| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 08/11/2011 | US20110192819 System and method for the manufacture of surgical blades |
| 08/11/2011 | US20110192779 Thin layer chromatography plates and related methods |
| 08/10/2011 | EP2352859A2 Pickling method and pickling plant |
| 08/10/2011 | CN201924078U 蚀刻液自动添加装置 Etching solution automatically add devices |
| 08/10/2011 | CN102149851A Etchant for titanium-based metal, tungsten-based metal, titanium-tungsten-based metal or nitrides thereof |
| 08/10/2011 | CN102146565A Recyclable copper surface micro etching agent |
| 08/10/2011 | CN102041510B Method for removing carbons in polysilicon carbon head materials |
| 08/09/2011 | US7994056 Method for forming pattern in semiconductor device |
| 08/09/2011 | US7993540 Substrate processing method and substrate processing apparatus |
| 08/09/2011 | US7993539 Methods of etching nanodots, methods of removing nanodots from substrates, methods of fabricating integrated circuit devices, methods of etching a layer comprising a late transition metal, and methods of removing a layer comprising a late transition metal from a substrate |
| 08/09/2011 | US7993535 Robust self-aligned process for sub-65nm current-perpendicular junction pillars |
| 08/09/2011 | US7993534 Chemical microreactor and method thereof |
| 08/09/2011 | US7993489 Capacitive coupling plasma processing apparatus and method for using the same |
| 08/09/2011 | US7993462 Substrate-supporting device having continuous concavity |
| 08/09/2011 | US7993460 Substrate support having dynamic temperature control |
| 08/09/2011 | US7993458 Vacuum processing apparatus and method |
| 08/09/2011 | US7993457 Deposition sub-chamber with variable flow |
| 08/09/2011 | US7993456 Device for carrying out a surface treatment of substrates under vacuum |
| 08/09/2011 | US7992518 Silicon carbide gas distribution plate and RF electrode for plasma etch chamber |
| 08/04/2011 | WO2011093445A1 Etching liquid for a copper/titanium multilayer thin film |
| 08/04/2011 | US20110189857 Chemical mechanical polishing apparatus, chemical mechanical polishing method, and control program |
| 08/04/2011 | US20110189593 Defect repair apparatus and method for EUV mask |
| 08/04/2011 | US20110189446 Process and System for Fabrication of Patterns on a Surface |
| 08/04/2011 | US20110188801 Semiconductor hollow-core waveguide using photonic crystal gratings |
| 08/04/2011 | US20110188535 Method and Sensor for Determining the Hydrocarbon Dew Point in a Gas |
| 08/04/2011 | US20110186545 Feedforward temperature control for plasma processing apparatus |
| 08/04/2011 | US20110186542 Slurry containing multi-oxidizer and mixed nano-abrasives for tungsten cmp |
| 08/04/2011 | US20110186229 Gas shower structure and substrate processing apparatus |
| 08/04/2011 | US20110186227 Plasma chamber for wafer bevel edge processing |
| 08/04/2011 | US20110186226 Gas supply member, plasma processing apparatus, and method of manufacturing the gas supply member |
| 08/04/2011 | US20110186224 Method and device for descaling a metal strip |
| 08/03/2011 | EP2350345A1 Process for removing a coating from surfaces of components using only hydrochloric acid |
| 08/03/2011 | CN1673861B Chemically amplified positive resist composition |
| 08/03/2011 | CN102140639A Deposited metal stripping agent and preparation method thereof |
| 08/03/2011 | CN102140638A Method and apparatus for recovering pattern on silicon substrate |
| 08/03/2011 | CN102139933A Etchant purifying device |
| 08/03/2011 | CN101736287B Method for fabricating smei-cylindrical groove by shadow evaporation and wet etching |
| 08/02/2011 | US7988871 Method of lifting off and fabricating array substrate for liquid crystal display device using the same |
| 08/02/2011 | US7988817 Lift pin driving device and a flat panel display manufacturing apparatus having same |
| 08/02/2011 | US7988816 Plasma processing apparatus and method |
| 08/02/2011 | US7988814 Plasma processing apparatus, plasma processing method, focus ring, and focus ring component |
| 08/02/2011 | US7988812 Substrate treatment apparatus |
| 08/02/2011 | US7988787 Workpiece support system and method |
| 08/02/2011 | US7988398 Linear substrate transport apparatus |
| 08/02/2011 | US7987814 Lower liner with integrated flow equalizer and improved conductance |
| 07/28/2011 | WO2011090692A2 Pretreatment process for aluminum and high etch cleaner used therein |
| 07/28/2011 | US20110184503 Method of making 3-dimensional neural probes having electrical and chemical interfaces |
| 07/28/2011 | US20110183444 method for electron beam induced etching |
| 07/28/2011 | US20110180711 Thermal detector, thermal detection device and electronic instrument, and method for manufacturing thermal detector |
| 07/28/2011 | US20110180512 Accurately Monitored CMP Recycling |
| 07/28/2011 | US20110180511 Polishing Composition and Polishing Method Using the Same |
| 07/28/2011 | US20110180388 Plasma Processing Method and Plasma Processing Apparatus |
| 07/28/2011 | US20110180213 Plasma processing apparatus and plasma processing method |
| 07/28/2011 | US20110179996 Deposition mask and mask assembly having the same |
| 07/28/2011 | DE102010060297A1 Verfahren zum Entfernen von Kontamination von einem Reaktor A method of removing contamination from a reactor |
| 07/28/2011 | CA2784150A1 Pretreatment process for aluminum and high etch cleaner used therein |
| 07/27/2011 | EP2347026A1 Enhanced metal wicking surface |
| 07/27/2011 | EP1431417B1 Method for protecting against corrosion and scale deposit and for restoring tubes of heat-exchanging equipment and device for carrying out said method |
| 07/27/2011 | CN102137956A Process for production of aluminum wheel |
| 07/27/2011 | CN102134120A Method for recovering precious metals in acidic waste liquid |
| 07/27/2011 | CN101880880B Hole punching device for carbon dioxide buffer silicon wafer |
| 07/27/2011 | CN101768742B Regenerated acidic etching solution, copper recycling method and special device thereof |
| 07/27/2011 | CN101560663B Method for electrochemically preparing nano-array structure materials on basis of nano-mask preparation technique |
| 07/26/2011 | USRE42566 Liquid feed nozzle, wet treatment, apparatus and wet treatment method |
| 07/21/2011 | WO2011086984A1 Method of laser joining of aluminum alloy member and resin member |
| 07/21/2011 | US20110177952 Template for a superconducting coil |
| 07/21/2011 | US20110177695 Substrate processing method and storage medium |
| 07/21/2011 | US20110174778 Plasma processing apparatus and method |
| 07/21/2011 | US20110174777 Process condition sensing device and method for plasma chamber |
| 07/21/2011 | US20110174776 Plasma processing apparatus, plasma processing method and end point detection method |
| 07/21/2011 | US20110174775 Surface processing apparatus |
| 07/21/2011 | US20110174773 Substrate for biochip, biochip, method for manufacturing substrate for biochip, and method for manufacturing biochip |
| 07/21/2011 | US20110174772 Micro-fluid ejection device and method for assembling a micro-fluid ejection device by wafer-to-wafer bonding |
| 07/21/2011 | US20110174770 Method for modifying an etch rate of a material layer using energetic charged particles |
| 07/21/2011 | US20110174440 Plasma processing apparatus |
| 07/21/2011 | US20110174246 Method for producing a cylinder crankcase |
| 07/20/2011 | CN102130205A Method for performing surface catalytic texturing on polycrystalline silicon solar cell |
| 07/20/2011 | CN102127766A Process for recycling circuit board micro-etching waste liquid |
| 07/20/2011 | CN102127765A Circularly regenerating system for acidic waste etching solution |
| 07/20/2011 | CN101760744B Separating and recycling device of multiple kinds of chemical liquid medicines |
| 07/20/2011 | CN101456154B Multiple zone carrier head with flexible membrane |
| 07/20/2011 | CN101153395B Metal removing solution and metal removing method using the same |
| 07/20/2011 | CN101058711B Grinding fluid for metal and grinding method |
| 07/19/2011 | US7981303 Method of manufacturing monocrystalline silicon micromirrors |
| 07/19/2011 | US7981269 Method of electrochemical fabrication |
| 07/19/2011 | US7981219 System for plasma treating a plastic component |
| 07/19/2011 | US7981218 Substrate supporting mechanism and substrate processing apparatus |
| 07/19/2011 | US7981217 Vertical heat treatment apparatus and method of transferring substrates to be processed |
| 07/14/2011 | US20110171432 Nanoimprint method |
| 07/14/2011 | US20110171137 Novel nanostructures and process of preparing same |
| 07/14/2011 | US20110170376 Fabrication process and package design for use in a micro-machined seismometer or other device |
| 07/14/2011 | US20110170188 Monolithic polarizing diffractive structures and associated methods |
| 07/14/2011 | US20110168674 Plasma processing method and apparatus |
| 07/14/2011 | US20110168673 Plasma processing apparatus, plasma processing method, and mechanism for regulating temperature of dielectric window |
| 07/14/2011 | US20110168671 Process control using signal representative of a throttle valve position |
| 07/14/2011 | US20110168670 Patterned Sapphire Substrate Manufacturing Method |
| 07/14/2011 | US20110168669 Method of preparing low resistance metal line, patterned metal line structure, and display device using the same |
| 07/14/2011 | US20110168667 Anti-Reflective Surfaces And Methods For Making The Same |
| 07/14/2011 | US20110168562 Nanopore and Carbon Nanotube Based DNA Sequencer |
| 07/14/2011 | US20110168205 Substrate cleaning method and substrate cleaning apparatus |