05/09/2002 | US20020055260 CMOS-compatible MEM switches and method of making |
| 05/08/2002 | EP1203391A1 Microelectromechanic relay and method for the production thereof |
| 05/07/2002 | US6384353 Micro-electromechanical system device |
| 05/02/2002 | WO2002011188A3 A mem sensor and a method of making same |
| 05/02/2002 | WO2002010063A3 A tunneling sensor or switch and a method of making same |
| 04/25/2002 | WO2002033777A1 Coplanar switch |
| 04/25/2002 | WO2002012114A3 Ceramic microelectromechanical structure |
| 04/25/2002 | WO2002010684A3 Three-axes sensor and a method of making same |
| 04/25/2002 | US20020048135 Micro-switches for downhole use |
| 04/25/2002 | DE10047113A1 Sensoreinrichtung Sensor device |
| 04/24/2002 | CN1346503A Electronic devices including micromechanical switches |
| 04/23/2002 | US6376787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer |
| 04/17/2002 | EP1196935A1 High voltage micromachined electrostatic switch |
| 04/17/2002 | EP1196932A1 Arc resistant high voltage micromachined electrostatic switch |
| 04/17/2002 | CN1345480A Device including micromechanical resonator having operating requency and method of extending same |
| 04/16/2002 | US6373682 Electrostatically controlled variable capacitor |
| 04/16/2002 | US6373356 Microelectromechanical liquid metal current carrying system, apparatus and method |
| 04/16/2002 | US6373007 Series and shunt mems RF switch |
| 04/11/2002 | WO2001082479A3 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 04/11/2002 | WO2001082478A3 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 04/11/2002 | WO2001082477A3 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
| 04/11/2002 | WO2001082467A3 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 04/11/2002 | US20020041220 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 04/10/2002 | EP1194960A1 Nanoscopic wire-based devices, arrays, and methods of their manufacture |
| 04/03/2002 | CN1082237C Micro-relay and method for manufacturing the same |
| 04/02/2002 | US6365442 Efficient method of making micro-miniature switch device |
| 03/28/2002 | WO2001045120A3 Variable capacitor and associated fabrication method |
| 03/28/2002 | US20020036304 Method and apparatus for switching high frequency signals |
| 03/26/2002 | US6362018 Method for fabricating MEMS variable capacitor with stabilized electrostatic drive |
| 03/21/2002 | WO2001080258A3 A micro relay |
| 03/14/2002 | WO2001063634A3 Microswitch and process for its production |
| 03/14/2002 | WO2001057902A3 Electrostatic actuator for microelectromechanical systems and methods of fabrication |
| 03/14/2002 | US20020030566 Microelecto-mechanical system actuator device and reconfigurable circuits utilizing same |
| 03/14/2002 | DE10051311C1 Capacitive device for impedance variation of coplanar waveguide has capacitance value adjusted by varying relative spacings between three conductive connections |