| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 12/14/2010 | US7850817 Polishing device and substrate processing device |
| 12/14/2010 | US7850174 Plasma processing apparatus and focus ring |
| 12/09/2010 | WO2010139902A1 Method for regenerating a solution used for pickling or chemically milling titanium |
| 12/09/2010 | WO2010138999A1 Plasma etching of chalcogenides |
| 12/09/2010 | US20100311247 Method and Device for Treating Silicon Wafers |
| 12/09/2010 | US20100310830 Etching Mask, Base Material Having Etching Mask, Finely Processed Article, And Method For Production Of Finely Processed Article |
| 12/09/2010 | US20100310828 Substrate processing method and substrate processed by this method |
| 12/09/2010 | US20100308463 Interfacial capping layers for interconnects |
| 12/09/2010 | US20100308015 Superfine-patterned mask, method for production thereof, and method employing the same for forming superfine-pattern |
| 12/09/2010 | US20100308014 Method and apparatus for etching |
| 12/09/2010 | US20100308010 Composite micromechanical component and method of fabricating the same |
| 12/09/2010 | US20100308009 Nanoimprint resist, nanoimprint mold and nanoimprint lithography |
| 12/09/2010 | US20100308008 Nanoimprint resist, nanoimprint mold and nanoimprint lithography |
| 12/09/2010 | US20100307687 Internal member of a plasma processing vessel |
| 12/09/2010 | US20100307686 Substrate processing apparatus |
| 12/09/2010 | US20100307685 Microwave plasma processing apparatus |
| 12/09/2010 | DE102009024320A1 Coating comprises corroded nanoparticular metal-/silicon oxide layers, in whose surface, fluorine compounds are bounded, or silica, silicon oxide compound, alumina and/or titania or mixed oxides of titania/silica |
| 12/08/2010 | CN101910468A Etchant for copper or copper alloy, liquid for etching pretreatment, and etching method |
| 12/08/2010 | CN101908576A Method for manufacturing textured surface of monocrystalline silicon solar cell |
| 12/08/2010 | CN101904774A Metal implant and surface processing method thereof |
| 12/08/2010 | CN101904766A Silicon blades for surgical and non-surgical use |
| 12/07/2010 | US7846348 Manufacturing method of semiconductor device |
| 12/07/2010 | US7846345 Method of manufacturing an imprinting template using a semiconductor manufacturing process and the imprinting template obtained |
| 12/07/2010 | US7846291 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 12/07/2010 | US7846255 Processing equipment for object to be processed |
| 12/07/2010 | US7846254 Heat transfer assembly |
| 12/07/2010 | US7845310 Wide area radio frequency plasma apparatus for processing multiple substrates |
| 12/07/2010 | US7845309 Ultra high speed uniform plasma processing system |
| 12/02/2010 | US20100304573 Stabilized etching solutions for cu and cu/ni layers |
| 12/02/2010 | US20100304572 Plasma processing apparatus and plasma processing method |
| 12/02/2010 | US20100304571 Film adhesive for semiconductor vacuum processing apparatus |
| 12/02/2010 | US20100304146 Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves |
| 12/02/2010 | US20100304061 Fabrication of high aspect ratio features in a glass layer by etching |
| 12/02/2010 | US20100303673 Solar energy powered molecular engine |
| 12/02/2010 | US20100302616 Illumination devices and methods of fabrication thereof |
| 12/02/2010 | US20100301013 Method for laser ablation |
| 12/02/2010 | US20100301012 Device and method for producing microwave plasma with a high plasma density |
| 12/02/2010 | US20100301011 Apparatus and method for downstream pressure control and sub-atmospheric reactive gas abatement |
| 12/02/2010 | US20100301010 ETCHANT COMPOSITIONS AND ETCHING METHOD FOR METALS Cu/Mo |
| 12/02/2010 | US20100301009 Method for forming electrode pattern of ceramic substrate |
| 12/02/2010 | US20100301006 Method of Manufacturing an Electrical Component on a Substrate |
| 12/02/2010 | US20100300623 Plasma etching apparatus |
| 12/02/2010 | US20100300622 Circular ring-shaped member for plasma process and plasma processing apparatus |
| 12/02/2010 | US20100300621 Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor |
| 12/01/2010 | CN201663760U Automatic feeding device of etching solution additive for printed circuit board production line |
| 12/01/2010 | CN101903988A Etching agent, etching method and liquid for preparing etching agent |
| 12/01/2010 | CN101901743A Cleaning process and apparatus for silicate materials |
| 12/01/2010 | CN101899666A Stabilization and regeneration method of aluminum and aluminum alloy chemical milling solution |
| 12/01/2010 | CN101899665A Method for recycling copper from acid copper chloride etching liquid |
| 12/01/2010 | CN101592469B Method and device for measuring damaged layer thickness and minority carrier lifetime of solar cell silicon chip |
| 12/01/2010 | CN101530679B Solid phase micro-extraction stainless steel fiber and preparation method thereof |
| 12/01/2010 | CN101307453B Technology of silicon nano-wires without electrodeposit nickel and thermoelectric power device based on the technology |
| 11/30/2010 | US7844559 Method and system for predicting process performance using material processing tool and sensor data |
| 11/30/2010 | US7842223 Plasma process for removing excess molding material from a substrate |
| 11/30/2010 | US7842158 Multiple zone carrier head with flexible membrane |
| 11/25/2010 | WO2010133787A1 Method for etching a material in the presence of solid particles |
| 11/25/2010 | WO2010133786A1 Method for etching a material in the presence of a gas |
| 11/25/2010 | WO2010114420A3 Method for producing a relief pattern |
| 11/25/2010 | WO2010060408A4 Pickling method and pickling plant |
| 11/25/2010 | US20100297850 Selective self-aligned double patterning of regions in an integrated circuit device |
| 11/25/2010 | US20100297788 Arrangements and methods for improving bevel etch repeatability among substrates |
| 11/25/2010 | US20100297787 System and method for backside circuit editing on full thickness silicon device |
| 11/25/2010 | US20100296986 Microscreen for filtering particles in microfluidics applications and production thereof |
| 11/25/2010 | US20100294710 Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component |
| 11/25/2010 | US20100294654 Micro-metal-mold with patterns of grooves, protrusions and through-openings, processes for fabricating the mold, and micro-metal-sheet product made from the mold |
| 11/25/2010 | US20100294433 Plasma processing apparatus |
| 11/25/2010 | US20100294431 Equipment for producing semiconductors, corresponding pumping device and substrate holder |
| 11/24/2010 | EP2253740A1 Etchant for copper or copper alloy, liquid for etching pretreatment, and etching method |
| 11/24/2010 | EP2253739A1 Etching method |
| 11/24/2010 | EP2253583A2 Method of harvesting nanostructures from a substrate |
| 11/24/2010 | EP2252725A1 Single phase fluid imprint lithography method |
| 11/24/2010 | CN201648520U Spraying device for etching PCB |
| 11/24/2010 | CN1584129B Method for separating copper from copper-containing waste liquid |
| 11/24/2010 | CN101894790A Preparation method of semiconductor chip |
| 11/24/2010 | CN101894779A A method and apparatus for semiconductor processing |
| 11/24/2010 | CN101894778A A method and apparatus for semiconductor processing |
| 11/24/2010 | CN101891948A Super hydrophobic polyurethane film with wear resistance property and preparation method thereof |
| 11/23/2010 | US7837889 Methods of etching nanodots, methods of removing nanodots from substrates, methods of fabricating integrated circuit devices, methods of etching a layer comprising a late transition metal, and methods of removing a layer comprising a late transition metal from a substrate |
| 11/23/2010 | US7837799 Arrangement for transporting a flat substrate in a vacuum chamber |
| 11/23/2010 | US7837798 Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support |
| 11/18/2010 | WO2010130705A1 Process for the recovery of phosphate values from a waste solution |
| 11/18/2010 | US20100288731 Solution and Process to Treat Surfaces of Copper Alloys in Order to Improve the Adhesion Between the Metal Surface and the Bonded Polymeric Material |
| 11/18/2010 | US20100288730 Vacuum Processing Apparatus And Vacuum Processing Method Using The Same |
| 11/18/2010 | US20100288729 Methods for Manufacturing a Microstructure |
| 11/18/2010 | US20100288728 Apparatus and method for processing substrate |
| 11/18/2010 | US20100288727 Method for manufacturing substrate for biochip |
| 11/18/2010 | US20100288542 Embedded Substrate Having Circuit Layer Element With Oblique Side Surface and Method for Making the Same |
| 11/17/2010 | EP1015669B1 Electroplating method for forming a multilayer structure |
| 11/17/2010 | CN201634764U Device for regenerating waste acidic etching liquid and recovering copper |
| 11/17/2010 | CN201634763U Metal layer planarization system |
| 11/17/2010 | CN101889106A A method of manufacturing a press plate, a press plate, a method of embossing a floor panel, and a floor planel |
| 11/17/2010 | CN101886266A Etchant and method of manufacturing an array substrate using the same |
| 11/17/2010 | CN101886265A Etching solution for copper-containing multilayer film |
| 11/17/2010 | CN101886264A Surface treatment method for metal implant |
| 11/17/2010 | CN101886263A Blowing corrosion machine and method for corrosion and cleaning |
| 11/17/2010 | CN101886262A Wet etching machine bench and method for eliminating silicon wafer etching difference |
| 11/16/2010 | US7833405 doped areas are first selectively anodized (porous etching), which is carried out locally by means of a monocrystalline cover layer, e.g., an epitaxial layer, followed by a time-controlled switch to selective electropolishing of doped layer buried under the membrane to produce a cavity under cover layer |
| 11/16/2010 | US7833382 Vacuum processing apparatus |
| 11/16/2010 | US7833381 Optical emission interferometry for PECVD using a gas injection hole |
| 11/16/2010 | US7833351 Batch processing platform for ALD and CVD |