Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
05/2013
05/08/2013CN103094314A New iii-nitride growth method on silicon substrate
05/08/2013CN103094067A Manufacture method of semi-conductor device
05/08/2013CN103088416A LED (Light-Emitting Diode) epitaxial wafer deposition process and LED epitaxial wafer deposition device
05/08/2013CN103088415A Method for improving temperature uniformity in lamp-heated cavity
05/08/2013CN103088414A Vapor-phase epitaxy deposition apparatus realizing nitride crystal homoepitaxy
05/08/2013CN103088413A Etching and roasting equipment
05/08/2013CN103088412A Reaction furnace of etching roasting equipment
05/08/2013CN103088311A Method of forming seed layer and method of forming silicon-containing thin film
05/08/2013CN102268736B Method for preparing silicon carbide nanowire array through gas phase interlayer diffusion reaction process
05/02/2013US20130108877 Crystalline strontium titanate and methods of forming the same
05/02/2013US20130104802 Gallium trichloride injection scheme
05/02/2013US20130104800 Film-forming method and film-forming apparatus
05/01/2013EP2587556A1 Sapphire substrate, method for producing same, and nitride semiconductor light emitting element
05/01/2013CN103081062A Method for manufacturing compound semiconductor
05/01/2013CN103078016A LED (Light Emitting Diode) epitaxial wafer deposition method and LED epitaxial wafer deposition equipment
05/01/2013CN103074679A Preparation method of single crystal grapheme through chemical vapor deposition
05/01/2013CN103074677A Preparation method for zinc telluride homoepitaxy layer
05/01/2013CN103074676A Edge protection method for achieving growth of semiconductor material having self-peeling function
05/01/2013CN103074675A 气体系统 Gas System
05/01/2013CN103074674A Reaction chamber air inlet device for metal organic chemical vapor deposition (MOCVD) equipment
05/01/2013CN103074673A Substrate supporting structure and deposition device
05/01/2013CN103074672A Gas phase epitaxial growth method of single crystal silicon
05/01/2013CN101636850B Iii-nitride light emitting devices grown on templates to reduce strain
04/2013
04/30/2013US8430959 Apparatus and methods for preparation of high-purity silicon rods using mixed core means
04/25/2013US20130098289 Methods and apparatus for a chemical vapor deposition reactor
04/25/2013US20130098288 Gas-phase synthesis of wires
04/24/2013EP2584072A2 Large area deposition of graphene hetero-epitaxial growth, and products including the same
04/24/2013CN202904399U Temperature control system, metal organic chemical vapor deposition equipment and semiconductor film deposition equipment
04/24/2013CN202898596U Light-emitting diode (LED) epitaxial wafer reacting furnace
04/24/2013CN1890784B Strained semiconductor substrate and processes therefor
04/24/2013CN103060907A A method of preparing single-crystal graphene on insulating materials
04/24/2013CN103060906A Square spray nozzle structure for vapor phase epitaxy of material
04/24/2013CN103060905A Growing method of superfine indium arsenide nanowire with high crystalline quality
04/24/2013CN102051675B Method for manufacturing CuO nanowire
04/24/2013CN101787561B Growing method of Fe3N material
04/23/2013US8425803 Nanocrystal doped matrixes
04/23/2013CA2456847C System and method for producing synthetic diamond
04/18/2013US20130095305 Graphene pattern and process of preparing the same
04/18/2013US20130093288 Thermally oxidized seed layers for the production of textured electrodes and pzt devices and method of making
04/17/2013EP2581475A1 Preparation method of a type p Zinc oxide ZnO or of a type p ZnMgO
04/17/2013CN202881384U Control structure provided with eight U-type grooves and used for plate-type PECVD (Plasma Enhanced Chemical Vapor Deposition) specific gas pipeline
04/17/2013CN101802273B Epitaxial SIC single crystal substrate and method for manufacturing epitaxial SIC single crystal substrate
04/17/2013CN101336314B Process for growth of low dislocation density GaN
04/16/2013US8420043 Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film
04/16/2013US8419856 Substrate processing apparatus
04/11/2013US20130087095 Self-gettering differential pump
04/11/2013US20130087093 Apparatus and method for hvpe processing using a plasma
04/10/2013EP2579297A1 Method of producing template for epitaxial growth and nitride semiconductor device
04/10/2013CN103035794A Light-emitting diode (LED) epitaxial wafer developed on silicon (Si) substrate and preparation method thereof
04/10/2013CN103031598A Silicon epitaxial growth process
04/10/2013CN103031597A Na-Be codoped p-ZnO film growth method
04/10/2013CN103031596A Epitaxial growth method of solar-blind UV (Ultraviolet) photocathode based on AlGaN (Aluminum Gallium Nitrogen) materials
04/10/2013CN103031595A Non-polar doped GaN film grown on LiGaO2 substrate and preparation method thereof
04/10/2013CN103031530A Thin film forming method and film forming apparatus
04/10/2013CN102260908B Device for growing nanometer crystal silicon powder
04/07/2013CA2789486A1 Apparatus and process for deposition of polycrystalline silicon
04/03/2013CN202849591U Quartz explosionproof container for single crystal growth
04/03/2013CN103021946A Method of preparing GaN monocrystal substrate in mechanical removal way
04/03/2013CN103014847A Preparation method for tension strain germanium nano-film with high mono-crystal quality
04/03/2013CN103014846A Concentric-ring sprayer structure for material vapor phase epitaxy
04/03/2013CN103014845A Method for self-assembly growth for micro-nano-scale graphene
04/03/2013CN103014659A Method and apparatus for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber
04/03/2013CN103014625A Method for preparing tetragonal-phase room-temperature multi-ferroic material BiFeO3
04/03/2013CN102505113B Preparation method of large-area graphene based on Cl2 reaction
04/03/2013CN101838848B Epitaxially coated silicon wafer and method for producing an epitaxially coated silicon wafer
04/02/2013US8409349 Film thickness measurement method, epitaxial wafer production process and epitaxial wafer
03/2013
03/28/2013WO2013042504A1 Substrate having buffer layer structure for growing nitride semiconductor layer
03/28/2013DE102007049666B4 Verfahren zur Herstellung von p- -dotierten und epitaktisch beschichteten Halbleiterscheiben aus Silicium Process for the preparation of p-doped and epitaxially coated semiconductor wafers of silicon
03/27/2013EP2573206A1 Method for growing a group (iii) metal nitride film
03/27/2013CN103003209A Vitreous silica crucible having a polygonal opening, and method for manufacturing same
03/27/2013CN103000555A Thermal treatment apparatus, temperature control system, thermal treatment method, and temperature control method
03/27/2013CN102995119A Large-dimension hexagonal bi-layer grapheme single-crystal domain and preparation method thereof
03/27/2013CN102995117A Preparation method of topological insulator structure
03/27/2013CN102220640B Preparation method of gallium nitride single crystal
03/27/2013CN101443488B Process for producing a III-N bulk crystal and a free-standing III-N substrate, and III-N bulk crystal and free-standing III-N substrate
03/26/2013US8404571 Film deposition method
03/26/2013US8404044 Epitaxial growth film formation method
03/26/2013US8404042 Group-III nitride crystal composite
03/21/2013US20130069078 Crystal producing apparatus, crystal producing method, substrate producing method, gallium nitride crystal, and gallium nitride substrate
03/21/2013US20130069075 Nitride semiconductor crystal producing method, nitride semiconductor epitaxial wafer, and nitride semiconductor freestanding substrate
03/21/2013DE102006027841B4 Verfahren zur Herstellung eines III-Nitrid-Halbleiter-Bauteils A process for producing a III-nitride semiconductor device
03/20/2013EP2570523A1 Method for producing gallium trichloride gas and method for producing nitride semiconductor crystal
03/20/2013EP2570522A1 Epitaxial silicon carbide single-crystal substrate and method for producing the same
03/20/2013EP2569466A1 Gas-phase synthesis of wires
03/20/2013CN102978695A Concealed-structure substrate for epitaxial growth of semiconductor device
03/20/2013CN102978572A Method for preparing CdTe film and thermal evaporation device
03/20/2013CN102104060B Semiconductor structure and forming method thereof
03/20/2013CN102057079B Arrangement in connection with ALD reactor
03/20/2013CN101653735B Catalyst particles on tip
03/19/2013US8399339 Nanosensors
03/19/2013US8398768 Methods of making an article of semiconducting material on a mold comprising semiconducting material
03/14/2013WO2013035691A1 Sic epitaxial wafer and method for manufacturing same
03/14/2013US20130062628 Methods for the epitaxial growth of silicon carbide
03/14/2013DE112011101454T5 Epitaxialwafer-Suszeptor und dem Suszeptor angepasste Halte- und Dreh-Verbindungsvorrichtung Epitaxial wafer susceptor and the susceptor adapted holding and rotating connection device
03/13/2013EP2567004A1 Substrate for epitaxial growth
03/13/2013CN202786421U Graphite boat ceramic loop
03/13/2013CN102971452A Gas-phase synthesis of wires
03/13/2013CN102965733A Growth technique of graphite-coating-free conductive silicon carbide crystals
03/13/2013CN102260907B Preparation method of ZnO nano homogeneous p-n junction array
03/13/2013CN102011182B Method for manufacturing lattice graded buffer layer
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 ... 134