C23F 1 - Etching metallic material by chemical means

Patents for C23F 1 - Etching metallic material by chemical means (16,062)
06/2011
06/16/2011	WO2011071105A1 Coated aluminum material and process for producing same
06/16/2011	US20110143550 Method for manufacturing semiconductor device, apparatus for processing substrate, and computer readable medium
06/16/2011	US20110143549 Etching method, method for manufacturing microstructure, and etching apparatus
06/16/2011	US20110143548 Ultra low silicon loss high dose implant strip
06/16/2011	US20110141854 Acoustic sensor and method of fabricating the same
06/16/2011	US20110141195 Nozzle plate and method of manufacturing the same
06/16/2011	US20110140303 Methods of fabricating imprint mold and of forming pattern using the imprint mold
06/16/2011	US20110140302 Capillary Imprinting Technique
06/16/2011	US20110139751 Plasma-based chemical source device and method of use thereof
06/16/2011	US20110139750 Method of removing post-etch residues
06/16/2011	US20110139749 Substrate processing apparatus, substrate processing method, and program for implementing the method
06/16/2011	US20110139748 Atomic layer etching with pulsed plasmas
06/16/2011	US20110139372 Showerhead assembly for vacuum processing apparatus
06/16/2011	US20110139371 Plasma etching chamber
06/16/2011	US20110139370 Plasma processing apparatus
06/16/2011	US20110139369 Etching apparatus
06/16/2011	US20110139176 Low damage photoresist strip method for low-k dielectrics
06/16/2011	DE102009054525A1 Method for removing nitric oxides and hydrogen nitrite from acid mixture, comprises removing the nitrogen oxide and the hydrogen nitrite by the introduction of kinetic energy in the mixture by blowing gas into the acid mixture
06/16/2011	DE10136078B4 Wässrige Lösung zum kontinuierlichen Mikroätzen von Kupfer oder Kupferlegierung Aqueous solution for continuously microetching of copper or copper alloy
06/15/2011	EP2331672A1 Method for cleaning surfaces using a protic ionic liquid
06/15/2011	CN201864780U Etching equipment of electronic soft label
06/15/2011	CN1621555B Mask and container and manufacturing apparatus
06/15/2011	CN102094202A Method of detinning Sn plating layer on Cu-based material
06/15/2011	CN102094201A Micro-etching liquid for copper metal surface treatment
06/15/2011	CN102094200A Micro etching solution
06/15/2011	CN102094199A Etching equipment of electronic soft label
06/15/2011	CN101656192B Device for dry etching
06/15/2011	CN101432860B Method for forming self-aligned metal silicide contacts
06/15/2011	CN101397668B Etching technology of silicon shallow slot
06/14/2011	US7959819 Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes
06/14/2011	US7959818 Method for forming a fine pattern of a semiconductor device
06/14/2011	US7959816 Wet-processing apparatus and method of fabricating display panel
06/14/2011	US7959815 Transparent textured substrate and methods for obtaining same
06/14/2011	US7959734 Substrate mounting structure and substrate processing apparatus
06/09/2011	WO2011066668A1 Method of etching features into substrate
06/09/2011	US20110135265 Method of forming waveguide facet and photonics device using the method
06/09/2011	US20110132874 Small plasma chamber systems and methods
06/09/2011	US20110132873 Substrate processing apparatus, method for measuring distance between electrodes, and storage medium storing program
06/09/2011	US20110132872 Method of forming a nozzle and an ink chamber of an ink jet device by etching a single-crystal substrate
06/09/2011	US20110132871 Shear sensors and uses thereof
06/09/2011	US20110132542 Plasma processing apparatus
06/09/2011	US20110132540 Plasma processing apparatus
06/08/2011	CN201857427U Silicon cup corrosion fixture
06/08/2011	CN102086519A Corrosive solution composition, corrosion method and generated silicon wafer
06/08/2011	CN101512040B Confinement ring drive
06/08/2011	CN101495268B Methods of making gas distribution members for plasma processing apparatuses
06/08/2011	CN101351573B Stephanoporate valve metallic thin-film and manufacturing method thereof as well as thin-film capacitor
06/08/2011	CN101018884B Plasma processing apparatus including gas distribution member supplying process gas and radio frequency (RF) power
06/07/2011	USRE42420 Liquid feed nozzle, wet treatment apparatus and wet treatment method
06/07/2011	US7955514 Plasma processing apparatus and plasma processing method
06/03/2011	WO2011019209A3 Etchant composition for forming metal interconnects
06/03/2011	WO2011010877A3 Etchant composition for the formation of a metal line
06/02/2011	US20110130478 Ordered porous mesostructured materials from nanoparticle-block copolymer self-assembly
06/02/2011	US20110130010 Etching and cleaning methods and etching and cleaning apparatuses used therefor
06/02/2011	US20110130003 Method and apparatus for conformable polishing
06/02/2011	US20110129605 Method for manufacturing printing plate
06/02/2011	US20110129181 Turning mirror for photonic integrated circuits
06/02/2011	US20110128165 Keypad for electronic device and method for manufacturing the keypad
06/02/2011	US20110127236 Developing device and developing method
06/01/2011	EP1177112B1 Remote plasma generator
06/01/2011	CN102084034A Electrochemical process for the recovery of metallic iron and sulfuric acid values from iron-rich sulfate wastes, mining residues and pickling liquors
06/01/2011	CN102080230A Etching control method
06/01/2011	CN101665875B Tin-lead recovery method in waste circuit board
06/01/2011	CN101664745B Method for removing aluminum film deposited on surface of heat exchanger in aluminum technology
05/2011
05/31/2011	US7951722 Double exposure semiconductor process for improved process margin
05/31/2011	US7951303 Method of fabricating grabbing face of sample grabbing portion
05/31/2011	US7951262 Plasma processing apparatus and method
05/31/2011	US7951261 Plasma etching apparatus
05/31/2011	US7950847 Breguet overcoil balance spring made of micro-machinable material
05/31/2011	US7950136 Process of making an improved AP1 layer for a TMR device
05/31/2011	CA2406404C Method and apparatus for improving corrosion resistance of chrome plated material
05/26/2011	US20110124144 Substrate processing system and substrate processing method
05/26/2011	US20110123932 Method for forming a fluid ejection device
05/26/2011	US20110123665 Imprint blank, imprint template and method for manufacturing the same
05/26/2011	US20110121244 Sputtering target, transparent conductive film and transparent electrode
05/26/2011	US20110121058 Microwave plasma processing apparatus and method for producing cooling jacket
05/26/2011	US20110120974 Method For Atomizing A Surface Of A Substrate
05/26/2011	US20110120971 Micromachined transducers and method of fabrication
05/26/2011	US20110120651 Showerhead assembly with improved impact protection
05/26/2011	US20110120650 Semiconductor device manufacturing method and substrate processing system
05/26/2011	US20110120649 Vacuum processing apparatus
05/26/2011	US20110120648 Apparatus and a method for controlling the depth of etching during alternating plasma etching of semiconductor substrates
05/26/2011	US20110120647 Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus
05/25/2011	CN102071426A Method for eliminating recrystallization of directionally solidified nickel-based high-temperature alloy
05/24/2011	US7947190 Methods for polishing semiconductor device structures by differentially applying pressure to substrates that carry the semiconductor device structures
05/24/2011	US7947189 Vacuum processing apparatus and vacuum processing method of sample
05/19/2011	WO2011013907A9 Method for evaluating center segregation of continuous casting slab
05/19/2011	US20110117749 Method for reducing line width roughness with plasma pre-etch treatment on photoresist
05/19/2011	US20110117375 Molybdenum containing targets
05/19/2011	US20110117373 Compound material, method of producing the same and apparatus for producing the same
05/19/2011	US20110117323 Surface processing method, mask for surface processing, and optical device
05/19/2011	US20110116347 Sprung balance resonator for a timepiece
05/19/2011	US20110115581 Apparatus and method for implementing left-handed transmission line
05/19/2011	US20110115338 Methods of Fabricating a Membrane With Improved Mechanical Integrity
05/19/2011	US20110114601 Plasma source design
05/19/2011	US20110114600 Plasma processing apparatus and plasma processing method
05/19/2011	US20110114599 Plasma processing apparatus and plasma processing method
05/19/2011	US20110114261 Plasma processing apparatus
05/19/2011	US20110114115 Tuning hardware for plasma ashing apparatus and methods of use thereof
05/18/2011	EP2322692A1 Etchant for titanium-based metal, tungsten-based metal, titanium-tungsten-based metal or nitrides thereof

1 ... 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 ... 161