Patents
Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592)
08/2005
08/25/2005WO2005078752A1 Piezoelectric thin-film electromechanical microsystem device
08/25/2005US20050184836 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making the same
08/25/2005US20050183938 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
08/25/2005US20050183609 Micromechanical latching switch
08/24/2005EP1565922A1 Electrostatic microswitch for low-voltage-actuation components
08/24/2005EP1565921A1 Electrostatic microswitch for low-voltage-actuation component
08/23/2005US6933165 Method of making an electrostatic actuator
08/18/2005US20050178646 High-reliability micro-electro-mechanical system (MEMS) switch apparatus and method
08/17/2005EP1564584A1 Miniature electro-optic device and corresponding uses thereof
08/17/2005EP1564182A1 Miniature relay and corresponding uses thereof
08/17/2005CN1656644A Spring loaded bi-stable mems switch
08/17/2005CN1656643A Micro electro-mechanical system method
08/16/2005US6930873 Micro electromechanical switches
08/13/2005CA2496860A1 Microelectromechanical devices
08/11/2005WO2005043602A3 Three-dimensional inductive micro components
08/11/2005WO2004028953B1 Microelectromechanical device having an active opening switch
08/11/2005US20050173619 Optically controlled MEMS devices
08/11/2005US20050173235 Electro-mechanical micro-switch device
08/11/2005US20050173234 Low-voltage micro-switch actuation technique
08/10/2005EP1562207A1 Bistable microelectromechanical system
08/09/2005US6927352 Lateral displacement multiposition microswitch
08/04/2005US20050170637 Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay mems switch
08/04/2005US20050168793 Drive circuit of switch and relay circuit
08/04/2005US20050168306 MEMS device with integral packaging
08/04/2005US20050167047 Method of fabricating radio frequency microelectromechanical systems (mems) devices on low-temperature co-fired ceramic (ltcc) substrates
08/04/2005US20050166677 Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
08/03/2005EP1559987A1 Micromechanical latching switch
08/03/2005CN1650383A Diaphragm activated micro electromechanical switch
08/03/2005CN1650382A Micro electromechanical switch having a deformable elastomeric conductive element
08/02/2005US6924966 Spring loaded bi-stable MEMS switch
08/02/2005US6924538 Devices having vertically-disposed nanofabric articles and methods of making the same
07/2005
07/28/2005WO2005069331A1 Low-voltage micro-switch actuation technique
07/28/2005WO2005069330A1 Electro-mechanical micro-switch device
07/28/2005US20050162244 Switch
07/28/2005US20050161753 Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
07/27/2005EP1556877A1 A micromachined relay with inorganic insulation
07/27/2005CN1212637C Microelectromechanical relay and method for production thereof
07/21/2005WO2005066987A1 Self-healing liquid contact switch
07/21/2005US20050156695 Micro-electro-mechanical RF switch
07/20/2005CN1211274C Microelectric mechanical system with monoarmature
07/19/2005US6919784 High cycle MEMS device
07/19/2005US6919592 Electromechanical memory array using nanotube ribbons and method for making same
07/14/2005WO2005043573A3 A method of manufacturing an electronic device and electronic device
07/14/2005US20050151444 Piezoelectric switch for tunable electronic components
07/14/2005US20050151170 Protected switch and techniques to manufacture the same
07/12/2005US6917268 Lateral microelectromechanical system switch
07/12/2005US6917138 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
07/12/2005US6917086 Trilayered beam MEMS device and related methods
07/07/2005WO2005062332A1 Mems switch
07/07/2005US20050145393 Micro-switches for downhole use
07/06/2005EP1474817B1 Microswitch with a micro-electromechanical system
06/2005
06/30/2005US20050140478 Self-sustaining center-anchor microelectromechanical switch and method of manufacturing the same
06/30/2005DE19950373B4 Mikromechanisches Relais mit federndem Kontakt und Verfahren zum Herstellen desselben The same micromechanical relay with resilient contact and methods of making
06/29/2005EP1547189A2 Sealed integral mems switch
06/28/2005US6911891 Bistable actuation techniques, mechanisms, and applications
06/28/2005US6911682 Electromechanical three-trace junction devices
06/23/2005US20050134413 MEMS switch stopper bumps with adjustable height
06/22/2005EP1543535A1 Electrostatically actuated low response time power commutation micro-switches
06/22/2005CN1630923A Microswitch with a micro-electromechanical system
06/16/2005US20050130339 Protected switch and techniques to manufacture the same
06/16/2005US20050127792 Piezoelectric switch for tunable electronic components
06/16/2005US20050126898 Protected switch and techniques to manufacture the same
06/16/2005DE19950964B4 Mikromechanisches Relais und Verfahren zur Herstellung Micromechanical relay and process for preparing
06/09/2005WO2005015594A3 Bistable micromechanical switch, actuating method and corresponding method for realizing the same
06/09/2005WO2005001899A3 Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
06/09/2005US20050121298 Microrelays and microrelay fabrication and operating methods
06/08/2005EP1538691A1 Variable capacitance element
06/08/2005EP1537590A2 Micro-electromechanical switch performance enhancement
06/08/2005CN1624846A Microwave/radio-frequency micromechanical switch and manufacturing method thereof
06/02/2005US20050117441 Nanoscopic wire-based devices and arrays
06/02/2005US20050115811 MEMs switching circuit and method for an implantable medical device
06/01/2005EP1536439A1 Component comprising a variable capacitor
06/01/2005EP1535297A1 Diaphragm activated micro-electromechanical switch
06/01/2005EP1535296A1 Micro-electromechanical switch having a deformable elastomeric conductive element
05/2005
05/26/2005WO2005048296A2 Nanotube-based switching elements with multiple controls and circuits made from same
05/26/2005CA2535634A1 Nanotube-based switching elements with multiple controls and circuits made from same
05/25/2005EP1386347A4 Microelectromechanical system (mens) device
05/19/2005WO2005045869A1 Mems switching circuit and method for an implantable medical device
05/19/2005US20050104694 Low-voltage and low-power toggle type-SPDT RF MEMS switch actuated by combination of electromagnetic and electrostatic forces
05/19/2005US20050104693 Self-healing liquid contact switch
05/19/2005US20050103608 Integrated microsprings for speed switches
05/19/2005CA2543472A1 Mems switching circuit and method for an implantable medical device
05/17/2005US6894237 Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch
05/12/2005WO2005043602A2 Three-dimensional inductive micro components
05/12/2005WO2005043573A2 A method of manufacturing an electronic device and electronic device
05/12/2005WO2005043572A1 Radio-frequency microelectromechanical systems and a method of manufacturing such systems
05/12/2005WO2005042400A1 Electronic device
05/12/2005US20050099252 RF-MEMS switch and its fabrication method
05/11/2005EP1529300A1 Electrode configuration in a mems switch
05/10/2005US6891454 Switch
05/10/2005US6889565 Fingerprint sensors using membrane switch arrays
05/06/2005WO2004072335A3 Devices having vertically-disposed nanofabric articles and methods of making the same
05/05/2005US20050096878 Micro-electromechanical switch performance enhancement
05/05/2005US20050093667 Three-dimensional inductive micro components
05/05/2005US20050093141 Micro-electromechanical system and method for production thereof
05/04/2005EP1527466A1 Microfabricated relay with multimorph actuator and electrostatic latch mechanism
05/04/2005EP1527465A1 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism
05/04/2005CN1613154A MEMS device having contact and standoff bumps and related methods
05/04/2005CN1613128A MEMS device having a trilayered beam and related methods
05/03/2005US6888420 RF MEMS switch matrix
1 ... 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 ... 26