| Patents for H01H 59 - Electrostatic relays; Electro-adhesion relays (2,592) |
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| 02/24/2000 | WO1999063562B1 Low-voltage, electrostatic type microelectromechanical system switches for radio-frequency applications |
| 02/22/2000 | US6028552 Waveguide phased array antenna apparatus |
| 02/15/2000 | US6025252 Semiconductor device and method of fabricating the same |
| 02/09/2000 | EP0978893A2 Single-pole single-throw microelectro-mechanical switch with active off-state control |
| 02/01/2000 | US6020564 Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications |
| 02/01/2000 | US6020215 Process for manufacturing microstructure |
| 01/05/2000 | DE19823690C1 Mikromechanisches elektrostatisches Relais The micromechanical electrostatic relay |
| 12/16/1999 | WO1999065107A1 Phased-array antenna device |
| 12/09/1999 | WO1999063562A1 Low-voltage, electrostatic type microelectromechanical system switches for radio-frequency applications |
| 12/09/1999 | WO1999063559A1 Micro-mechanical elements |
| 12/08/1999 | EP0963000A2 Resonator structures |
| 12/08/1999 | EP0962999A2 Resonator structures |
| 12/08/1999 | CN1237828A Resonator structures |
| 12/08/1999 | CN1237827A Resonator structures |
| 12/02/1999 | WO1999062089A1 Micro-mechanical electrostatic relay |
| 11/30/1999 | US5994796 Single-pole single-throw microelectro mechanical switch with active off-state control |
| 11/30/1999 | US5994750 Microstructure and method of forming the same |
| 10/27/1999 | CN1233343A Micro-relay and method for manufacturing the same |
| 09/28/1999 | US5959763 Spatial light modulator |
| 09/28/1999 | US5959338 Micro electro-mechanical systems relay |
| 09/16/1999 | DE19807214A1 Mikromechanisches elektrostatisches Relais The micromechanical electrostatic relay |
| 09/08/1999 | CN1227979A Phase controller for use in waveguide phased array antenna |
| 09/01/1999 | EP0938738A1 Method for manufacturing a micromechanical relay |
| 08/31/1999 | US5946176 Electrostatic discharge protection utilizing microelectromechanical switch |
| 08/26/1999 | WO1999043013A1 Micro-mechanical electrostatic relay |
| 07/22/1999 | DE19800189A1 Lateral micromechanical switch for electrical current switching |
| 07/15/1999 | WO1999026333A3 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
| 07/08/1999 | WO1999034383A1 Micro electro-mechanical systems relay |
| 06/16/1999 | EP0923099A1 Micro-relay and method for manufacturing the same |
| 06/15/1999 | US5912606 Mercury wetted switch |
| 06/09/1999 | EP0921591A1 Array antenna with switched distributed-constant phase-shifter |
| 06/02/1999 | CA2254748A1 Waveguide phased array antenna apparatus |
| 06/01/1999 | US5909163 High voltage reed switch |
| 05/27/1999 | WO1999026333A2 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
| 04/29/1999 | WO1999021204A1 Electrostatic micro-relay |
| 04/28/1999 | EP0861497B1 Switches and switching systems |
| 04/08/1999 | WO1999017322A1 Electrostatic microrelay |
| 04/07/1999 | EP0681739B1 Micromachined relay and method of forming the relay |
| 03/09/1999 | US5880921 Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology |
| 03/04/1999 | WO1999010907A1 Micromechanical electrostatic relay and method for the production thereof |
| 03/04/1999 | CA2300956A1 Micromechanical electrostatic relay, and a method for its production |
| 02/16/1999 | US5872489 Integrated tunable inductance network and method |
| 01/20/1999 | EP0892419A2 Micro electro-mechanical system (MEMS) switch |
| 01/19/1999 | US5860210 Method of manufacturing an electronic component |
| 12/30/1998 | EP0887879A1 Phased-array antenna apparatus |
| 12/02/1998 | EP0880817A1 Bistable microactuator with coupled membranes |
| 12/01/1998 | CA2114159C Electrostatic relay |
| 11/26/1998 | DE19736674C1 Micromechanical electrostatic relay |
| 10/06/1998 | US5818148 Electromechanical switch |
| 09/30/1998 | CN1040049C Micromechanical relay with hybrid actuator |
| 09/15/1998 | US5808527 Tunable microwave network using microelectromechanical switches |
| 09/08/1998 | US5802911 Semiconductor layer pressure switch |
| 09/02/1998 | EP0861497A1 Switches and switching systems |
| 07/21/1998 | US5784189 Spatial light modulator |
| 06/24/1998 | EP0849820A2 Tunable microwave network using microelectromechanical switches |
| 05/26/1998 | US5757319 Ultrabroadband, adaptive phased array antenna systems using microelectromechanical electromagnetic components |
| 05/22/1998 | WO1998021734A1 Method for manufacturing a micromechanical relay |
| 05/14/1998 | DE19646667A1 Micromechanical electrostatic relay production |
| 05/06/1998 | EP0840394A2 Ultrabroadband, adaptive phased array antenna systems using microelectromechanical electromagnetic components |
| 05/05/1998 | US5748159 Display |
| 04/14/1998 | US5738731 Solar cells |
| 03/18/1998 | EP0829091A1 A controllable microswitch, a method of making it, and use of such a microswitch |
| 03/05/1998 | WO1998009312A1 Micro-relay and method for manufacturing the same |
| 11/26/1997 | EP0698279B1 Bi-stable memory element |
| 11/11/1997 | CA2072199C Electrostatic relay |
| 10/14/1997 | US5677823 Bi-stable memory element |
| 10/07/1997 | US5673785 Micromechanical relay |
| 09/10/1997 | EP0794543A2 Electromechanical switch |
| 09/09/1997 | US5666258 Micromechanical relay having a hybrid drive |
| 08/19/1997 | US5658698 Microstructure, process for manufacturing thereof and devices incorporating the same |
| 08/14/1997 | WO1997029538A1 Bistable microactuator with coupled membranes |
| 08/14/1997 | DE19637928A1 Bistable electrostatic actuator, with pneumatic or liquid coupling, for microvalve or micropump |
| 08/13/1997 | EP0685109B1 Micromechanical relay with hybrid actuator |
| 06/17/1997 | US5638946 Micromechanical switch with insulated switch contact |
| 06/03/1997 | US5635750 Micromechanical relay with transverse slots |
| 05/22/1997 | WO1997018574A1 Switches and switching systems |
| 05/21/1997 | EP0592469B1 Miniature actuating device |
| 05/13/1997 | US5629565 Micromechanical electrostatic relay with geometric discontinuity |
| 05/06/1997 | US5627396 Micromachined relay and method of forming the relay |
| 04/15/1997 | US5620933 Micromachined relay and method of forming the relay |
| 04/08/1997 | US5619177 Shape memory alloy microactuator having an electrostatic force and heating means |
| 04/08/1997 | US5619061 Micromechanical microwave switching |
| 01/02/1997 | EP0751546A2 Micro electromechanical RF switch |
| 12/05/1996 | WO1996038850A1 A controllable microswitch, a method of making it, and use of such a microswitch |
| 11/26/1996 | US5578976 Micro electromechanical RF switch |
| 09/03/1996 | US5552015 Process for manufacturing a pressure-difference sensor |
| 08/06/1996 | US5544001 Electrostatic relay |
| 07/30/1996 | US5541614 Smart antenna system using microelectromechanically tunable dipole antennas and photonic bandgap materials |
| 06/12/1996 | EP0628209B1 Process for making a sensor for differential pressure |
| 06/11/1996 | US5526172 Microminiature, monolithic, variable electrical signal processor and apparatus including same |
| 05/22/1996 | EP0713235A1 Micromechanical electrostatic relay |
| 05/08/1996 | EP0711029A2 Microstructure and method of forming the same |
| 05/08/1996 | EP0710972A1 Micromechanical relay |
| 05/08/1996 | EP0710971A1 Micromechanical relay |
| 05/01/1996 | EP0709911A2 Improved switches |
| 03/06/1996 | CN1118199A Micromechanical relay with hybrid actuator |
| 02/28/1996 | EP0698279A1 Bi-stable memory element |
| 02/06/1996 | US5489556 Method for the fabrication of electrostatic microswitches |
| 01/17/1996 | CN1115067A Microminiature, monolithic, variable electrical device and apparatus including same |
| 12/26/1995 | US5479042 Micromachined relay and method of forming the relay |