C23F 1 - Etching metallic material by chemical means

Patents for C23F 1 - Etching metallic material by chemical means (16,062)
03/2011
03/23/2011	CN101988197A Deep silicon etching method, plasma processing method and system
03/23/2011	CN101988196A Deep reactive ion etching method and gas-flow control device thereof
03/23/2011	CN101851757B Additive of wool making solution for monocrystalline silicon pieces and using method
03/23/2011	CN101851756B Additive of alkali wool making solution for monocrystalline silicon pieces and using method
03/23/2011	CN101195917B Method for etching copper or copper alloy
03/22/2011	US7910042 Capillary imprinting technique
03/22/2011	US7909961 Method and apparatus for photomask plasma etching
03/22/2011	US7909960 Apparatus and methods to remove films on bevel edge and backside of wafer
03/17/2011	US20110063563 Fast response twisted nematic liquid crystal display and method
03/17/2011	US20110062114 Substrate liquid-processing method, substrate liquid-processing apparatus, and storage medium
03/17/2011	US20110062113 Substrate processing apparatus and method
03/17/2011	DE102009006397B4 Polysiliziumschicht-Entfernverfahren und Speichermedium Polysilicon layer Removal and storage medium
03/16/2011	EP1496543B1 Polishing device
03/16/2011	CN101985752A Spray etching device
03/16/2011	CN101649458B Method for reducing remaining copper on surface of cathode foil of aluminum electrolytic capacitor
03/15/2011	US7906437 System and method for the manufacture of surgical blades
03/15/2011	CA2553225C Method of treating razor blade cutting edges
03/10/2011	US20110058147 Cleaning module and euv lithography device with cleaning module
03/10/2011	US20110057678 Ceramic Substrate, Functional Ceramic Substrate, Probe Card and Method for Manufacturing Ceramic Substrate
03/10/2011	US20110056914 Process for the stripping of workpieces and stripping solution
03/10/2011	US20110056913 Reduced isotropic etchant material consumption and waste generation
03/10/2011	US20110056912 Plasma processing apparatus and plasma processing method
03/10/2011	US20110056910 Etching method
03/10/2011	US20110056625 Electron beam etching device and method
03/10/2011	US20110056595 Aluminium alloy for lithographic sheet
03/10/2011	US20110056514 Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same
03/10/2011	US20110056513 Method for treating surfaces, lamp for said method, and irradiation system having said lamp
03/08/2011	US7901587 Manufacturing method for vibrator
03/08/2011	US7901539 Apparatus and methods for transporting and processing substrates
03/08/2011	US7901510 Bolt and plasma processing apparatus provided with same
03/08/2011	US7900580 Substrate processing apparatus and reaction container
03/03/2011	WO2011023798A1 Treatment of parts with metallized finish areas with a differentiated appearance
03/03/2011	WO2011023078A1 Deep silicon etching device and gas intake system for deep silicon etching device
03/03/2011	US20110054511 Adding microscopic porosity to the surface of a microcoil to be used for medical implantation
03/03/2011	US20110053379 Profile control in dielectric etch
03/03/2011	US20110052871 Heat dissipating material including carbon substrate with nanometer-order uneven structure and its manufacturing method
03/03/2011	US20110050055 Method for making device housing and device housing thereof
03/03/2011	US20110049547 Fabricating method and structure of a wafer level module
03/03/2011	US20110049104 Etchant for copper or copper alloy, liquid for etching pretreatment, and etching method
03/03/2011	US20110049103 Methods of manufacturing a honeycomb extrusion die
03/03/2011	US20110049102 Plasma treatment apparatus and method for plasma-assisted treatment of substrates
03/03/2011	US20110049101 Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof
03/03/2011	US20110049100 Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same
03/03/2011	US20110049099 Hardmask trim method
03/03/2011	US20110049098 Plasma etching method
03/03/2011	US20110049091 Method of removing photoresist and etch-residues from vias
03/03/2011	US20110049089 Ultraviolet-curable resin material for pattern transfer and magnetic recording medium manufacturing method using the same
03/03/2011	US20110049088 Etching composition and etching process
03/03/2011	US20110049087 Frame for holding laminate during processing
03/03/2011	US20110048755 Housing for electronic device and method for making the same
03/03/2011	US20110048138 Mems stress concentrating structure for mems sensors
03/03/2011	DE102009028762A1 Verfahren zum Ätzen von Siliziumoberflächen A process for etching silicon surfaces
03/02/2011	CN101982570A Etching solution for monocrystalline solar cell plate
03/02/2011	CN101568669B Method of surface treatment for metal glass part, and metal glass part with its surface treated by the method
03/01/2011	US7897058 Device manufacturing method and computer program product
03/01/2011	US7897055 Method for manufacturing multilayer flexible printed circuit board
03/01/2011	US7897009 Plasma processing apparatus
03/01/2011	US7897008 Apparatus and method for regional plasma control
03/01/2011	US7896968 Winding type plasma CVD apparatus
03/01/2011	US7895971 Microwave plasma processing apparatus
03/01/2011	US7895970 Structure for plasma processing chamber, plasma processing chamber, plasma processing apparatus, and plasma processing chamber component
02/2011
02/24/2011	WO2011021299A1 Dye-sensitized solar cell and method for manufacturing the same
02/24/2011	WO2010147512A3 Device for etching the surface of an elongated metal article (embodiments)
02/24/2011	US20110045672 Multi-film stack etching with polymer passivation of an overlying etched layer
02/24/2011	US20110045582 Methods and apparatus for integrated cell handling and measurements
02/24/2011	US20110043937 Microvalve system
02/24/2011	US20110042353 Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light
02/24/2011	US20110042352 Imprint method and processing method of substrate using the imprint method
02/24/2011	US20110042350 Method for fabricating 3d structure having hydrophobic surface by dipping method
02/24/2011	US20110042347 Method and apparatus for plasma surface treatment of a moving substrate
02/24/2011	US20110042009 Plasma etching device
02/24/2011	US20110042008 Plasma generator
02/24/2011	US20110041758 Deposition mask and method of fabricating the same
02/23/2011	EP2287886A1 Plasma treatment system
02/23/2011	EP2287361A1 Recast removal method
02/17/2011	WO2011019222A9 Etchant composition for forming copper interconnects
02/17/2011	WO2011019222A2 Etchant composition for forming copper interconnects
02/17/2011	WO2011019209A2 Etchant composition for forming metal interconnects
02/17/2011	US20110037489 Silicon chicklet pedestal
02/17/2011	US20110036810 Manufacturing method of electron source
02/17/2011	US20110036395 Methods for forming nanostructures and photovoltaic cells implementing same
02/17/2011	US20110036033 Door skin, a method of etching a plate for forming a wood grain pattern in the door skin, and an etched plate formed therefrom
02/16/2011	EP2284532A1 Non-destructive inspection method for metallic alloys
02/16/2011	CN101976700A Post-cleaning technology of silicon wafer
02/16/2011	CN101974756A Device for regenerating waste microetching liquid and recovering copper
02/16/2011	CN101974755A Monocrystal silicon battery plate efficient flock preparing special corrosive solution
02/15/2011	US7887713 Method for producing an electronic component
02/15/2011	US7887711 Method for etching chemically inert metal oxides
02/15/2011	US7887670 Gas introducing mechanism and processing apparatus for processing object to be processed
02/15/2011	US7887669 Vacuum processing apparatus
02/15/2011	US7886690 Plasma source
02/15/2011	US7886689 Plasma processing apparatus
02/15/2011	US7886688 Plasma processing apparatus
02/15/2011	US7886687 Plasma processing apparatus
02/15/2011	CA2592982C Gas treating solution corrosion inhibitor and method
02/10/2011	WO2010147508A3 Method for etching the surface of an elongated metal article
02/10/2011	US20110033661 Controllable nanostructuring on micro-structured surfaces
02/10/2011	US20110032659 Complimentary metal-insulator-metal (mim) capacitors and method of manufacture
02/10/2011	US20110031219 Cylinder barrel inside surface treatment apparatus and method
02/10/2011	US20110031216 Synchronized radio frequency pulsing for plasma etching

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