Patents
Sitemap › H01 - Basic electric elements › H01H - Electric switches; Relays; Selectors; Emergency protective devices › H01H 59 - Electrostatic relays; Electro-adhesion relays
Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592)
08/2003
08/14/2003WO2002011189A3 A tunneling sensor or switch and a method of making same
08/14/2003US20030151879 Capacitive micro-electro-mechanical switch and method of manufacturing the same
08/14/2003US20030151104 Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same
08/13/2003EP1335398A1 Micro-electrical-mechanical switch
08/13/2003EP1334501A1 Micro-relay contact structure for rf applications
08/13/2003CN1436357A Method and arrangement for controlling micromechanical element
08/12/2003US6605043 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
08/07/2003US20030149363 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
08/07/2003US20030148550 Method of fabricating micro-electromechanical switches on cmos compatible substrates
08/07/2003US20030146804 Device having a capicator with alterable capacitance, in particular a high-frequency microswitch
08/07/2003US20030146079 Proximity micro-electro-mechanical system
08/05/2003US6603238 Micro-relay and method for manufacturing the same
07/2003
07/31/2003WO2003028059A8 Mems switches and methods of making same
07/31/2003US20030141562 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same
07/29/2003US6600252 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
07/24/2003WO2003061107A2 Dielectric actuator including conductive gap
07/24/2003WO2003060940A1 Micro-electromechanical system and method for production thereof
07/24/2003WO2003059805A2 Micro device
07/24/2003CA2450451A1 Micro device
07/23/2003EP1328997A1 Coplanar switch
07/17/2003WO2003058730A1 Methods of making electromechanical three-trace junctions devices
07/17/2003WO2003058652A2 Electromechanical three-trace junction devices
07/17/2003US20030132824 High-speed MEMS switch with high-resonance-frequency beam
07/17/2003CA2471380A1 Methods of making electromechanical three-trace junction devices
07/17/2003CA2471378A1 Electromechanical three-trace junction devices
07/15/2003US6593831 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
07/03/2003WO2003054938A1 Method of fabricating micro-electromechanical switches on cmos compatible substrates
07/03/2003US20030124837 Methods of making electromechanical three-trace junction devices
07/03/2003US20030124325 Electromechanical three-trace junction devices
07/03/2003US20030122640 Lateral microelectromechanical system switch
07/01/2003US6587021 Micro-relay contact structure for RF applications
06/2003
06/26/2003US20030119221 Trilayered beam MEMS device and related methods
06/26/2003US20030117257 Electrothermal self-latching MEMS switch and method
06/26/2003US20030117027 Low inertia latching microactuator
06/26/2003US20030116851 Micro-scale interconnect device with internal heat spreader and method for fabricating same
06/26/2003US20030116848 MEMS device having a trilayered beam and related methods
06/26/2003US20030116417 MEMS device having contact and standoff bumps and related methods
06/25/2003EP1321957A1 A micro relay device having a membrane with slits
06/18/2003EP1319260A1 Coplanar waveguide switch
06/18/2003EP1319168A1 Sensor device
06/17/2003US6580337 MEMS switch
06/17/2003US6580138 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same
06/17/2003US6578436 Method and apparatus for pressure sensing
06/10/2003US6577040 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
06/05/2003US20030103315 Coplanar switch
06/05/2003US20030102936 Lateral motion MEMS switch
06/05/2003US20030102771 Electrostatic actuator, and electrostatic microrelay and other devices using the same
06/05/2003US20030102552 In-situ cap and method of fabricating same for an integrated circuit device
06/04/2003CN1422433A Microelectromechanical micro-relay with liquid metal contacts
06/03/2003US6573822 Tunable inductor using microelectromechanical switches
05/2003
05/29/2003US20030099081 Micro-switching device actuated by low voltage
05/29/2003US20030098618 Micro-electromechanical switch having a conductive compressible electrode
05/28/2003EP1314687A2 Micro-switching device actuated by low voltage
05/27/2003US6570750 Shunted multiple throw MEMS RF switch
05/22/2003WO2003043095A2 Anchors for micro-electro-mechanical systems (mems) devices
05/22/2003WO2003043044A1 Mems device having a trilayered beam and related methods
05/22/2003WO2003043042A1 Mems device having electrothermal actuation and release and method for fabricating
05/22/2003WO2003043038A2 Mems device having contact and standoff bumps and related methods
05/22/2003WO2003042721A2 Trilayered beam mems device and related methods
05/21/2003EP1312100A1 Microswitch
05/20/2003US6566786 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
05/20/2003US6566617 Micromachine switch and its production method
05/15/2003WO2003041133A2 Electrothermal self-latching mems switch and method
05/15/2003WO2003040338A2 Micro-scale interconnect device with internal heat spreader and method for fabricating same
05/15/2003WO2002063657A3 Microelectronic mechanical system (mems) switch and method of fabrication
05/15/2003US20030090350 Electromagnetic energy controlled low actuation voltage microelectromechanical switch
05/15/2003US20030090346 Resonant operation of MEMS switch
05/14/2003CN1417826A Electrostatic driver and electrostatic micro relay and other device with the driver
05/13/2003US6563184 Single crystal tunneling sensor or switch with silicon beam structure and a method of making same
05/08/2003US20030085109 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip
05/07/2003EP1308977A2 Electrostatic actuator, and electrostatic microrelay and other devices using the same
05/07/2003EP1151446B1 Microswitching contact
05/02/2003EP1306869A1 Electrostatic actuator
05/02/2003EP1305640A2 A mem sensor and a method of making same
05/02/2003EP1305570A2 Three-axes sensor and a method of making same
05/02/2003EP1305258A2 Ceramic microelectromechanical structure
05/02/2003EP1305257A2 A tunneling sensor or switch and a method of making same
05/01/2003US20030080839 Method for improving the power handling capacity of MEMS switches
04/2003
04/24/2003WO2003034457A2 High cycle mems device
04/24/2003US20030076006 Electrostatic actuator
04/24/2003US20030075768 Microelectromechanical switch
04/22/2003US6552696 Electronically tunable reflector
04/17/2003WO2003032349A1 A micromechanical switch and method of manufacturing the same
04/17/2003WO2003032092A1 Planarizing recess etch
04/15/2003US6548841 Nanomechanical switches and circuits
04/10/2003US20030067047 Micromechanical switch and method of manufacturing the same
04/03/2003WO2003028059A1 Mems switches and methods of making same
04/03/2003WO2003028058A1 A micromechanical switch and method of manufacturing the same
04/03/2003WO2002059977A3 Monolithic switch
04/02/2003CN1408120A Variable capacitor and associated fabrication method
03/2003
03/27/2003WO2002010684A9 Three-axes sensor and a method of making same
03/27/2003US20030059973 Micromechanical switch and method of manufacturing the same
03/27/2003US20030058069 Stress bimorph MEMS switches and methods of making same
03/20/2003WO2003023805A1 Overdrive structures for flexible electrostatic switch
03/18/2003US6535091 Microelectronic mechanical systems (MEMS) switch and method of fabrication
03/18/2003US6534839 Nanomechanical switches and circuits
03/14/2003WO2002029364A1 Sensor device
03/13/2003WO2003021613A2 Electromechanical memory array using nanotube ribbons and method for making same
03/13/2003WO2002096796A3 Membrane for micro-electro-mechanical switch, and methods of making and using it
03/13/2003US20030048149 MEMS RF switch with low actuation voltage
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